• 제목/요약/키워드: electron optics

검색결과 188건 처리시간 0.034초

다중빔 리소그래피를 위한 초소형 컬럼의 전자빔 광학 해석에 관한 연구 (Study on The Electron-Beam Optics in The Micro-Column for The Multi-Beam Lithography)

  • 이응기
    • 반도체디스플레이기술학회지
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    • 제8권4호
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    • pp.43-48
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    • 2009

  • The aim of this paper is to describe the development of the electron-beam optic analysis algorithm for simulating the e-beam behavior concerned with electrostatic lenses and their focal properties in the micro-column of the multi-beam lithography system. The electrostatic lens consists of an array of electrodes held at different potentials. The electrostatic lens, the so-called einzel lens, which is composed of three electrodes, is used to focus the electron beam by adjusting the voltages of the electrodes. The optics of an electron beam penetrating a region of an electric field is similar to the situation in light optics. The electron is accelerated or decelerated, and the trajectory depends on the angle of incidence with respect to the equi-potential surfaces of the field. The performance parameters, such as the working distances and the beam diameters are obtained by the computational simulations as a function of the focusing voltages of the einzel lens electrodes. Based on the developed simulation algorithm, the high performance of the micro-column can be achieved through optimized control of the einzel lens.

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안경렌즈의 전자파 차폐 코팅에 관한 연구 (A Study on Electromagnetic Shield Coating of Ocular Lens)

  • 김기홍;박대진;김인수
    • 한국안광학회지
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    • 제11권2호
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    • pp.115-119
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    • 2006

  • 전자파 차폐 기능을 가지고 있는 ITO 코팅층을 안경 유리 기판위에 마그네트론 스퍼터링 방법으로 제조하였다. 코팅된 ITO 층을 surface, profiler, four-point probe, XRD, spectrophotometer 및 Auger electron spectroscopy를 사용하여 기판 온도가 코팅층의 특성 변화에 미치는 영향을 조사하였다. 기판의 온도가 높을수록 전자의 농도가 증가하였으며 가시영역에서 광투과율도 향상되었다.

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