• Title/Summary/Keyword: ellipsometry angle

Search Result 39, Processing Time 0.044 seconds

Determination of optical constants and thickness of organic electroluminescence thin films using variable angle spectroscopic ellipsometry (가변입사각 분광타원 법을 이용한 유기 발광 박막의 광학상수 및 두께 결정)

  • 김상열;류장위;김동현;정혜인
    • Korean Journal of Optics and Photonics
    • /
    • v.12 no.6
    • /
    • pp.472-478
    • /
    • 2001
  • We determined the optical constants and thickness of organic electroluminescence thin films using variable angle spectroscopic ellipsometry. Using the measured transmittance spectra and the spectroscopic ellipsomeoy data of the organic films on glass substrates in the optically transparent region, we determined the effective thickness and the refractive indices of organic thin films. Then by applying a numerical inversion method to variable angle spectro-ellipsometry data, we determined the complex refractive index at each wavelength including the optically absorbing region, as well as the thickness and surface micro-roughness of the organic thin films. The calculated transmittance spectra showed a tight agreement with the measured ones, confining the validity of the present model analysis.

  • PDF

Evaluation of LCD device parameters and rubbed surface of Polyimide by means of renormalized spectroscopic ellipsometry

  • Kimura, Munehiro;Hasegawa, G.;Sakamoto, H.;Akahane, T.
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 2006.08a
    • /
    • pp.1715-1718
    • /
    • 2006
  • Evaluating method of the device parameters of liquid crystal display (LCD) by means of the renormalized transmission spectroscopic ellipsometry is demonstrated. Dielectric and elastic constant, threshold voltage, pretilt angle, cell gap and Anchoring strength coefficients can be evaluated from the measurement of ellipsometric parameters measured by the symmetrically oblique incidence transmission ellipsometry (SOITE). Furthermore, rapid evaluating method for rubbed polyimide film is also demonstrated.

  • PDF

Ellipsometric Characterization of Rubbed Polyimide Alignment Layer in Relation with Distribution of Liquid Crystal Molecules in Twisted Nematic Cell

  • Cho, Sung Yong;Park, Sang Uk;Yang, Sung Mo;Kim, Sang Youl
    • Current Optics and Photonics
    • /
    • v.2 no.2
    • /
    • pp.185-194
    • /
    • 2018
  • Ultra-small optical anisotropy of a rubbed polyimide (PI) alignment layer is quantitatively characterized using the improved reflection ellipsometer. Twisted nematic (TN) cells are fabricated using the rubbed PIs of known surface anisotropy as alignment layers. Distribution of liquid crystal (LC) molecules in the TN cell is characterized using transmission ellipsometry. The retardation of the rubbed PI surface increases as rubbing strength increases. The tilt angle of the optic axis of the rubbed PI surface decreases as rubbing strength especially as the angular speed of the rubbing roller increases. Pretilt angle of LC molecules in the TN cell shows strong correlation with tilt angle of the optic axis of the rubbed PI surface. Both the apparent order parameter and the effective twist angle of the LC molecules in the TN cell decrease as the pretilt angle of LC molecules increases.

Evaluation of the Surface Anchoring Strength by Means of Renormalized Transmission Spectroscopic Ellipsometry

  • Kimura, Munehiro;Tanaka, Norihiko;Bansho, Ryota;Akahane, Tadashi
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 2005.07a
    • /
    • pp.191-194
    • /
    • 2005
  • Evaluating methods of the polar and/or azimuthal anchoring strength coefficients by means of the renormalized transmission spectroscopic ellipsometry are demonstrated. The Anchoring strength coefficients can be evaluated from the measurement of ellipsometric parameters measured by the oblique incident transmission ellipsometry, where the effect of multiplebeam interference is eliminated. The device parameters such as the pretilt angle and cell gap can be determined simultaneously even in the case of the twisted nematic liquid crystal sample cells.

  • PDF

Study of Ultra-Small Optical Anisotropy Profile of Rubbed Polyimide Film by using Transmission Ellipsometry

  • Lyum, Kyung Hun;Yoon, Hee Kyu;Kim, Sang Jun;An, Sung Hyuck;Kim, Sang Youl
    • Journal of the Optical Society of Korea
    • /
    • v.18 no.2
    • /
    • pp.156-161
    • /
    • 2014
  • Anisotropy profile of a rubbed polyimide film is investigated using both a modified ultra high precision transmission ellipsometer and the analysis software previously developed to determine the optic axis distribution of discotic liquid crystals in the wide view film. The distorted sinusoidal variation of the ellipsometric constants obtained at an oblique angle of incidence indicates that the optic axis varies from $14.7^{\circ}$ to $40.6^{\circ}$ from the sample plane. The magnitude and distribution of anisotropy is expressed in terms of no, ne, and the cosine-shaped tilt angle distribution of the optic axis in a rubbed polyimide film.

Properties of Indium Tin Oxide Multilayer Fabricated by Glancing Angle Deposition Method

  • Oh, Gyujin;Lee, Kyoung Su;Kim, Eun Kyu
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2013.02a
    • /
    • pp.367-367
    • /
    • 2013
  • Commercial applications of indium tin oxide (ITO) can be separated into two useful areas. As it is perceived to bear electrical properties and optical transparency at once, its chance to apply to promising fields, usually for an optical device, gets greater in the passing time. ITO is one of the transparent conducting oxides (TCO), and required to carry the relative resistance less than $10^{-3}{\Omega}$/cm and transmittances over 80 % in the visible wavelength of light. Because ITO has considerable refractive index, there exist applications for anti-reflection coatings. Anti-reflection properties require gradual change in refractive index from films to air. Such changes are obtained from film density or nano-clustered fractional void. Glancing angle deposition (GLAD) method is a well known process for adjusting nanostructure of the films. From its shadowing effects, GLAD helps to deposit well-controlled porous films effectively. In this study, we are comparing the reference sample to samples coated with controlled ITO multilayer accumulated by an e-beam evaporation system. At first, the single ITO layer samples are prepared to decide refractive index with ellipsometry. Afterwards, ITO multilayer samples are fabricated and fitted by multilayer ellipsometric model based on single layer data. The structural properties were measured by using atomic force microscopy (AFM), and by scanning X-ray diffraction (XRD) measurements. The ellipsometry was used to determine refractive indices and extinction coefficient. The optical transmittance of the film was investigated by using an ultraviolet-visible (UV-Vis) spectrophotometer.

  • PDF

Determination of Optical Constants of ZnS Using Jellison-Modine Dispersion Relation (Jellison Modine 분산식을 이용한 ZnS의 광학상수 결정)

  • Park, Myung-Hee
    • Journal of Korean Ophthalmic Optics Society
    • /
    • v.12 no.1
    • /
    • pp.85-90
    • /
    • 2007
  • We deposited thin films of ZnS(Zinc Sulphide), in which was used antireflection coating material of glasses-lens on silicon and slide-glass substrates using spin coating method, and measured spectra of ellipsometry angles ${\Delta}$ and ${\Psi}$ in the photon-energy range of 1.5~5.0 eV using a variable angle spectroscopic ellipsometer. The optical constants, refractive index and extinction coefficient, of ZnS were determined via the dispersion parameters extracted from the curve-fitting process based on Jellison-Modine dispersion function.

  • PDF