• 제목/요약/키워드: epitaxial relation.

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질소 도핑된 P/P- Epitaxial Silicon Wafer의 Slip 및 강도 평가 (Evaluation of Slip and Strength of Nitrogen doped P/P- Epitaxial Silicon Wafers)

  • 최은석;배소익
    • 한국재료학회지
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    • 제15권5호
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    • pp.313-317
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    • 2005
  • The relation between bulk microdefect (BMD) and mechanical strength of $P/P^-$ epitaxial silicon wafers (Epitaxial wafer) as a function of nitrogen concentrations was studied. After 2 step anneal$(800^{\circ}C/4hrs+1000^{\circ}C/16hrs)$, BMD was not observed in nitrogen undoped epitaxial silicon wafer while BMD existed and increased up to $3.83\times10^5\;ea/cm^2$ by addition of $1.04\times10^{14}\;atoms/cm^3$ nitrogen doping. The slip occurred for nitrogen undoped and low level nitrogen doped epitaxial wafers. However, there was no slip occurrence above $7.37\times10^{13}\;atoms/cm^3$ nitrogen doped epitaxial wafer. Mechanical strength was improved from 40 to 57 MPa as nitrogen concentrations were increased. Therefore, the nitrogen doping in silicon wafer plays an important role to improve BMD density, slip occurrence and mechanical strength of the epitaxial silicon wafers.

In-situ Growth of Epitaxial PbVO3 Thin Films under Reduction Atmosphere

  • Oh, Seol Hee;Jin, Hye-Jin;Shin, Hye-Young;Shin, Ran Hee;Yoon, Seokhyun;Jo, William;Seo, Yu-Seong;Ahn, Jai-Seok
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.361.1-361.1
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    • 2014
  • PbVO3 (PVO), a polar magnetic material considered as a candidate of multiferroic, has ferroelectricity along the c-axis and 2-dimensional antiferromagnetism lying in the in-plane through epitaxial growth [1,2]. PVO thin films were grown on LaAlO3 (001) substrates under reduction atmosphere from a stable Pb2V2O7 sintered target using pulsed laser deposition method. Epitaxial growth of the PVO films is possible only under Ar atmospheren with no oxygen partial pressure. X-ray diffraction was used to investigate the phase formation and texture of the films. We confirmed epitaxial growth of the PVO films with crystalline relationship of PbVO3[001]//LaAlO3[001] and PbVO3[100]//LaAlO3[100]. In addition, surface morphology of the films displays drastic changes in accordance with the growth conditions. Elongated PVO grains are related to the Pb2V2O7 pyrochlore structure. The relation between structural deformation and ferroelectricity in the PVO films was examined by local measurement of piezoresponse force microscopy.

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HVPE법에 의한 질화갈륨 단결정막 성장시 상전이에 관한 연구 (Phase Transformation in Epitaxial Growth of Galium Nitride by HVPE Process)

  • ;;김향숙;이선숙;황진수;정필조
    • 한국결정학회지
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    • 제6권1호
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    • pp.49-55
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    • 1995
  • HVPE(Halide Vapour Phase Epitaxy) 법에 의하여 육방정계 질화갈륨(GaN) 단결정막의 (0001)면에 섬모양으로 배향된 입방정계 β-GaN상과 육방정계 α-GaN상 사이의 상호 배향은 [110](111) β-GaN//[1120](001) α-GaN 관계를 갖는 것으로 관찰되었다. 삼각섬 모양을 β-GaN는 막표면에 평행인 (111)면에 대한 쌍정위치를 점하고 있었다. 광발광(PL) 및 국소부위 음극선 발광(CL)을 측정하여 β-GaN의 금제대폭값은 실온에서 3.18±0.30eV로 얻어졌다.

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Mechanism of Morphological Transition from Lamellar/Perforated Layer to Gyroid Phases

  • Ahn, Jong-Hyun;Zin, Wang-Cheol
    • Macromolecular Research
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    • 제11권3호
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    • pp.152-156
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    • 2003
  • We investigated epitaxial relations of phase transitions between the lamellar (L), hexagonally perforated layers (HPL), and gyroid (G) morphologies in styrene-isoprene diblock copolymer (PSI) and polyisoprene (PI)/PSI blend using rheology and small angle X-ray scattering (SAXS) techniques. In HPLlongrightarrowG transitions, six spot patterns of G phase were observed in two-dimensitional SAXS pattern. On the other hand, in direct L-longrightarrowG transition without appearance of HPL phase, the polydomain patterns of G phase were observed. From present study, it was understood that direct LlongrightarrowG transition of blend may be suppressed by high-energy barrier of transition and mismatches in domain orientation between epitaxially related lattice planes.

Epitaxial Growth of Bi2Se3 on a Metal Substrate

  • 전정흠;장원준;윤종건;강세종
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.306-306
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    • 2011
  • Three dimensional(3D) topological insulators(TIs) of Bi binary alloys are characterized by a bulk energy gap with strong spin-orbit coupling and metallic surface states protected by time-reversal symmetry. It was reported that film forms of such materials were advantageous over bulk forms due to less defect density and better crystallinity. So far, the films have been prepared on several substrates including semiconductors and graphene. But, there were no studies on metal substrates. For electronic transport experiments and device applications, it is necessary to know epitaxial relation between TIs and metal electrodes. In this study, Atomically flat films of Bi2Se3 were grown on a Au(111) metal substrate by in-situ molecular beam epitaxy. Using home-built scanning tunneling microscope, we observed hexagonal atomic structures which corresponded to the outmost selenium atomic layer of Bi2Se3. Triangular-shaped defects known as Selenium vacancy were also found.

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이트리움 실리사이드 박막의 (100)Si 기판상에서의 방향성 성장과 미세조직의 특성 (Epitaxial growth and microstructural characterization of $YSi_2$ films on (100)Si substrate)

  • Lee, Young-Ki
    • 한국결정성장학회지
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    • 제7권1호
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    • pp.59-69
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    • 1997
  • 이트리움 실리사이드($YSi_2$)는 $400^{\circ}C$ 이상의 진공열처리 중 고상반응에 의하여 (100)Si 기판상에서 $YSi_2$의 (1100)면이 방향성 성장을 하였으며, $YSi_2$ 박막과 (100)Si 기판과의 방위관계는 [0001]$YSi_2$//[011i]Si과 [0001]$YSi_2$//[011]Si이었다. 그러나 방위관계에서도 알 수 있는 바와 같이 $YSi_2$는 [1100]$YSi_2$의 domain이 상호간에 $90^{\circ}$의 방위각을 이루며 성장하는 이른바 double-domain 구조를 나타내었다. 이는(1100)$YSi_2$면과 Si기판과의 계면에서 커다란 격자 불일치의 이방성 때문이라 생각되며, 각각의 domain은 (2201) 비대칭 반사면의 $\omega$-mode rocking curve 측정 결과, 거의 동등한 체적율과 결정성을 나타내었다. 본 연구에서는 이러한 double-domain의 형성기구를 (1100)$YSi_2$면과 (100)Si기판과의 계면에서 정합 모델에 근거한 기하학적 matching 관계로 설명하였다.

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高變形된 異種 에피층에서 응력 집중이 결정결함 생성에 미치는 영향 (Stress Concentration Effects on the Nucleation of the Structural Defects in Highly Strained Heteroepitaxial Layers)

  • 김삼동;이진구
    • 한국재료학회지
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    • 제11권7호
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    • pp.615-621
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    • 2001
  • 본 연구에서는 고변형된 이중 에피층에서 두 가지 종류의 반원 전위 루프 ($60^{\circ}$및 쌍격자 전위)의 생성 속도물 예측하는 모델을 제안한다. 모델링 시, 에피층 표면에서 발생하는 결함과 이곳에 집중되는 응력 효과를 고려하였으며, Matthew의 식을 발전시켜 에피층 두께에 따른 잔류 변형율을 변수로 사용하였다. 모델링을 통한 계산 결과에 의하면, 응력 집중 현상은 고변형된 이종에피층에서 전위 및 결정 결함 현상을 설명하는 데 매우 중요하였다. 또한,본 연구를 퉁하여, 응력 집중 현상이 에피층 성장 초기에 생성되는 전위 형태를 결정하는 주요한 인자 중 하나임을 단면 투과 전자 현미경 결과와의 비교를 통해 확인할 수 있었다.

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Magnetisation reversal dynamics in epitaxial Fe/GaAs(001) and Fe/InAs(001) thin films

  • Lee, W. Y.;K. H. Shin;Kim, H. J.
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2000년도 International Symposium on Magnetics The 2000 Fall Conference
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    • pp.230-238
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    • 2000
  • We present the magnetisation reversal dynamics of epitaxial Fe thin films grown on GaAs(001) and InAs(001) studied as a function of field sweep rate in the range 0.01-160 kOe/s using magneto-optic Kerr effect (MOKE). For 55 and 250 ${\AA}$ Fe/GaAs(001), we find that the hysteresis loop area A follows the scaling relation A ∝ H$\^$${\alpha}$/ with ${\alpha}$=0.03∼0.05 at low sweep rates and 0.33-0.40 at high sweep rates. For the 150 ${\AA}$ Fe/InAs(001) film, ${\alpha}$ is found to be ∼0.02 at low sweep rates and ∼0.17 at high sweep rates. The differing values of ${\alpha}$ are attributed to a change of the magnetisation reversal process with increasing sweep rate. Domain wall motion dominates the magnetisation reversal at low sweep rates, but becomes less significant with increasing sweep rate. At high sweep rates, the variation of the dynamic coercivity H$\sub$c/ is attributed to domain nucleation dominating the reversal process. The results of magnetic relaxation studies for easy-axis reversal are consistent with the sweeping of one or more walls through the entire probed region (∼100 $\mu\textrm{m}$). Domain images obtained by scanning Kerr microscopy during the easy cubic axis reversal process reveal large area domains separated by zigzag walls.

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Epitaxial Growth of $NdF_3:Er^{3+}/CaF_2(111)$ by MBE

  • Ko, J.M.;Fukuda, T.
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1998년도 PROCEEDINGS OF THE 14TH KACG TECHNICAL MEETING AND THE 5TH KOREA-JAPAN EMGS (ELECTRONIC MATERIALS GROWTH SYMPOSIUM)
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    • pp.71-74
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    • 1998
  • $Er^{3+}$ doped $NdF_{3}$ single crystalline thin films with smooth, microcrack-free, and high-crystalline quality were grown on $CaF_{2}(111)$ substrate at $500^{\circ}C$by molecular beem epitaxy(MBE). The relation-ship between subcell and supercell showing the reconstructed $3^{1/2} \times 3^{1/2}$ structure was studied by reflection high-energy electron diffraction(RHEED) investigation. The film surface and the growth mode were examined in studied by RHEED patterns and atomic force microscope(AFM) images ex situ. The crystallinity of film and the lattice mismatch between $NdF_{3}Er}^{3+}(0002)$ film and $CaF_{2}(111)$ substrate depending in the $Er^{3+}$ concentration were investigated by X-ray rocking curve analysis.

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New Oxide Crystals as Substrates for GaN-based Blue Light Emitting Devices

  • Fukuda, T.;Shimamura, K.;Tabata, H.;Takeda, H.;Futagawa, N.;Yoshikawa, A.;Kochurikhin, Vladimir-V.
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1999년도 PROCEEDINGS OF 99 INTERNATIONAL CONFERENCE OF THE KACG AND 6TH KOREA·JAPAN EMG SYMPOSIUM (ELECTRONIC MATERIALS GROWTH SYMPOSIUM), HANYANG UNIVERSITY, SEOUL, 06월 09일 JUNE 1999
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    • pp.3-26
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    • 1999
  • We have successfully grown <111>-oriented (La,Sr)(Al,Ta)$O_3$(LSAT) mixed-perovskite single crystals and <0001>-oriented $Ca_8La_2(PO_4)_6O_2$(CLPA) single crystals with the apatite structure by the Czochralski method. The compositional and lattice parameter uniformity of the crystals are discussed in relation to the growth conditions. Since LSAT and CLPA single crystals have excellent lattice matching with GaN, they ar promising as new substrates for the growth of high quality GaN epitaxial layers.

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