• 제목/요약/키워드: electron beam deflection

검색결과 22건 처리시간 0.029초

전자총 시스템 제작과 이를 이용한 고융점 금속 증발에 관한 연구 (Study on the evaporation of high melting temperature metal by using the manufactured electron hem gun system)

  • 정의창;노시표;김철중
    • 한국진공학회지
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    • 제12권1호
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    • pp.1-6
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    • 2003
  • 50 kW급 출력의 전자빔을 발생시킬 수 있는 축선 방식 전자총 (axial electron beam gun)과 전원장치를 제작하였다. 전자총은 전자빔 발생장치와 전자빔 궤적제어장치로 이루어졌다. 전자빔 발생장치는 필라멘트와 음극(cathode), 양극(anode)으로 구성되었고 전자빔의 최대전류는 2A, 가속전압은 평균 25kV이다. 전자빔 궤적제어장치는 전자빔의 크기를 조절하는 초점 (focusing) 코일과 전자빔의 방향을 조절하는 편향(deflection) 코일 및 주사 (scanning) 코일로 구성되었다. 전자총과 별개로 진공용기 내부에 Helmholtz 코일을 설치하여 시료의 표면에 입사되는 전자빔의 입사각도를 최적화시켰다. 각 부분의 동작 특성을 측정한 결과와 제작된 전자총으로 고융점 원소인 지르코늄 (zirconium, Zr)과 가돌리늄(gadolinium, Gd) 금속을 증발시킨 결과를 정리하였다.

Oblate Spheroidal 좌표계를 이용한 자기 편형요크내의 자장 해석에 관한 연구 (A Study on the Analysis of Magnetic Field in Magnetic Deflection Yoke Based on the Oblate Spheroidal coordinates)

  • 서정두;유형선
    • 한국정밀공학회지
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    • 제10권3호
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    • pp.117-124
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    • 1993
  • This paper presents the study on the magnetic field analysis of magnetid deflection yoke using integral equation method. An integral equation method is developed for the computer modeling of the magnetic fields produced by color CRT and T.V. deflection yoke. Deflection of electron beams using magnetic fields is applied in a variety of display instruments such as te.evision receivers, electron probe instruments, etc. The magnetic field is solved by dividing these into the finite elements in the whole domain : the saddle coil which deflects the electron heam horizontally, the toroidal coil which deflects it vertically, magnetic core which enhances the magnetid fields genterated by the both coils. Using oblate spheroidal coordinates, this paper has had an easier access to the shape of magnetic deflection yoke chasing the boundaries than other coordinates.

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Electron Beam Simulation Technology for CRTs

  • Shirai, Shoji;Oku, Kentarou
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.385-387
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    • 2002
  • The electron beam simulation technology is indispensable for the recent electron gun design. The technology is becoming more and more important for deflection yoke (DY) design and investigation of the interference effects between gun and DY. Further, it may become vital even for shadow mask, glass funnel, exposure lens and magnetic shield.

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전자빔 용접기 진공 작업실의 구조설계 (Structural Design on the Vacuum Chamber of Electron Beam Welding System)

  • 이영신;류충현;서정;한유희
    • 한국레이저가공학회지
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    • 제1권1호
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    • pp.11-17
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    • 1998
  • The electron beam welding system has the advantages of the high power density, narrow welding section, and small thermal distortion of a workpiece. Recently, the electron beam welding system is widely used to the airplane engineering, nuclear power plant, and automobile industry. In the present paper, the structural analyses on the vacuum chamber of the electron beam welding system are performed by the F.E.M. analysis. The stiffening characteristics on the geometric shape, stiffener height and stiffener span are investigated. The deflection of the stiffened vacuum chamber under pressure is minimized by longitudinal and transverse stiffeners which are continuous in both direction.

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미세접합을 위한 전자빔 용접장치의 개조 (Modification of Electron beam welding system for Micro joining)

  • 서정;이제훈;김정오;강희신
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2003년도 추계학술발표대회 개요집
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    • pp.24-26
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    • 2003
  • In this study EB(Electron Beam) welder was modified to apply EB welder to micro-joining with solder ball and Pt wire. The power and beam current of EB welder is 6kW, 100mA and the minimum current was 1mA. The minimum current of EB welder was modified to decrease the amount of beam current to 0.0lmA and the monitoring system to observe materials was made up. The control system and CAD/CAM software for e-beam direct writing was developed and the deflection beam was controlled without moving workpieces. the possibility of applying EB welder to micro-joining with solder ball and Pt wire was studied through this experiments.

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엔드밀 변위에 의한 공구파손검출 (Tool Fracture Detection by End Mill Deflection)

  • 맹민재
    • 한국생산제조학회지
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    • 제8권2호
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    • pp.100-107
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    • 1999
  • End milling experiments are conducted to investigate characteristics of laser beam signals due to tool fracture. The laser beam signals are obtained with adapt focusing of tool. Tool states are identified wit h scanning electron microscopy and optical microscopy. It is demonstrated that the laser beam signals provide reliable informations about the cutting processes and tool states. Moreover, tool fracture can be detected successfully using coefficient of variation.

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전자빔 용접장치를 이용한 미세접합 (Micro joining using electron beam welding system)

  • 서정;이제훈;김정오;강희신
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2004년도 추계학술발표대회 개요집
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    • pp.79-81
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    • 2004
  • In this study EB(Electron Beam) welder was modified to apply Ef welder to micro-joining for soldering and micro-brazing. The power and beam current of EB welder is 6kW, 100mA(60kV) and the minimum current was 1mA. The minimum current of EB welder was modified to decrease the amount of beam current to 0.0lmA and the monitoring system to observe materials was made up. The system is developed including teaching function for generating patterns. The control system and CAD/CAM software for EB direct writing was developed and the deflection beam was controlled without moving workpieces. the possibility of applying EB welder to micro-joining for soldering and brazing was studied through this experiments.

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전자빔 증발원을 이용한 물질의 증발 특성 (Evaporation Characteristics of Materials from an Electron Beam Evaporation Source)

  • 정재인;양지훈;박혜선;정재훈;송민아
    • 한국표면공학회지
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    • 제44권4호
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    • pp.155-164
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    • 2011
  • Electron beam evaporation source is widely used to prepare thin films by physical vapor deposition because it is very effective to vaporize materials and there is virtually no limit to vaporize materials including metals and compounds such as oxide. In this study, evaporation characteristics of various metals and compounds from an electron beam evaporation source have been studied. The 180 degree deflection type electron beam evaporation source which has 6-hearth crucibles and is capable of inputting power up to 10 kW was employed for evaporation experiment. 36 materials including metals, oxides and fluorides have been tested and described in terms of optimum crucible liner, evaporation state, stability, and so on. Various crucible liners have been tried to find out the most effective way to vaporize materials. Two types of crucible liners have been employed in this experiment. One is contact type liner, and the other is non-contact type one. It has been tried to give the objective information and the most effective evaporation method on the evaporation of materials from the electron beam evaporation source. It is concluded that the electron beam evaporation source can be used to prepare good quality films by choosing the appropriate crucible liner.