• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.04b
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• pp.192-197
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• 1993

반도체 기억소자의 급격한 발전추세에 대응하기 위해서는 노광(exposure) 장비의 증첩정밀도 (overlay accuracy)가 같이 개선되어야 한다. 본 연구에서는 64M ERAM 제조를 목적으로개발된 스텝 퍼(stepper) 시스템의 성능평가 항목 중에서 증첩정밀도에대한 측정방법 및 현재까지의 연구결과를 기술하였다. 제작된 웨이퍼 정렬계는 off-axis 및 TTL 광학계와 이들 정렬신호에 따라 움직이는 웨이 퍼 구동계로 구성되어 있다. off-axis 광학계는 화상처리와 회절의 두 가지 방식이 가능하도록 설계 제작되었으며, TTL 광학계는 dual beam interferometric method를 이용하였다. 본 실험의 결과는 웨이퍼 정렬계의 특성을 평가한 것으로서, 현재까지 off-axis 정렬 방법만으로 얻은 증첩정밀도는 0.26-0.29$\mu$m (m+3 $\sigma$ )이다. 따라서 여기에 이미 제작되어 있는 TLL 정렬광학계를 추가로 사용하면 0.1 $\mu$m 이하의 정밀도에 이를 것으로 예측된다.

• 제어로봇시스템학회:학술대회논문집
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• 1993.10a
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• pp.565-569
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• 1993

In this paper, a specified number of actuators are selected from a given set of admissible actuators. The selected set of actuators is likely to use minimum control energy while required output variance constraints are guaranteed to be satisfied. The actuator selection procedure is an iterative algorithm composed of two parts; an output variance constrained control and an input variance constrained control algorithm. The idea behind this algorithm is that the solution to the first control problem provides the necessary weighting matrix in the objective function of the second optimization problem, and the sensitivity information from the second problem is utilized to delete one actuator. For variance constrained control problems, by considering a dual version of each control problem an efficient algorithm is provided, whose convergence properties turn out to be better than an existing algorithm. Numerical examples with a simple beam are given for both the input/output variance constrained control problem and the actuator selection problem.

• Proceedings of the Korea Concrete Institute Conference
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• 2006.05a
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• pp.438-441
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• 2006

Since the behavior of structural members subjected to blast load shows different responses, the effect of impulse as well as peak load should be considered in the damage analysis. The threshold on P-I diagram that causes specific damage level divides the diagram into the failure zone and the non-failure zones. In this study, numerical analysis is performed based on single-degree-of-freedom (SDOF) techniques to generate rational P-I diagram considering material non-linearity and dual failure modes (flexure and direct shear) of RC beams. From the comparison with existing test results it is concluded that proposed numerical method is good to derive failure mode of RC beam under blast load.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.1427-1429
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• 2008

In this paper, an illumination system design using two lamps was proposed to improve the brightness of the projector. The proposal is based on the results from optical simulation. The prism array was applied to maintain the same optical properties, such as brightness distribution for the divergence angle and the composed beam size of the system. These were compared to those of the one UHP lamp system. The brightness of the two-lamp system, having a panel size of 0.74" and an f/2.9, increased by a factor of 1.7 when compared to the brightness of one UHP lamp system.

• Proceedings of the Optical Society of Korea Conference
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• 1991.06a
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• pp.45-45
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• 1991

We describe a simple method for obtaining a narrow dip with subnatural linewidth in Doppler-free laser spectroscopy. The method is based on detecting the absolute magnitude, ｜Re[$\chi$NL($\omega$-$\omega$o)]｜, of the dispersive component (real part) of the nonlinear susceptibility induced by the pump beam, and the line shape recorded therefore exhibits a fully resolved technique and a dual phase lock-in amplifier, we have demonstrated the dip as narrow as 3 MHz in the laser-induced birefringence spectrum of the Na D1 line (natural linewidth 10 MHz). Possible spectroscopic applications are considered.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.04a
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• pp.441-441
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• 2012

Noise and vibration performance plays an important role in the development of rotating components, such as engines, drivelines, transmission systems, compressors and pumps. The presence of torsional vibrations and other specific phenomena require the dynamic behaviour of systems and components to be designed accurately in order to avoid comfort and durability related problems. This paper provides an overview of the instrumentation and challenges related to torsional vibration testing. The accuracy and performance of five measurement techniques (high-speed incremental encoder, dual beam laser interferometer, zebra tape, zebra disc, direct pulse measurements with magnetic probe) is investigated by measurements on a Fiat Punto 1.4 liter engine. The potential sources of error are discussed to explain the inaccuracies of each technique.

• Proceedings of the Korea Information Processing Society Conference
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• 2005.11a
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• pp.599-602
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• 2005

본 논문에서는 기존 단극성 원 빔 레이저 방식의 단점을 개선하기 위하여 듀얼 빔을 응용한 차량용 레이저 레이더 시스템을 설계하엿다. 양극성 m-시퀀스를 두 개의 레이저 파장에 할당함으로써 2차원 OOC(orthogonal optical codes)와 유사한 특성을 갖도록 하고 수신부에서 두 개의 단극성 신호를 차동구조를 이용하여 양극성 신호로 합성하는 방법을 이용, SNR 개선 방안을 제시한다. 시뮬레이션 결과, 제안한 듀얼 빔 방식이 기존의 원 빔 단극성 신호방식의 레이져 레이더 시스템에 비해 3dB의 SNR 개선이 가능함을 확인하였다.

• Proceedings of the KSRS Conference
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• 2007.10a
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• pp.25-28
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• 2007

Precise digital elevation model (DEM) is an important issue in coastal area where DEMs in a time series are especially required. Although LIDAR system is useful in coastal regions, it is not yet popular in Korea mainly because of its high surveying cost and national security reasons. Recently, precise coastal DEM have been made using radar interferometry, waterline method. One of these methods, Spaceborne imaging radar interferometry has been widely used to measure the topography and deformation of the Earth. We acquired ALOS PALSAR FBD mode (Fine Beam Dual) data for evaluating the quality of interferograms and their coherency. The purpose of this study is construction of DEM using the ALOS PALSAR data using radar interferometry and analysis of surface characteristics by coherence and magnitude map over the Ganghwado and Siwha tidal flats and near coastal lands.

• The Bulletin of The Korean Astronomical Society
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• v.36 no.2
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• pp.60.1-60.1
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• 2011

We present the preliminary results of the pilot observations for the fringe survey at 43 GHz with the VLBI Exploration of Radio Astrometry (VERA). The main goals of the fringe survey are to establish a full list of phase calibrators for the VERA dual-beam astrometric observations, and for the KVN multi-frequency phase referencing observations. We performed two 24 hours experiments as a pilot observation to test the feasibility of the fringe survey. Each source from a list of 220 sources has been observed in one scan for 2 minutes. 67 sources were detected with the SNR threshold of 3.5. The correlated flux densities of the detected sources are presented in four ranges of projected baseline lengths.

• Korean Journal of Optics and Photonics
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• v.8 no.1
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• pp.26-30
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• 1997

A wide dynamic range heterodyne interferometer scheme using intermode beat between a stabilized, dual frequency He-Ne laser beam has been applied for a measurement of optical thickness of an optical medium. Resolution of the optical thickness measurement is about $\pm$ 1.74 ${\mu}{\textrm}{m}$. Using this technique, we are able to determine the optical thickness of an organic dye film. We also obtain a map of the optical thickness variations over a surface of the film