• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.117-117
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• 2008

In MIM capacitor, poly-Si bottom electrode is replaced with metal bottom electrode. Noble metals can be used as bottom electrodes of capacitors because they have high work function and remain conductive in highly oxidizing conditions. In addition, they are chemically very stable. Among novel metals, Ru (ruthenium) has been suggested as an alternative bottom electrode due to its excellent electrical performance, including a low leakage of current and compatibility to high dielectric constant materials. Chemical mechanical planarization (CMP) process has been suggested to planarize and isolate the bottom electrode. Even though there is a great need for development of Ru CMP slurry, few studies have been carried out due to noble properties of Ru against chemicals. In the organic chemistry literature, periodate ion ($IO_4^-$) is a well-known oxidant. It has been reported that sodium periodate ($NaIO_4$) can form $RuO_4$ from hydrated ruthenic oxide ($RuO_2{\cdot}nH_2O$). $NaIO_4$ exist as various species in an aqueous solution as a function of pH. Also, the removal mechanism of Ru depends on solution of pH. In this research, the static etch rate, passivation film thickness and wettability were measured as a function of slurry pH. The electrochemical analysis was investigated as a function of pH. To evaluate the effect of pH on polishing behavior, removal rate was investigated as a function of pH by using patterned and unpatterned wafers.

• Advances in Energy Research
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• 제5권3호
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• pp.219-226
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• 2017

Electrochemical double layer capacitors (EDLCs) have received a tremendous interest due to their suitability for diverse applications. They have been fabricated using different carbon based electrodes including activated carbons, single walled/multi walled carbon nano tubes. But, graphite which is one of the natural resources in Sri Lanka has not been given a considerable attention towards using for EDLCs though it is a famous carbon material. On the other hand, EDLCs are well reported with various liquid electrolytes which are associated with numerous drawbacks. Gel polymer electrolytes (GPE) are well known alternative for liquid electrolytes. In this paper, it is reported about an EDLC fabricated with a nano composite polyethylene oxide based GPE and two Sri Lankan graphite based electrodes. The composition of the GPE was [{(10PEO: $NaClO_4$) molar ratio}: 75wt.% PC] : 5 wt.% $TiO_2$. GPE was prepared using the solvent casting method. Two graphite electrodes were prepared by mixing 85% graphite and 15% polyvinylidenefluoride (PVdF) in acetone and casting n fluorine doped tin oxide glass plates. GPE film was sandwiched in between the two graphite electrodes. A non faradaic charge discharge mechanism was observed from the Cyclic Voltammetry study. GPE was stable in the potential windows from (-0.8 V-0.8 V) to (-1.5 V-1.5 V). By increasing the width of the potential window, single electrode specific capacity increased. Impedance plots confirmed the capacitive behavior at low frequency region. Galvanostatic charge discharge test yielded an average discharge capacity of $0.60Fg^{-1}$.

• Elastomers and Composites
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• 제6권1호
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• pp.71-81
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• 1971

The intention of this study is to investigate the properties of polymer blend, NBR/PVC vulcanizates and blending procedures such as roll-mixing temperatures and sequences for polymer blending of NBR and PVC(resin type). The results obtained are as follows: 1. The roll temperature applied for polymer blending is around $150^{\circ}C$. At this temperature region, the degradation of rubber stock, which may be caused by heat, can be minimized and mill processing in practical application in industries can also be facilitated. 2. It is obviously necessary that a small amount of plasticizers should be added to the stock for improving processibility of roll mixing and physical properties. 3. On roll-mixing sequence, it is more effective that PVC compounded with plasticizer is added to NBR milled on hot roll. 4. The vulcanizates of the blends with different degree of polymerization of PVC ale similar to one another in properties. 5. NBR/PVC(70/30) blends shows the better physical characters than eve,-made foreign latex blend except abrasion-resistance. 6. As PVC addition ratio is increased, the physical properties such as resistance to ozone, tear, heat and oil and tensile strength, modulus, hardness have also improved, on the other hand, tension set and rebound character decreased. 7. The curve of ultimate elongation have point of inflection at the ratio of $30\sim40$ part of PVC. 8. While CR is blended, the physical properties such as brittle point, rebound and resistance to oil in high temperature have improved. 9. Polymer blend of NBR and domestic PVC is applied for the industrial utility such as rubber sole and heel, electric wire cover and oil-resistant packing, coating and gasket, printing roll, film for food packing etc.

• 대한전자공학회논문지
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• 제26권4호
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• pp.67-72
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• 1989

부분산화공정(LOCOS : local oxidation of silicon)에서 발생하는 새부리의 길이를 줄이기 위하여 상온 플라즈마 질화막을 잉요한 시로운 공정에 대해 연구하였다. 400W, 100kHz의 교류 전력에 의한 질소 플라즈마로 실리콘 위에 두께가 $100{\AA}$ 미만의 균일한 실리콘 질화막을 형성시킬 수 있었다. 이렇게 형성된 질화막은 실리콘을 4000${\AA}$두께로 산화시키는 공정에서 실리콘의 산화를 효과적으로 방지할 수 있었고 새부리의 길이를 0.2${mu}m$로 감소시킬 수 있다는 것을 SEM 단면도로 확인하였다. 이 길이는 두꺼운 LPCVD 질화막을 이용한 기존의 부분산화공정에서의 0.7${mu}m$ 보다 훨씬 줄어든 것이다. Secco에칭 후 SCM으로 단면을 보았을때 새부리 근처에서 결정 결함을 관찰할 수 없었다. 이 새로운 LOCOS공정으로 $N^+/P^-\;well,\;P^+/N^-$ well 다이오드를 만들어 누설전류를 측정하였다. 그 결과 기존의 LOCOS 공정에 의한 성질보다 우수하거나 동등한 성질을 나타내었다.

• 치과방사선
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• 제9권1호
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• pp.25-31
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• 1979

The utilization of x-ray for diagnosis and examination is increasing by about 5-15% every year, therefore, it would be mandatory to protect the patients from exposures and so, studies in this field are performed even now. In dental field, the area of irradiation is limited any to the head and neck area, but the irradiated angle is varied following the objected tooth, so the adjacent structures lens and thyroid gland would be fragile to radiation. And the scattered radiation is one of the complicated problems in the protection because of specificity of dental x-ray and its object structures. The author, by using TLD (Thermo luminescent Dosimeter; Teledyne Isotopes-Model 7300, Element; TLD 200(CaF₂:Dy) and Capintec(Capintec Model 192, PM-30 Diagnostic chamber 28㎖ active volume), tried a measurement of air dose distribution of the scattered radiation and the irradiated dose of lens and thyroid gland under the condition of taking the film on the left maxillary molar. The results were as follows: 1. The half value layer of adapted dental x-ray machine was measured, and is 1.44㎜ Al. 2. The time of irradiation on the left maxillary molar in the Alderson Rando Phantom, the measured doses of left and right lens, and thyroid gland were 8,9mR, 1,2mR and 2,8mR. Under the same conditions, the scattered radiation at the distance of 1 meter from the phantom were 84 μR at the front side, 11μR at the back side, 18μR at the right side and 72μR at the left side. 3. Under the same conditions, the dose showed higher value by about 5% in the presence of object(phantom) than in the case of absence.

• 한국언론정보학보
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• 제59권
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• pp.162-179
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• 2012

본 연구는 SNS(Social Network Service), 인터넷 등 '디지털뉴미디어 혁명'으로 위기에 처한 신문기업이 회생하기 위하여 '자본과 권력으로부터 독립하여 정론적 논조를 견지해야 한다'는 저널리즘의 정체성을 훼손하지 않고 수행할 수 있는 수익사업 분야로는 어떤 것이 바람직한가를 알아보았다. 이를 위하여 현직 신문사 간부기자들을 대상으로 한 심층인터뷰를 통하여 신문사 경영위기에 대한 인식, 광고수주와 신문판매와 같은 전통적 신문산업 비즈니스모델을 제외한 여타 수익사업에 대한 필요성, 수익사업 수행 시 저널리즘 정체성과의 충돌 가능성, 바람직한 수익사업 분야 등에 대하여 조사하였다. 그 결과 기자들은 신문기업들이 소셜미디어(Social Media)의 급속한 팽창 등 디지털뉴미디어 혁명에 대처하는 경영전략이 부재하며 이에 따라 광고수주와 신문판매 이외의 새로운 패러다임으로 사업을 개발해야 한다고 인식하고 있었다. 그러나 이 같은 수익사업에 무분별하게 뛰어들기보다는 공익(public interest)적이면서도 경영적 이익을 보장할 수 있는 사업이 바람직하다는 반응을 보였다. 이 같은 사업에 대하여 기자들은 인터넷, 방송, 공연, 전시, 교육, 출판, 영화, 음악, 게임, 등 뉴미디어 정보문화사업 분야를 꼽았다.

• 대한화학회지
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• 제37권6호
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• pp.549-554
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• 1993

티타늄 금속판을 공기산화와 수증기 산화하여 만든 Ti$O_{2-x}$ 박막을 시료로 사용하여 1M NaOH 용액에서 광전기화학적 성질을 연구하였다. 높은 온도에서 제조된 Ti$O_{2-x}$ 전극들은 낮은 온도에서 제조된 전극들보다 더 음의 값으로 주어지는 flat band potential($V_{fb}$)과 더 높은 donor density($N_D$)를 가졌다. 전극전위의 변화에 따른 광전류 측정과 Mott-Schottky plot로부터 얻은 $V_{fb}$는 -0.95 ∼ -1.1 V 사이에서 비슷한 값으로 주어졌다. 자외부 영역의 광을 완전히 차단하는 TiO2 단결정을 필터로 하여 가시부 영역의 광전류를 측정할 때 분해능이 좋은 slit를 사용한 경우 좋은 sub band gap 광반응을 볼 수 있었다.

• 한국산학기술학회논문지
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• 제16권9호
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• pp.5906-5913
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• 2015

이 논문의 목적은 비닐하우스의 결합기술에 대한 수용효과와 보완성을 분석하는 것이다. 분석대상 기술은 10m 이상 하우스, polyolefin 필름, 권취환기, 15온스 이상 보온덮개 등 네 가지이며, 분석결과는 다음과 같이 요약된다. 첫째, 10m 이상 하우스, PO필름, 권취환기, 15온스 이상 보온덮개의 기술들이 단독으로 수용되었을 경우, 그리고 10m 이상 하우스와 권취환기의 기술결합, 10m 이상 하우스와 15온스 이상 보온덮개의 기술결합에서 순수익이 증가한다. 둘째, 권취환기를 활용하고 있는 경우, 10m 이상 하우스와 PO필름을 수용한다면 보완적 효과를 가져 올 수 있다. 셋째, 10m 이상 하우스와 권취환기는 항상 보완성을 가지는 조합으로 분석된다. 넷째, 10m 이상 하우스와 15온스 이상 보온덮개 기술조합은 PO필름과 권취환기를 모두 활용하지 않는 경우 보완적이다. 본 연구의 결과는 정부의 기술보급 정책에 기여할 것으로 기대된다.

• 한국실내디자인학회논문집
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• 제15권3호
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• pp.83-91
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• 2006

Our human society is rapidly changing into the world of advanced visual information with the development of image industry, the advent of satellite and terrestrial DMB, and the opening of Ubiquitous era. Like this, we are living in the space of overflowing media contents. Jean Baudrillad anticipated that the influential power of image would dominate our reality in 'Simulation'. Noticing the indication of our time, which is organized by various information media including the mass media, Baudrillad predicted that the 21st century would be an era of symbol and image due to the development of television, computer, and internet. This paper attempts to find the physical and conceptual peculiarities of the space change according to the use of display, by analyzing SF films, where future daily life is a major setting, under the judgement that the exploration of space change is significant. Through findings, it tries to lead the visual expansion, which recognizes display as space itself rather than object of space and changes unmoving space into moving space, and suggest the future space design by using digital space. It suggests case studies, which use digital display in the real space, as a study method and it examines the features, influences, and roles of digital display through investigating literatures and cases. In addition, it attempts to find a correlation of digital display and space by selecting films, which can give the affluent resources of analysis on the digital display among SF films. Therefore, it will come to a conclusion that space change should be dealt with in the space design.

• 한국표면공학회지
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• 제50권5호
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• pp.366-372
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• 2017

Plasma electrolytic oxidation(PEO) has attracted attention as a surface treatment which has high wear resistance and corrosion resistance. PEO is generally considered as cost-effective, environmentally friendly and superior in terms of coating performance. Most of studies about the PEO processes have been applied to light metals such as Al and Mg. Because the strength of Al and Mg is weaker than that of steel, there is a limit to the application. In this study, PEO process was used to form oxide coatings on Hot dipped aluminized(HDA) steel and the characteristics of the coating film according to the PEO current density were studied. The morphology was observed by SEM and component was analyzed by using EDS. The corrosion behaviors of PEO coating films were estimated by exposing salt spray test at 5 wt.% NaCl solution and measuring polarization curves in deaerated 3 wt.% NaCl solution. With the increase of PEO process current density, the pore size of the coating surface and the thickness of coating increased. It was confirmed that no Fe component was present on the coating surface. PEO coating films obviously showed good corrosion resistance compared with HDA. It is considered that the PEO coating acts as a barrier to protect the base material from external factors causing corrosion.