• Journal of the Korean institute of surface engineering
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• v.55 no.6
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• pp.328-341
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• 2022

Area selective atomic layer deposition (AS-ALD) is a bottom-up nanopattern fabrication method that can grow the ALD films only on the desired substrate areas without using photolithography and etching processes. Particularly, AS-ALD has attracted great attention in the semiconductor manufacturing process due to its advantage in reducing edge placement error by fabricating self-aligned patterns. In this paper, the basic principles and characteristics of AS-ALD are described. In addition, various approaches for achieving AS-ALD with excellent selectivity were comprehensively reviewed. Finally, the technology development to overcome the selectivity limit of AS-ALD was introduced along with future prospects.

• Proceedings of the Materials Research Society of Korea Conference
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• 1999.11a
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• pp.101-101
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• 1999

• Journal of Ecology and Environment
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• v.36 no.1
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• pp.31-38
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• 2013

Annual ring formation is considered a source of information to investigate the effects of environmental changes caused by temperature, air pollution, and acid rain on tree growth. A comparative investigation of annual ring growth of Cryptomeria japonica in relation to environmental changes was conducted at two sites in southern Korea (Haenam and Jangseong). Three wood disks from each site were collected from stems at breast height and annual ring growth was analyzed. Annual ring area at two sites increased over time (p > 0.05). Tree ring growth rate in Jangseong was higher than that in Haenam. Annual ring area increment in Jangseong was more strongly correlated with environmental variables than that in Haenam; annual ring growth increased with increasing temperature (p < 0.01) and a positive effect of $NO_2$ concentration on annual ring area (p < 0.05) could be attributed to nitrogen deposition in Jangseong. The correlation of annual ring growth increased with decreasing $SO_2$ and $CO_2$ concentrations (p < 0.01) in Jangseong. Variation in annual growth rings in Jangseong could be associated with temperature changes and N deposition. In Haenam, annual ring growth was correlated with $SO_2$ concentration (p < 0.01), and there was a negative relationship between precipitation pH and annual ring area (p < 0.01) which may reflect changes in nutrient cycles due to the acid rain. Therefore, the combined effects of increased $CO_2$, N deposition, and temperature on tree ring growth in Jangseong may be linked to soil acidification in this forest ecosystem. The interactions between air pollution ($SO_2$) and precipitation pH in Haenam may affect tree growth and may change nutrient cycles in this site. These results suggested that annual tree ring growth in Jangseong was more correlated with environmental variables than that in Haenam. However, the further growth of C. japonica forest at two sites is at risk from the long-term effects of acid deposition from fossil fuel combustion.

• Journal of Chest Surgery
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• v.54 no.1
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• pp.9-16
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• 2021

Background: The deposition of monomeric C-reactive protein (mCRP) in the myocardium aggravates ischemia-reperfusion injury (IRI) and myocardial infarction. Ischemic preconditioning (IPC) is known to protect the myocardium against IRI. Methods: We evaluated the effects of IPC on myocardium upon which mCRP had been deposited due to IRI in a rat model. Myocardial IRI was induced via ligation of the coronary artery. Direct IPC was applied prior to IRI using multiple short direct occlusions of the coronary artery. CRP was infused intravenously after IRI. The study included sham (n=3), IRI-only (n=5), IRI+CRP (n=9), and IPC+IRI+CRP (n=6) groups. The infarcted area and the area at risk were assessed using Evans blue and 2,3,5-triphenyltetrazolium staining. Additionally, mCRP immunostaining and interleukin-6 (IL-6) mRNA reverse transcription-polymerase chain reaction were performed. Results: In the IRI+CRP group, the infarcted area and the area of mCRP deposition were greater, and the level of IL-6 mRNA expression was higher, than in the IRI-only group. However, in the IPC+IRI+CRP group relative to the IRI+CRP group, the relative areas of infarction (20% vs. 34%, respectively; p=0.079) and mCRP myocardial deposition (21% vs. 44%, respectively; p=0.026) were lower and IL-6 mRNA expression was higher (fold change: 407 vs. 326, respectively; p=0.376), although the difference in IL-6 mRNA expression was not statistically significant. Conclusion: IPC was associated with significantly decreased deposition of mCRP and with increased expression of IL-6 in myocardium damaged by IRI. The net cardioprotective effect of decreased mCRP deposition and increased IL-6 levels should be clarified in a further study.

• 한국초전도학회:학술대회논문집
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• v.10
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• pp.145-145
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• 2000

Large area YBCO - films are series produced by thermal co-evaporation using a deposition scheme known as Garching process, which allows intermittent oxygen supply in a high vacuum ambient by an oxygen cup spaced closely underneath the moving substrates. The deposition area of 9" diameter is capable to handle very large wafers up to 8" diam. or numerous smaller wafers. The large distance between substrates and boat sources and an elaborate heater design guarantee excellent film uniformity over the entire deposition area. YBCO - films deposited by this technique are commercially fabricated for a variety of applications - the most prominent are resistive fault current limiters and microwave filters for mobile or satellite communications. IMUX and OMUX - filters are currently space qualined by Robert Bosch GmbH and are expected to be launched and installed on an experimental platform of the international space station ALPHA in 2001. Both of the above applications require quite different film specifications on the one hand, but at the same time extremely high uniformity and reproducibility on the other hand, since hundreds of YBCO - films are combined to large systems or have to be approved for manned space missions. The success of such projects is direct evidence that the technique of thermal evaporation is readily capable to meet these high demands and has become the major deposition technique to support the emerging HTS market.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.206-206
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• 2011

Nanoparticles have been received great attention from many researchers for several decades because of their good and unique properties. In particular, researches in the field of synthesis of bimetallic nanoparticles showed good results for the past ten years. In this research, Pd thinlayer on Au nanoparticles were synthesized by electrochemical deposition method. Well-defined Au(111) nanoparticles were synthesized by solution based reduction method. Electrochemical deposition conditions for Pd thinlayer on Au(111) nanoparticles surface were carefully regulated by controlling parameters of cyclic voltammetry. To calculate exact mass and surface area catalytic activities of deposited Pd thinlayer on Au(111) nanoparticle, electrochemically active surface area (ECSA) and mass of the deposited Pd thinlayer were measured by cyclic voltammetry in 0.1 M HClO4 solution. Afterward, catalytic activities of the deposited Pd thinlayer were measured in 0.1 M HClO4 + 0.2 M formic acid solution. In case of less negative deposition potential, the amounts of deposited Pd mass and surface area were small. However, mass and ECSA activity of the deposited Pd to oxidize formic acid were increased.

• Journal of Korean Society for Atmospheric Environment
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• v.16 no.6
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• pp.585-594
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• 2000

Through an application of Micrometerorological methods, we conducted measurements of Hg fluxes from Nan-Ji-Do which is well known as one of the major local areal sources in Seoul metropolitan area during Match/April of 2000. In the course of our study, we determined the concentration gradients of total gaseous Hg(between 20 and 2000 cm heights) and combined these data with Micrometerorological components to derive is fluxes. It turned out that emission from and dry deposition to soil surfaces occurred at the ratio of 72:27 from a total of 271 hourly measurements. The validity of measured concentration gradients( or resulting fluxes) was evaluated in terms of percent gradient. Accordingly, about more than 95% of gradient data derived were statistically significant. The mean fluxes of Hg across soil-air interface, when computed using the concentrations gradients and relevant parameters, were found at 253(during emission) and -846ng/$m^2$/h(during dry deposition) The occurrences of abnormalously high exchange rates appear to be the combined effects of enormously high gradient values and high transfer coefficients. While the emissions of Hg occurred constantly during the whole study periods, the occurrences of dry deposition events were observed most intensively during very limited time periods(3/29 and 4/3). The results of our study cleary indicated that the studied area is a strong local areal source, while exhibiting great potential as a major sink simultaneously.

• Journal of the Korean institute of surface engineering
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• v.29 no.5
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• pp.430-436
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• 1996

We have grown superconducting thin films on various substrates using a pulsed laser deposition (PLD) method. $YBa_2Cu_3O_7-\delta$ (YBCO) superconducting thin films with the superconducting transition temperature ($T_{c. offset}$) of 87K were grown on Si substrates using yittria-stabilized zirconia (YSZ) and $CeO_2$ double buffer layers. We have developed a large area pulsed laser deposition system. The system was designed to deposit up to 6 different materials on a large area substrate up to 7.5cm in diameter without breaking a vacuum. The preliminary runs of the deposition of YBCO superconducting thin films on $SrTiO_3$ substrate using this system showed a very uniform thickness profile over the entire substrate holder area. $T_{c}$ of the deposited YBCO thin film, however, was scattered depending on the position and the highest value was 85K.

• Environmental Sciences Bulletin of The Korean Environmental Sciences Society
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• v.10 no.S_2
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• pp.55-63
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• 2001

This work employs two models to quantify the size-segregated dry deposition fluxes of particle-bound N $O_3$$^{[-10]}$ , N $H_4$$^{+}$, and S $O_4$$^{2-}$ along the coastal area of Jeju Island based on the chemical composition data of aerosol collected during the springtime of 1995. The two approaches produced fairly comparable results, despite the feature differences between the two models. The modelling results obtained indicated that the mean dry deposition velocity was around 0.4 cm $s^{-1}$ for N $O_3$$^{[-10]}$ , 0.2 cm $s^{-1}$ for N $H_4$$^{+}$, and 0.3 cm $s^{-1}$ for S $O_4$$^{2-}$, and the dry deposition flux varied between 371~1368 $\mu\textrm{g}$ $m^{-2}$ da $y^{-1}$ for nitrate, 28~625 $\mu\textrm{g}$ $m^{-2}$ da $y^{-1}$ for ammonium, and 957~6088 $\mu\textrm{g}$ $m^{-2}$ da $y^{-1}$ for sulfate. Although difficulties in collecting giant and/or fine particles limited the understanding of the mass size distribution of particles and thus the ability to refine estimates of the dry deposition flux for the particulate matter, both models were still able to offer sufficient realism to explain the features of the available data collected from the coastal area of Jeju Island.and.

• Journal of the Korean Society for Heat Treatment
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• v.33 no.1
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• pp.20-24
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• 2020

Single crystal diamonds are in great demand in such fields as mechanical, electronic applications and optoelectronics. Large area single crystal diamonds are attracting attention in future industries for mass production and low cost. In this study, hot filament CVD (HFCVD) is used to grow large area single crystal diamond. However, the growth rate of large area single crystal diamond using HFCVD is known to be very low. The goal of this study is to use single crystal diamond substrates in HFCVD with methane-hydrogen gas mixtures to increase the growth rate of single crystal diamond and to optimize the conditions by analysing the effects of deposition conditions for high quality crystallinity. The deposition pressure, the ratio of CH₄/H₂ gas, the substrate temperature and the distance between the filament and the substrate were optimized. The sample used a 4×4 (mm²) size single crystal diamond substrate (100), the CH₄/H₂ gas ratio was fixed at 5%, the substrate temperature was synthesized to about 1000℃. At this time, the deposition pressure was changed to three types of 50, 75, 85 Torr and deposited. Finally, optimization was investigated under pressure conditions to analyse the growth rate and quality of single crystal diamond.