Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Development of Integration Pressure Sensor Using Piezoresistive Effect of Chemical Vapor Deposition (CVD) Produced Multilayer Graphene

CVD공정으로 제작된 멀티레이어 그래핀의 압저항 효과를 이용한 직접화된 압력센서 개발

  • Dae-Yun Lim (Green Energy & Nano Technology R&D Group, Korea Institute of Industrial Technology (KITECH)) ;
  • Tae Won Ha (Green Energy & Nano Technology R&D Group, Korea Institute of Industrial Technology (KITECH)) ;
  • Chil-Hyoung Lee (Green Energy & Nano Technology R&D Group, Korea Institute of Industrial Technology (KITECH))
  • 임대윤 (한국생산기술연구원 그린에너지나노연구그룹) ;
  • 하태원 (한국생산기술연구원 그린에너지나노연구그룹) ;
  • 이칠형 (한국생산기술연구원 그린에너지나노연구그룹)
  • Received : 2023.11.13
  • Accepted : 2023.11.23
  • Published : 2023.11.30
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Abstract

In this study, a diaphragm-type pressure sensor was developed using multi-layer(four-layer) graphene produced at 1 nm thickness by thermally transferring single-layer graphene produced by chemical vapor deposition (CVD) to a 6" silicon wafer. By measuring the gauge factor, we investigated whether it was possible to produce a pressure sensor of consistent quality. As a result of the measurement, the pressure sensor using multilayer graphene showed linearity and had a gauge factor of about 17.5. The gauge factor of the multilayer graphene-based pressure sensor produced through this study is lower than that of doped silicon, but is more sensitive than a general metal sensor, showing that it can be sufficiently used as a commercialized sensor.

Keywords

Acknowledgement

본 연구는 한국생산기술연구원 (Project No. EO230001)의 지원을 받아 작성하였습니다.

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