Permeation Behavior of Semiconductor Rinsing Wastewater Containing Si Particles in Ultrafiltration System -I. Permeation Characteristics of Polysulfone Flat Plate Membrane- (Si 입자를 함유한 반도체 세정폐수의 한외여과 특성[I] -Polysulfone 평판막에 의한 투과분리-)
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- Membrane Journal
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- v.8 no.2
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- pp.102-108
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- 1998