Effect of thermal annealing on optical and electrical properties of VOx deposited by magnetron sputtering (마그네트론 스퍼터링법으로 증착한 VOx 박막의 열처리에 따른 광학적.전기적 특성 변화)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2008.11a
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- pp.247-247
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- 2008