• 전기학회논문지P
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• 제58권4호
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• pp.516-520
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• 2009

Atmosphere Plasmas of Gas Discharge (APGD) have been used in plasma sources for material processing such as etching, deposition, surface modification, etc. This study is to investigate and understand the fundamental plasma discharge properties. Especially, $SF_6/N_2$ mixed gas would be used in power transformer, GIS (Gas insulated switchgear) and so on. In this paper, we developed a one dimensional fluid simulation model with capacitively coupled plasma chamber at the atmosphere pressure (760 [Torr]). 38 kinds of $SF_6/N_2$ plasma particles which are an electron, two positive ions (${SF_5}^+$, ${N_2}^+$), five negative ions (${SF_6}^-$, ${SF_5}^-$, ${SF_4}^-$, ${F_2}^-$, ${F_1}^-$), thirty excitation and vibrational particles for $N_2$ were considered in this computation. The $N_2$ gases of 20%, 50%, 80% were mixed in $SF_6$ gas. As the amount of $N_2$ gas was increased, the properties of electro-negative plasma moved toward the electro-positive plasma.

• Progress in Superconductivity
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• 제13권3호
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• pp.189-194
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• 2012

Studies on the development of high voltage superconducting apparatuses, such as transmission superconducting fault current limiters (SFCLs) and superconducting cables, have been performed worldwide. In this paper, a study on the electrical insulation characteristics of electro negative gas according to various pressures and utilization factors was conducted as a part of developing a high voltage superconducting coil with a sub-cooled nitrogen cooling system. Some gases such as helium (He), nitrogen ($N_2$), and sulfur hexafluoride ($SF_6$) are considered for pressurizing the sub-cooled nitrogen cooling system of high voltage SFCLs and superconducting cables. $SF_6$ is used to pressurize and enhance the dielectric performance of a superconducting system of a sub-cooled nitrogen cooling system for superconducting cables being developed in the Republic of Korea. In this paper, dielectric experiments on AC voltage, as well as lightning impulse voltage of $SF_6$, are conducted according to various utilization factors by using several kinds of sphere-to-plane electrode systems. As results, it is known that the empirical formulae of $SF_6$, known as an electro negative gas, are derived according to various pressures and utilization factors. Also, the appropriate pressure condition for designing a high voltage superconducting coil is found from the viewpoint of dielectric performance.

• 한국건설순환자원학회논문집
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• 제2권2호
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• pp.93-100
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• 2006

Building materials are trending toward environmental materials nowadays and the market share of those is growing. So those researches and developments for environmental property are proceeding now. The main properties of environmental products are far infrared emission, negative ion emission, electro magnetic wave shielding, and anti fungus, these products are used with shape of mortar, and spray on the finish material. But There are not much researches for the concrete, main material in construction field, with those functional properties. So in this research we evaluated slump, compressive strength and air content as basic properties for concrete using functional materials of sericite, wood pattern sand stone, carbon black and nanometric silver solution and functional properties like far infrared emission, negative ion emission, electro magnetic wave shielding, and anti fungus. The results were as follows. The most useful material in the functional materials was carbon black. Sericite and nanometric silver solution had a little effect on functional property, so it was difficult to apply to concrete, and wood pattern sand stone had a high functional property but low compressive strength, can be applied to a factory product. Anti fungus of the concrete using nanometric silver solution was not clear but if those specimens were aged in $CO_2$ gas for a long time it might apparent.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2002-2004
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• 2000

The discharge processes in electro-negative gases with non-uniform field gape are composed of the formation of pulsed streamer corona, the transition of the streamers into leader step, the temporal development of the leader channel, and the stepped propagation of leader through the gap. In this paper, the first corona inception characteristics in $SF_6$ gas and $SF_{6}-N_{2}$ mixtures, related to the propagation of loader and the space charge effect, were experimentally investigated with positive and negative transient impulse voltages.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.100-101
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• 2012

The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

• 한국물환경학회지
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• 제31권2호
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• pp.94-102
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• 2015

Electro-coagulation experiments were conducted with aluminum (Al) or iron (Fe) electrode in order to determine the optimal electrode material and operation conditions for algae removal. Al electrode showed higher removal rate of algae than Fe electrode because Al flocs have positive surface charges which electrostatically attract algae species having negative surface charges. Removal rate of algae and total phosphorous (T-P) was increased as current density and electrode area increases. It was also found that initial pH with neutral range was optimum for T-P removal by electro-coagulation. Bench-scale continuous flow experiments consisted of electro-coagulation reactor, agitation tank and settling tank were conducted. In electro-coagulation reactor, a large fraction of Al flocs were distributed to scum layer, due to the gas bubbles generated by electrolysis reaction. In agitation tank, most of Al flocs were settled and the optimal mixing intensity was found to be 50 rpm to achieve good settleability. The removal rate of algae was about 90-95%. Additionally, the removal rate of the T-P and COD was observed to be $73.8{\pm}8.0%$ and $75.0{\pm}3.8%$, respectively. Meanwhile, the removal rate of total nitrogen (T-N) was relatively low at only 24%.

• 전기학회논문지P
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• 제59권2호
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• pp.146-150
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• 2010

Distribution Function and Drift velocities for electrons in $SF_6$-Ar mixtures gases used by MCS-BEq algorithm has been analysed over the E/N range 30~300[Td] by a two term Boltzmann equation and by a Monte Carlo simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2[%] and 0.5[%] $SF_6$-Ar mixtures were measured by time-of-flight method. The results obtained in this work will provide valuable information on the fundamental behaviors of electrons in weakly ionized gases and the role of electron attachment in the choice of better gases and unitary gas dielectrics or electro negative components in dielectric gas mixtures. The results show that the deduced electron drift velocities agree reasonably well with theoretical for a rang of E/N values.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2006년도 춘계학술대회 논문집
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• pp.298-301
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• 2006

This paper describes the electron energy distribution function characteristics in $SF_6-Ar$ gas calculated for range of E/N values from $50\sim700[Td]$ by the Monte Carlo simulation(MCS) and Boltzmann equation(BE) method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained by time of flight(TOF) method. In this dissertation the results of the combined experimental and theoretical studies designed to understand and predict the spatial growth and transport coefficients for electrons in $SF_6$ and $SF_6-Ar$ mixtures have described. The ionization and attachment coefficients in pure $SF_6$ and $SF_6-Ar$ mixtures have been calculated over the range of 10$SF_6$ molecule and for Ar atom proposed by other authors. The results obtained in this work will provide valuable information on the fundamental behaviors of electrons in weakly ionized gases and the role of electron attachment in the choice of better gases and unitary gas dielectrics or electro negative components in dielectric gas mixtures.

• International Journal of Concrete Structures and Materials
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• 제18권3E호
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• pp.165-171
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• 2006

Environment-friendly materials are increasingly used as building construction materials nowadays, and the market share of those is growing. Accordingly, the research and developments in terms of environmental value are progressing steadily now. The main characteristics of environmental products are far-infrared radiation, negative-ion emission, electromagnetic wave shielding, and antimicrobial property. These products are often used in mortar and as spray on the finishing material. Nevertheless, there are hardly any research on the functional properties of concrete, the main material in construction field. Thus, we evaluated such basic properties of concrete as slump, compressive strength and air content while using such functional materials as sericite, wood-pattern sandstone, carbon black and nano-metric silver solution to focus on their functional properties like far-infrared radiation, negative ion emission, electro magnetic wave shielding, and antimicrobial activity in this research. The results indicated that the most useful material in the functional materials was carbon black. Sericite and nano-metric silver solution had a little effect on the functional property. Moreover, although wood-pattern sandstone had very high functional property, it exhibited too low compressive strength to be applied, to concrete as a factory product. Antimicrobial property of nano-metric silver solution in the concrete was not clear demonstrated, but if these specimens were to be aged in $CO_2$ gas for a long time, it might be apparent.

• 한국진공학회지
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• 제8권4A호
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• pp.482-489
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• 1999

AC PDP(P1asma Display Pane1)s use the mixture of inert gases to generate a discharge inside the display pixels. Impurities such as CO, $CO_2$ and OH inside discharge region may deteriorate the characteristics of PDP operation during long life time of PDP. Electro-negative gas such as CO can cause the sustain pulse amplitude to rise by attaching electrons which will play an important role in the earlier stage of the discharge. MgO film is used to protect the dielectric layer in AC PDP, and is in contact with the free space of display pixel where it is filled with the inert gas mixture. So, MgO film can be a main source of impurities. In this experiment, we observed the change of impurity generation of various MgO films which were deposited by different methods, by using QMS. (quadropole mass spectrometer) The main impurites were $H_2$, CO and $CO_2$. And with the comparison of the TPD (temperature programmed desorption) result, it can be understood that impurity gases are generated by sputtering of MgO surface not by outgassing. Deposition method had effects on the characteristics of the impurity generation. The MgO film manufactured by e-beam evaporation generated more amount of impurity gases than the MgO films manufactured by sputtering or ion-plating. And also heat treatment of MgO film after deposition decreased the magnitude of impurity gas generation.