• Title/Summary/Keyword: etching solution.

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A Study on the factors of Casein-Ammonium bichromate photoresist in pattern formation and etching process (Casein - Ammonium bichromate 감광성수지의 패턴형성 및 에칭공정에 있어서 Facter들에 관한 연구)

  • 이형관
    • Journal of the Korean Graphic Arts Communication Society
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    • v.12 no.1
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    • pp.67-80
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    • 1994
  • Electrochrominm is a phenomenon of reversible change in optical properties produced electrochromically. Among the several organic type electrochromic displays(ECD), the one based on viologen solution is still attractive and become of the possibility for choosing various colors by introducing different substituents in viologen molecules. But these has been rather a severe problem in this type of ECD, which is the erasing failure caused by the recrystallized molecule sticking to the display electrode.This paper was investigated on developing a new class of composite materials which consists of the mixture of BV2+ . 2BF4-, TMPD with TBABF4 as supporting electrolyte to overcome the above mentioned problem of viologen solution.

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Well Defined One-Dimensional Photonic Crystal Templated by Rugate Porous Silicon

  • Lee, Sung Gi
    • Journal of Integrative Natural Science
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    • v.6 no.3
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    • pp.183-186
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    • 2013
  • Well defined 1-dimentional (1-D) photonic crystals of polystyrene replicas have been successfully obtained by removing the porous silicon from the free-standing rugate porous silicon/phenylmethylpolysiloxane composite film. Rugate porous silicon was prepared by an electrochemical etching of silicon wafer in HF/ethanol mixture solution. Exfoliated rugate porous silicon was obtained by an electropolishing condition. A composite of rugate porous silicon/phenylmethylpolysiloxane composite film was prepared by casting a toluene solution of phenylmethylpolysiloxane onto the top of rugate porous silicon film. After the removal of the template by chemical dissolution, the phenylmethylpolysiloxane castings replicate the photonic features and the nanostructure of the master. The photonic phenylmethylpolysiloxane replicas are robust and flexible in ambient condition and exhibit an excellent reflectivity in their reflective spectra. The photonic band gaps of replicas are narrower than that of typical semiconductor quantum dots.

Chemical Solution Deposition of PZT/Oxide Electrode Thin Film Capacitors and Their Micro-patterning by using SAM

  • Suzuki, Hisao
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.907-912
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    • 2005
  • Micro-patterns of $Pb(Zr_{0.53}Ti_{0.47})O_3$, PZT, thin films with a MPB composition were deposited on $Pt/Ti/SiO_2/Si$ substrate from molecular-designed PZT precursor solution by using self-assembledmonolayer(SAM) as a template. This method includes deposition of SAM followed by the optical etching by exposing the SAM to the UV-light, leading to the patterned SAM as a selective deposition template. The pattern of SAM was formed by irradiating UV-light to the SAM on a substrate and/or patterned PZT thin film through a metal mask for the selective deposition of patterned PZT or lanthanum nickel oxide (LNO) precursor films from alkoxide-based precursor solutions. As a result, patterned ferroelectric PZT and PZT/LNO thin film capacitors with good electrical properties in micrometer size could be successfully deposited.

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Effect of $Mo_2C$ Content on the Microstructure and Properties of Ti(CN)-$Mo_2C$ Ceramics

  • Park, Dong-Soo;Lee, Yang-Doo;Taejoo Jung
    • The Korean Journal of Ceramics
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    • v.5 no.3
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    • pp.230-234
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    • 1999
  • Ti(CN)-0.3mole% $Mo_2C$ ceramics were prepared by pressureless sintering. $Mo_2C$ dissolved in Ti(CN) more easily in a nitrogen environment than in the other environment because nitrogen forced Mo to form a solid solution, (Ti, No)(C, N). A "core-rim" structure developed within the grains. The boundary between the "core" and the rim was delineated by thermal etching in the sample with more than 2 mole% $Mo_2C$. The rim thickness and the grain size decreased as the $Mo_2C$ content increased. The hardness and the flexural strength showed maxima of 18.2 GPa and 1.23 GPa, respectively when the $Mo_2C$ content was 2 mole%. The post-sintering heat treatments improved the properties.oved the properties.

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The Effects of Chlorination on the Friction Properties of SBR (염소화 반응조건이 SBR의 표면마찰 특성에 미치는 영향)

  • Park, Cha-Cheol;Kim, Ho-Jung
    • Fashion & Textile Research Journal
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    • v.10 no.1
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    • pp.101-105
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    • 2008
  • This study was concerned with the influence of reaction conditions on the surface friction properties of Syrene-Butadiene Rubber(SBR) sheet when it was chlorinated by chemical treatment method using the sodium hypochlorite and sulfuric acid. The results of this study were as follows. SEM photographs of chlorinated SBR surface showed uneven etching caused by the chlorination. In the FTIR spectra, the intensity of C=C peak of SBR was decreased with increasing the concentration of sodium hypochlorite. Otherwise there was no trace of C=C peak in spectrum of SBR treated with 5 wt% NaOCl with pH 0.1 for 90 seconds. EDX spectra showed that relative content of chlorine of SBR was increased with increasing the amount of sodium hypochlorite, and also affected with pH condition of acid solution. Friction angle and friction coefficient of SBR were influenced with concentration of sodium hypochlorite, but were not with pH condition of acid solution.

Large-Scale Assembly of Aligned Graphene Nanoribbons with Sub 30-nm Width

  • Kim, Taekyeong
    • Journal of the Korean Chemical Society
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    • v.58 no.6
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    • pp.524-527
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    • 2014
  • We report a simple yet efficient method to assemble large-scale aligned graphene nanoribbons (GNRs) with a width as small as 30 nm. The $V_2O_5$ nanowires (NWs) were aligned on a graphene surface via spraying a solution of the $V_2O_5$ NWs, and the graphene was selectively etched by the reactive ion etching method using the $V_2O_5$ NWs as a shadow mask. This process allowed us to prepare large scale patterns of the aligned GNRs on a $SiO_2$ substrate. The orientation of the aligned and randomly oriented GNRs was compared by the atomic force microscope (AFM) images. We achieved the highly aligned GNRs along the flow direction of the $V_2O_5$ NWs solution. Furthermore, we successfully fabricated a field effect-transistor with the aligned GNRs and measured its electrical properties. Since our method enable to prepare the aligned GNRs over a large area, it should open up new way for the various applications.

Fabrication of BLT Nanotubes for 3D Nanotube Capacitor (3D Nanotube Capacitor 구현을 위한 BLT Nanotube 제작)

  • Seo, Bo-Ik;Shaislamov Ulugbek;Kim, Sang-Woo;Hong, Seok-Kyung;Yang, Bee-Lyong
    • Journal of the Korean Ceramic Society
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    • v.43 no.4 s.287
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    • pp.220-223
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    • 2006
  • BLT nanotubes were synthesized by using simple and convenient method template-wetting process. Porous alumina membranes were prepared by 2 step anodic oxidation as the template. To improve wetting properties and make low surface energy, BLT solution was mixed with polymer. Polymer was removed completely during annealing. After completely etching the template in 30 wt% KOH solution, we demonstrate that BLT nanotubes with a diameter of 200 nm can be fabricated. Grain growth process of BLT nanotubes during baking, and furnace annealing was examined by FE-SEM and XRD.

Fabrication of Cylindrical Macroporous Silicon and Diaphragms (원통형 메크로기공을 갖는 다공질 실리콘과 다이어프램의 제작)

  • 민남기;이치우;하동식;정우식
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.8
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    • pp.620-627
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    • 1998
  • For chemical microsensors such as humidity and gas sensors, it is essential to obtain a single pore with a large inner surface and straight structure. In this paper, cylindrical macroporous silicon layers have been formed of p-silicon substrate by anodization in HF-ethanol-water solution with an applied current. The pores grew normal to the (100) surface and were uniformly distributed. The pore diameter was approximately $1.5~2{\mu}m$ with a depth of $20~30{\mu}m$ and the pores were not interconnected, which are in sharp contrast to the porous silicon reported previouly for similarly doped p-Si. Porous silicon diaphragms 18 to $200{\mu}m$ thick were formed by anistropic etching in TMAH solution and then anodization. The fabrication of macroporous silicon and free-standing diaphragms is expected to offer applications for microsensors, micromachining, and separators.

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반도체 장비 부품의 Ti/TiN 흡착물 세정 공정 연구

  • 유정주;배규식
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2004.05a
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    • pp.92-96
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    • 2004
  • Scales, accumulated on semiconductor equipment parts during device fabrication processes, often lower equipment lifetime and production yields. Thus, many equipments parts have be cleaned regularly. In this study, an attempt to establish an effective process for the removal of scales on the sidewall of collimators in the chamber of sputter is made. The EDX analysis revealed that the scales are composed of Ti and TiN with the colummar structure. It was found that the heat-treatment at 700 for 1 min. after the oxide removal in the HF solution, and then etching in the HNO3 : H2SO4 : H2O =4:2:4 solution for 5.5 hrs at 67 was the most effective process for the scale removal.

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Recovery of Pure Electrolytic Iron from Wasted Hydrochloric Pickling Solution of Steel (철강의 염산산세 폐액으로부터 전해철의 제조에 관한 연구)

  • 김기호;권오익;홍성규
    • Journal of the Korean institute of surface engineering
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    • v.26 no.1
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    • pp.23-30
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    • 1993
  • Iron component in wasted hydrochloric etching solutions from steel works were recovered by electrolysis. The electric conductances of the solutions, as the function of the bath temperature and the ferrousion concen-tration, were measured and the result of the original solution was K=(0.0012+0.0005$\times$10-3T-0.1160$\times$10-6T2)$\times$102S.m-1(T in $^{\circ}C$) The current efficiency was better for the bath using a soluble steel plate anode than for the bath using an insoluble platinized titanium one. Densed electrolytic iron having the purity of higher than 99.99% was ob-tained at the electrolysis conditions of the cathodic current density of 15A/dm2, the bath temperature of $70\pm$$5^{\circ}C$ and the ferrous ion concentration of about 100g/l. The morphologies of the deposited iron were observed by SEM.

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