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Utilizing Advanced Pad Conditioning and Pad Motion in WCMP

  • Kim, Sang-Yong;Chung, Hun-Sang;Park, Min-Woo;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.171-175
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    • 2001
  • Chemical mechanical polishing(CMP) process has been widely used to planarize dielectrics and metal, which can apply to employed in integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of free-defects in inter level dielectrics and metal. Especially, defects like (micro-scratch) lead to severe circuit failure, and affects yield. Current conditioning method - bladder type, orbital pad motion- usually provides unsuitable pad profile during ex-situ conditioning near the end of pad life. Since much of the pad wear occurs by the mechanism of bladder type conditioning and its orbital motion without rotation, we need to implement new ex-situ conditioner which can prevent abnormal regional force on pad caused by bladder-type and also need to rotate the pad during conditioning. Another important study of ADPC is related to the orbital scratch of which source is assumed as diamond grit dropped from the strip during ex-situ conditioning. Scratch from diamond grit damaged wafer severely so usually scraped. Figure 1 shows the typical shape of scratch damaged from diamond. e suspected that intensive forces to the edge area of bladder type stripper accelerated the drop of Diamond grit during conditioning. so new designed Flat stripper was introduced.

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The Water Wave Scattering by the Marine Structure of Arbitrary Shape (임의 형태의 해양구조물에 의한 해수파의 산란)

  • 신승호;이중우
    • Journal of the Korean Institute of Navigation
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    • v.17 no.1
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    • pp.61-78
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    • 1993
  • Large offshore structure are to be considered for oil storage facilities , marine terminals, power plants, offshore airports, industrial complexes and recreational facilities. Some of them have already been constructed. Some of the envisioned structures will be of the artificial-island type, in which the bulk of structures may act as significant barriers to normal waves and the prediction of the wave intensity will be of importance for design of structure. The present study deals wave scattering problem combining reflection and diffraction of waves due to the shape of the impermeable rigid upright structure, subject to the excitation of a plane simple harmonic wave coming from infinity. In this study, a finite difference technique for the numerical solution is applied to the boundary integral equation obtained for wave potential. The numerical solution is verified with the analytic solution. The model is applied to various structures, such as the detached breakwater (3L${\times}$0.1L), bird-type breakwater(318L${\times}$0.17L), cylinder-type and crescent -type structure (2.89L${\times}$0.6L, 0.8L${\times}$0.26L).The result are presented in wave height amplification factors and wave height diagram. Also, the amplification factors across the structure or 1 or 2 wavelengths away from the structure are compared with each given case. From the numerical simulation for the various boundary types of structure, we could figure out the transformation pattern of waves and predict the waves and predict the wave intensity in the vicinity of large artificial structures.

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A Study of Core Water Injection Effect Influencing Plume in 75 tf $1^{st}$ Stage Liquid Propellant Rocket Engine Ground Test (75톤 1단 액체로켓엔진 지상시험에서 중앙 물분사가 후류에 미치는 영향 고찰)

  • Moon, Yoon-Wan;Seol, Woo-Seok
    • Aerospace Engineering and Technology
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    • v.10 no.1
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    • pp.129-135
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    • 2011
  • A study of efficient plume cooling by core water injection type was performed by computational fluid dynamics. A side injection type is well known, on the contrary, a core injection type is not well known. In order to figure out the characteristics of core injection type, several calculations were performed by computational fluid dynamics along various mass flow rates and locations of water injection. On the basis of analysis it was the adequate cooling condition that water mass flow rate to total mass flow rate was two times at least and location of water injections was L/De=1.2.

Atomization Characteristics Experiment of Hole Type Nozzle for the Reduction of Harmful Exhausted Gas (유해배기가스 저감을 위한 Hole형 노즐의 미립화 특성실험)

  • Chung, Jin-Do;Yu, Byoung-Gu
    • Journal of ILASS-Korea
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    • v.2 no.3
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    • pp.17-24
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    • 1997
  • A simplified experiment was performed to figure out the atomization characteristics of rice-bran oil which it is highly viscous liquid by applying ultrasonic energy. A spray system, an ultrasonic system, and three kinds of hole-type nozzles(hole diameter: 0.31, 0.34, 0.37mm) were manufactured. To investigate the effects of ultrasonic energy on the atomization of a highly viscous liquid, a phase doppler particle analyzer was used for measurement and calculation of spray droplets data. Nozzle opening pressures were chosen of 3 levels, i.e, 16, 20, and 24MPa. As a result, it could be concluded that the ultrasonic energy was effective to improve the spray atomization when it applied to the fuel by means of 3 different nozzles because of the effects of the liquid fuel cavitation and relaxation between molecules caused by ultrasonic energy. The improvement rate of the spray atomization by the ultrasonic method compared with the conventional spray increased about 15% in the case of hole type nozzles. By increasing of the nozzle opening pressure and decreasing of the hole diameter, the atomization of spray droplets was improved.

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Design Analysis of Impedance Matching Circuit by Phasor Plot (페이저도에 의한 임피던스 정합회로 설계 해석)

  • Weon, La-Kyoung
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.26 no.11
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    • pp.1686-1696
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    • 2022
  • The impedance matching circuit design technique based on the phasor plot introduced in this paper is based on the impedance triangle of electric circuit. It is a technique that designs through the construction of a phasor figure using the values given to the matching circuit design. The design pattern is based on L-type, inverted L-type, T-type, and 𝜋-type, and unknown reactance elements are determined through phasor shapes. In this paper, using a design by phasor plot, we design several cases, such as the case where the input and output ports are pure resistance and have reactance. It was confirmed that the design value was verified by serial-parallel equivalent conversion to achieve matching. This design technique can immediately grasp the phase or size of input/output power, so it is expected to be applied mainly in a low frequency band due to rapid design change and application.

Thermoelectric Property and p-n Transition Mechanism of Hot Pressed Bi4/3Sb2/3Te3 ($Bi_{4/3}Sb_{2/3}Te_3$ 가압소결체의 열전특성과 p-n 전이기구)

  • 박태호;유한일;심재동
    • Journal of the Korean Ceramic Society
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    • v.29 no.11
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    • pp.855-862
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    • 1992
  • Thermoelectric power, electrical conductivity and Hall effect were measured, as functions of temperature in the range of 100 to 600 K, on polycrystalline Bi4/3Sb2/3Te3 which had been prepared via uniaxial hot-pressing at different temperatures in the range of 373 K to 773 K, aiming at searching a profitable processing route to a polycrystalline thermoelectric material, a promising, viable alternative to a single crystalline one. It was found that, with increasing temperature of pressing under a fixed pressure, the material, normally a p-type prior to being hot-pressed, underwent a transition to n-type. This transition was confirmed to be due to plastic deformation during hot-pressing and interpreted as being attributed to the change of the major ionic defect BiTe' into TeBi˙at temperature high enough for structure elements mobility. Thermoelectric figure-of-merit of the hot-pressed material was discussed in connection with the p-n transition in addition to microstructure.

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Thermoelectric Properties of n-type 90%$Bi_{2}Te_{3}+10% Bi_{2}Se_{3}$ Materials Prepared by Rapid Solidification Process and Hot Pressing (급속응고기술에 의한 n-type 90%$Bi_{2}Te_{3}+10% Bi_{2}Se_{3}$ 열간압축제의 열전특성)

  • 김익수
    • Journal of Powder Materials
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    • v.3 no.4
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    • pp.253-259
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    • 1996
  • The efficiency of thermoelectric devices for different applications is known to depend on the thermoelectric effectiveness of the material which tends to grow with the increase of its chemical homogeneity. Thus an important goal for thermal devices is to obtain chemically homogeneous solid solutions. In this work, the new process with rapid solidification (melt spinning method) followed by hot pressing was investigated to produce homogeneous material. Characteristics of the material were examined with HRD, SEM, EPMA-line scan and bending test. Property variations of the materials were investigated as a function of variables, such as dopant ${CdCl}_{2}$ quantity and hot pressing temperature. Quenched ribbons are very brittle and consist of homogeneous $Bi_2Te_3$, ${Bi}_{2}{Se}_{3}$ solid solutions. When the process parameters were optimized, the maximum figure of merit was 2.038$\times$$10^{-3}K^{-4}. The bending strength of the material hot pressed at 50$0^{\circ}C$ was 8.2 kgf/${mm}^2$.

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A study on the type of mathura buddha's costume (Mathra 불의의 양식에 관한 연구)

  • 안명숙
    • Journal of the Korean Home Economics Association
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    • v.26 no.1
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    • pp.1-9
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    • 1988
  • The purpose of this study is to investigate the differences between Mathura and gandhara Buddha's costume, and to observe the types and unique style of Mathura Buddha's costume. I classified all types of Mathura Buddha's costume by and largely and researched the feature of each type and creases of costume with the focus criterion works of that. The results are followed ① dress method of pt on left shoulder ; The early years ·a statue of standing : It is traced back to kaniska 2, 3 years before ·a seated figure : It is traced back to the latter of ksatraka period than a statue of standing The expression of costume creases is a way of expressing pure Indolike of mathura peculity ② dress method of put on right and left shoulder : the latter years It can be said that there is closeness with Gandhara Buddha's costume in method of creases. Mathura is center of Buddha's statue and influences to Gandhara with each other. Also mathura has developed peculiarly and at last Mathura made the masterpiece of Buddha's statue of Gupta period to acme of the 5 century.

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A study on color palette as a traditional color by university students (대학생들이 전통공간의 색채로 인식하는 배색팔레트 조사)

  • Cho, Jae-Kyoung;Rhee, Ji-Sook
    • Proceeding of Spring/Autumn Annual Conference of KHA
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    • 2008.11a
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    • pp.403-406
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    • 2008
  • Living in the present, specially in this multi-cultural society, we have to look back our tradition in many aspects. And we try to find out our own identity. Color is very important element to decide what is traditional or not. And it‘s a prominent factor for design subject visually. With the color from traditional residence, we will figure out traditional color and it‘s combination which the people prefer today, so we can applicate and develop it in the present design. Using color palette which has extracted from traditional building and space, a survey has done of university students for finding out which they think of traditional color. The result showed that Y-R type and Y-R type in color palette was the most traditional things by the students. This study is meaningful in the way of clarifying that university students think what is the traditional color and color palette.

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A study on the fabrication techologies for the 23GHz LNAs (23GHz대 저잡음 증폭기의 제작기술에 관한 연구)

  • 안동식;장동표
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.34D no.3
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    • pp.9-16
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    • 1997
  • A 23GHz 1-stage LNA was designed by using new topology of coupled line type with EEsof softwares and modified by using MPIE numerical analysis. The parallel coupled filter-type matching sections give impedance matching and DC blocking simultaneously, and have small discontinuities. This matching scheme has simple structure in the design process and give small error. The EFT chip was directly attached to the ground metal. The designed LAN gives 6.2dB gain and 2.5dB noise figure without considering the loss of connectors. Through these results, it was verified that our design process, matching schemes and fabrication technologies was valied for developing 20GHz-band LNA.

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