• Title/Summary/Keyword: deposition rate

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The Structures and Dielectric Properties of Plasma Polymerized Polyethylene (플라즈마 중합 폴리에틸렌 구조와 유전특성)

  • 김두석
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.14 no.3
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    • pp.38-42
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    • 2000
  • Plasma polymerized thin films were manufactured inter-electrode coupled plasma polymerization apparatus. The deposition rate reached its maximum between 40[W] and 100[W]. In the ESCA analysis, peaks revealing -CH2, -CH, -C- were present at 285.4 and 285.5[eV] respectively. The C=O peak at 532.8[eV] and the C-O peak at 533.8[eV], which were grouped with an unignorable amount of oxygen were conformed. In ESR analysis, the curve revealing strong amplification was in saturation, which was affected by weak power. This is considered as a -CH-Ch=Ch- structure containing the Allyl group. The relative permittivity of the plasma polymerized thin films was about 3.5 at a frequency of 100[Hz]∼200[kHz]. The dissipation factor showed allow value of 0.008.

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Changes of Sedimentary Environments in the Southern Tidal Flat of Kanghwa Island (강화 남부 갯벌의 퇴적환경 변화)

  • Woo, Han-Jun;Je, Jong-Geel
    • Ocean and Polar Research
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    • v.24 no.4
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    • pp.331-343
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    • 2002
  • The southern tidal flat of Kanghwa Island with an area of approximately $90km^2$ is one of the biggest flats on the west coast of Korea. Surface sediments for sedimentary analyses were sampled at 83 stations in August 1997, September 1999 and August 2000. The very poorly-sorted mud sediments were predominant in the eastern part of the tidal flat, whereas the poorly-sorted sand-mud mixed sediments were dominant in the western part. The area of muddy sediment distribution diminished, but that of sandy mud sediment extended to southeastward tidal flat for three years. In the western part of tidal flat, deposition occurred during the period of spring to summer, whereas erosion occurred in winter. Sediment accumulation rates during three years indicated that the sediments deposited continuously in the eastern part of tidal flat, whereas eroded in the western part of tidal flat. Recently, construction of artificial structures such as new airport, island-connecting bridges and dikes near the tidal flat might change tidal current and river flow pattern. In order to reduce the ecological damage and to preserve tidal-flat environment, it is necessary to Investigate long-term impacts on sedimentary environment and ecology.

Identification of Differentially Expressed Proteins at Four Growing Stages in Chicken Liver

  • Lee, K.Y.;Jung, K.C.;Jang, B.G.;Choi, K.D.;Jeon, J.T.;Lee, J.H.
    • Asian-Australasian Journal of Animal Sciences
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    • v.21 no.10
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    • pp.1383-1388
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    • 2008
  • Because of high growth rate and large deposition of fat in the abdomen, the chicken has been used as a model organism for understanding lipid metabolism, fattening and growing. In this study, differentially expression of proteins in chicken liver, one of the important organs for lipid metabolism, has been investigated at four different growing stages. After separation of proteins using two-dimensional electrophoresis (2-DE), more than 700 protein spots were detected. Among them, 13 growing stage specific proteins in chicken liver were selected and further investigated by matrix-assisted laser adsorptions ionization-time of flight mass spectrometry (MALDI-TOF MS). Of these, 12 proteins were matched to existing proteins based on a database search. The identified fat-related proteins in this study were fatty acid synthase (FASN) and malic enzyme (ME1). These proteins were more highly expressed at week 32 than at other weeks. In order to confirm the differential expression, one of the proteins, FASN, was confirmed by western blotting. The identified proteins will give valuable information on biochemical roles in chicken liver, especially for lipid metabolism.

Removal of Serratia marcescens Aerosols Using an Electrostatic Precipitator Air-Cleaner

  • Ko, Gwang-Pyo;Burge, Harriet
    • Journal of Microbiology and Biotechnology
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    • v.17 no.10
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    • pp.1622-1628
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    • 2007
  • We characterized the efficacy of an electrostatic precipitator (ESP) air-cleaner in reducing the concentration of Serratia marcescens in an enclosed space. We used an experimental room ($4.5{\times}3{\times}2.9\;m$) in which electrostatic air-cleaners were located. Two air-cleaners enhanced the equivalent ventilation rates in the chamber by about 3.3 air changes per hour (ACH) over the 2 ACH provided by the mechanical ventilation system. Natural die-off of the organisms provided an additional equivalent of 3 ACH, so that the total ventilation rate with the ESP air-ccleaners was 8.3 ACH. We also examined whether the ESP air-cleaners altered the deposition of Serratia marcescens aerosols on the experimental room surfaces. We did not find any significant differences in the number of colony forming units recovered from surfaces with and without the air-cleaners. We installed UV lights inside the ESPs and determined if UV light, in addition to electrical fields, increased the efficacy of the ESPs. The presence of UV light inside the ESP reduced S. marcescens aerosols by approximately 2 ACH. Finally, a box model indicates that the efficiency of the air-cleaner increases for both biological and nonbiological particles at ventilation rates of 0.2-1, which are typical for residential settings.

Sheet Reisistance Analysis of TiNx Thin Film by RF Magnetron Sputtering (RF magnetron 스파터링법으로 제작한 TiNx 박막의 면저항분석)

  • Park, Moon Chan;Oh, Jeong Hong;Kim, Nam Young;Hwangbo, Chang Kwon
    • Journal of Korean Ophthalmic Optics Society
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    • v.4 no.1
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    • pp.21-25
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    • 1999
  • The TiN, thin films were prepared on glass substrate by RF(radio-frequency) magnetron sputtering apparatus from a Ti target in a gaseous mixture of argon and nitrogen. In deposition, a RF power supply was used as a power source with a constant power of 240W, and the substrate was heated to $200^{\circ}C$. The films were obtained at nitogen flow rates in the range 3-9 sccm with a constant argon flow rate of 20 secm. For the films obtained, the sheet resistance and the chemical binding energy of the films was observed by four-point-probe method and x-ray photoelectron spectroscopy(XPS) depth profiling respectively. In addition, we investigated the relationship between the surface resistance and the chemical nature of the films.

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Electrical Characteristic of Al/AIN/GaAs MIS Capacitor fabricated by Reactive Sputtering Method for the DC power (반응성 스퍼터링법으로 Al/AIN/GaAs MIS 커패시터 제조시 DC 전력에 따른 전기적 특성)

  • 권정열;이헌용;김지균;김병호;김유경
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.566-569
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    • 2001
  • In this paper, we investigated the electrical characteristics through DC power at manufacturing the MIS capacitor insulator AIN thin film based on reactive sputtering method. In case of deposition temperature 250$^{\circ}C$, pressure 5mTorr, total flow rate 8sccm(Ar:4sccm N2:4sccm), AIN thin film was deposited with changing DC power. As DC power increses, resistivity is observed a little increase. When AIN thin film is deposited at 100W, the result shows leakage current 10$\^$-8/A/$\textrm{cm}^2$ at 0.1MV/cm. Otherwise, In case of depositing at 150W and 200W, the result shows that the characteristic of leakage current is under 10$\^$-9//$\textrm{cm}^2$ at 0.1MV/cm. In C-V characteristic with DC power, deep depletion phenomenon is observed at inversion region in 100W and 150W. In 200W, that phenomenon, however, was showed to decrease. It shows that the hysterisis increases with being increasing DC power.

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Fatigue Characteristics of PZT Thin Films Deposited by ECR-PECVD

  • Chung, Su-Ock;Lee, Won-Jong
    • Transactions on Electrical and Electronic Materials
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    • v.6 no.4
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    • pp.177-185
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    • 2005
  • Fatigue characteristics of lead zirconate titanate (PZT) films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD) were investigated. The fatigue characteristics were investigated with respect to PZT film thickness, domain structure, fatigue pulse height, temperature, electrode materials and electrode configurations. The used top and bottom electrode materials were Pt and $RuO_2$. In the fatigue characteristics with fatigue pulse height and PZT film thickness, the fatigue rates are independent of the applied fatigue pulse height at the electric field regions to saturate the P-E hysteresis and polarization $(P^*,\;P^A)$ characteristics. The unipolar and bipolar fatigue characteristics of PZT capacitors with four different electrode configurations $(Pt//Pt,\;Pt//RuO_2,\;RuO_2//Pt,\;and\;RuO_2//RuO_2)$ were also investigated. The polarization-shifts during the unipolar fatigue and the temperature dependence of fatigue rate suggest that the migration of charged defects should not be expected in our CVD-PZT films. It seems that the polarization degradations are attributed to the formation of charged defects only at the Pt/PZT interface during the domain switching. The charged defects pin the domain wall at the vicinity of Pt/PZT interface. When the top and bottom electrode configurations are of asymmetric $(Pt//RuO_2,\;RuO_2//Pt)$, the internal fields can be generated by the difference of charged defect densities between top and bottom interfaces.

The Chemical Structure of Phenyl Isothiocyanate Thin Films Fabricated by Plasma Polymerization Method (플라즈마 중합법에 의해 제작된 PHENYL ISOTHIOCYANATE 막의 화학적 구조)

  • Kim, Sung-O;Park, Bok-Kee;Kim, Du-Seok;Lee, Kyung-Sup;Lee, Jin;Lee, Duck-Chool
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.04a
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    • pp.183-187
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    • 1997
  • The Thin films were obtained by plasma polymerization of phenyl isothiocyanate. Polymerizations were carried out in rf(13.56 [MHz]) glow discharge generated in an inter-electrode capacitively coupled gas flow system. It was fecund that this monomer produces uniform films with a wide range of thicknesses, from hundreds of nanometers to tens of micrometers. The deposition rate appeared to be dependent on the substrate distance from the monomer inlet. The IR data revealed significant decrease in -NCS groups content in the polymer as compared with the monomer spectrum and indicated for the appearance of new absorption bands corresponding to the -CN and C-H aliphatic groups. The soluble fraction by GC was found to be composed of numerous low molecular-weight compounds.

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Optical Properties of Multi-layer TiNO/AlCrNO/Al Cermet Films Using DC Magnetron Sputtering

  • Han, Sang-Uk;Park, Soo-Young;Kim, Hyun-Hoo;Jang, Gun-Eik;Lee, Yong-Jun
    • Transactions on Electrical and Electronic Materials
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    • v.16 no.5
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    • pp.280-284
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    • 2015
  • Among many the oxynitrides, TiNO and AlCrNO, have diverse applications in different technological fields. We prepared TiNO/AlCrNO/Al thin films on aluminum substrates using the method of dc reactive magnetron sputtering. The reactive gas flow, gas mixture, and target potential were applied as the sputtering conditions during the deposition in order to control the chemical composition. The multi-layer films have been prepared in an Ar and O2+N2 gas mixture rate. The surface properties were estimated by performing scanning electron microscopy (SEM). At a wavelength range of 0.3~2.5 μm, the exact composition and optical properties of thin films were measured by Auger electron spectroscopy (AES) and Ultraviolet-visible-near infrared (UV-Vis-NIR) spectrophotometry. The optimal absorptance of multi-layer films was exhibited above 95.5% in the visible region of the electromagnetic spectrum, and the reflectance was achieved below 1.89%.

Oxygen Annealing Effect of SrTiO$_3$ Single Crystal Substrate Damaged by Ar$^+$ Ion Milling (Ar 이온 밀링으로 손상된 단결정 SrTiO$_3$ 기판의 산소 열처리 효과)

  • Choi, Hee-Seok;Hwang, Yun-Seok;Kim, Jin-Tae;Lee, Doon-Hoon;Lee, Soon-Gul;Park, Yong-Ki;Park, Jong-Chul
    • 한국초전도학회:학술대회논문집
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    • v.9
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    • pp.87-90
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    • 1999
  • We have studied the annealing effects of 570 (SrTiO$_3$) single crystal substrate and the I-V properties of step-edge junctions after Ar ion milling. YBa$_2Cu_3O_7$ (YBCO) thin films are fabricated on the substrates by using pulsed laser deposition (PLD) and photolithography. The surface of Ar ion milled substrate was characterized with atomic force microscope (AFM) and scanning electron microscope (SEM) images. After the substrate was damaged by milling, the critical current density of YBCO thin films deposited on the substrate was lowered. The annealing of the damaged substrate at about 1000 $^{\circ}C$ recovered the critical current density to that before the milling. Futhermore the annealing helped junction formation due to high quality film and increased the yield rate for the fabrication of high quality step-edge junction.

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