• 한국환경과학회지
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• 제21권10호
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• pp.1181-1186
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• 2012

We studied the ozone concentrations generated by low-temperature dielectric barrier discharge plasma reactor after adding air and phytoplankton to control the ozone concentrations in seawater. We also examined the numbers of bacteria and Vibrio spp. after treatment using the plasma reactor. As the airflow rate was increased, more ozone was removed. Although marked variation in the ozone decrease was observed with and without airflow, the rate of ozone removal did not increase proportionately with the airflow rates. The ozone concentration decreased with increasing organic matter and time. The amount of organic matter seems to be an important factor decreasing the dissolved ozone concentration in liquid. The ozone concentration was 0.07, 0.32, 1.28, and 2.3 mg/L when operating the plasma reactor for 30, 60, 180, and 300 s, respectively; i.e., the ozone concentration increased with the reactor operating time. The initial numbers of bacteria and Vibrio spp. were 800 and 480 CFU/mL, respectively. After operating the plasma reactor at a flow rate of 6 L/min for 30 s, no bacteria or Vibrio spp. were detected. The disinfection effect of this plasma reactor seems to be superior to that of a conventional ozone generator.

• 상하수도학회지
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• 제11권2호
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• pp.94-104
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• 1997

Ozone Treatment is getting a common process in a water treatment plant all over the nation. Especially an advanced water treatment using ozone and biofiltration has been a typical method in the regions where using the Nak-Dong River as a drinking water source. The effectiveness of ozone treatment in a continuous flow contact system was investigated with sand filtered water of the Nak-dong River. Pilot tests of the experiments were performed three times of the year like June, August, and October 1995. Most degradable organics of sand filtered water were oxidized in the first and second contact chamber of the system. Ozone treatment was effective for the removal of UV254 absorbance. However, Noticeable removals of $KMnO_4$ demand and TOC(Total Organic Carbon) were occurred when their concentrations exceeded about 5mg/l. The organics causing $KMnO_4$ demand and TOC were degraded into lower molecular matter in an early stage of the ozone contact in the system. Dissolved oxygen concentration was increased after ozone treatment.

• 한국식품위생안전성학회지
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• 제23권2호
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• pp.98-107
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• 2008

오존은 불소 다음으로 강력한 산화력을 가지고 있으며 넓은 범위의 살균 스펙트럼을 가진 성분이다. 식품산업을 포함한 다양한 분야에서 오존이 가진 장점을 이용하기 위한 연구가 진행되었고 지금도 효율적인 이용을 위한 많은 연구들이 이루어지고 있다. 오존은 미국, 호주 및 일본 등에서는 이미 식품첨가물로 허가되어 사용되고, 국내에서도 2007년 11월에 오존수를 식품첨가물로 허가하면서 국내 식품산업계에서 오존수 이용에 대한 관심이 증가되고 있다. 오존을 이용한 살균방법은 다른 방법들과 비교해보면 초기 설비비에 비해 유지관리비가 저렴하고, 사용 후 부산물이 거의 없다는 장점을 가지고 있으며, 최근의 식품안전 요구증대와 맞물려 그 수요가 증가될 전망이다. 국내에서 오존수는 과일, 채소, 식육 등 식품의 원재료 처리하는 살균용제로서 주로 사용되고 있으나 실태조사의 결과에 따르면 이용사례는 극히 제한적이었다. 그러나 오존수 생성 기계장치의 국내 시장이 급속도로 확대되면서, 단체급식을 중심으로 점차 사용이 증가되고 있는 추세이다. 오존수는 오존을 좀 더 편리하게 이용할 수 있도록 물에 용존 시킨 상태를 말한다. 따라서 오존수는 오존의 용존량과 용존된 오존의 지속시간 등에 대하여 철저히 관리되어야 하며, 안전한 사용을 위해서는 배오존 농도 관리도 필요하다. 상기 관리항목들은 대부분이 기계장치의 자체성능과 직결되는 것이기 때문에 오존수 제조장치의 성능기준을 새롭게 정립할 필요가 있다.

• 연구논문집
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• 통권33호
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• pp.99-109
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DIW-$O_3$) in semiconductor wet cleaning process and photoresist stripping process to replace the conventional sulfuric acid and hydro peroxide mixture(SPM) method has been studied. In this paper, we propose the water-electrode type ozone generator which has the characteristics of the high concentration and purity to produce the high concentration DIW-$O_3$ for the photoresist strip process in the semiconductor fabrication. The proposed ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. Through this study, we obtained the results of the 10.3 wt% of ozone gas concentration at the oxygen gas of 0.5 [liter/min.] and the DIW-$O_3$ concentration of 79.5 ppm.. Through the photoresist stripping test using the produced DIW-$O_3$, we confirmed that the photoresist coated on the silicon wafer was removed effectively in the 12 minutes.

• Biotechnology and Bioprocess Engineering:BBE
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• 제9권3호
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• pp.151-155
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• 2004

The bioremediation of water system contaminated with phenolic compounds having endocrine-disrupting activity, i.e. 2,4-dichlorophenol, 2,4-dichlorophenoxy acetic acid (2,4-D), and 2,4,5-trichlorophenoxy acetic acid (2,4,5-T), was investigated by using ozone oxidation and activated sludge treatment. Ozone oxidation (ozonation time: 30 min) followed by activated sludge treatment (incubation time: 5 days) was an efficient treatment method for the conversion of phenolic compounds in water into carbon dioxide and decreased the value of total organic carbon (TOC) up to about 10% of initial value. Furthermore, 2,4-D was dissolved in water containing salt, i.e. artificial seawater (ASW), and this water was used as model coastal water contaminated with phenolic compounds. The activated sludge treatment (incubation time: 5 days) could consume significantly organic acids produced from 2,4-D in the model costal water by the ozone oxidation (ozonation time: 30min) and decrease the value of TOC up to about 35% of initial value.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.362-363
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• 2006

Ozonized DI water was supplied to make alkaline cleaning solutions to replace SCI chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonized water with $NH_4OH$ to a bath without recirculation resulted in higher PRE over 93 %.

• Advances in environmental research
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• 제2권1호
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• pp.1-8
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• 2013

There is a significant demand to make various dissolved gases in water. However, the conventional aeration method shows low gas mass transfer rate and gas utilization efficiency. In this study, a novel rotating wheel entraining gas method was developed for making high dissolved $O_2$ and $O_3$ in water. It produced higher concentration and higher transfer rate of dissolved $O_2$ and $O_3$ than conventional bubble aeration method, especially almost 100% of gas transfer efficiency was achieved for $O_3$ in enclosed reactor. For application of rotating wheel entraining gas method, aerobic bio-reactor and membrane bio-reactor (MBR) were successfully used for treatment of domestic and pharmaceutical wastewater, respectively; and vacuum ultraviolet $(VUV)/UV+O_3/O_2$ reactors were well used for sterilization in air/water, removal of dust particles and toxic gases in air, and degradation of pesticide residue and sterilization on fruits and vegetables.

• 한국축산시설환경학회지
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• 제7권3호
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• pp.191-195
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• 2001

양돈.양계농장에서 가축음용수 수질향상을 위하여 이용이 확대되고 있는 오존발생기의 이용효과를 구명하고자 가축음용수에 3종의 표준균주를 접종 후 $O_3$A, $O_3$, UVL 등 3종류의 오존발생기를 공시하여 처리하였으며 그 결과는 다음과 같다. 1.가축음용수 오존처리시 pH는 $O_3$A구 6.84에서 8.01로, $O_3$구 6.81에서 7.59로 증가 했으나 UVL, Control구는 변화가 없었다. 2. 용존산소량은 $O_3$A구 6.43ppm에서 8.43 ppm으로, $O_3$구 6.40ppm에서 8.40ppm 으로 증가 했으나 UVL, Control구는 변화가 없었다. 3. 산화환원전위차는 $O_3$A구는 처리전 168.7 mV에서 502.3mV로 증가하였으며 $O_3$구는 164.3mV에서 409.7mV로 급격히 증가하였으나 UVL구나 Control구는 완만찬 증가를 보였다. 4. 가축음용수에 E. coli 08:$H^-$, Salmonella typhimurium, Staphylococcus aureus를 접종 후 오존처리시 처리 30분 후 세균수는 급격하게 감소하였다.

• 상하수도학회지
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• 제22권6호
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• pp.633-640
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• 2008

In this research, the $3.6m^3/day$ scale pilot plant consisting preozonation, coagulation, flocculation, and ceramic membrane processes was operated for long term period to evaluate the validity of ceramic membrane filtration process for treating lake water containing high concentration manganese. The higher concentration of dissolved manganese($Mn^{2+}$) was effectively oxidized to the bigger insoluble colloidal manganese ($MnO^2$) by 1~2 mg/L ozone. The colloidal manganese reacted with coagulant (poly aluminium chloride, PAC) and then formed the big floc. Ceramic membrane rejected effectively manganese floc during membrane filtration. Dissolved organic carbon(DOC) removal was dependent upon $Mn^{2+}$ concentration. While average $Mn^{2+}$ concentration was 0.43 and 0.85 mg/L in raw water, DOC removal rate in preozonation was 26.5 and 13.5%, respectively. The decrease rate of membrane permeability was faster without preozonation than with preozonation while membrane fouling decreased with NOM oxidation by ozone. In conclusion, raw water containing high concentration of manganese can be effectively treated in preozonation-coagulation-ceramic membrane filtration system.

• 반도체디스플레이기술학회지
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• 제4권4호
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• pp.19-26
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• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.