• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 추계학술대회논문집
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• pp.237-242
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• 2000

The areal recording density of HDD(Hard Disk Drive) has been increasing by about 60% a year. In order to achieve high areal density, less track pitch is expected and more servo bandwidth is required. Dual stage actuator and servo controller for HDD have been suggested for achieving high track density as a possible solution. Dual-loop servo system is generally classified into a two-input-two-output system, but if we use an estimator for a two-input-two-output system, it can be converted into two input one output system. Since we can't control the dual stage servo system by the classical method, it requires a special technique; for example, Parallel Loop System, Master-Slave Loop System, Decoupled Master-Slave Loop System, and Dual Feedback Loop System. In this paper, we performed experimental evaluations of several types of control algorithm. Further experiments will be made in the future.

• 한국정밀공학회지
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• 제16권3호통권96호
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1991년도 추계학술대회 논문집 학회본부
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• pp.175-178
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• 1991

The drive system of servo motor is requested to have robustness of disturbance and parameter variation. However, the dynamics of PMSM drive change significantly by forced disturbance and parameter variation. Moreover, the state error caused by them should be suppressed completely and rapidly. In this paper, the vector-control system of PMSM using dual adaptive control loop is investigated. In the proposed system, linear adaptive control loop rapidly recovers the state error caused by both disturbance and parameter variation. In the dual adaptive control loop, the inner loop reduces the system sensitivity of parameter variation and disturbance, and the outer loop suppresses the state error caused by them completely. The proposed servo system is verified through a computer simulations and experimental results.

• 반도체디스플레이기술학회지
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• 제6권1호
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• pp.31-36
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• 2007

Effect of coulomb friction and backlash on the single loop position control has been studied for the precision position control. We have showed the limit cycle on the single loop system which used a ball screw that had the backlash. Also, we have made an inner loop with a classical velocity and torque controller which was forcing the current of d axis to be zero by using a permanent-magnet synchronous motor and composed the outer loop with linear encoder for sensing a position of the loader. Also, we have used least squares fit(LSF) observer for reducing noise when we got velocity from position outputs. We have shown a good result by using the dual loop through simulation and experiment.

• 한국생산제조학회지
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• 제22권2호
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• pp.206-215
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• 2013

In this paper, a synchronization control technique of dual-servo motor driven press system is proposed. An independent cascade PID control technique has been applied to the conventional press system for advancement of control stability. However, it is not easy to reduce synchronous error using the independent cascade PID control technique when some different load disturbances are involved in each motor. The eccentric error of the slide caused by the problem degrade the control performance of the BDC(Bottom Dead Center). In order to achieve reduction of the synchronous error between two servo motors and accurate position control simultaneously, a new control scheme comprised with cascade PID control loop and cross-coupling loop is proposed. In simulation using Matlab SIMULINK, the AC servo system is designed. The control performance of proposed technique is compared with conventional control technique to the model of AC servo system. Also, the sub-scale model of dual-servo motor driven press system which can replicate the slide motion is constructed for experimental verification for the performance of the proposed control technique. The cross-coupling control technique reveals more precise and stable performances in the position and synchronization controls.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2001년도 추계학술대회논문집 I
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• pp.46-51
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• 2001

To reach high areal density, less track pitch is expected and more servo bandwidth is required. One approach to overcoming the problem is by using dual stage servo system. In this system, a voice coil motor (VCM) is used as the primary stage while a milliactuator is used as the secondary stage. We have suggested new milliactuator based on the shear mode of piezoelectric elements to drive the head suspension assembly. In this paper, we introduce controller design method, PQ method. PQ method reduces the controller design problem for DISO(dual-input/single-output) systems to two standard controller design problems for SISO(single-input/single-output) problems. The first part of PQ method directly address the issue of actuator output contribution, and the second part allows the use of traditional loop shaping to achieve the overall system performance. This paper shows how to employ the PQ method to meet aggressive close-loop performance specifications for a disk drive system with a VCM and piezoelectric milliactuator.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 학술대회 논문집 정보 및 제어부문
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• pp.738-740
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• 2004

The disturbance observer is effective in enhancing the performance of position control in high speed optical disk drive systems(ODDS). It is known that error based modified disturbance observer (EM-DOB) is more effective structure than general DOB. It has a simple structure and realization, but it loses robustness. We propose a dual modified disturbance observer(Dual mDOB). It consists of internal loop EM-DOB and external loop DOB. Those loops are designed for different objects. We see that the dual mDOB is an effective method for tracking performance.

• 한국소음진동공학회논문집
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• 제13권12호
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• pp.965-971
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• 2003

고밀도, 고정밀의 정보저장기를 실현하기 위해서 높은 서보대역이 요구되고 있다 이러한 요구조건을 만족시키기 위해서 이단구동시스템이 도입되었다. 이 시스템은 기존의 VCM을 조동구동기로, 추가적인 밀리엑츄에이터를 미동구동기로 사용하는 것이다. 이를 위해 우리는 압전형 밀리엑츄에이터를 서스펜션 부에 설계하였다 이러한 시스템의 제어를 위하여 PQ 제어 방법을 도입하였으며, 이 방식은 이중입력/단일출력 시스템을 두개의 단일 입출력 시스템으로 단순화시키는 것이다. 이 논문은 PQ 제어 방식을 적용시켜 설계하고. 설계된 제어기의 성능 평가로써 기존의 HDD의 PES을 받아서 외란제어 능력을 평가하는 것이다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.2087-2092
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• 2005

Using disturbance observer (DOB) is effective in enhancing the performance of dynamic system in the presence of disturbances. Recently the definition of disturbance has been expanded to modeling uncertainty including parameter variation, internal disturbance. Various structures of DOB have been proposed to improve sensitivity of system for better disturbance rejection performance. However in the case of improvement of sensitivity function, it tends to bring poor transient response due to cross-coupling and phase lag. Furthermore it could be very sensitive to measurement noise due to increased peak of complementary sensitivity function. In this paper, a dual disturbance observer (Dual-DOB) is proposed to reduce the effect of such cross-coupling. It is possible for us to improve the sensitivity function with additional external DOB with hardly affecting complementary sensitivity function. Thus it is able to have robustness against measurement noise. Since we are able to design DOBs of internal and external loop independently, we could prevent transient response quality from degrading while improving the sensitivity function. The proposed Dual-DOB is applied to a commercial optical disk drive tracking servo system. The experimental result shows that the Dual-DOB is an effective method in rejecting the disturbance as well as improving the tracking performance.