• Journal of Electrical Engineering and Technology
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• 제12권1호
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• pp.356-362
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• 2017

This paper presents a robust position controller for a one degree-of-freedom (DOF) mechanical system using only position measurement. In order to alleviate the performance degradation owing to various uncertainties, a two-stage design method is studied by employing a proportional integral observer (PIO). In the first stage, a baseline backstepping controller is designed for a nominal system without accounting for uncertainties. The PIO is developed for estimating both the velocity information for the backstepping controller and an equivalent input disturbance for a feedforward compensation using the estimated uncertainty. It is shown that the estimation errors with the proposed PIO can be made arbitrarily small in a finite time. If the system suffers from undesirable actuator nonlinearities, however, it might be necessary to estimate the velocity and the disturbance with different rates of convergence. The proposed method combines the predesigned backstepping controller and dual PIOs to reduce mechanical vibrations as well as steady-state errors. The performance of the proposed method is tested through comparative computer simulations and experiments using a laboratory prototype.

• 한국소음진동공학회논문집
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• 제13권12호
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• pp.965-971
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• 2003

고밀도, 고정밀의 정보저장기를 실현하기 위해서 높은 서보대역이 요구되고 있다 이러한 요구조건을 만족시키기 위해서 이단구동시스템이 도입되었다. 이 시스템은 기존의 VCM을 조동구동기로, 추가적인 밀리엑츄에이터를 미동구동기로 사용하는 것이다. 이를 위해 우리는 압전형 밀리엑츄에이터를 서스펜션 부에 설계하였다 이러한 시스템의 제어를 위하여 PQ 제어 방법을 도입하였으며, 이 방식은 이중입력/단일출력 시스템을 두개의 단일 입출력 시스템으로 단순화시키는 것이다. 이 논문은 PQ 제어 방식을 적용시켜 설계하고. 설계된 제어기의 성능 평가로써 기존의 HDD의 PES을 받아서 외란제어 능력을 평가하는 것이다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 춘계학술대회논문집
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• pp.1570-1576
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• 2000

하드디스크의 고용량화 추세에 따라 헤드의 정밀한 위치제어를 위한 큰 대역폭의 트랙추적 서보 시스템의 필요성이 대두되고 있다. 이에 작은 신호의 마찰을 제거하고 대역폭을 높이는 방법 중 하나인 2단구동기 트랙추적제어를 실시하여 큰 대역폭의 트랙 추적 서보시스템을 구성하는 방법에 대해 연구하였다. 2단구동기는 조동구동기(기존 하드디스크의 VCM)와 전단형 압전체를 부착한 미동구동기로 구성하였다. 미동구동기의 Hinge구조는 트랙 방향의 공진 주파수와 출력변위를 만족시키기 위한 구조로 설계하였다. 제어기는 notch filter와 PI 보상기를 사용하는 조동구동기와 notch filter와 PD 보상기를 사용하는 미동구동기를 다양한 구조로 구성한 것들을 비교하였다. 2단구동기는 VCM만을 사용하여 트랙 추적을 할 때보다 트랙 편심을 잘 추적하며, 기계적 공진과 VCM의 비선형성에 의해 제한된 대역폭을 개선시키는 효율적인 방법임을 확인하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.37.3-37
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• 2001

The quality of a precision product, in genera, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the workpiece in the process. Recently the positioning accuracy level employed for some of precision product has reached the level of submicron and long range of motion is required. For example, for 1GDRM lithography, 20nm accuracy and 300nm stroke needs. This paper refers to the lithography stage especially fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM(Linear DC Noter) is used and for fine or VCM is used ...

• 융복합기술연구소 논문집
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• 제1권2호
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• pp.6-15
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• 2011

This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 추계학술대회 논문집 전기물성,응용부문
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• pp.65-68
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• 2001

본 연구에서는 코움 드라이브에 비해 구동력은 크고 평행 판 구동 방식에 비해서는 선형 특성이 우수하며 안정된 구동거리가 증가하는 특성을 갖는 새로운 정전력(electrostatic force) 구동 방식을 제안한다. 운동 전극과 고정 전극을 기울어지게 배치하여 전극 면에 평행한 정전력 $F_x$와 전극 면에 수직인 정전력 $F_y$의 합력 $F_e$ 방향으로 전극을 운동시킴으로써 정전력의 방향과 전극의 운동 방향을 일치시킨다. 제안된 구동방식의 정전력 모델을 이용한 해석 결과 코움 드라이브에 비해서는 구동력이 50 % 이상 크며 평행 판 구동에 비해서는 안정된 구동 거리가 10 - 30 % 이상 증가하는 구동 특성을 얻을 수 있었다. 제안된 구동방식을 이용하여 HDD의 트랙 방향 저장 밀도를 증가시키기 위한 듀얼스테이지 서보(dual-stage servo)에 사용 될 마이크로 액츄에이터 (microactuator)를 설계하고 SoG(Silicon on Glass) 공정을 이용하여 제작하였다.

• 전기학회논문지
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• 제58권9호
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• pp.1802-1808
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• 2009

A fault detection observer with finite time convergence characteristics(FT_FDO) is proposed and applied to a fault detection isolation system for a dynamic control system. The FT_FDO is a kind of dual state-observer scheme that provides with the state estimates insensitive to a specified fault and the corresponding fault estimate. The state estimates are processed to get the residual that will be logically compared with other residuals to detect and isolate the fault of interest, and the fault estimate may be used for fault compensation. The FDIS employing the FT_FDOs can be considered to be a multiple observer schemes(MOS) in which FT_FDOs are parallelly driven to generate a set of residuals to be compared each other. Due to the finite time convergence characteristics of the FT_FDO, the predetermined detection delay can be considered in the design stage of FDIS so that any fault of interest can be detected and identified in that time. It evidently resolves a well known difficulty of threshold selection owing to the transient responses of the fault detection observers(FDO) employed in FDIS. An FDIS is constructed for instruments(2-sensor, 1-actuator) in an inverted pendulum control system, and simulations are performed to show the performance of the FDIS and fault tolerant control system.