• Journal of Sensor Science and Technology
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• v.13 no.4
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• pp.309-315
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• 2004

In the pressure sensor, about below 20 kPa, the center boss diaphragm structure is generally used, but it is hard to obtain the high sensitivity because the center boss structure is limited at the thickness and size of diaphragm with chip size. Therefore, this paper suggests that the Center boss structure has surface etched diaphragm using a stress concentration to improve the sensitivity. We carried out the simulation and fabrication applied new diaphragm design. In the result, the sensitivity is improved to 60% without the change of non-linearity (0.14%FS). So, the Center boss of surface etched diaphragm can be applied for the high sensitivity in the low-pressure sensor.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.298-302
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• 2002

Equivalent volume estimation of the coupler and two coupled microphones has a key role in standard microphone pressure calibration. The equivalent volume of the microphone is determined by the dynamic characteristics of the diaphragm system and front cavity. Therefore the modal parameters of diaphragm system - natural frequency and damping fatter - should be measured explicitly for the estimation of the equivalent volume. The diaphragm system is composed of the vibrating diaphragm, back slit behind diaphragm, pressure equalization vent, and front cavity which are acoustically coupled. In the measurement, the electrostatic actuator was used to excite the system with the swept sine, and the frequency response was obtained. The close actuator in front of the diaphragm must influence the radiation impedance of the system, and then the modal parameters. From the measured frequency response, the natural frequency and the damping factor could be estimated with the Complex exponential method based on the Prony model and the zero crossing real and imaginary plot.

• Proceedings of the KIEE Conference
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• 1994.07a
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• pp.141-143
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• 1994

In this paper, an electrostatic micro-actuator is fabricated using flat p+ diaphragm. To avoid the buckling of the flat p+ diaphragm, the processes are designed appropriately. The fabrication processes of the actuator are the anisotropic etching with EPW, the boron diffusion process, Al deposition and the silicon to glass bonding using the negative photoresist. The distance between the p+ and Al electrodes is $10{\mu}m$, and the thickness of the p+ diaphragm is $2{\mu}m$. The measurement of the characteristic of the actuator is performed at 50V. The center displacement of the diaphragm is $1.5{\mu}m$ at 10Hz. In comparison with the experimental data of the actuator with corrugated diaphragm, it is confirmed that the actuator with flat diaphragm is more effective than that with corrugated one in the small deflection region.

• Journal of the Korean Geotechnical Society
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• v.17 no.2
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• pp.123-134
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• 2001

본 연구에서는 화강풍화토 지반상 unpropped diaphragm wall의 거동을 연구하기 위하여 벽체의 근입깊이와 지하수위 조건을 변화시키면서 원심모형실험을 수행하였다. 원심모형실험시 diaphragm wall은 두께 8mm인 알루미늄합금을 사용하였으며, 지반굴착을 재현하기 위하여 zinc chloride 기법을 이용하였다. 수치해석은 대부분의 지반공학문제에 적용할 수 있는 SAGE CRISP 프로그램을 이용하였다. 수치해석에서 모형지반은 수정 Cam-Clay 모델, diaphragm wall은 탄성모델, 지반과 diaphragm wall 사이의 경계면요소는 슬립모델을 사용하여 2차원 평면변형률 조건으로 해석을 수행하였다. 모형실험 결과 파괴면의 직선적인 형태로 파괴면내의 배면측 지반은 벽체를 향하여 하향의 변위를 일으키면서 벽체의 회전에 의해 파괴되었다. 실험 및 유한요소해석 결과 지반의 최대침하량과 최대침하량이 발생하는 위치는 잘 일치하였으며, 깊이에 따른 벽체변위는 선형적인 관계를 나타내었다. 또한, 최대 휨모멘트와 근입깊이로 정규화한 최대 휨모멘트 발생위치($h_{Mmax}$/d=0.4)는 잘 일치하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.372-375
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• 2003

MCA deflection control is a important technology for the development of MEMS applications. In this study, deflection analysis at the MLA/Si diaphragm was investigated by Finite Element Method. Analysis of Si diaphragm combined with MCA has been implemented into the ANSYS (Solid5 and Solid45). On the basis of this structure, deflection versus MCA number of layers has been modelled and MCA/Si contact area characteristics with different diaphragm conditions were analyzed. Consequently, it is expected that fabrication technology of MCA/Si diaphragm could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2012.05a
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• pp.163-166
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• 2012

The hybrid combustion were performed with the different diaphragm position for the experimental studies on characteristic of regression rate and combustion efficiency. The diaphragm was installed in 25% and 50% of fuel length from the front of solid fuel, respectively. As results of experiments, the position of diaphragm has small effect on the regression rate and combustion efficiency. It is considered that the diaphragm has local effect near the diaphragm.

• Journal of Drive and Control
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• v.18 no.2
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• pp.32-37
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• 2021

The piston reservoir is mainly used in hydraulic blow-down system for aerospace engineering. The reservoir is heavy due to both hydraulic cylinder and piston in pressurization. The positive expulsion tank with rubber diaphragm has been mostly applied propellant and fuel tank at low pressure to satellites. To reduce weight, the reservoir that can be used at high pressure with rubber diaphragm was developed. In this research, the prediction of life-time for the rubber diaphragm was implemented through an accelerated life test, as a part of development of new reservoir. Also, the diaphragm was stored in an temperature chamber at the same condition as and operation with hydraulic oil. As a result, the life-time for a rubber diaphragm was successfully evaluated via Arrhenius law and Time-Temperature Superposition based on failure times over temperatures in the accelerated test.

• Journal of Korean Ophthalmic Optics Society
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• v.6 no.1
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• pp.13-29
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• 2001

A mathematical model was proposed to analyze the vibration of diaphragm, such as the contact lenses fitted on the eyes, being subjected to the external sinusoidal pressure. The model incorporates the differential equations and their numerical solution program, based on the wave equations. Turbo-C and graphic software, formulated to describe the dependence of the various parameters involved in the vibration. The model predicts the radial distribution of amplitude, frequency dependence of both average displacement amplitude and the power of diaphragm whose edge is being either simply supported or rigidly clamped in vibration. The effect of variables such as thickness, radius, damping coefficients on the vibration characteristics was illustrated by the computer simulation of the derived program. As the frequency of driving pressure increases above the certain value determined by the boundary conditions and parameters the wave shape or pattern changes from simple arc to belly or loops having double antinode. It seems that the effect of outer antinode progressively increases as the frequency increases. If this kind of phenomena occurs to the contact lens on the cornea in vivo, it may cause an abnormal correction power in the lenses or pull off the eye due the increased rise of outer part of the lens.

• Journal of Korean Society of Steel Construction
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• v.17 no.6 s.79
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• pp.649-660
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• 2005

Since the diaphragm manhole of steel box girder bridges is designed generally from experience, it has become the primary factor in the excessive cost of steel bridge construction. For the economical and efficient manufacture of diaphragm manholes, it is necessary to study the exact behavior of the diaphragm manhole in a steel box girder bridge. In this study, both an experimental test and a structural analysis are performed to verify the behavior of the diaphragm manhole in a steel box girder bridge. A detailed structural analysis was performed according to various diaphragm manhole shapes, and in conclusion, the suitable reinforcement method for the support of diaphragm manholes in steel box bridges is presented.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.6 s.177
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• pp.1616-1623
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• 2000

A diaphragm spring is an important component of a clutch assembly, characteristics of which depends largely on that of a diaphragm spring. A diaphragm spring is subject to high stress concentration in driving condition, which frequently causes cracks and fracture around finger area. In this paper, behavior of a diaphragm spring is analysed by finite element method to calculate sensitivity of design parameters, which is used to perform optimal design of diaphragm spring shape. As an object function, hoop stresses are taken and minimized to improve durability. Characteristics of the diaphragm is used as equality constraint to maintain the original design purpose and sequential linear programming(SLP) is utilized as an optimization tool. With optimized design, it is verified that concentrated stress is decreased maintaining release load characteristic.