• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2009년도 춘계학술대회 논문집
• /
• pp.252-253
• /
• 2009

In this study, the deformation and etch characteristics of ArF and EUV photoresists were compared in a dual frequency superimposed capacitively coupled plasma (DFS-CCP) etcher systems using $CF_{4}/O_{2}/Ar$ and $CF_{4}/CHF_{3}/O_{2}/Ar$ mixture gas chemistry which are typically used for BARC open and $Si_{3}N_{4}$ teching chemistry, respectively. Etch rate of the resists tend to increase with low-frequency source power ($P_{LF}$) and high-frequency source ($f_{HF}$). The etch rate of ArF resist was hgither than that of EUV resist.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2010년도 제39회 하계학술대회 초록집
• /
• pp.132-132
• /
• 2010

In the nano-scale Si processing, patterning processes based on multilevel resist structures becoming more critical due to continuously decreasing resist thickness and feature size. In particular, highly selective etching of the first dielectric layer with resist patterns are great importance. In this work, process window for the infinitely high etch selectivity of silicon oxynitride (SiON) layers and silicon nitride (Si3N4) with EUV resist was investigated during etching of SiON/EUV resist and Si3N4/EUV resist in a CH2F2/N2/Ar dual-frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters, such as the CH2F2 and N2 flow ratio and low-frequency source power (PLF). It was found that the CH2F2/N2 flow ratio was found to play a critical role in determining the process window for ultra high etch selectivity, due to the differences in change of the degree of polymerization on SiON, Si3N4, and EUV resist. Control of N2 flow ratio gave the possibility of obtaining the ultra high etch selectivity by keeping the steady-state hydrofluorocarbon layer thickness thin on the SiON and Si3N4 surface due to effective formation of HCN etch by-products and, in turn, in continuous SiON and Si3N4 etching, while the hydrofluorocarbon layer is deposited on the EUV resist surface.

• 한국재료학회지
• /
• 제29권9호
• /
• pp.547-552
• /
• 2019

In the present study, the thermal conductivity of a silicon nitride($Si_3N_4$) thin-film is evaluated using the dual-wavelength pump-probe technique. A 100-nm thick $Si_3N_4$ film is deposited on a silicon (100) wafer using the radio frequency plasma enhanced chemical vapor deposition technique and film structural characteristics are observed using the X-ray reflectivity technique. The film's thermal conductivity is measured using a pump-probe setup powered by a femtosecond laser system of which pump-beam wavelength is frequency-doubled using a beta barium borate crystal. A multilayer transient heat conduction equation is numerically solved to quantify the film property. A finite difference method based on the Crank-Nicolson scheme is employed for the computation so that the experimental data can be curve-fitted. Results show that the thermal conductivity value of the film is lower than that of its bulk status by an order of magnitude. This investigation offers an effective way to evaluate thermophysical properties of nanoscale ceramic and dielectric materials with high temporal and spatial resolutions.

• 한국항공우주학회지
• /
• 제33권3호
• /
• pp.93-98
• /
• 2005

과학기술위성2호는 2007년 12월에 발사될 예정이다. 이 위성의 주관측기는 DREAM으로서, 주요 임무는 지구 또는 대기로부터 발생되는 복사에너지를 라디오파 대역에서 관측하는 것이다. 이 외 과학기술위성2호는 과학기술 실험용기기로서 정밀디지탈 태양센서, 2중헤드 별센서 등이 탑재되며, 과학기술위성2호의 자세제어 및 모멘텀 덤핑용 과학기술실험용 탑재체로서 펄스형 플라즈마 추력기가 실린다. 본 논문에서는 관측기기 및 과학기술실험용 탑재체 등의 운용모드를 고려한 과학기술위성2호의 운용모드에 따른 전력의 수요예측에 대하여 연구하였고, 임무를 수행하는 동안 안정적인 전력을 공급하기위한 필요전력에 대하여 분석하였다.

• 열처리공학회지
• /
• 제21권5호
• /
• pp.235-243
• /
• 2008

Ni-C composite films were prepared using a combination of microwave plasma CVD and ion beam sputtering deposition working in a codeposition way. The structure of these films was characterized by energy-dispersive X-ray diffraction (EDXRD), transmission electron microscopy (TEM) and Raman spectroscopy. It was found that a nickel carbide phase, $Ni_3C$ (hcp), formed as very fine crystallites over a wide temperature range when Ni-C films were deposited at low $CH_4$ flow rates. The thermal stability of this nonequilibrium carbide $Ni_3C$ was also studied. As a result, the $Ni_3C$ carbide was found to decompose into nickel and graphite at around $400^{\circ}C$. With high $CH_4$ flow rates (> 0.2 sccm), the structure of the Ni-C films became amorphous. The formation behavior of the carbide and amorphous Ni-C phases are discussed in relation to the electrical resistivity of the films.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
• /
• 한국우주과학회 2011년도 한국우주과학회보 제20권1호
• /
• pp.27.3-27.3
• /
• 2011

The plasmasphere is filled with the ions and electron transported mostly from the mid-latitude ionosphere. In the topside ionosphere where the $O^+$ ions are still major ions, the $O^+$ ions are in chemical equilibrium with the $H^+$ ions and exchange their charges with each other's parent atoms with similar rates in both reactions. During the day, the newly produced $H^+$ ions flow upward to fill the plasmasphere while they flow downward and contribute to the maintenance of the ionospheric density at night under the geomagnetically quiet condition. The ionosphere and plasmasphere are coupled by these plasma fluxes and therefore strongly affect each other. In order to study these coupling we utilized the plasma density measurements from JASON satellite. This satellite measures vertical total electron content (TEC) from the ground to the satellite orbit (about 1336 km) and slant TEC from the satellite orbit to much higher GPS satellites by using the on-board dual-frequency altimeter and GPS receiver, respectively. The former measurement can represent the ionospheric TEC while the latter can represent the plasmaspheric TEC in the equatorial region. We compared these data with different seasons, solar activities and local times, and the results will be presented.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2002년도 춘계학술대회 논문집 디스플레이 광소자 분야
• /
• pp.45-48
• /
• 2002

Poly(3-hexylthiophene) or P3HT based organic thin film transistor (OTFT) array was fabricated on flexible poly carbonate substrates and the electrical characteristics were investigated. As the gate dielectric, a dual layer structure of polyimide-$SiO_2$ was used to improve the roughness of $SiO_2$ surface and further enhancing the device performance and also source-drain electrodes were $O_2$ plasma treated for improvement of the electrical properties, such as drain current and field effect mobility. For the active layer, polymer semiconductor, P3HT layer was printed by contact-printing and spin-coating method. The electrical properties of OTFT devices printed by both methods were evaluated for the comparison. Based on the experiments, P3HT-based OTFT array with field effect mobility of 0.02~0.025 $cm^{2}/V{\cdot}s$ and current modulation (or $I_{on}/I_{off}$ ratio) of $10^{3}\sim10^{4}$ was fabricated.

• The Korean Journal of Physiology and Pharmacology
• /
• 제23권6호
• /
• pp.459-466
• /
• 2019

Dipeptidyl peptidase (DPP)-4 inhibitors, or gliptins, are a class of oral hypoglycemic drugs that have been widely used as a second-line treatment for type 2 diabetes. Gliptins, which were introduced for clinical use a decade ago, have been shown to be beneficial against nonalcoholic fatty liver disease/nonalcoholic steatohepatitis (NASH) in animals and humans. Cenicriviroc (CVC), a dual antagonist of C-C chemokine receptor type 2 and 5, is currently under investigation against NASH and fibrosis. It was previously discovered that evogliptin (EVO) reduces hepatic steatosis in diet-induced obese animals but the effectiveness of EVO on NASH remains unexplored. Here, we compared the effectiveness of EVO and CVC against NASH and fibrosis in mice fed a high-fat and high-fructose diet (HFHF). Biochemical and histological analyses showed that mice fed a HFHF for 20 weeks developed severe hepatic steatosis and inflammation with mild fibrosis. Administration of EVO (0.2% wt/wt) for the last 8 weeks of HFHF feeding significantly reduced hepatic triglyceride accumulation, inflammation, and fibrosis as well as restored insulin sensitivity, as evidenced by lowered plasma insulin levels and the improvement in insulin tolerance test curves. Treatment of mice with CVC (0.1% wt/wt) inhibited hepatic inflammation and fibrogenesis with similar efficacy to that of EVO, without affecting hepatic steatosis. CVC treatment also reduced plasma insulin concentrations, despite no improvement in insulin tolerance. In conclusion, EVO administration efficiently ameliorated the development of NASH and fibrosis in HFHF-fed mice, corroborating its therapeutic potential.

• International Journal of Industrial Entomology and Biomaterials
• /
• 제39권1호
• /
• pp.34-38
• /
• 2019

In this study, we investigated the effect of silkworm, and its by-products on exercise endurance, muscle mass, and fatigue recovery using ICR mice model. Powders of silkworm, pupae, dongchunghacho, and silk powder were suspended in water and feed to mice for 2 weeks. The forced swimming time was increased by 4.3, 4.1 and 2.8 seconds after silkworm, pupae, and dongchughacho administration compared to DW fed group. Increases in exercise ability were achieved by difference mechanism according to feeding materials. Pupae increased muscle mass by 129% compared with the control group which may effect on elongation of swimming time. Dongchunghacho improved the plasma concentrations of fatigue markers such as creatinine, blood urea nitrogen (BUN), and D-lactate. Silkworm administration showed dual effect, the muscle mass induction (114% vs. control) and anti-fatigue (plasma creatinine, BUN, and D-lactate were 63, 75, and 78% vs. con) effect which contributed most elongated swimming time. In conclusion, silkworm and its by-products including pupae and dongchunghacho with the predominant protein and bioactive components improved muscle mass and showed anti-fatigue effect which could promote exercise performance ability.

• The Journal of Advanced Prosthodontics
• /
• 제2권1호
• /
• pp.7-13
• /
• 2010

Although most researchers agree that platelet-rich plasma (PRP) is a good source of autogenous growth factors, its effect on bone regeneration is still controversial. The purpose of this study was to evaluate whether increasing angiogenic factors in the human PRP to enhance new bone formation through rapid angiogenesis. MATERIAL AND METHODS. In vitro, the human platelets were activated with application of shear stress, $20\;{\mu}g/ml$ collagen, 2 mM $CaCl_2$ and 10U thrombin/$1\;{\times}\;10^9$ platelets. Level of vascular endothelial growth factor (VEGF) and platelet microparticle (PMP) in the activated platelets were checked. In the animal study, human angiogenic factors-enriched PRP was tested in 28 athymic rat's cranial critical bone defects with $\beta$-TCP. Angiogenesis and osteogenesis were evaluated by laser Doppler perfusion imaging, histology, dual energy X-ray densinometry, and micro-computed tomography. RESULTS. In vitro, this human angiogenic factors-enriched PRP resulted in better cellular proliferation and osteogenic differentiation. In vivo, increasing angiogenic potential of the PRP showed significantly higher blood perfusion around the defect and enhanced new bone formation around acellular bone graft material. CONCLUSION. Angiogenic factor-enriched PRP leads to faster and more extensive new bone formation in the critical size bone defect. The results implicate that rapid angiogenesis in the initial healing period by PRP could be supposed as a way to overcome short term effect of the rapid angiogenesis.