Fabrication of GHz-Band FBAR with AIN Film on Mo/SiO2/Si(100) Using MOCVD (Mo/SiO2/Si(100)기판 위에 MOCVD법으로 성장시킨 AIN박막이용 GHz대역의 FBAR제작에 관한 연구)
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- Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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- v.20 no.4
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- pp.7-11
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- 2006