• 제목/요약/키워드: difference line width

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수직하중에 의한 응력이 CMP 공정의 디싱에 미치는 영향 (Investigation of the Relationship Between Dishing and Mechanical Stress During CMP Process )

  • 김형구;김승현;김민우;임익태
    • 반도체디스플레이기술학회지
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    • 제22권2호
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    • pp.30-34
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    • 2023
  • Since dishing in the CMP process is a major factor that hinders the uniformity of the semiconductor thin film, many studies have focused this issue to improve the non-uniformity of the film due to dishing. In the metal layer, the dishing mainly occurs in the central part of the metal due to a difference in a selection ratio between the metal and the dielectric, thereby generating a step on the surface of the metal layer. Factors that cause dishing include the shape of the thin film, the chemical reaction of the slurry, thermal deformation, and the rotational speed of the pad and head, and dishing occurs due to complex interactions between them. This study analyzed the stress generated on the metal layer surface in the CMP process using ANSYS software, a commercial structure analysis program. The stress caused by the vertical load applied from the pad was analyzed by changing the area density and line width of the dummy metal. As a result of the analysis, the stress in the active region decreased as the pattern density and line width of the dummy metal increased, and it was verified that it was valid compared with the previous study that studied the dishing according to the dummy pattern density and line width of the metal layer. In conclusion, it was confirmed that there is a relationship between dishing and normal stress.

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선형테이퍼 결합 Strip 선로의 여파특성 (Characteristics of Linearly Tapered Coupled Strip-Line Filters)

  • 박기수
    • 대한전자공학회논문지
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    • 제9권2호
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    • pp.1-16
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    • 1972
  • 본논문은 특성임퍼이던스가 선형적으로 변화하는 단일 Strip선로의 특성파라미터를 이용하여, 우선 even-mode 및 odd-mode임피이던스가 모두 선형적으로 변화하는 비대칭형인 결합Strip선로의 특성파라미터를 구하였다. 다음에는 상기한 비대칭결합Strip선로를 종속연결한 대칭형결합Strip선로를 구성하고, 선로단자조건에 따라서 결합Strip선로가 갖는 여파특성을 고찰하였다. 선형 결합Strip선로의 특성을 해석한 결과, 선형결합Strip선로는 균일Strip선로를 사용하는 경우에 비하여 몇가지 점에서 좋은 여파특성을 갖고 있음을 명시하였다.

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여성복 테일러드 칼라 패턴 비교연구 - 의복구성학 교재를 중심으로 - (A Comparative Study on the Tailored Collar Patterns of Women's Jackets - Focus on Clothing Construction Textbooks -)

  • 정화연
    • 한국의류학회지
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    • 제34권4호
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    • pp.617-627
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    • 2010
  • This study selected and compared 7 tailored collar making factors from 15 clothing construction university textbooks. According to the results, in 15 clothing construction textbooks, the neckline of a tailored collar was drawn at the same length as the back neck circumference of the bodice and the length of collar stand was 3cm in 10 textbooks. In addition, the length of the collar laying varied between 2cm and 4.5cm regardless of the width of the upper collar or the textile thickness. In 7 out of the 15 textbooks, the gorge line of the collar was drawn by illustrating the collar pattern on the bodice based on the roll line and then copying it symmetrically. On the other hand, the pattern of upper collar was made in 5 ways; and 2 books did not give any explanation in the sections dealing with patterns or sewing. In addition, 6 textbooks explained that inner and outer collars are sewn with a difference. The lapel pattern of the facing part was made in 4 ways; in addition, 3 textbooks did not provide an explanation and 4 books explained that the difference is given in the sewing. The textile thickness and elasticity need to be considered in collar pattern making; however, they were not specifically mentioned in most of the textbooks.

복합레진 인레이 수복시 와동형태에 따른 치아파절에 관한 유한요소법적 연구 (A THREE DIMENSIONAL FINITE ELEMENT ANALYSIS WITH CAVITY DESIGN ON FRACTURE OF COMPOSITE RESIN INLAY RESTORED TOOTH)

  • 김철순;민병순
    • Restorative Dentistry and Endodontics
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    • 제19권1호
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    • pp.231-254
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    • 1994
  • Fracture of cusp, on posterior teeth, especially those carious or restored, is major cause of tooth loss. Inappropriate treatments, such as unnecessarily wide cavity preparations, increase the potential of further trauma and possible fracture of the remaining tooth structures. Fracture potential may be directly related to the stresses exerted upon the tooth during masticatory function. The purpose of this study is to evaluate the fracture resistance of tooth, restored with composite resin inlay. In this study, MOD inlay cavity prepared on maxillary first premolar and restored with composite resin inlay. Three dimensional finite element models with eight nodes isoparametric solid element, developed by serial grinding-photographing technique. These models have various occlusal isthmus and depth of cavity, 1/2, 1/3 and 1/4 of isthmus width and 0.7, 0.85 and 1.0 of depth of cavity. The magnitude of load was 474 N and 172 N as presented to maximal biting force and normal chewing force. These loads applied onto ridges of buccal and lingual cusp. These models analyzed with three dimensional finite element method. The results of this study were as follows : 1. There is no difference of displacement between width of occlusal isthmus and depth of cavity. 2. The stress concentrated at bucco-mesial comer, bucco-disal comer, pulpal line angle and the interface area between internal slopes of cusp and resin inlay. 3. The vector of stress direct to buccal and lingual side from center of cavity, to tooth surface going on to enamel. The magnitude of vector increase from occlusal surface to cervix. 4. The crack of tooth start interface area, between internal slop of buccal cusp and resin inlay. It progresses through buccopulpal line angle to cervix at buccomesial and buccodistal comer. 5. The influence with depth of cavity to fracture of tooth was more than width of isthmus. 6. It would be favorable to make the isthmus width narrower than a third of the intercuspal distance and depth of cavity is below 1 : 0.7.

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Initial Experience of Patient-Specific QA for Wobbling and Line-Scanning Proton Therapy at Samsung Medical Center

  • Jo, Kwanghyun;Ahn, Sung Hwan;Chung, Kwangzoo;Cho, Sungkoo;Shin, Eun Hyuk;Park, Seyjoon;Hong, Chae-Seon;Kim, Dae-Hyun;Lee, Boram;Lee, Woojin;Choi, Doo Ho;Lim, Do Hoon;Pyo, Hong Ryull;Han, Youngyih
    • 한국의학물리학회지:의학물리
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    • 제30권1호
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    • pp.14-21
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    • 2019
  • Purpose: To report the initial experience of patient-specific quality assurance (pQA) for the wobbling and line-scanning proton therapy at Samsung Medical Center. Materials and Methods: The pQA results of 89 wobbling treatments with 227 fields and 44 line-scanning treatments with 118 fields were analyzed from December 2015 to June 2016. For the wobbling method, proton range and spread-out Bragg peak (SOBP) width were verified. For the line-scanning method, output and two-dimensional dose distribution at multiple depths were verified by gamma analysis with 3%/3 mm criterion. Results: The average range difference was -0.44 mm with a standard deviation (SD) of 1.64 mm and 0.1 mm with an SD of 0.53 mm for the small and middle wobbling radii, respectively. For the line-scanning method, the output difference was within ${\pm}3%$. The gamma passing rates were over 95% with 3%/3 mm criterion for all depths. Conclusions: For the wobbling method, proton range and SOBP width were within the tolerance levels. For the line-scanning method, the output and two-dimensional dose distribution showed excellent agreement with the treatment plans.

A comparison of condyle in malocclusion patients using 3D program

  • Jeon, Eun-Young;Park, Jong-Tae
    • 한국콘텐츠학회:학술대회논문집
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    • 한국콘텐츠학회 2019년도 춘계종합학술대회
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    • pp.275-276
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    • 2019
  • The purpose of this study was to assess condylar size in volumetric 3D imaging in patients with class I, class II, class III malocclusions. To evaluate the differences among the three experimental groups, the condylar values of men were analyzed. There was a significant difference in the measured values of height. Among the three experimental groups, the condylar measurements in women showed significant differences in height and width. This study is expected to be used for determining the connection between malocclusion and condyle as a base line data.

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마그네슘 페라이트에서 강자성 공명의 시료 크기 의존성 연구 (A Study on Sample Size Dependence of Ferromagnetic Resonance in Polycrystalline Magnesium Ferrites)

  • 한기태;백종규
    • 한국세라믹학회지
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    • 제32권2호
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    • pp.163-170
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    • 1995
  • Sample size effect on ferromagnetic resonance (FMR) in polycrystalline MgFe2O4 has been investigated. The signal intensity (SI), resonance field (Hres) and line width (ΔH) were found to increase proportionally to r3 with the increase of sample radius. The r3-depencence of SI means the complete penetration of rf-field into the sample, and the broadening of ΔH due to the sample size appears to be closely related to the amount of scattering sources like pores. Meanwhile, the values of Hres (0) and ΔH (0) obtained by extrapolating the data of Hres (r) and ΔH (r) measured at several sizes to r=0, were in good agreement with those calculated using the Schlomann's equations for internal field and ΔH, respectively. This result indicates that the discrepancy between the measured FMR parameters and those calculated by Schlomann's equation could be ascribed to the effect of sample size. Thus it is suggested that the size effect on FMR should be removed for the analysis of the FMR parameters. Meanwhile, our result for the size dependance of ΔH was found to be contradictory to those reported by Dionne, where ΔH 1/r at a given surface roughness. This discrepancy appears to arise from the difference in the definition of reading the line width.

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Biometry of width between labial transitional line angles in anterior teeth: an observational study

  • Wen, Chao;Ye, Hongqiang;Chen, Hu;Zhou, Yongsheng;Huang, Mingming;Sun, Yuchun
    • The Journal of Advanced Prosthodontics
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    • 제14권1호
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    • pp.1-11
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    • 2022
  • PURPOSE. The maximum width between the mesial and distal labial transitional line angles, described as "esthetic width" herein, could significantly influence the visual perception of the teeth and smile. This study aimed to conduct biometric research on esthetic width and to explore whether regular distribution exists in the esthetic width of human teeth. MATERIALS AND METHODS. A total of 4,264 maxillary and mandibular anterior teeth were measured using the Geomagic studio software program. The proportions of maxillary to mandibular homonymous teeth and proportions between the adjacent teeth were calculated. Bilateral symmetry and the correlation between the esthetic and mesiodistal widths were both accounted for during the measurement procedures. RESULTS. The mean esthetic widths were 6.773 ± 0.518 mm and 4.329 ± 0.331 mm for maxillary and mandibular central incisors, respectively, 5.451 ± 0.487 mm and 5.008 ± 0.351 mm for maxillary and mandibular lateral incisors, respectively, and 3.340 ± 0.353 mm and 5.958 ± 0.415 mm for maxillary and mandibular canines, respectively. Except for the mandibular canines, no significant difference in esthetic width was found among homonymous teeth from the same jaw. A high linear correlation was found between the esthetic and mesiodistal widths of the same tooth, except for the maxillary canines. Esthetic width proportions among different tooth categories showed some regular patterns, which were similar to those of the mesiodistal width. CONCLUSION. Esthetic width is regularly distributed among the teeth in the Chinese population. This could provide an important reference for anterior dental restorations and dimension recovery in esthetic reconstruction of anterior teeth.

양측성 구순열 환자의 안모 변형에 대한 연구 (A Study of Facial Deformity in the Patient with Bilateral Cleft Lip before the Primary Cheiolplasty)

  • 윤보근;소병수;백진아;신효근
    • 대한구순구개열학회지
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    • 제4권2호
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    • pp.51-68
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    • 2001
  • Midfacial hypoplasia in patients with clefts of the lip and palate is considered to be the result of congenital dysmorphogenesis. And cleft lip and palate developes facial deformity, jaw abnormality, speech problem, which is most frequent hereditary deformity in maxillofacial region. So cleft lip and palate is characterized by midface deformity which shaws maxillary anterior nasal septal deviation and deformity. Our study describes congenital correlates of midfacial hypoplasia by examining the displacement of a normal complement of parts, a triangular tissue deficiency low on the lip border on the columellar side, and a linear deficiency and displacement in the line of the bilateral cleft lip. 15 patients with bilateral cleft lip and palate were taken impression before operation, but the patient who had other abnormalities and complications were excluded. Average age is 3.4 months and they were classified into both complete, both incomplete and complete & incomplete group. The obtained results were as follows 1. There were no differences on intercanthal width and canthal width between each of the groups. 2. Both complete group had longer lateral ala length than both incomplete group, but there were no differences between both complete group and complete side of com. & incom. group and both incomplete group and incomplete side of com. & incom. group. 3. Columella length was greater in both incomplete group than in both complete group, but there was no difference between both complete group and complete side of com. & incom. group and both incomplete group and incomplete side of com. & incom. group. 4. Both complete group had longer ala width & ala base width than both incomplete group had. But there were no differences between both complete group and complete side of com. & incom. group and both incomplete group and incomplete side of com. & incom. group. 5. There were no differences between each of the groups on upper lip length, but nose/mouth width ratio was greater in both complete group than in both incomplete group. 6. Pronasale(pm), subnasle(sn), la~rale superioris(ls), stomion(sto) points were located around the central vertical line of face but deviated to incomplete side in com. & incom. group. 7. Nasal tip protrusion was greater in both incomplete group and com. & incom. group than both complete group, but there was no difference between both incomplete group and com. & incom. group.

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십자형 패치를 이용한 ISM 대역용 이중대역 마이크로스트립 안테나 설계 (Design of Dual-band Microstrip Antenna for ISM Bandwidth using Cross Patch)

  • 박기동;정문숙;임영석
    • 한국전자파학회:학술대회논문집
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    • 한국전자파학회 2002년도 종합학술발표회 논문집 Vol.12 No.1
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    • pp.241-245
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    • 2002
  • Dual-band microstrip antenna is designed for industrial-scientific-medical(ISM) band of 2.4㎓ and 5.8㎓ using finite-difference time-domain method(FDTD). Cross Patch fed by aperture in the ground plane of microstrip line is proposed as radiation element of antenna, which is 2 rectangular Patch is overlapped. To design antenna, change of input impedance by aperture and stub length change is examined. And it is investigated that center frequency and -10 ㏈ bandwidth by Length of radiation element and width change. Experimental result about reflection Loss confirmed that agree well with analysis results of FDTD and IE3D, And -3 ㏈ beam width, front to back ratio and gain in frequency 2.43㎓ and 5.79㎓ is presented by measuring radiation Pattern of antenna.

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