• KSTLE International Journal
• /
• 제8권2호
• /
• pp.26-28
• /
• 2007

Si(100) surfaces were topographically modified i.e. the surfaces were patterned at micro-scale using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and microchannels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating a thin DLC film. The surfaces were then evaluated for their friction behavior at micro-scale in comparison with those of bare Si(100) flat, DLC coated Si(100) flat and uncoated patterned surfaces. Experimental results showed that the chemically treated (DLC coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the surfaces. This indicates that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro-Electro-Mechanical-Systems (MEMS).

• 한국군사과학기술학회지
• /
• 제17권3호
• /
• pp.289-295
• /
• 2014

The composition of bright flash device is a pyrotechnic mixture consisting of metal powder, oxidizer and additives. A pyrotechnic mixture of bright flash device generates a bright flash through burning after being ignited by initiator. The function of bright flash is to distract or incapacitate electro optical sensor systems and enemy eyes temporally. This study is to develop composition of pyrotechnic mixture of bright flash and to analyze the test results by considering intensity and efficiency of light.

• 한국재료학회지
• /
• 제29권6호
• /
• pp.363-370
• /
• 2019

The recent development of information and communication technologies brings new changes to automobile traffic systems. The most typical example is the advancement of dedicated short range communication(DSRC). DSRC mainly consists of an intelligent transportation system(ITS), an electronic toll collection system(ETCS) and an advanced traveler information system(ATIS). These wireless communications often cause unnecessary electromagnetic waves, and these electromagnetic waves, in turn, cause frequent system malfunction. To solve this problem, an absorber of electromagnetic waves is suggested. In this research, various materials, such as powdered metal and iron oxides, are used to test the possibility for an effective absorption of the unnecessary electromagnetic waves. The various metal powders are made into a thin sheet form by compositing through processing. The electromagnetic characteristics(complex permittivity, complex permeability) of the fabricated sheet are measured. As a result, we achieve -6.5 dB at 940 MHz(77.6 % absorption rate) with a 1.0 mm-thickness electromagnet wave absorber, and -9.5 dB at 940 MHz(88.8 % absorption rate) with a 2.0 mm-thickness absorber.

• 센서학회지
• /
• 제32권6호
• /
• pp.470-474
• /
• 2023

In this study, a diaphragm-type pressure sensor was developed using multi-layer(four-layer) graphene produced at 1 nm thickness by thermally transferring single-layer graphene produced by chemical vapor deposition (CVD) to a 6" silicon wafer. By measuring the gauge factor, we investigated whether it was possible to produce a pressure sensor of consistent quality. As a result of the measurement, the pressure sensor using multilayer graphene showed linearity and had a gauge factor of about 17.5. The gauge factor of the multilayer graphene-based pressure sensor produced through this study is lower than that of doped silicon, but is more sensitive than a general metal sensor, showing that it can be sufficiently used as a commercialized sensor.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2004년도 추계학술대회 논문집
• /
• pp.467-470
• /
• 2004

Diamond-Like Carbon (DLC) thin film is a semiconductor with high mechanical hardness, low friction coefficient, high chemical inertness, and optical transparency. DLC thin films have widespread applications as protective coatings and solid lubricant coatings in areas such as Hard Disk Drive (HDD) and Micro-Electro-Mechanical-Systems (MEMS). In this work, the wear characteristics of DLC thin films deposited on silicon substrates using a DC-magnetron sputtering system were analyzed. The wear tracks were measured with an Atomic Force Microscope (AFM). To identify the sp2 and sp3 hybridization of carbon bonds and other bonds Raman spectroscopy was used. The structural information of DLC thin films was obtained with Fourier transform infrared spectroscopy and wear tests were conducted by using a micro-pin-on-reciprocator tester. Results showed that the wear characteristics were dependent on the sputtering conditions. The wear rate could be correlated with the bonding state of the DLC thin film.

• 한국항공우주학회지
• /
• 제31권2호
• /
• pp.57-62
• /
• 2003

MEMS(미소전기기계시스템) 박막의 푸와송비 측정을 위한 미소굽힙기법이 제안되었다. 푸와송비 측정에 민감한 쌍원시편(두 개의 원모양)을 설계하고 표면미세가공 공정을 사용하여 제작하였다. 미소압입기로 하중을 가한 쌍원시편의 하중-변위 곡선을 분석하여 푸와송비를 측정할 수 있었다. 제안도니 미소굽힘기법은 표면미세가공에 적합하여 소자제작과정에서의 동시측정이 가능하고(in-situ measurement), 소자가 위치해 있는 작은 영영에서의 물성을 국부적으로 측정할 수 있는 장점이 있다. 제안된 기법을 검증하기 위하여 저압화학기상증착법에 의하여 증착된 2.3㎛ 다결정실리콘(Poly-silicon)의 푸와송비를 측정하였다. 실험에 사용된 다결정실리콘막의 푸와송비는 0.2569 이고 쌍원시편의 강성에 대한 측정표준편차는 2.66% 이었다.

• 한국진공학회지
• /
• 제17권1호
• /
• pp.67-72
• /
• 2008

본 연구에서는 염료감응 태양전지의 상대전극으로써 다중벽 탄소나노튜브를 사용하여 전기화학적 특성에 미치는 열처리 효과에 대해 연구하였다. 다중벽 탄소나노튜브는 실리콘 기판위에 철 촉매를 사용하여 열화학 기상증착법으로 합성하였다. 직경이 다른 다중벽 탄소나노튜브를 각각 성장하여 두 개의 샘플을 준비하였고 질소 분위기의 RTA(rapid thermal annealing) system에서 $900^{\circ}C$ 온도로 1분간 열처리 하였다. 다중벽 탄소나노튜브의 구조적, 전기적, 전기화학적 특성은 FE-SEM, Raman spectroscopy, 2-point probe station, electrochemical impedance spectroscopy (EIS)을 이용하여 측정하였다. 라만 스펙트럼 분석에서 열처리 한 다중벽 탄소나노튜브의 I(D)/I(G) ratio는 상당히 감소한 것을 확인하였으며, 다중벽 탄소나 노튜브 표면과 전해질과의 산화 환원 반응 특성에서는 열처리 전보다 열처리 후의 전해질과의 산화 환원 반응 특성이 향상된 것을 알 수 있었다. 표면에서의 반응 저항 또한 열처리 후의 다중벽 탄소나노튜브가 더 낮은 값을 나타내었다. 그 결과, 열처리 후의 다중벽 탄소나노튜브를 상대전극으로 사용하였을 때의 전기화학적 특성이 더 좋은 것을 확인하였다.

• 한국산업융합학회 논문집
• /
• 제26권5호
• /
• pp.875-884
• /
• 2023

Hydrogen infiltration into metals has been reported to induce alterations in their mechanical properties under load. In this study, we conducted CTOD (Crack Tip Opening Displacement) tests on steel specimens designed for use in liquid hydrogen storage systems. Electrochemical hydrogen charging was performed using both FCC series austenitic stainless steel and BCC series structural steel specimens, while CTOD testing was carried out using a 500kN-class material testing machine. Results indicate a notable divergence in behavior: SS400 test samples exhibited a higher susceptibility to failure compared to austenitic stainless steel counterparts, whereas SUS 316L test samples displayed minimal changes in displacement and maximum load due to hydrogen charging. However, SEM (Scanning Electron Microscopy) analysis results presented challenges in clearly explaining the mechanical degradation phenomenon in the tested materials. This study's resultant database holds significant promise for enhancing the safety design of liquid hydrogen storage systems, providing invaluable insights into the performance of various steel alloys under the influence of hydrogen embrittlement.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2007년도 춘계학술대회B
• /
• pp.3506-3511
• /
• 2007

The energy harvesting using smart materials has been extensively investigated to supply electric power to wireless sensor systems. In this paper, the energy harvesting using eddy current was studied with the integrated magnetic cantilever beam system. If a large conductive metal plate moves through a magnetic field which intersects perpendicularly to the sheet, the magnetic field will induce small rings of current which will actually create internal magnetic fields opposing the change. This eddy current that was induced in the coiled conductive sheet from the mechanical vibration was converted to chemical energy by charging batteries. The experimental results show that the eddy current generated the electric power up to max 31.2mW. Additionally the vibration reduction of the mechanical cantilever beam was observed by the energy dissipation in the electro-magnetic coupled system. The present result shows that the vibration level of the first natural frequency was reduced up to 7.7dB

• 대한용접접합학회:학술대회논문집
• /
• 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
• /
• pp.781-784
• /
• 2002

Adhesion phenomenon is more significant for smaller objects, because adhesional force is proportional to size of the objects while gravitational force is proportional to the third power of it. For the purpose of microassembly, theoretical understanding is required for the Adhesion phenomenon. Authors have developed a force measurement system in an ultra-high vacuum chamber of Auger electron spectroscopy. The force between arbitrary combination of materials can be measured at a pressure less than 100 nPa after and before Ar ion sputtering and chemical analysis for several atomic layers of the surface. The results are successfully interpreted with a theory of contact mechanics. Since surface energy is quite important in the interpretation, electronic theory is used to evaluate the surface energy. In the manipulation of small objects, the adhesional force is always attractive. Repulsive force is essential for the manipulation. It can be generated by Coulomb interaction. The voltage required for detachment is theoretically analyzed and the effect of boundary conditions on the detachment is obtained. The possibility and limitations of micro-manipulation using both the adhesion phenomenon and Coulomb interaction are theoretically clarified. Its applicability to nano-technology is found to be expected.