• Title/Summary/Keyword: electric deposition

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Electrical Properties of PbS-CuS Thin Films Prepared by Chemical Bath Deposition (CBD 방법에 의한 PbS-CuS 박막의 전기적 특성)

  • 정수태;조종래;조정호;정재훈;김강언;조상희
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.5
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    • pp.423-429
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    • 2001
  • PbS, CuS and (Pb,Cu)S thin films were chemically deposited on glass from alkaline baths containing lead acetate, copper chloride, thiourea and triethanolamine. The deposition, optical, resistivity and thermal electric properties of these films were studied. PbS thin films showed a hexagonal structure and CuS thin films showed amorphous. The crystalline of (Pb,Cu)S thin films was obtained by heat treatment at 200$\^{C}$ and the deposition ratio of Pb to Cu showed 7:3. The energy gap of PbS, CuS and (Pb,Cu)S thin films were 1.7, 2.1 and 2.4 eV, respectively. Sheet resistance of PbS thin films was less affected on thermal annealing, but hose of (Pb,Cu)S and CuS thin films were more reduced about 3 orders of magnitude. All of those thin films indicated p type semiconductor in temperature ranging 30$\^{C}$ to 150$\^{C}$.

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Preparation of High Quality ZnO Thin Films by Separated Pulsed Laser Deposition (분리형 펄스 레이져 증착법을 이용한 ZnO 박막의 특성에 관한 연구)

  • Park, Sang-Moo;Lee, Boong-Joo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.9
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    • pp.818-824
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    • 2008
  • The Separated Pulsed Laser Deposition (SPLD) technique uses two chambers that are separated by a conic metallic wall with a central orifice. The pressures of ablation chamber and deposition chamber were controlled by the differential vacuum system. We deposited zinc oxide (ZnO) thin films by SPLD method to obtain high quality thin films. When the bias voltage of +500 V was applied between a substrate and an orifice, the ZnO thin film was deposited efficiently. The deposited ZnO thin film at ablation chamber gas pressure of Ar 5 mTorr showed the sharpest ultraviolet absorption edge indicatory the band gap of about 3.1 eV. ZnO thin films were deposited using effect of electric and magnetic fields in the SPLD method. E${\times}$B drift happened by an electric fields and a magnetic fields, activated plasma plume, as a result the film surface became very smooth. When the bias voltage of +500 V and magnet of 0,1 T were applied the ZnO thin films surface state showed high quality. Grain size was 41.99 nm and RMS was 0.84 nm.

Application of Electro-deposition Method for Crack Closing and Surface Improvement of Reinforced Concrete (철근콘크리트의 균열폐색 및 표면개선을 위한 전착의 응용)

  • 문한영;류재석
    • Journal of the Korea Concrete Institute
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    • v.11 no.6
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    • pp.79-88
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    • 1999
  • In this paper, the electro-deposition method for the rehabilitation of cracked concrete, based on the electro-chemical technique, is presented. The main purpose of this paper is to apply this technique to reinforced concrete members on land. After cracking with a specified load(crack width 0.5mm), 10$\times$10$\times$20cm concrete specimens with embedded steel bars were immersed in several solutions, then a constant current density between the embedded steel in concrete and an electrode in the solution was applied for 4~20 weeks. The results indicate that electro-deposits formed in this process are able to close concrete cracks and to coat the concrete surface and that formation of these electro-deposits is confirmed to have an effect of protection against detrimental materials. Therefore, it is demonstrated that the electro-deposition method can be usefully applied for the rehabilitation technique of concrete.

Electrophoretic Deposition of Ni Nano-particles for Self-repairing of Heat Exchanger Tubes

  • Lee, Gyoung-Ja;Pyun, Su-Il;Rhee, Chang-Kyu
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09b
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    • pp.1211-1212
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    • 2006
  • The electrophoretic deposition process of Ni nano-particles was employed for self-repairing of heat exchanger tubes. For electrophoretic deposition of Ni nano-particles on pitted Ni alloy specimen, a constant electric field of 100 V $cm^{-1}$ was applied to the specimen for 180 s in Ni-dispersed solution. It was found that as electrophoretic deposition proceeded, the size of the pit remarkably decreased due to the agglomeration of Ni nano-particles at the pit. This strongly suggests that the electrophoretic mobility of the charged particles is larger for the pit with a higher current value rather than outer surfaces with a lower current value.

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Superconducting film fabrication using field Assisted Electrophoresis (보조전계를 이용한 전기영동 초전도 막의 제작)

  • 소대화;전용우
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.2
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    • pp.157-162
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    • 2003
  • For fabricating high T$\sub$c/ superconducting deposition film, novel electrophoretic deposition (EPD) technique applied to deposit surface charged particles on metal substrate with only d.c field has been studied. However, the electric properties of superconducting film could not be improved easily by this way, because the particles of EPD film were usually deposited randomly on metal substrate without any directional orientation affected to its critical current density. For the purpose of obtaining partcle orientation on the EPD films, the new method modified by a.c. assisted field to the conventional electrophoresis system was investigated to improve the particle deposition density and to increase the contacting area among the particles with highly oriented particle deposition of BSCCO superconducting film.

A Study on the thermal and electrical stability of PVDF organic thin films fabricated by physical vapor deposition method. (진공증착법을 이용하여 제조한 PVDF 유기 박막의 열적.전기적 안정 특성에 관한 연구)

  • 박수홍;이덕출
    • Journal of the Korean Vacuum Society
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    • v.8 no.2
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    • pp.93-101
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    • 1999
  • The purposed of this paper is to investigate the electrical and thermal stability of Polyvinylidene fluoride(PVDF) organic thin films prepared by the vapor deposition method. The differential scanning calorimetry curve of the PVDF organic thin films prepared by increasing substrate temperature showed that the melting curve increased from $128^{\circ}C$ to $142^{\circ}C$. This result implied that the PVDF organic thin film prepared by increasing substrate temperature increased intermolecular force in the crystalline region. The anomalous properties in dielectric constant and dielectric loss at low frequency and high temperature were described for PVDF organic thin film containing impurity carriers. It was confirmed that in view of electric conductive characteristics the ohm's law is satisfied in the range of lower electric field and ln J was proportional to the electric field ln E as like the conventional property of ionic conduction in the range of higher electric field. It was confirmed that major carrier of conductivity was ions. The electrical stability was improved according to an increase of the substrate temperature. On the basis of this experimental result, it could be observed that the optimum temperature of substrate for the electrical and thermal stability was at $105^{\circ}C$.

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A Study on FTO-less Dye Sensitized Solar Cell with Ti Deposited Glass (티타늄이 증착된 유리를 사용한 FTO-less 염료감응형 태양전지에 관한 연구)

  • Park, Songyi;Seo, Hyunwoong;Son, Min-Kyu;Kim, Soo-Kyoung;Hong, Na-Yeong;Song, Jeong-Yun;Prabakar, Kandasamy;Kim, Hee-Je
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.62 no.2
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    • pp.208-212
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    • 2013
  • Dye-sensitized solar cells (DSCs) have taken much attention due to their low cost and easy fabrication method compare to silicon solar cells. But research on cost effective DSC is prerequisite for commercialization. Fluorine doped tin oxide (FTO) which have been commonly used for electrode substrate as electron collector occupied most percentage of manufacturing cost. Therefore we studied FTO-less DSC using sputtered Ti deposited glass as photoelectrode instead of FTO to reduce manufacturing cost. Ti films sputtered on the glass for different time, 5 to 20 minutes with decreasing sheet resistance as deposition time increases. A light source illuminated to counter electrode in order to overcome opaque Ti films. The efficiency of DSC (Ti20) made Ti sputtered glass for 20 min as photoelectrode was 5.87%. There are no significant difference with conventional cell despite lower manufacturing cost.

A Study on the Dielectric Properties and Electrical Conduction of PVDF Thin Films by Physical Vapor Deposition (진공 증착법으로 제작한 PVDF 박막의 유전 특성과 전기전도도에 대한 연구)

  • Gang, Seong-Jun;Lee, Won-Jae;Jang, Dong-Hun;Yun, Yeong-Seop
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.5
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    • pp.9-15
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    • 2000
  • The 3 ${\mu}{\textrm}{m}$-thick PVDF (polyvinylidene fluoride) thin film have been prepared using physical vapor deposition with electric field, and its FT-IR spectrum, dielectric property and electric conduction phenomenon have been investigated. Since the characteristic peaks are detected at 509.45 [$cm^{-1}$ /] and 1273.6 [$cm^{-1}$ /]in the FT-IR spectrum, we are confirmed that the $\beta$ -phase is dominant in the PVDF thin film. In the results of dielectric properties, the PVDF thin film shows anomalous dispersion, i.e. gradual decrease of dielectric constant with increase of frequency, and also that the dielectric absorption point changes from 200 Hz to 7000 Hz with increasing temperature of thin film, which is consistent with the Debye's theory. The activation energy ( $\Delta$H) obtained from temperature dependence of dielectric loss is 21.64 ㎉/mole. We confirm that the electric conduction mechanism of PVDF thin film is dominated by ionic conduction by investigating the dependence of the leakage current of the thin film on the temperature and the electric field.

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Effects of Strong Wind and Ozone on Localized Tree Decline in the Tanzawa Mountains of Japan

  • Suto, Hitoshi;Hattori, Yasuo;Tanaka, Nobukazu;Kohno, Yoshihisa
    • Asian Journal of Atmospheric Environment
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    • v.2 no.2
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    • pp.81-89
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    • 2008
  • The numerical simulation of wind and ozone ($O_3$) transport in mountainous regions was performed with a computational fluid dynamics technique. A dry deposition model for $O_3$ was designed to estimate $O_3$ deposition in complex terrain, and the qualitative validity of the predicted $O_3$ concentration field was confirmed by comparison with observed data collected with passive samplers. The simulation revealed that wind velocity increases around ridge lines and peaks of mountains. The areas with strong wind corresponded well with the sites of tree decline at high altitudes, suggesting that it is an important factor in the localization of tree/forest decline. On the other hand, there is no direct relationship between forest decline and $O_3$ concentration. The $O_3$ concentration, however, tends to increase as wind velocity becomes higher, thus the $O_3$ concentration itself may be a potential secondary factor in the localized decline phenomena. While the diffusion flux of $O_3$ is not related to localized tree decline, the pattern of advection flux is related to those of high wind velocity and localized tree decline. These results suggest that strong wind with large advection flux of $O_3$ may play a key role in the promotion of tree/forest decline at high mountain ridges and peaks.

Co-Deposition법을 이용한 Yb Silicide/Si Contact 및 특성 향상에 관한 연구

  • Gang, Jun-Gu;Na, Se-Gwon;Choe, Ju-Yun;Lee, Seok-Hui;Kim, Hyeong-Seop;Lee, Hu-Jeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.438-439
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    • 2013
  • Microelectronic devices의 접촉저항의 향상을 위해 Metal silicides의 형성 mechanism과 전기적 특성에 대한 연구가 많이 이루어지고 있다. 지난 수십년에 걸쳐, Ti silicide, Co silicide, Ni silicide 등에 대한 개발이 이루어져 왔으나, 계속적인 저저항 접촉 소재에 대한 요구에 의해 최근에는 Rare earth silicide에 관한 연구가 시작되고 있다. Rare-earth silicide는 저온에서 silicides를 형성하고, n-type Si과 낮은 schottky barrier contact (~0.3 eV)를 이룬다. 또한, 비교적 낮은 resistivity와 hexagonal AlB2 crystal structure에 의해 Si과 좋은 lattice match를 가져 Si wafer에서 high quality silicide thin film을 성장시킬 수 있다. Rare earth silicides 중에서 ytterbium silicide는 가장 낮은 electric work function을 갖고 있어 낮은 schottky barrier 응용에서 쓰이고 있다. 이로 인해, n-channel schottky barrier MOSFETs의 source/drain으로써 주목받고 있다. 특히 ytterbium과 molybdenum co-deposition을 하여 증착할 경우 thin film 형성에 있어 안정적인 morphology를 나타낸다. 또한, ytterbium silicide와 마찬가지로 낮은 면저항과 electric work function을 갖는다. 그러나 ytterbium silicide에 molybdenum을 화합물로써 높은 농도로 포함할 경우 높은 schottky barrier를 형성하고 epitaxial growth를 방해하여 silicide film의 quality 저하를 야기할 수 있다. 본 연구에서는 ytterbium과 molybdenum의 co-deposition에 따른 silicide 형성과 전기적 특성 변화에 대한 자세한 분석을 TEM, 4-probe point 등의 다양한 분석 도구를 이용하여 진행하였다. Ytterbium과 molybdenum을 co-deposition하기 위하여 기판으로 $1{\sim}0{\Omega}{\cdot}cm$의 비저항을 갖는 low doped n-type Si (100) bulk wafer를 사용하였다. Native oxide layer를 제거하기 위해 1%의 hydrofluoric (HF) acid solution에 wafer를 세정하였다. 그리고 고진공에서 RF sputtering 법을 이용하여 Ytterbium과 molybdenum을 동시에 증착하였다. RE metal의 경우 oxygen과 높은 반응성을 가지므로 oxidation을 막기 위해 그 위에 capping layer로 100 nm 두께의 TiN을 증착하였다. 증착 후, 진공 분위기에서 rapid thermal anneal(RTA)을 이용하여 $300{\sim}700^{\circ}C$에서 각각 1분간 열처리하여 ytterbium silicides를 형성하였다. 전기적 특성 평가를 위한 sheet resistance 측정은 4-point probe를 사용하였고, Mo doped ytterbium silicide와 Si interface의 atomic scale의 미세 구조를 통한 Mo doped ytterbium silicide의 형성 mechanism 분석을 위하여 trasmission electron microscopy (JEM-2100F)를 이용하였다.

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