• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2002년도 추계학술발표대회 논문개요집
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• pp.73-79
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• 2002

• 한국레이저가공학회지
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• 제10권1호
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• pp.19-27
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• 2007

Previous studies demonstrated that laser ablation under transparent liquid can result in ablation enhancement and particle removal from the surface. Although the ablation enhancement by liquid is already known for semiconductor and metal, the phenomena of polymer ablation have not been studied. In this work, tile liquid-assisted excimer laser ablation process is examined for polymer materials, such as polyethylene terephthalate (PET), polymethyl methacrylate (PMMA) with emphasis on ablation enhancement and surface topography. In the case of PET and PMMA, the effect of liquid is analyzed both for thin water film and bulk water. The results show that application of liquid increases the ablation rate of PMMA while that of PET remains unchanged even in the liquid-assisted process. However, the surface roughness is generally deteriorated in the liquid-assisted process. The surface topography is found to be strongly dependent on the method of liquid application, i.e., thin film or bulk liquid.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2003년도 추계종합학술대회
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• pp.423-427
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• 2003

In this paper, we have investigated the output characteristics of the Stokes Raman laser in hydrogen, deuterium, and their mixed gases as a function of the incident pump energy and gas pressure using KrF excimer laser as pumping source for generating the differential absorption lidar (DIAL) wavelengths suitable in measuring the ozone concentration of the troposphere. The optimization results of compact excimer-Raman laser transmitter in DIAL system for the tropospheric ozone sounding at the 292 nm/319 m and 292 nm/313 nm wavelength pairs are presented. for the ozone sounding in the 4-12 km range, it has been demonstrated that the design of transmitter for DIAL lidar may be significantly simplified by the use of 292 nm/319 nm wavelength pair. The investigations of Raman scattering in the mixture of hydrogen and deuterium gases have shown that such mixture may be efficiently used for developing the multi- wavelength light sources for DIAL systems.

• 한국정밀공학회지
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• 제22권7호
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• pp.38-46
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• 2005

In laser machining such as drilling with $CO_2$ or Nd:YAG laser, and etching or ablation with Excimer laser, one of the most important parameters affecting the machining is known to be beam characteristics. In this paper a numerical study is performed to investigate the effects of beam parameters, especially in the process of excimer laser ablation of polymers. Results of different beam conditions reveal that if the ablated depth is small compared to beam size the simple photochemical etching model is suitable to predict the etched shape, and that the importance of precise alignment becomes large as beam quality factor becomes larger.

• ETRI Journal
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• 제11권4호
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• pp.139-149
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• 1989

Excimer laser를 이용한 투영노광기술은 '80년대 초 $0.5\mum$ 이하의 패턴 형성에 시도된 이래 점진적인 발전을 이루어 왔으며 기존 광노광기술의 연장선상에서 64M bit DRAM 제조를위한 핵심 노광기술이 될 것이다. 본 논문에서는 차세대 노광장비로서의 excimer stepper가 갖는 중요성을 고찰하고 대량생산을 위한 노광장비의 개발방향을 제시하였다. 먼저단파장화에 의한 투과도 저하로 인하여 발생하는 투영광학계의 문제점을 살펴보고 이에 따른 광원의 요구조건을 도출하였다. 그리고excimer stepper를 광원, 조명계, 투영계, 정렬계, stage계 및 제어계등 기능별로 분류한 후 각각의 문제점 및 설계조건을 제시하였다.

• Journal of information and communication convergence engineering
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• 제1권1호
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• pp.39-43
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• 2003

The technology required to advance the state of the art of ultra-high-intensity excimer amplifier construction to the 100 J/100fs output pulse level is identified. The preliminary design work for very large final amplifier pumped by electron beam module is described, and key design problems and approaches are presented and discussed in detail based on the recent experimental and theoretical results.

• 한국공작기계학회논문집
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• 제13권1호
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• pp.55-62
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• 2004

This paper addresses the method for figuring out the hole diameter on the mask containing the information about machining depth. With this mask e micro machining is carried out with a simple 2D movement of the mask. Based on e suggested method excimer laser ablation processes are modeled and determination of the optimal laser ablation conditions such as hole diameter, step size, mask movement velocity, etc. is completed. The excimer laser ablation simulation for creating 3D micro lens is carried out by employing determined ablation conditions to prove verification of the method. The results from simulation illustrated the average error of 140nm and e relative error of 2％.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.743-746
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• 2000

The removal of contaminants of silicon wafers has been investigated by various methods. Laser cleaning is the new dry cleaning technique to replace wafer wet cleaning in the near future. A dry laser cleaning uses inert gas jet to remove contaminant particles lifted off by the action of a KrF excimer laser. A laser cleaning model is developed to simulate the cleaning process and analyze the influence of contaminant particles and experimental parameters on laser cleaning efficiency. The model demonstrates that various types of submicrometer-sized particles from the front sides of silicon wafer can be efficiently removed by laser cleaning. The laser cleaning is explained by a particle adhesion model. including van der Waals forces and hydrogen bonding, and a particle removal model involving rapid thermal expansion of the substrate due to the thermoelastic effect. In addition, the experiment of wafer laser cleaning using KrF excimer laser was conducted to remove various contaminant particles.

• 한국환경과학회지
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• 제27권6호
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• pp.437-445
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• 2018

Laser induced-exciplex-fluorescence (EXCIPLEX) proposed by Melton is used to visualize fuel vapor in spray combustion. However, in the EXCIPLEX method based on TMPD/naphthalene system, the TMPD : naphthalene ratio is strictly restricted to 1 : 9. In addition, fluorescence intensity due to the vapor phase is extremely weak. To overcome these drawbacks, we propose a new laser-induced-excimer fluorescence (EXCIMER) method to visualize the liquid and vapor phases simultaneously. The spatial distributions of liquid and vapor in fuel spray suspended by ultrasonic waves are compared using the EXCIPLEX and EXCIMER methods. The correlation between fuel vapor concentration and fluorescence intensity is experimentally investigated by measuring the fluorescence intensity of saturated vapor formed over liquid fuel at a controlled temperature. These experimental results indicate that the EXCIMER method is effective for evaluating fuel vapor visualization in spray combustion. Furthermore, the quantitative distribution of fuel vapor concentration can be correctly estimated by the EXCIMER method.

• 한국연소학회:학술대회논문집
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• 한국연소학회 1997년도 제15회 KOSCO SYMPOSIUM 논문집
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• pp.13-21
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• 1997

Excitations of eight pumping transitions for nitric oxide fluorescence imaging are analyzed under equivalent experimental conditions to determine the detection. Frequency mixed dye laser pumping, 1st anti-Stokes $H_2$ Raman of KrF excimer laser pumping and ArF excimer laser pumping show good sensitivities.