• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.63-66
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• 2004

Transparent MgO thin films were deposited on glass substrates by electron beam evaporation of MgO (99.99%) under $O_2$ atmosphere at 150-250 $^{\circ}C$. These films were characterized for their useful properties such as thickness, transmission, and refractive index using ultraviolet / visible (UV/VIS) spectrophotometer, scanning electron microscopy (SEM), and Spectroscopic Ellipsometry. The thickness of MgO films were measured by alpha step instrument and found to be 600 nm to 1000 nm and are meeting the stoichiometry. The transmission spectrum of these films shows transmittance values ${\sim}$92%..

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.540-540
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• 2013

In this studying, we investigated the basic properties of N-doped plasma polymer. The N-doped ethylcyclohexane plasma polymer thin films were deposited by radio frequency (13.56 MHz) plasma-enhanced chemical vapor deposition method. Ethylcyclohexenewas used as organic precursor (carbon source) with hydrogen gas as the precursor bubbler gas. Additionally, ammonia gas [NH3] was used as nitrogen dopant. The as-grown polymerized thin films were analyzed using ellipsometry, Fourier-transform infrared [FT-IR] spectroscopy, Raman spectroscopy, FE-SEM, and water contact angle measurement. The ellipsometry results showed the refractive index change of the N-doped ethylcyclohexene plasma polymer film. The FT-IR spectrashowed that the N-doped ethylcyclohexene plasma polymer films were completely fragmented and polymerized from ethylcyclohexane.

• Journal of the Semiconductor & Display Technology
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• v.2 no.4
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• pp.23-26
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• 2003

The general users find difficulties in using ellipsometers. Thus, the object of this study is to construct an ellipsometer with simple operation principle. We developed an ellipsometer which does not require alignment and calibration before measuring sample. A basis structure model after rotating a compensator spectroscopic ellipsometry, the fixed incidence angle at $70^{\circ}$. This ellipsometer does not demand calibration, because the plane of incidence is not changed due to the novel sample holder structure. The results for various standard samples were compared with those from conventional RCSE to test the performance of this instrument. Also repeated measurements were performed to test the precision of the calibration coefficient in a plane of incidence fixed.

• Journal of Korean Ophthalmic Optics Society
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• v.10 no.4
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• pp.267-272
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• 2005

We deposited thin films of organic light-emitting-material $Alq_3$(alumina quinoline) on silicon and slide-glass substrates using thermal evaporation method, and measured spectra of ellipsometry angles ${\Delta}$ and ${\Psi}$ in the photon-energy range of 1.5~5.0 eV using a variable angle spectroscopic ellipsometer. The optical constants, refractive index and extinction coefficient, of $Alq_3$ were determined via the dispersion parameters extracted from the curve-fitting process based on Jellison-Modine dispersion function. The reliability of determined optical constants were verified through the comparison of measured and simulated transmittance curves and the good agreement between simulated absorption-coefficient curves and absorbance spectra measured using a spectrophotometer.

• Korean Journal of Optics and Photonics
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• v.8 no.1
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• pp.31-36
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• 1997

We measured refractive indices and thicknesses of SiO$_2$ thin films that have been plated on LCD glass substrate for the purpose of preventing the out-diffusion of sodium ions. The best experimental condition to determine refractive index and thickness of SiO$_2$ thin film by using ellipsometry is searched for, where ⅰ) the film thickness is increased uniformly by 20 $\AA$ from 0 $\AA$ to the period thickness while the angle of incidence is fixed and ⅱ) the angle of incidence is increased uniformly by 1$^{\circ}$ from 45$^{\circ}$ to 70$^{\circ}$ while the film thickness is fixed. We estimated the errors in determining the refractive index and thickness by comparing the measurement error of $\Delta$ and Ψ with the calculated one. The ellipsometric constants of SiO$_2$ thin film on LCD glass substrate are measured at several angle of incidence around the Brewster angle, which is the best angle if the experimental error of ellipsometer is not sensitive to the incident angle. Also the best fit refractive index and thickness of SiO$_2$ thin film to these ellipsometric constants measured at several angle of incidenc eas well as the best fit ones to the SE data are obtained using regressional analysis.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.11a
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• pp.147-151
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• 1996

Brewster angle microscopy(BAM) makes it possible to observe the monolayer states on the water subphase and the phase transitions from a gaseous phase via a expanded phase to a condensed phase. Also BAM can be used to observe the films on the solid substrate such as Langmuir-Blodgett(LB) films. In this Paper Polyamic Acid Alkylamine Salts(PAAS) was used for forming L films and LB films and $\pi$-A isotherm showed pressure of each phase. We obtained BAM images as surface pressure increased. Images of LB films were compared with data from ellipsometry which was used to measure the film thickness. Images of both L films and LB films were analyzed with computer in the point of brightness.

• Proceedings of the Optical Society of Korea Conference
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• 2001.02a
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• pp.264-265
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• 2001

영상표시방법은 관례적인 CRT 방법에 더하여 LCD, TFT-LCD, FED, PDP 등 다양한 방법들이 개발되었거나 개발되고 있다. 유기발광소자(OLED)를 이용한 영상표시법도 최근 그 실용성이 크게 향상된 방법으로 이 OLED를 이용하는 발광소자는 LCD, TFT-LCD 등의 방법과 마찬가지로 다층박막구조를 가지므로 각 박막층의 특성과 계면 급준성 등을 정확하게 평가하는 것은 긴요하다 하겠다. (중략)

• Korean Journal of Optics and Photonics
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• v.15 no.6
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• pp.531-538
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• 2004

Studies of adsorption isotherms with sharp step-wise layer condensation help us to better understanding of two dimensional layers. For this, an adsorption isotherm apparatus, using a phase modulated ellipsometric technique, has been constructed and an adsorption experiment has been performed. With subatomic scale resolution(∼0.3 $\AA$), the adsorption processes could be observed by ellipsometric signals. On measurement of multilayer adsorption of argon on highly oriented pyrolytic graphite(HOPG), thousands of adsorbed layers were observed at 34.04 K, which suggests that the adsorption is completely wet. On the contrary nine sharp layers of steps for adsorptions and desorptions were observed at 67.05 K. These isotherms obtained can provide a lot of information about thermodynamic states, bonding energies between adsobate and substrate, and structure transitions in the adsorbed film.

• Korean Journal of Optics and Photonics
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• v.26 no.1
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• pp.9-16
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• 2015

We have developed ellipsometry lidar and measured aerosol and ice-cloud characteristics. To measure a full normalized backscattering phase matrix (NBSPM) composed of nine elements, we have designed an optical system with three kinds of transmission and three kinds of reception, composed of ${\lambda}/2$ waveplate, ${\lambda}/4$ waveplate and empty optic. To find systematic optical errors, we used clean day middle-altitude (4-6km) lidar signals for which the aerosol's concentration was small and its orientation chaotic. After calibrating our lidar system, we have calculated NBSPM elements scattered from an aerosol and from an ice cloud. In the case of an aerosol, we found that the off-diagonal values $m_{12},{\ldots},m_{34}$ of the NBSPM are smaller than those for a cirrus cloud. Also, the off-diagonal values of the NBSPM from a cirrus cloud depend on atmospheric conditions.

• Journal of the Microelectronics and Packaging Society
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• v.7 no.1
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• pp.35-40
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• 2000

Teflon-like fluorocarbon thin film was deposited on various substrates by vapor deposition using PFDA (perfluorodecanoic acid). The fluorocarbon films were characterized by static/dynamic contact angle analysis, VASE (Variable-angle Spectroscopic Ellipsometry) and AFM/LFM (Atomic/Lateral Force Microscopy). Based on Lewis Acid/Base theory, the surface energy ($S_{E}$) of the films was calculated by the static contact angle measurement. The work of adhesion (WA) between de-ionized water and substrates was calculated by using the static contact data. The fluorocarbon films showed very similar values of the surface energy and work of adhesion to Teflon. All films showed larger hysteresis than that of Teflon. The roughness and relative friction force of films were measured by AFM and LFM. Even though the small reduction of surface roughness was found on film on $SiO_2$surface, the large reduction of relative friction farce was observed on all films. Especially the relative friction force on TEOS was decreased a quarter after film deposition. LFM images showed the formation of "strand-like"spheres on films that might be the reason far the large contact angle hysteresis.