• 한국표면공학회지
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• 제22권1호
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• pp.17-25
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• 1989

The structural Charactesties and adhesion of chemically vapor deposited TiN film on stain less steels have been investated as functions of deposition temperature, surface roughness of sub state, and types of substrates. The grain zine and the lattice parameter of TiN film decreased with decreasing roughness of substates. The(200) preferred orientation was developed dominatly and the lattlice parameter decreased as temperature intereased reardless of the surdless roughnessand type of the substrates used. The surface morphology of TiN film changed from bushed crystal to a plate and then to pyamidal dense crystals with an increase in the deposition temperature. The adhesion of TiN films increased with coating thinkness and decreased with surface roughness in general. The calculations using a Bejamin & Weaver's model have been compard. Maximum valuse of adhesion energy calculated using Laguier's model were W304=331Jm-2,w410=113Jm-2,andW430=107jm-2

• 한국막학회:학술대회논문집
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• 한국막학회 1998년도 춘계 총회 및 학술발표회
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• pp.105-109
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• 1998

1. Introduction : In microfiltration the transport, deposition and removal of particles control cake formation on a filter. In this connection a new model on cake formation, based on the wall shear stress, was tested here in comparison with experiments of fine particle slurry under Taylor-vortex flow. The model expresses the deposition process for particles as two first-order steps in series of mass transfer and adhesion, and their removal process as a linear relation to the wall shear stress. This embraces characteristics of both dead-end and crossflow filtration. The correlation resulting from fitting to experimental data represented the experimental data reasonably well. This study will be helpful in analyzing fouling in heat exchangers.

• 산업기술연구
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• 제14권
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• pp.63-75
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• 1994

The objective of this research is to analyze the phenomena of negative ion behavior in silane plasma chemical vapor deposition. Based on the plasma chemistry, the model equations for the formation and transport of negative ions were proposed and solved. The evolutions of gaseous species along the reactor were presented for several conditions of process variables such as reactor pressure, total gas flow rate, and electric field. Based on the model results, it is found that : (1) The concentration profiles of positive ions show the sharp peaks at the center of plasma reactor. (2) Most of negative ions are located in bulk plasma region, because the negative ions are excluded from the sheath region by electrostatic repulsion.

• 한국컴퓨터정보학회:학술대회논문집
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• 한국컴퓨터정보학회 2012년도 제46차 하계학술발표논문집 20권2호
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• pp.33-34
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• 2012

토석류 퇴적 모델은 토석류에 의한 피해지 예측을 위해 그 효용성이 입증된 모델이지만 이를 이용하기 위해서는 몇 가지 파라미터를 필요로 한다. 파라미터를 자동으로 추정하기 위한 방법은 여러 가지가 있지만 토석류에 의한 피해지 예측을 위한 데이터는 충분히 양을 확보하기가 어려우므로 기존의 학습 기법을 적용하는데 어려움이 있다. 본 논문에서는 인공 신경망을 학습시키는 과정에서 기존 샘플로부터 의사 샘플을 생성하고 이를 학습에 사용함으로써 보다 안정적인 학습이 가능한 의사 샘플 신경망을 제안하였다. 제안한 의사 샘플 신경망은 해공간을 평탄화시킴으로써 잘못된 국부 최적해에 빠질 확률을 줄여주고 따라서 보다 안정적인 파라미터 추정이 가능하다는 사실을 실험을 통해 확인할 수 있다.

• Environmental Sciences Bulletin of The Korean Environmental Sciences Society
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• 제10권S_2호
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• pp.55-63
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• 2001

This work employs two models to quantify the size-segregated dry deposition fluxes of particle-bound N $O_3$$^{[-10]}$ , N $H_4$$^{+}$, and S $O_4$$^{2-}$ along the coastal area of Jeju Island based on the chemical composition data of aerosol collected during the springtime of 1995. The two approaches produced fairly comparable results, despite the feature differences between the two models. The modelling results obtained indicated that the mean dry deposition velocity was around 0.4 cm $s^{-1}$ for N $O_3$$^{[-10]}$ , 0.2 cm $s^{-1}$ for N $H_4$$^{+}$, and 0.3 cm $s^{-1}$ for S $O_4$$^{2-}$, and the dry deposition flux varied between 371~1368 $\mu\textrm{g}$ $m^{-2}$ da $y^{-1}$ for nitrate, 28~625 $\mu\textrm{g}$ $m^{-2}$ da $y^{-1}$ for ammonium, and 957~6088 $\mu\textrm{g}$ $m^{-2}$ da $y^{-1}$ for sulfate. Although difficulties in collecting giant and/or fine particles limited the understanding of the mass size distribution of particles and thus the ability to refine estimates of the dry deposition flux for the particulate matter, both models were still able to offer sufficient realism to explain the features of the available data collected from the coastal area of Jeju Island.and.

• 한국재료학회지
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• 제9권2호
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• pp.155-162
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• 1999

Zirconia thin films of uniform structure were fabricated by plasma-enhanced metal-organic chemical vapor deposition. Deposition conditions such as substrate temperature were observed to have much influence on the formation of zirconia films, therefore the mechanism of decomposition of $Zr[TMHD]_4$precursor and film growth were examined by XRD, FT-IR etc., as well as the determination of the optimal deposition condition. From temperature dependence on zirconia, below the deposition temperature of 523K, the amorphous zirconia was formed while the crystalline of zirconia with preferred orientation of cubic (200) was obtained above the temperature. Deposits at low temperatures were investigated by FT-IR and the absorption band of films revealed that the zirconia thin film was in amorphous structure and has the same organic band as that of Zr precursor. In case of high temperature, it was found that Zr precursor was completely decomposed and crystalline zirconia was obtained. In addition, at 623K the higher RF power yielded the increased crystallinity of zirconia implying an increase in decomposition rate of precursor. However, it seems that RF power has nothing with the zirconia deposition process at 773K. It was found that the proper bubbler temperature of TEX>$Zr[TMHD]<_4$ precursor is needed along with high flow rate of carrier gas. Through AFM analysis it was determined that the growth mechanism of the zirconia thin film showed island model.

• 한국환경과학회:학술대회논문집
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• 한국환경과학회 2003년도 봄 학술발표회 발표논문집
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• pp.155-160
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• 2003

Indoor air quality can be affected by indoor sources, ventilation, decay and outdoor levels. Although technologies exist to measure these factors, direct measurements are often difficult. The purpose of this study was to develop an alternative method to characterize indoor environmental factors by multiple indoor and outdoor measurements. Daily indoor and outdoor $NO_2$ concentrations were measured for 30 consecutive days in 28 houses in Brisbane, Australia, and for 21 consecutive days in 37 houses in Seoul, Korea. Using a mass balance model and regression analysis, penetration factor (ventilation rate divided by the sum of ventilation rate and deposition constant) and source strength factor (source strength divided by the sum of ventilation rate and deposition constant) were calculated using multiple indoor and outdoor measurements. Subsequently, the ventilation rate and $NO_2$ source strength were estimated. Geometric means of ventilation rate were 1.44 ACH in Brisbane, assuming a residential $NO_2$ deposition constant of 1.05 $hr^{-1}$, and 1.36 ACH in Seoul, with the measured residential $NO_2$ deposition constant of 0.94 $hr^{-1}$. Source strengths of $NO_2$ were 15.8 $\pm$ 18.2 ${\mu}g$/$m^3$.hr and 44.7 $\pm$ 38.1${\mu}g$/$m^3$.hr in Brisbane and Seoul, respectively. In conclusion, indoor environmental factors were effectively characterized by this method using multiple indoor and outdoor measurements.

• 대한치과보철학회지
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• 제39권6호
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• pp.633-640
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• 2001

Statement of problem. Relatively low success rate of root analogue implant system was supposed to be due to the time duration between extraction and implant installation. The use of three-dimensional computer tomography and the reconstruction of objects using rapid prototyping methods would be helpful to shorten this time. Purpose. This aim of this study was to evaluate the application possibility of the 3-dimensional computer tomography and the rapid prototyping to root analogue implants. Material and methods. Ten single rooted teeth were prepared. Width and height of the teeth were measured by the marking points. This was followed by CT scanning, data conversion and rapid prototyping model fabrication. 2 methods were used; fused deposition modelling and stereolithography. Same width and height of this models were measured and compared to the original tooth. Results. Fused deposition modelling showed an enlarged width and reduced height. The stereolithography showed more exact data compared with the fused deposition modelling. Smaller standard deviation were recorded in the stereolithographic method. Overall width error from tooth to rapid prototyping was 7.15% in fused deposition modelling and 0.2% in stereolithography. Overall height showed the tendency of reducing dimensions. Conclusion. From the results of this study, stereolithography seems to be very predictable method of fabricating root analogue implant.

• 한국환경보건학회:학술대회논문집
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• 한국환경보건학회 2004년도 International Conference Current Challenges and Advances in Environmental Health
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• pp.45-50
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• 2004

Indoor air quality can be affected by indoor sources, ventilation, decay and outdoor levels. Alt hough technologies exist to measure these factors, direct measurements are often difficult. The purpose of this study was to develop an alternative method to characterize indoor environmental factors by multiple indoor and outdoor measurements. Daily indoor and outdoor NO2 concentrations were measured for 30 consecutive days in 28 houses in Brisbane, Australia, and for 21 consecutive days in 37 houses in Seoul, Korea. Using a mass balance model and regression analysis, penetration factor (ventilation rate divided by the sum of ventilation rate and deposition constant) and source strength factor (source strength divided by the sum of ventilation rate and deposition constant) were calculated using multiple indoor and outdoor measurements. Subsequently, the ventilation rate and NO2 source strength were estimated. Geometric means of ventilation rate were 1.44 ACH in Brisbane, assuming a residential NO2 deposition constant of 1.05 hr-1, and 1.36 ACH in Seoul, with the measured residential NO2 deposition constant of 0.94 hr-1. Source strengths of N02 were 15.8 ${\pm}$ 18.2 ${\mu}$g/m3${\cdot}$hr and 44.7 ${\pm}$ 38.1 ${\mu}$g/m3${\cdot}$hr in Brisbane and Seoul, respectively. In conclusion, indoor environmental factors were effectively characterized by this method using multiple indoor and outdoor measurements.

• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.53-58
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• 2023

The storage capacity of 3D-NAND flash memory has been enhanced by the multi-layer dielectrics. The deposition process has become more challenging due to the tight process margin and the demand for accurate process control. To reduce product costs and ensure successful processes, process diagnosis techniques incorporating artificial intelligence (AI) have been adopted in semiconductor manufacturing. Recently there is a growing interest in process diagnosis, and numerous studies have been conducted in this field. For higher model accuracy, various process and sensor data are required, such as optical emission spectroscopy (OES), quadrupole mass spectrometer (QMS), and equipment control state. Among them, OES is usually used for plasma diagnostic. However, OES data can be distorted by viewport contamination, leading to misunderstandings in plasma diagnosis. This issue is particularly emphasized in multi-dielectric deposition processes, such as oxide and nitride (ON) stack. Thus, it is crucial to understand the potential misunderstandings related to OES data distortion due to viewport contamination. This paper explores the potential for misunderstanding OES data due to data distortion in the ON stack process. It suggests the possibility of excessively evaluating process drift through comparisons with a QMS. This understanding can be utilized to develop diagnostic models and identify the effects of viewport contamination in ON stack processes.