• Title/Summary/Keyword: dummy pattern

Search Result 31, Processing Time 0.025 seconds

The Study of ILD CMP Using Abrasive Embedded Pad (고정입자 패드를 이용한 층간 절연막 CMP에 관한 연구)

  • 박재홍;김호윤;정해도
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2001.04a
    • /
    • pp.1117-1120
    • /
    • 2001
  • Chemical mechanical planarization(CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There have been serious problems in CMP in terms of repeatability and defects in patterned wafers. Since IBM's official announcement on Copper Dual Damascene(Cu2D) technology, the semiconductor world has been engaged in a Cu2D race. Today, even after~3years of extensive R&D work, the End-of-Line(EOL) yields are still too low to allow the transition of technology to manufacturing. One of the reasons behind this is the myriad of defects associated with Cu technology. Especially, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasive and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using Ce$O_2$ is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method for developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

  • PDF

A Variation of Health Service Utilization in Wonju City (시군통합 원주시 내의 의료서비스 이용의 변이)

  • Jin, Ki-Nam
    • Journal of Preventive Medicine and Public Health
    • /
    • v.29 no.2 s.53
    • /
    • pp.385-395
    • /
    • 1996
  • This study intends to examine the behavioral pattern and small area variations of health service utilization within Wonju city. We selected three small areas in Wonju city as the study site: Haksung-dong(central area of the city), Moonmak-myun (industrial area which is located 25km away from the center of the city), and Gure-myun (agricultural area which is located 32km away from the center). The data were collected by administering questionnaire interviews with 526 people in three areas. The questionnaire include the items on health service utilization behaviors, sociodemographic characteristics, health status, and perceptions. The statistical methods used for the analysis were ANOVA and hierarchical logistic regression. From the analysis, it was found that there was a variation of health service utilization by areas. Compared to those of other areas, the respondents from agricultural area showed a high probability of using health services. When respondents' personal characteristics were taken into account, the effect of dummy variables representing areas disappeared. Instead, the perceived health status became the prime factor of health service utilization. This result showed that the small area variations of health service utilization is due to the demand factor rather than the supply factor.

  • PDF

A Study on the Utilization of Arbitration for Promoting Trade in the South American Market (남미시장 교역 활성화를 위한 중재 활용방안에 관한 연구)

  • Ahn, Tae-Kun;Kim, Sung-Ryong
    • Journal of Arbitration Studies
    • /
    • v.26 no.2
    • /
    • pp.91-114
    • /
    • 2016
  • The purpose of this study is to promote trade between Korea and South American countries. Korea's trade with South America has decreased recently. This study analyzed the effects of arbitration on trade between Korea and South America. To this end, we conducted an analysis of the gravity model of trade between Korea and South America. The gravity model is a research method that is widely used to analyze the pattern of international trade. The dependent variables of the gravity model were trade in Korea and South America. The independent variables were GDP, population, and distance between Korea and South America. In addition, dummy variables were the FTA and whether to join the New York Convention or Washington Convention. Joining either Convention indicated the establishment of an international arbitration system. As a result, an arbitration system appeared to be effective in increasing trade. Depending on the results it shows the importance of utilizing the system of arbitration in South America. So this study analyzed the current status of arbitration in South America. To companies doing business in South America it provided the implications for an arbitration system there. Also it proposed a method for increasing trade for the Korean government and institutions.

The Study of Metal CMP Using Abrasive Embedded Pad (고정입자 패드를 이용한 텅스텐 CMP에 관한 연구)

  • Park, Jae-Hong;Kim, Ho-Yun;Jeong, Hae-Do
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.18 no.12
    • /
    • pp.192-199
    • /
    • 2001
  • Chemical mechanical planarization (CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There hale been serious problems in CMP in terms of repeatability and deflects in patterned wafers. Especial1y, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasives and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using CeO$_2$is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method fur developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

  • PDF

Intergenerational economic mobility in Korea using a quantile regression analysis (한국의 세대 간 경제적 이동성 - 분위수회귀분석을 중심으로 -)

  • Richey, Jeremiah;Jeong, Kiho
    • Journal of the Korean Data and Information Science Society
    • /
    • v.25 no.4
    • /
    • pp.715-725
    • /
    • 2014
  • This study uses a quantile regression analysis to investigate intergenerational economic mobility in Korea. The analysis is based on data from the 1st through 11th waves of the Korean Labor and Income Panel Study (KLIPS) conducted from 1998-2008. The household nature of the data allows us to link parents' incomes to children's incomes at different points in time. Using a quantile regression analysis instead of mean one reveals that the effect of fathers' earnings are different across the conditional distribution of sons' earnings, particularly being larger on the upper quantile than on the lower quantile. After controlling effect of sons' college education by including a dummy variable for the degree, however, the pattern among quantile effects for fathers' earnings is no longer clear. Instead a new pattern emerges that education has a much larger effect on the upper quantiles than on the lower ones. Using nonparametric estimates of conditional density curves based on the quantile regression results, we derive some interesting features in graphical forms, which are not obvious in numerical analysis.

An Analysis of Human Body Shape of Junior High School Girls by Using Plan Potogrammetry (평면사진 계측에 의한 여중생의 체형분석)

  • Kim Kyung Sook;Lee Choon Kye
    • Journal of the Korean Society of Clothing and Textiles
    • /
    • v.14 no.3 s.35
    • /
    • pp.208-215
    • /
    • 1990
  • The purpose of this study is to provide the fundamental data of a dummy design for more suitable ready made clothing by making a pattern of somatic types and analyzing their morphological characteristics in accordance with different pattern of somatic types. The side view silhouettes of 90 junior high school girls of age $13\~16$ in seoul urban area were measured by means of the plan photographing and the low data were examined by principal component analysis, while the principal component analysis was applied and three components were extracted and then interpreted to explain to variation of the form of the body. Using three components respectively the cluster analysis was carried out and the subject classified into 4 cluster The following outcomes are obtained. . The results of principal component analysis of this study would be turned out the three; 1) The first principal component shows the degree of erectness or stoop of the figure. 2) The second principal component was a stature length or a growth rate. 3) The third principal component was the obesity component. 2. The results of cluster analysis by using three principal component analysis would be turned out the four cluser; 1) Cluster 1 ($29\%$ of the total) is characterized with lower stature. 2) Cluster 2 ($21\%$ of the total) is characterized with backward somatotype, and the highest leg. 3) Cluster 3 ($23\%$ of the total) is thicked back of neck. 4) Cluster 4 ($27\%$ of the total) is characterized with forward somatotype, and highest stature, height.

  • PDF

A Research on the Actual Condition of Silver Apparel Brands (실버의류 기성복업체의 실태조사 연구)

  • Chung Sham-Ho;Kim Soo-A
    • Journal of the Korean Society of Costume
    • /
    • v.56 no.4 s.103
    • /
    • pp.15-32
    • /
    • 2006
  • The purpose of this study is to research on the actual condition of production and selling in silver apparel market. For the questionnaire, 19 women's wear brands which were in higher ranking of sales in boutiques and madame-zone of department stores were selected. Pattern makers of each brand were questioned about 40 items for this research. The results of the questionnaire were as follows: 1) According to the result of the survey on the made-to-wear production of 19 ready-to-wear manufacturers, there was the gap was in ages between the target and the real consumer. Consumers of these brands were older and aged more broadly than their target ages. 2) Most of the consumers of silver-zone has thick waists, common heights, fat shapes. Custom-made clothes are ordered in many cases because of the big abdomen(50.0%) and H-shape(58.3%) of a somatotype. The body size variation of user population is needed for a good fit. 3) All brands(100%) of this research are using KS standards in the label of clothing, but they don't use these data in their production by reason of unawareness and distrust about these data. These inconsistency between the label and the real size of products may cause a confusion when consumers buy ready-to-wear. 4) Silver apparel manufacturers have need of anthropometry information and dummy(78.6%) suitable for their target consumers to increase their satisfaction about their apparel fit.

Impact of Country Risks in Countries along the 'One Belt and One Road' on China's Overseas Direct Investment ('일대일로' 연선국가의 국가 리스크가 중국 해외직접투자에 미치는 영향)

  • Choong Bae Lee;Jong Chul Lee;Yongqiang, Xu
    • Korea Trade Review
    • /
    • v.46 no.3
    • /
    • pp.119-133
    • /
    • 2021
  • After 'Zhou Chuchu (走出去, Go global)' in the early 2000s, and with the 'One-to-One Road' initiative in 2012, China's Overseas Foreign Direct Investment (OFDI) has increased significantly, resulting in high academic interest. The purpose of this study is to analyze the impact of national risks of home country on China's OFDI by using data from 49 countries along the 'One-to-One Road' between 2007 and 2018, and to compare the factors of national risks that attract investment from the world. As a result of the study, market economy companies' perceptions of national risks are mostly negative, so risk acts as a deterrent to investment. On the other hand, national risks of home countries have had positive effects on China's OFDI, which would mean that Chinese investors, mostly state-owned enterprises have a high tendency to invest in regions or countries with high national risks. Other economic factors, such as the size of the investment partner country's market, GNI per capita, and trade openness, had a positive (+) effect, and natural resources had a negative (-) effect on China's OFDI. As dummy variables, FTA, which is an economic and diplomatic factor, SCO, which is a political and diplomatic factor, and bordering which is a geographical factor, were also found to have a positive (+) effect. This study implies the investment pattern of China's OFDI is due to the characteristics of China's unique geopolitical and economic system, and it is judged to be influenced by political and strategic factors, especially the aspects led by state-owned enterprises.

Demand Pattern of the Global Passengers: Sea and Air Transport (글로벌 여객의 해상과 항공운송에 대한 수요패턴)

  • Mo, Soo-Won
    • Journal of Korea Port Economic Association
    • /
    • v.27 no.1
    • /
    • pp.1-11
    • /
    • 2011
  • The main purpose of this paper is to estimate the impact of exchange rate and economic business activity on the passengers' demand for international transportation. The demand pattern depends upon the transport vehicles that the global passengers take. The global passengers' demand for transportation is modelled as exchange rate, industrial production and seasonal dummy variables. The seasonality is found in both water and air, but the former is far greater than the latter. All series span the period January 1990 to December 2008. The empirical results of this paper reveal that the income elasticity of sea transport is greater than that of air one, all of which are positive. The study also shows that the exchange rate has an significant impact on the demand for air transport, whereas it is insignificant in water transport. The impulse response function indicates that passengers increase steadily before peaking seven to eight months after the shocks to economic business activity and decline very slowly to its pre-shock level. The air passengers also respond negatively to the shocks in exchange rate and the impacts of exchange rate shock seem to decrease relatively slowly, while the water passengers respond positively after six months. The industrial production shocks remain above equilibrium for more than twenty four months, while the exchange rate shocks remain below equilibrium for more than twenty four months. Boosted by improved economic conditions worldwide, international tourism has recovered faster than expected from the impacts of the global financial crisis and economic recession of late 2008 and 2009. These facts suggest that the demand of global water transport has the high possibility of growing steadily and continuously.

The Effect of Controlling Shareholders md Related-Party Transactions on Firm Value (대주주 소유구조 및 연계거래 여부가 기업가치에 미치는 영향에 관한 실증연구)

  • Lee, Won-Heum
    • The Korean Journal of Financial Management
    • /
    • v.23 no.1
    • /
    • pp.69-100
    • /
    • 2006
  • We examine the effect of controlling shareholders ownership structure and related-party transactions(hereafter 'RPT') of publicly traded companies on their firm values during the post-IMF period. In the multivariate regression analysis using control variables such as firm size, capital structure, investment, dividend, profitability and industry dummy that might affect firm values, we find that there exists a significant negative relation between the controlling shareholders ownership structure and firm values proxied by Tobin's Q, and also find that there is a significant negative relation between RPT and the firm values. Those evidences seem to support the controlling shareholders' expropriation hypothesis. Additionally, we investigate the relation between ownership structure and rim value through the piecewise regression analysis. We find a significant 'inverse' U-shape pattern between the controlling shareholders ownership structure and firm values. This result is quite different from the existing literatures that have usually reported an U-shape pattern. In conclusion, the findings in this study do not support the notion that the ownership concentration to the controlling shareholders does negatively affect the firm values monotonically.

  • PDF