• 제목/요약/키워드: ellipsometry angle

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가변입사각 분광타원 법을 이용한 유기 발광 박막의 광학상수 및 두께 결정 (Determination of optical constants and thickness of organic electroluminescence thin films using variable angle spectroscopic ellipsometry)

  • 김상열;류장위;김동현;정혜인
    • 한국광학회지
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    • 제12권6호
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    • pp.472-478
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    • 2001
  • 가변입사각 분광타원법(Variable Angle Spectroscopic Ellipsometry)을 사용하여 유기발광소자(OLED)의 발광층인 유기박막 의 광학상수와 두께를 결정하였다. 광투과영역에서 모델링분석으로 박막의 평균두께와 굴절률 분산식을 결정하고, 광흡수영역으로 확장하여 유기막의 다층구조, 각 층의 두께와 밀도 그리고 각 파장에서의 복소굴절률을 결정하였다. 분광광도계를 사용하여 구한 투과율 스펙트럼을 가변입사각 분광타원법을 사용하여 결정한 다층구조 및 복소굴절률로 계산한 투과율 스펙트럼과 비교하여 분석의 정확성을 확인하였다.

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Evaluation of LCD device parameters and rubbed surface of Polyimide by means of renormalized spectroscopic ellipsometry

  • Kimura, Munehiro;Hasegawa, G.;Sakamoto, H.;Akahane, T.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.1715-1718
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    • 2006
  • Evaluating method of the device parameters of liquid crystal display (LCD) by means of the renormalized transmission spectroscopic ellipsometry is demonstrated. Dielectric and elastic constant, threshold voltage, pretilt angle, cell gap and Anchoring strength coefficients can be evaluated from the measurement of ellipsometric parameters measured by the symmetrically oblique incidence transmission ellipsometry (SOITE). Furthermore, rapid evaluating method for rubbed polyimide film is also demonstrated.

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Ellipsometric Characterization of Rubbed Polyimide Alignment Layer in Relation with Distribution of Liquid Crystal Molecules in Twisted Nematic Cell

  • Cho, Sung Yong;Park, Sang Uk;Yang, Sung Mo;Kim, Sang Youl
    • Current Optics and Photonics
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    • 제2권2호
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    • pp.185-194
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    • 2018
  • Ultra-small optical anisotropy of a rubbed polyimide (PI) alignment layer is quantitatively characterized using the improved reflection ellipsometer. Twisted nematic (TN) cells are fabricated using the rubbed PIs of known surface anisotropy as alignment layers. Distribution of liquid crystal (LC) molecules in the TN cell is characterized using transmission ellipsometry. The retardation of the rubbed PI surface increases as rubbing strength increases. The tilt angle of the optic axis of the rubbed PI surface decreases as rubbing strength especially as the angular speed of the rubbing roller increases. Pretilt angle of LC molecules in the TN cell shows strong correlation with tilt angle of the optic axis of the rubbed PI surface. Both the apparent order parameter and the effective twist angle of the LC molecules in the TN cell decrease as the pretilt angle of LC molecules increases.

Evaluation of the Surface Anchoring Strength by Means of Renormalized Transmission Spectroscopic Ellipsometry

  • Kimura, Munehiro;Tanaka, Norihiko;Bansho, Ryota;Akahane, Tadashi
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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    • pp.191-194
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    • 2005
  • Evaluating methods of the polar and/or azimuthal anchoring strength coefficients by means of the renormalized transmission spectroscopic ellipsometry are demonstrated. The Anchoring strength coefficients can be evaluated from the measurement of ellipsometric parameters measured by the oblique incident transmission ellipsometry, where the effect of multiplebeam interference is eliminated. The device parameters such as the pretilt angle and cell gap can be determined simultaneously even in the case of the twisted nematic liquid crystal sample cells.

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Study of Ultra-Small Optical Anisotropy Profile of Rubbed Polyimide Film by using Transmission Ellipsometry

  • Lyum, Kyung Hun;Yoon, Hee Kyu;Kim, Sang Jun;An, Sung Hyuck;Kim, Sang Youl
    • Journal of the Optical Society of Korea
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    • 제18권2호
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    • pp.156-161
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    • 2014
  • Anisotropy profile of a rubbed polyimide film is investigated using both a modified ultra high precision transmission ellipsometer and the analysis software previously developed to determine the optic axis distribution of discotic liquid crystals in the wide view film. The distorted sinusoidal variation of the ellipsometric constants obtained at an oblique angle of incidence indicates that the optic axis varies from $14.7^{\circ}$ to $40.6^{\circ}$ from the sample plane. The magnitude and distribution of anisotropy is expressed in terms of no, ne, and the cosine-shaped tilt angle distribution of the optic axis in a rubbed polyimide film.

가변입사각 타원해석법을 사용한 유리기판위의 이산화규소박막의 굴절율 및 두께 측정 (Measurement of a refractive index and thickness of silicon-dioxide thin film on LCD glass substrate using a variable angle ellipsometry)

  • 방현용;김현종;김상열
    • 한국광학회:학술대회논문집
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    • 한국광학회 1996년도 Advance Program of 13th optics andquantum Electronics conference, 1996제13 회 광학 및 양자전자 학술 발표회 논문 요약집
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    • pp.3-3
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    • 1996
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Properties of Indium Tin Oxide Multilayer Fabricated by Glancing Angle Deposition Method

  • Oh, Gyujin;Lee, Kyoung Su;Kim, Eun Kyu
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.367-367
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    • 2013
  • Commercial applications of indium tin oxide (ITO) can be separated into two useful areas. As it is perceived to bear electrical properties and optical transparency at once, its chance to apply to promising fields, usually for an optical device, gets greater in the passing time. ITO is one of the transparent conducting oxides (TCO), and required to carry the relative resistance less than $10^{-3}{\Omega}$/cm and transmittances over 80 % in the visible wavelength of light. Because ITO has considerable refractive index, there exist applications for anti-reflection coatings. Anti-reflection properties require gradual change in refractive index from films to air. Such changes are obtained from film density or nano-clustered fractional void. Glancing angle deposition (GLAD) method is a well known process for adjusting nanostructure of the films. From its shadowing effects, GLAD helps to deposit well-controlled porous films effectively. In this study, we are comparing the reference sample to samples coated with controlled ITO multilayer accumulated by an e-beam evaporation system. At first, the single ITO layer samples are prepared to decide refractive index with ellipsometry. Afterwards, ITO multilayer samples are fabricated and fitted by multilayer ellipsometric model based on single layer data. The structural properties were measured by using atomic force microscopy (AFM), and by scanning X-ray diffraction (XRD) measurements. The ellipsometry was used to determine refractive indices and extinction coefficient. The optical transmittance of the film was investigated by using an ultraviolet-visible (UV-Vis) spectrophotometer.

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Jellison Modine 분산식을 이용한 ZnS의 광학상수 결정 (Determination of Optical Constants of ZnS Using Jellison-Modine Dispersion Relation)

  • 박명희
    • 한국안광학회지
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    • 제12권1호
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    • pp.85-90
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    • 2007
  • 안경렌즈의 무반사 코팅물질로 사용되는 황화아연(Zinc Sulphide : ZnS)의 단일박막을 실리콘과 슬라이드 유리 기판위에 스핀코팅방법으로 증착하였다. 박막 증착 후 변입사각분광타원계(VASE : Variable Angle Spectroscopic Ellipsometer)를 사용하여 1.5~5.0 eV 광 에너지 영역에서 타원 각(ellipsometry angle) ${\Delta}$, ${\Psi}$를 측정하였다. 이 측정결과들을 Jellison Modine 분산관계식을 사용하여 최적맞춤하고, 매개변수들을 구하여 박막의 광학상수인 굴절계수 $n({\lambda})$와 소광계수 $k({\lambda})$를 결정하였다.

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