• Journal of the Korea Academia-Industrial cooperation Society
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• v.3 no.2
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• pp.74-79
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• 2002

In the a rapid changes of the semiconductor manufacturing technologies for early 21st century, it may be safely said that a kernel of terms is the size increase of Si wafer and the size decrease of semiconductor devices. As the size of Si wafers increases and semiconductor device is miniaturized, the units of cleaning processes increases. A present cleaning technology is based upon RCA cleaning which consumes vast chemicals and ultra pure water (UPW) and is the high temperature process. Therefore, this technology gives rise to the environmental issue. To resolve this matter, candidates of advanced cleaning processes has been studied. One of them is to apply the electrolyzed water. In this work, Compared with surface on Si wafer with electrolyzed water cleaning and various chemicals cleaning, and analyzed Si wafer surface condition treated with elecoolyzed water by cleaning temperature and cleaning time. Especially. concentrate upon the contact angle. finally, contact angle on surface treated with cathode water cleaning is 17.28, and anode water cleaning is 34.1.

• Proceedings of the KIPE Conference
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• 2001.10a
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• pp.109-112
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• 2001

Water-Electrolyzed gas is a mixed gas of the constant volume ratio 2:1 of Hydrogen and Oxygen gained from electrolyzed water, and it has better characteristics in the field of economy, efficiency of energy, and environmental intimacy than acetylene gas and LPG (Liquefied Petroleum Gas) used for existing gas welding equipment. So studies of Water-Electrolyzed gas are activity in progress nowaday, and commercially used as a source of thermal energy for gas welding in the industry. The object of this paper is getting a V-I characteristic of Hydrogen-Oxygen Gas Generator using DC source. First, chemical analysis of electrolysis is conducted and the relation of electrical energy and then chemical energy is investigated through the faraday's laws.

• Proceedings of the KIPE Conference
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• 2001.07a
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• pp.312-315
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• 2001

Water-Electrolyzed gas is a mixed gas of the constant volume ratio 2:1 Hydrogen and Oxygen gained from electrolyzed water, and it has better characteristics in the field of economy, efficiency of energy, and environmental intimacy than acetylene gas and LPG used for existing gas welding equipment. So studies of Water-Electrolyzed gas are activity in progress nowadays, and commercially used as a source of thermal energy for gas welding in the industry. The object of this paper is V-I feature of Hydrogen -Oxygen Gas Generator using DC source

• Proceedings of the KAIS Fall Conference
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• 2001.05a
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• pp.124-128
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• 2001

A present semiconductor cleaning technology is based upon RCA cleaning technology which consumes vast amounts of chemicals and ultra pure water(UPW) and is the high temperature Process. Therefore, this technology gives rise to the many environmental issues, and some alternatives such as functional water cleaning are being studied. The electrolyzed water was generated by an electrolysis system which consists of anode, cathode, and middle chambers. Oxidative water and reductive water were obtained in anode and cathode chambers, respectively. In case of NH$_4$Cl electrolyte, the oxidation-reduction potential and pH for anode water(AW) and cathode water(CW) were measured to be +1050mV and 4.8, and -750mV and 10.0, respectively. AW and CW were deteriorated after electrolyzed, but maintained their characteristics for more than 40 minutes sufficiently enough for cleaning. Their deterioration was correlated with CO$_2$ concentration changes dissolved from air. It was known that AW was effective for Cu removal, while CW was more effective for Fe removal. The particle distributions after various particle removal processes maintained the same pattern. In this work, RCA consumed about 9$\ell$chemicals, while EW did only 400$m\ell$ HCI electrolyte or 600$m\ell$ NH$_4$Cl electrolyte. It was hence concluded that EW cleaning technology would be very effective for eliminating environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.

• Korean Journal of Food Science and Technology
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• v.44 no.5
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• pp.628-633
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• 2012

This study investigated the washing efficiency of electrolyzed water for the removal of microorganisms and pesticide residues from Chinese cabbage. Initial total bacteria and coliform counts were 6.64 and 3.56 log cfu/g respectively. After washing, total bacteria count of tap water (TW) were 5.97 log cfu/g and low alkaline electrolyzed water (LAlEW) and strong acidic electrolyzed water (SAcEW) were 1.63-4.67 log cfu/g. Especially SAcEW-100 was found to the most effective method of washing the cabbages. After washing, the coliform count was dramatically reduced. The removal rate of pesticide residues by NaClO treatment (36.93-50.13%) was greater than that of TW treatment (32.28-38.46%). The removal rate of LAlEW-100 and SAcEW-100 was 63.79 and 78.30% respectively, and was higher than those of TW and NaClO treatments. The vitamin C content of the Chinese cabbages after all treatments did not differ significantly. Consequentially, the electrolyzed water was found to be effective to remove bacteria and pesticide residues from Chinese cabbage without affecting quality.

• Journal of the Korean Society of Food Science and Nutrition
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• v.39 no.12
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• pp.1846-1853
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• 2010

The storage attributes of green juice prepared by washing Angelica keiskei with various washing solutions using air bubble method were investigated. The washing solutions were distilled water (DW), sodium hypochlorite electrolyzed water (SHEW), and slightly acidic electrolyzed water (SAEW). During storage at $4^{\circ}C$, the number of bacteria after 1 day was $>10^5$ CFU/mL when DW was used, whereas bacterial growth was $<10^5$ CFU/mL after 4 days when SHEW or SAEW was used. The pH and color were not changed, and the polyphenol content, electron donating ability and total antioxidant ability were decreased slowly with the increase of storage time. No significant difference in any of the measured properties was found among washing methods (p<0.05). Consequently, these results suggest the possible use of electrolyzed water for washing to enhance the shelf life of green juice with A. keiskei because SHEW and SAEW decreased bacterial growth without affecting other properties of the green juice.

• Food Science and Preservation
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• v.12 no.6
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• pp.558-564
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• 2005

This study was carried out to investigate the cleaning effect of sesame leaf, the sterilization effect and physicochemical properties, treated with various electrolyzed water. Initial physicochemical properties could be kept more than 1 month in electrolyzed oxidizing water(EW-1) of diaphragm type and 15 days in electrolyzed water(EW-2 and EW-3) of non-diaphragm system, there was no significant difference by storage temperature. 4 kinds of microorganism (initial total counts, $10^7\~10^9$ CFU/mL) were sterilized within $0.5\~1$ minutes by electrolyzed water. In fresh sesame leaves, total viable cell count and coliform group in the treatment of electolyzed water were decreased to about $2\~3$ log scale comparing non-treated ones. Especially Bacillus cereus was not detected until 13th day when treated with EW-l. Decaying ratio of sesame leaf appears on day 6 of storage in the untreated but the treatments of electrolyzed water has no sign until day 10 of storage. Change in color difference(${\Delta}E$) during storage was observed the treatments of electrolyzed low-alkaline water(EW-2) and electrolyzed neutral water(EW-3) were very desirable at the level $1\~2$ after day 13 of storage comparative to the untreated Change of Chlorophyll content was biggest decreased to 6.8 $mg\%$ on the untreated and decreased least to 8.35 $mg\%$ on EW-3 treated group on 13th day from initial value of $9.0\~10.3\;mg\%$ The overall sensory evaluation appeared most acceptable in the treatments of EW-2 and EW-3.

• Food Science and Preservation
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• v.14 no.5
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• pp.462-468
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• 2007

In this study, the quality effect of soaking in alum water, soaking in electrolyzed oxidizing water, and freezing during storage, on peeled chestnuts, were analyzed. When soaked in 0.1% (w/v) alum water, peeled chestnuts showed good characteristics in terms of weight loss, decomposition, and color preservation. However, texture and taste qualities rapidly decreased with increases in storage time. When soaked in twice their own weight of electrolyzed oxidizing water(pH 2.61, ORP 1,142 mV) for 10 min, the samples were preserved in an optimally edible condition. When frozen at $-10^{\circ}C$ for 5 min, the samples were suitable for use as material for processed chestnut produce, as was also the case when pretreatment with electrolyzed oxidizing water was employed.

• Korean Journal of Food Science and Technology
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• v.38 no.4
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• pp.506-512
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• 2006

We investigated changes in the physicochemical characteristics and functional components of the Saengsik cereal grains-milled rice, brown rice, glutinous rice, and barley- by washing with electrolyzed water. There were no changes in the composition of all cereal grains that was dried with hot-air and freeze-dried after being washed with electrolyzed water. The L and a values were not affected by drying in milled rice, brown rice, glutinous rice, or barley, but the b value increased in milled rice and glutinous rice-this increase was greater with hot-air drying than with freeze-drying. The dietary fiber content of the all cereals increased with hot-air drying. The niacin content decreased in all cereals; the extent of this change was greater with hot-air drying than with freeze-drying. The ${\beta}-glucan$ content of barley was higher in samples that underwent freeze-drying than in those treated by hot-air drying, but was not affected by washing with electrolyzed water. Thus, other than a change in color for milled and glutinous rice, no changes in the physicochemical characteristics and functional components these products were observed with freeze-drying. Data indicate that the electrolyzed water washing could be effectively used as pasteurization step in the uncooked cereal grains.

• Korean Journal of Food Science and Technology
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• v.31 no.4
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• pp.1029-1034
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• 1999

To enhance the cleaning and sterilization effect of cooled electrolyzed acid water on lettuce, several kinds of polysorbates were used at various concentrations in immersion washing process. In case of the treatment containing polysorbate 20, coliform count of lettuce was reduced to about 1/40 level of that in non-treated lettuce. The treatment containing polysorbate 60 did not show a significant sterilization effect. Otherwise, the total and coliform counts of lettuce during immersion in electrolyzed acid water containing 1 ppm of polysorbate 80 was reduced to about 1/300 and 1/1,700 level of those in non-treated one. And, the changes of ORP(oxidation-reduction potential), pH and color value of lettuce in electrolyzed acid water containing 1 ppm of polysorbate 80 were not quite different during 60 min. immersion, but HCIO content decreased from 10.28 ppm to 8.51 ppm after 20 min. immersion. Also, total and coliform count of lettuce immersed in electrolyzed acid water containing 1 ppm of polysorbate 80 was lower to about 1/1,800 after 20 min. and 1/5,550 after 30 min, compared with non-treated lettuce.