• Title/Summary/Keyword: double exposure

Search Result 217, Processing Time 0.031 seconds

Very Fine Photoresist Pattern Formation using Double Exposure of Optical Wafer Stepper (Optical Stepper의 이중노광에 의한 미세한 포토레지스트 패턴의 형성)

  • 양전욱;김봉렬;박철순;박형무
    • Journal of the Korean Institute of Telematics and Electronics A
    • /
    • v.31A no.7
    • /
    • pp.69-75
    • /
    • 1994
  • A very fine pattern formation process using double exposure is investigated, which can overcome the resolution limit of optical wafer stepper. The very fine pattern can be obtained by moving the edge profile of large pattern by means of moving the stepper stage. The simulation results show that the light transmittance decrease bellow 9%, and the contrast increase to 16.6% for the 0.3$\mu$m photoresist pattern exposeed by the double exposure using i-line wafer stepper. And the experimental results show that fine photoresist pattern as short as 0.2$\mu$m can be obtained without a loss of photoresist thickness. Also, it proves that the depth of focus for 0.3$\mu$m pattern is longer than $1.5\mu$m. And, the very fine negative photoresist pattern was formmed by using the double exposure technique and the image reversal process.

  • PDF

Improved dynamic range of the camera image by using double-exposure image processing method for mobile phone cameras

  • Jang, Won-Woo;Kwak, Boo-Dong;Ha, Joo-Young;Kang, Bong-Soon;Lee, Gi-Dong
    • Journal of information and communication convergence engineering
    • /
    • v.7 no.3
    • /
    • pp.323-329
    • /
    • 2009
  • In this paper, we propose the improvement method of the camera images regardless of exposure environments. By using a double-exposure method, we could improve camera images with clear recognition. We applied the improvement method on the mobile phone. For the feasibility of the proposed algorithm, we compared simulated camera images with the proposed method to conventional images by using auto-exposure image. Experimental results are also shown in this paper.

Temperature Field Measurements of Hele-Shaw Convection Cell Using a Holographic Interferometry (홀로그래픽 간섭계를 이용한 Hele-Shaw Convection Cell 내부 온도장 측정)

  • Kim, Seok;Lee, Sang-Joon
    • Proceedings of the KSME Conference
    • /
    • 2001.06e
    • /
    • pp.530-535
    • /
    • 2001
  • Variations of temperature field in a Hele-Shaw convection cell (HSC) were measured using a holographic interferometry with varying Rayleigh number. Experimental results show a steady flow pattern at low Rayleigh numbers and a time-dependent periodic flow at high Rayleigh numbers. Especially, the period of oscillation at $Ra = 6.35{\times}10^6$ was 62 seconds. Two different measurement methods of holographic interferometry, double-exposure method and real-time method, were employed to measure the temperature field variations of HSC convective flow. In the double-exposure method, unwanted waves can be eliminated and reconstruction images are clear, but transient flow structure cannot be observed clearly. On the other hand, transient flow can be observed and reconstructed well using the real-time method. However, the fringe patterns reconstructed by the real-time method contain more noise, compared with the double-exposure method. The two holographic interferometer techniques employed complementary in this study were proved to be useful for analyzing the temperature field variations of unsteady thermal fluid flows.

  • PDF

Temperature Field Measurements of Hele-Shaw Convection Cell Using a Holographic Interferometry (홀로그래픽 간섭계를 이용한 Hele-Shaw Convection Cell 내부 온도장 측정)

  • Kim, Seok;Lee, Sang-Joon
    • Transactions of the Korean Society of Mechanical Engineers B
    • /
    • v.25 no.11
    • /
    • pp.1624-1631
    • /
    • 2001
  • Variations of temperature field in a Hele-Shaw convection cell (HSC) were measured using a holographic interferometry with varying Rayleigh number. Experimental results show a steady flow pattern at low Rayleigh numbers and a time-dependent periodic flow at high Rayleigh numbers. Especially, the period of oscillation at Ra = 6.35 $\times$ 10$^{6}$ was 62 seconds. Two different measurement methods of holographic interferometry, double-exposure method and real-time method, were employed to measure the temperature field variations of HSC convective flow. In the double-exposure method, unwanted waves can be eliminated and reconstruction images are clear, but transient flow structure cannot be observed clearly. On the other hand, transient flow can be observed and reconstructed well using the real-time method. However, the fringe patterns reconstructed by the real-time method contain more noise, compared with the double-exposure method. The two holographic interferometer techniques employed complementary in this study were proved to be useful fur analyzing the temperature field variations of unsteady thermal fluid flows.

Application of Holographic Interferometry and 2-D PIV for HSC Convective Flow Diagnostics (Hele-Shaw Cell 내부의 열유동 해석을 위한 홀로그래픽 간섭계와 2차원 PIV의 적용)

  • Kim, Seok;Lee, Sang-Joon
    • Proceedings of the KSME Conference
    • /
    • 2003.11a
    • /
    • pp.682-687
    • /
    • 2003
  • The variations of temperature and velocity fields in a Hele-Shaw convection cell (HSC) were investigated using a holographic interferometry and 2-D PIV system with varying Rayleigh number. To measure quasisteady changes of temperature field, two different measurement methods of holographic interferometry; double-exposure method and real-time method, were employed. In the double-exposure method, unwanted waves can be eliminated effectively using digital image processing technique and the reconstruction images are clear, but transient flow structure cannot be reconstructed clearly. On the other hand, transient convective flow can be reconstructed well using the real-time method. However, the fringe patterns reconstructed by the real-time method contain more noises, compared with the double-exposure method. Experimental results show a steady flow pattern at low Rayleigh numbers and a time-dependent periodic flow structure at high Rayleigh numbers. The periodic flow pattern at high Rayleigh numbers obtained by the real-time holographic interferometer method is in a good agreement with the PIV results.

  • PDF

PRODUCTION OF IL-6 AND IL-8 IN HUMAN FIBROBLASTS STIMULATED WITH BACTERIAL TOXINS (세균독소로 자극시킨 사람 섬유아 세포에서의 Interleukin-6와 Interleukin-8의 생성)

  • Hong, Si-Young;Kim, Uk-Kyu;Kim, Jong-Ryoul;Chung, In-Kyo;Yang, Dong-Kyu;Lee, Seong-Geun;Kim, Kwang-Hyuk
    • Maxillofacial Plastic and Reconstructive Surgery
    • /
    • v.21 no.4
    • /
    • pp.332-344
    • /
    • 1999
  • Cytokines are hormone-like proteins which mediate and regulate inflammatory and immune responses. Interleukin-6 (IL-6) is involved in the final differentiation of B cells into antibody-producing cells. Interleukin-8 (IL-8) is a neutrophil chemotactic factor that plays an important role in the recruitment of neutrophil to inflammatory loci. Inflammatory mediators by cells in the gingiva have been implicated in the initiation and progression of periodontitis and oral infection. The purpose of this study was conducted to investigate the effect of lipopolysaccharide (LPS), staphylococcus enterotoxin B (SEB) on production of IL-6 and IL-8 by human gingival and facial dermal fibroblasts. Primary cultured human gingival and facial dermal fibroblasts were incubated with LPS (0.01, 0.1, $1.0{\mu}g/ml$), SEB (0.01, 0.1, $1.0{\mu}g/ml$) or LPS $(0.1{\mu}g/ml)$ plus SEB $(0.1{\mu}g/ml)$. Culture supernatants were collected at 24, 48, and 72 hrs and assessed for IL-6 and IL-8 production by enzyme-linked immunosorbent assay. IL-6 production in gingival fibroblasts stimulated with LPS was higher than that with SEB. IL-6 production by double exposure with LPS plus SEB was amplified in comparison with single exposure of LPS or SEB. IL-6 production in facial dermal fibroblasts was increased only by stimulation with a high concentration of LPS $(1.0{\mu}g/ml)$. Its production in facial dermal fibroblasts by exposure with SEB was decreased in comparison with control, nontreated cells. Therefore, gingival fibroblasts showed higher sensitivity than facial dermal fibroblasts in response to low concentration of LPS. Also, IL-6 production by double exposure with LPS plus SEB was amplified in comparison with single exposure of LPS or SEB. IL-8 production in gingival fibroblasts was enhanced greatly only by stimulation of high concentration of LPS $(1.0{\mu}g/ml)$. That by exposure with SEB was increased only in 24 hrs cultivation. IL-8 production by double exposure with LPS plus SEB was amplified in comparison with single exposure of LPS or SEB. IL-8 production in facial dermal fibroblasts was decreased by LPS and increased only in 48 hrs cultivation by SEB. IL-8 production by double exposure with LPS plus SEB was enhanced only in 48 hrs cultivation in comparison with single exposure of LPS or SEB. therefore, IL-6 and IL-8 production were released at various quantities according to bacterial toxin applied and site of fibroblast harvested. These results suggest that gingival fibroblasts may be concerned with IL-6 and IL-8 related inflammatory response more than facial dermal fibroblasts.

  • PDF

A Study on the Holographic Process for Photonic Crystal Fabrication (광자결정 제작을 위한 홀로그라피 공정 연구)

  • Yeo, Jong-Bin;Yun, Sang-Don;Lee, Hyun-Yong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.20 no.8
    • /
    • pp.726-730
    • /
    • 2007
  • Two dimensional photonic crystals (2D PCs) have been fabricated by a double exposure holographic method using a He-Cd laser with a wavelength of 442nm. The arrays of the 2D PCs exhibit variable lattice structures from square to triangle according to a change of rotating angle $({\gamma})$ for double exposure beams. In addition, the period and filling factor of PCs as well as the forms (dot or antidot) could be controlled by experimental conditions. $A l.18-{\mu}m-thick$ resist was spin-coated on Si substrate and the 1st holographic exposure was carried out at incident angle $({\theta})$ of $11^{\circ}$. Then the sample was rotated to ${\gamma}=45^{\circ}{\sim}90^{\circ}$ and the 2nd holographic process was performed at ${\theta}=11^{\circ}$. The variation of diffraction efficiency during the exposure process was observed using a He-Ne laser in real time. The images of 2D PCs prepared were analyzed by SEM and AFM. We believe that the double holographic method is a tool suitable to realize the 2D PCs with a periodic array of large area.

Double Exposure Laser Interference Lithography for Pattern Diversity using Ultraviolet Continuous-Wave Laser

  • Ma, Yong-Won;Park, Jun Han;Yun, Dan Hee;Gwak, Cheongyeol;Shin, Bo Sung
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.26 no.2
    • /
    • pp.9-14
    • /
    • 2019
  • The newly discovered properties of periodic nanoscale patterns have increasingly sparked research interests in various fields. Along this direction, it is worth mentioning that there had been rare studies conducted on interference exposure, a method of creating periodic patterns. Additionally, these few studies seemed to validate the existence of only exact quadrangle shapes and dot patterns. This study asserted the formation of wavy patterns associated to using multiple exposures of the ratio of the first exposure intensity to the second exposure intensity. Such patterns were designed and constructed herein via overlapping of two Gaussian beams relative to certain rotation angles, and with a submicron structure fabricated based on a 360-nm continuous-wave laser. Results confirmed that the proposed double exposure laser interference lithography is able to create circular, elliptical and wavy patterns with no need for complex optical components.

Hand-Arm Vibration and Noise Levels of Double-Hammer Type and Oil-Pulse Type Impact Wrenches in Automobile Assembly Lines (자동차 조립라인에서 이중-헴머형(Double-hammer type) 임펙트 렌치와 오일-펄스형(Oil-pulse type)임펙트 렌치 에어공구의 국소진동가속도 및 소음수준)

  • Jeung, Jae-Yeal;Kim, Jung-Man
    • Journal of Korean Society of Occupational and Environmental Hygiene
    • /
    • v.5 no.2
    • /
    • pp.147-159
    • /
    • 1995
  • This study was conducted to introduce fundamental data of hand-arm vibration and noise exposure levels with impact wrenches(double-hammer impact wrenches and oil-pulse impact wrenches) used in automobile assembly lines considering the process variables and tool variables. In studing, products per day, required time screwing the bolts or nuts per bolts or nut were considered as process variables, and capacity of bolts or nuts, air consumptions per minute, tool weights, RPM were considered as tool variables. Hand-arm vibration levels of 3 axis in each hand were measured using the instruments compling with ISO/DIS 5349 and noise levels were measured using a noise logging dosimeter. The results were as follows : 1. Required time to screwing the bolt or nut by oil-pulse impact wrenches is shorter than double-hammer impact wrenches but total daily exposure time of oil-pulse impact wrenches was higher than double-hammer impact wrenches because the number of bolts or nuts per cycle was many. 2. Oil-pulse impact wrenches have been used to screwing the large bolt or nut in comparing with double-hammer impact wrenches and required time to screwing the bolts or nuts were shorter than double-hammer impact wrenches because oil-pulse impact wrenches were using high RPM and large air consumption per minute. Noise level of oil-pulse impact wrenches was 8 dB(A) lower than double-hammer impact wrenches. 3. Dominant hand-arm vibration levels of double-hammer impact wrenches in each hand were $8.24m/sec^2$ of Zh axis in right hand and $9.60m/sec^2$ of Xh axis in left hand. Dominant hand-arm vibration level of oil-pulse impact wrenches in each hand was $2.59m/sec^2$ of Xh axis in right hand and $3.23m/sec^2$ of Yh axis in left hand. 4. In double-hammer impact wrenches, corresponding hand-arm vibration levels of Xh, Yh, Zh axis in left hand were higher than hand-arm vibration levels of right hand in 3 axis. In oil-pulse impact wrenches, Xh axis of right, Yh axis of left, Zh axis of left were higher than the corresponding hand-arm vibration levels of Xh, Yh, Zh axis in right and left hand. 5. Correlation coefficients among Xh, Yh. Zh axis of right and left hand hand-arm vibration levels in double-hammer impact wrenches and oil-pulse impact wrenches were commonly high in Yh axis and correlation coefficients of Yh axis in double-hammer impact wrenches and oil-pulse impact wrenches were 0.76 and 0.86,respectively. 6. As a measure repetitiveness, plotting total daily exposure time with the number of bolts or nut per cycle, direct correlation was shown between repetitiveness and hand-arn vibration exposure, and correlation coefficient between the number of bolts or nut per cycle and total daily exposure time in double-hammer impact wrenches, oil-pulse impact wrenches were 0.84 and 0.50, respectively. 7. Considering the total acceleration level and tool variables in double-hammer impact wrenches and oil-pulse impact wrenches, air consumption in right hand, and bolt or nut capacity in left hand were commonly the variable that explainability was high. Considering the noise and tool variables in double-hammer impact wrenches and oil-pulse impact wrenches, air consumption per minute was commonly the variable that explainability was high.

  • PDF

Diagnosis of HSC Convective Flow Using a Digital Holographic Interferometry and PIV System (디지털 홀로그래픽 간섭계와 PIV를 이용한 Hele-Shaw Cell 내부 열유동 해석)

  • Kim, Seok;Lee, Sang-Joon
    • Transactions of the Korean Society of Mechanical Engineers B
    • /
    • v.28 no.4
    • /
    • pp.493-499
    • /
    • 2004
  • Variations of temperature and velocity fields in a Hele-Shaw convection cell (HSC) were investigated using a holographic interferometry and 2-D PIV system with varying Rayleigh number. To measure quasi-steady variation of temperature field, two different measurement methods of holographic interferometry, double-exposure method and real-time method, were employed. In the double-exposure method, unwanted waves were eliminated effectively using a digital image processing technique. The reconstructed images are clear, but transient flow cannot be reconstructed clearly. On the other hand, transient convective flow can be reconstructed well using the real-time method. However, the fringe patterns reconstructed by the real-time method contain more noises, compared with the double-exposure method. Experimental results show a steady flow pattern at low Rayleigh numbers and a time-dependent periodic flow structure at high Rayleigh numbers. The periodic flow pattern at high Rayleigh numbers obtained by the real-time holographic interferometer method is in a good agreement with the PIV results.