• Korean Journal of Metals and Materials
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• v.49 no.4
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• pp.334-341
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• 2011

The mechanism behind super-filling of high-aspect-ratio features with Cu by catalyst-enhanced chemical vapor deposition (CECVD) coupled with plasma treatment is described and the metrology required to predict the filling feasibility is identified and quantified. The reaction probability of a Cu precursor was determined as a function of substrate temperature. Iodine adatoms are deactivated by the bombardment of energetic particles and also by the overdeposition of sputtered Cu atoms during the plasma treatment. The degree of deactivation of adsorbed iodine was experimentally quantified. The quantified factors, reaction probability and degree of deactivation of iodine were introduced to the simulation for the prediction of the trench filling aspect by CECVD coupled with plasma treatment. Simulated results show excellent agreement with the experimental filling aspects.

• Applied Chemistry for Engineering
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• v.26 no.2
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• pp.145-153
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• 2015

$Cr_2O_3/AP$ (ammonium perchlorate) energetic composites were prepared by a method of solvent/anti-solvent. XRD analysis revealed that the crystalline structure of AP in $Cr_2O_3/AP$ composites is the same as that of pure AP. SEM photomicrograph shows that an average size of cuboid $Cr_2O_3/AP$ composites is approximately $2.5{\mu}m$. TGA analysis shows that the addition of submicron $Cr_2O_3$ particles into AP lowers the HTD (high-temperature decomposition) compared to that of neat AP and the activation energy of the $Cr_2O_3/AP$ composites was calculated by the isoconversional Starlink method. Considering changes in the activation energy, the decomposition reaction mechanism of AP was suggested as follows; the decomposition with the formation of nucleation sites renders formation of porous structure in the composites up to conversion of about 0.25 and after further conversion of over 0.3, it seems that decomposition reaction vigorously takes place rather than sublimation of AP.

• Bulletin of the Korean Space Science Society
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• 2008.10a
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• pp.33.3-34
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• 2008

As an activity of building Korean Space Weather Prediction Center (KSWPC), we has studied of radiation effect on the spacecraft components. High energy charged particles trapped by geomagnetic field in the region named Van Allen Belt can move to low altitude along magnetic field and threaten even low altitude spacecraft. Space Radiation can cause equipment failures and on occasions can even destroy operations of satellites in orbit. Sun sensors aboard Science and Technology Satellite (STSAT-1) was designed to detect sun light with silicon solar cells which performance was degraded during satellite operation. In this study, we try to identify which particle contribute to the solar cell degradation with ground based radiation facilities. We measured the short circuit current after bombarding electrons and protons on the solar cells same as STSAT-1 sun sensors. Also we estimated particle flux on the STSAT-1 orbit with analyzing NOAA POES particle data. Our result clearly shows STSAT-1 solar cell degradation was caused by energetic protons which energy is about 700 keV to 1.5 MeV. Our result can be applied to estimate solar cell conditions of other satellites.

• The Bulletin of The Korean Astronomical Society
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• v.35 no.1
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• pp.30.2-30.2
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• 2010

Numerous operational anomalies and satellite failures have been reported since the beginnings of the "space age". Space weather effects on modern spacecraft systems have been emphasized more and more as increasing their complexity and capability. Energetic particles potentially can destroy and degrade electronic components in satellites. We analyzed the geostationary (GEO) satellite anomalies during 1997-2009 to search possible influences of space weather on the satellite anomalies like power problem, control processor problem, attitude control problem, etc. For this we use particle data from GOES and LANL satellites to investigate space weather effects on the GEO satellites' anomalies depending on Kp index, local time, seasonal variation, and high-energy electron contribution. As results, we obtained following results: (1) there is a good correlation between geomagnetic index(Kp) and anomaly occurrences of the GEO satellite; (2) especially during the solar minimum, occurrence of the satellite anomalies are related to electron flux increase due to high speed solar wind; (3) satellite anomalies occurred more preferentially in the midnight and dawn sector than noon and dusk sector; (4) and the anomalies occurred twice more in Spring and Fall than Summer and Winter; (5) the electron with the lowest energy channel (50-75keV) has the highest correlation (cc=0.758) with the anomalies. High association between the anomalies and the low energy electrons could be understand by the facts that electron fluxes in the spring and fall are stronger than those in the summer and winter, and low-energy electron flux is more concentrated in the dawn sector where the GEO satellite anomalies occurred more frequently than high-energy electron flux. While we could not identify what cause such local time dependences, our results shows that low-energy electrons (~100keV) could be main source of the satellite anomaly, which should be carefully taken into account of operating satellites.

• The Bulletin of The Korean Astronomical Society
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• v.43 no.1
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• pp.51.3-52
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• 2018

Since Voyager 1 passed the Heliopause in 2012, it has provided the observations of the charged particles in the local interstellar medium. However, Voyager 1 only provides the information along with its trajectory. In order to understand the global view of the interstellar plasma flow surrounding the Heliopause, we need another tool. When the interstellar plasmas approach the Heliopause, the ions are deflected around the Heliopause due to the draping of the interstellar magnetic field. The draping of the interstellar magnetic field is strongly connected with the shape of the Heliopause. A fraction of the diverted ions exchanges their charges with the undisturbed primary interstellar neutral atoms, and then the ions become neutral atoms called the secondary interstellar neutral atoms. The newly created neutral atoms carry information on the diverted flow of the interstellar ions, and a fraction of them can travel to the Sun. Therefore, the secondary component of the interstellar neutrals is an excellent diagnostic tool to provide important information to constrain the shape of the Heliopause. The secondary interstellar neutrals are observed by Interstellar Boundary Explorer (IBEX) at Earth's orbit. Since 2009, two energetic neutral atom cameras on IBEX have measured neutral atoms and it has provided sky maps of neutral atoms. In this presentation, we will discuss the directional distribution of the secondary interstellar neutrals at Earth's orbit. In the sky maps, the primary interstellar neutral gas is seen between $200^{\circ}$ and $260^{\circ}$ in ecliptic longitude and the secondary components are seen in the longitude range of $160^{\circ}-200^{\circ}$. We also present a simplified model of the outer heliosheath to help interpret the observations of interstellar neutrals by the IBEX-Lo instruments. We extract information on the large-scale shape of the Heliopause by comparing the neutral flux measured at IBEX along four different look directions with simple models of deflected plasma flow around hypothetical obstacles of different aspect ratios to the flow. Our comparisons between the model results and the observations indicate that the Heliopause is very blunt in the vicinity of the Heliospheric nose, especially compared to a Rankine half-body or cometary shape.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.10
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• pp.1049-1055
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• 2004

Chemical Mechanical Polishing (CMP) is referred to as a three body tribological system, because it includes two solids in relative motion and the CMP slurry. On the assumption that the abrasives between the pad and the wafer could be a major reason not only for the friction force but also for material removal during polishing, the friction force generated during CMP process was investigated with the change of abrasive size and concentration of CMP slurry. The threshold point of average coefficient of friction (COF) with increase in abrasives concentration during interlayer dielectric (ILD) CMP was found experimentally and verified mathematically based on contact mechanics. The predictable models, Mode I (wafer is in contact with abrasives and pad) and Mode II (wafer is in contact with abrasives only), were proposed and used to explain the threshold point. The average COF value increased in the low abrasives concentration region which might be explained by Mode I. In contrast the average COF value decreased at high abrasives concentration which might be regarded to as Mode II. The threshold point observed seemed to be due to the transition from Mode I to Mode II. The tendency of threshold point with the variation of abrasive size was studied. The increase of particle radius could cause contact status to reach transition area faster. The correlation between COF and material removal rate was also investigated from the tribological and energetic point of view. Due to the energy loss by vibration of polishing equipment, COF value is not proportional to the material removal rate in this experiment.

• Journal of Astronomy and Space Sciences
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• v.35 no.3
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• pp.195-200
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• 2018

The present paper describes the design of a Solid State Telescope (SST) on board the Korea Astronomy and Space Science Institute satellite-1 (KASISat-1) consisting of four [TBD] nanosatellites. The SST will measure these radiation belt electrons from a low-Earth polar orbit satellite to study mechanisms related to the spatial resolution of electron precipitation, such as electron microbursts, and those related to the measurement of energy dispersion with a high temporal resolution in the sub-auroral regions. We performed a simulation to determine the sensor design of the SST using GEometry ANd Tracking 4 (GEANT4) simulations and the Bethe formula. The simulation was performed in the range of 100 ~ 400 keV considering that the electron, which is to be detected in the space environment. The SST is based on a silicon barrier detector and consists of two telescopes mounted on a satellite to observe the electrons moving along the geomagnetic field (pitch angle $0^{\circ}$) and the quasi-trapped electrons (pitch angle $90^{\circ}$) during observations. We determined the telescope design of the SST in view of previous measurements and the geometrical factor in the cylindrical geometry of Sullivan (1971). With a high spectral resolution of 16 channels over the 100 keV ~ 400 keV energy range, together with the pitch angle information, the designed SST will answer questions regarding the occurrence of microbursts and the interaction with energetic particles. The KASISat-1 is expected to be launched in the latter half of 2020.

• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.105-111
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• 2003

In order to find out whether a reflectron can be used as a mass selector in the gas cluster experiment, computer simulation are performed using the SIMION’ program. flight paths of energetic particles in the reflectron does not depend on their mass but energy. In the case of $(CO_2)n $ gas cluster, however, the position of clusters just after passing through the reflectron are spacially distributed with respect to the mass. The reason that the masses spacially distributes is the E/m ratio of clusters is constant, and it is the key reason that a reflectron can be used as a mass selector. Mass resolution does not depend on the cluster size and incident angle of clusters, and it is proportional to the incident position of clusters. This means that mass resolution can be enhanced by resizing the dimension of a reflectron. Therefore, it is concluded that a reflectron can be used as a mass selector with excellent mass resolution in the gas cluster experiment.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.171-174
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• 2002

The barium strontium titannate (BST) thin films were etched in $CF_{4}/Ar$ inductively coupled plasma (ICP). The high etch rate obtained at a $CF_{4}(20%)/Ar(80%)$ and the etch rate in pure argon was twice higher than that in pure $CF_{4}$. This indicated that BST etching is sputter dominant process. It is impossible to avoid plasma-induced damages by the energetic particles in the plasma and the nonvolatile etch products. The plasma damages were evaluated in terms of leakage current density, residues on the etched sample, and the changes of roughness. After the BST thin films exposed in the plasma, the leakage current density and roughness increases. In addition, there are appeared a nonvolatile etch byproductsand from the result of X-ray photoelectron spectroscopy (XPS). After annealing at ${600^{\circ}C}$ for 10 min in $O_{2}$ ambient, the increased leakage current density, roughness and nonvolatile etch byproducts reduced. From the this results, the plasma induced damage recovered by annealing process owing to the relaxation of lattice mismatches by Ar ions and the desorption of metal fluorides in high temperature.

• Journal of Biomedical Engineering Research
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• v.18 no.3
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• pp.307-313
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• 1997

he photoconductive gain mechanism in amorphus silicon devices was investigated in connection with applications to radiation detection. Various device types such as p-i-n, n-i-n and i-i-p-i-n structures were fabricated and tested. Photoconductive gain was measured in two time scales : one for short pulses of visible light(<$1{\mu}sec$) which simulate the transit of energetic charged particles or ${\gamma}$-rays, and the other for rather long pulses of light(1msec) which simulate x-ray exposure in medical imaging, We used two definitions of phtoconductive gain : current gain and charge gain which is an integration of the current gain. We obtained typical charge gains of 3~9 for short pulses and a few hundreds for long pulses at a dark current density level of 10mA/$cm^2$. Various gain results are discussed in terms of the device structure, applied bias and dark current density.