• Title/Summary/Keyword: deposited layer

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Formation of the $CoSi_{2}$ using Co/Zr Bilayer on the Amorphous and the Single Crystalline Si Substrates (단결정과 비정질 Si 기판에서 Co/Zr 이중층을 이용한 $CoSi_{2}$ 형성)

  • Kim, Dong-Wook;Jeon, Hyeong-Tag
    • Korean Journal of Materials Research
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    • v.8 no.7
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    • pp.621-627
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    • 1998
  • The formation of Co-silicide between Co/Zr bilayer on the amorphous and crystalline Si substrates has been investigated. The films of Zr(50$\AA$) and Co(l50$\AA$) were deposited with e-beam evaporation system and were heattreated with the rapid thermal annealing system at the temperatures between 50$0^{\circ}C$ and 80$0^{\circ}C$ with 10$0^{\circ}C$ increments for 30 seconds. The phase identification of Co-silicide was carried out by XRD and the chemical analysis was examined by AES and RBS. The interface morphologies of Co/Zr bilayer films were investigated by cross sectional TEM and HRTEM. $CoSi_2$ was formed epitaxially on the crystalline Si substrate above $700^{\circ}C$ while polycrystalline $CoSi_2$ was grown on the amorphous Si substrate. The formation temperature of Co-silicide on the amorphous Si substrate was about 100 C lower than that on the crystalline Si. The COzSi phase was not identified on the both Si substrates. The formation temperature of first phase of Co-silicide on ColZr bilayer was higher than that on Co mono layer. CoSizlayer formed on the amorphous Si substrate exhibits better uniformity compared to the CoSiz formed on the crystalline substrate. The sheet resistance of CoSiz layer on crystalline Si was lower than that on the amorphous Si at high temperatures.tures.

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THE CHANGE OF THE CONFIGURATION OF HYDROXYAPATITE CRYSTALS IN ENAMEL BY CHANGES OF PH AND DEGREE OF SATURATION OF LACTIC ACID BUFFER SOLUTION (유산 완충용액의 pH 및 포화도 변화에 따른 법랑질 내 수산화인회석 결정 형태의 변화)

  • Chon, Young-Eui;Jung, Il-Young;Roh, Bung-Duk;Lee, Chan-Young
    • Restorative Dentistry and Endodontics
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    • v.32 no.6
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    • pp.498-513
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    • 2007
  • Since it was reported that incipient enamel caries can be recovered, previous studies have quantitatively evaluated that enamel artificial caries have been, remineralized with fluoride showing simultaneously the increase of width of surface layer and the decrease of width of the body of legion. There is, however, little report which showed that remineralization could occur without fluoride. In addition, the observations on the change of hydroxyapatite crystals also have been scarcely seen. In this study, enamel caries in intact premolars or molars was induced by using lactic acidulated buffering solutions over 2 days. Then decalcified specimens were remineralized by seven groups of solutions using different degree of saturation(0.212, 0.239, 0.301, 0.355) and different pH(5.0, 5.5, 6.0) over 10 days. A qualitative comparison to changes of hydroxyapatite crystals after fracturing teeth was made under SEM(scanning electron microscopy) and AFM(atomic force microscopy). The results were as follows: 1. The size of hydroxyapatite crystals in demineralized area was smaller than the normal ones. While the space among crystals was expanded, it was observed that crystals are arranged irregularly. 2. In remineralized enamel area, the enlarged crystals with various shape were observed when the crystals were fused and new small crystals in intercrystalline spaces were deposited. 3. Group 3 and 4 with higher degree of saturation at same pH showed the formation of large clusters by aggregation of small crystals from the surface layer to the lesion body than group 1 and 2 with relatively low degree of saturation at same pH did. Especially group 4 showed complete remineralization to the body of lesions. Group 5 and 6 with lower pH at similar degree of saturation showed remineralization to the body of lesions while group 7 didn't show it. Unlike in Group 3 and 4, Group 5 and 6 showed that each particle was densely distributed with clear appearance rather than crystals form clusters together.

Exchange Coupling Field and Thermal Stability of Ni80Fe20/[Ir22/Mn78-Mn]/Co75Fe25 Multilayer Depending on Mn Content (Ni80Fe20/[Ir22/Mn78-Mn]/Co75Fe25 다층박막에서 Mn 함유량에 의존하는 교환결합력과 열적안정성)

  • Kim, B.K.;Lee, J.Y.;Kim, S.S.;Hwang, D.G.;Lee, S.S.;Hwang, J.Y.;Kim, M.Y.;Rhee, J.R.
    • Journal of the Korean Magnetics Society
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    • v.13 no.5
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    • pp.187-192
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    • 2003
  • The magnetic and thermal properties of NiFe/[IrMn-Mn]/CoFe with Mn additions have been studied. As-deposited CoFe pinned layers with [IrMn-Mn]layer had dominantly larger exchange biasing field ( $H_{ex}$) and blocking temperature ( $T_{b}$) than those with pure I $r_{22}$M $n_{78}$ used. The $H_{ex}$ and $T_{b}$ improved with 76.8-78.1 vol% Mn, but those of the NiFe/IrMn/CoFe dropped considerably with more addition of 0.6 vol % Mn. The average x-ray diffraction peak ratios of fcc [(111)CoFe, NiFe]/(111)IrM $n_3$ textures for the Mn inserted total vol of 75.5, 77.5, and 79.3% were about 1.4, 0.8, and 0.6, respectively. For the sample without Mn inserted layer, the $H_{ex}$ between IrMn and CoFe layers was almost zero, but it increased to 100 Oe after annealing of 250 $^{\circ}C$. For as-grown two multilayers samples with ultra-thin Mn layers of 77.5 and 78.7 vol %, the $H_{ex}$s were 259 and 150 Oe, respectively. In case of IrMn with 77.5 vol% Mn, the $H_{ex}$ was increased up to 475 Oe at 350 $^{\circ}C$ but decreased to 200 Oe at 450 $^{\circ}C$, respectively. The magnetic properties and thermal stabilities of NiFe/[IrMn-Mn]/CoFe multilayer were enhanced with Mn additions. In applications where higher $H_{ex}$ and $T_{b}$ are required, proper contents of Mn can be used. be used. used.

Preparation of $SrTiO_3$ Thin Film by RF Magnetron Sputtering and Its Dielectric Properties (RF 마그네트론 스퍼터링법에 의한 $SrTiO_3$박막제조와 유전특성)

  • Kim, Byeong-Gu;Son, Bong-Gyun;Choe, Seung-Cheol
    • Korean Journal of Materials Research
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    • v.5 no.6
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    • pp.754-762
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    • 1995
  • Strontium titanate(SrTiO$_3$) thin film was prepared on Si substrates by RF magnetron sputtering for a high capacitance density required for the next generation of LSTs. The optimum deposition conditions for SrTiO$_3$thin film were investigated by controlling the deposition parameters. The crystallinity of films and the interface reactions between SrTO$_3$film and Si substrate were characterized by XRD and AES respectively. High quality films were obtained by using the mixed gas of Ar and $O_2$for sputtering. The films were deposited at various bias voltages to obtain the optimum conditions for a high quality file. The best crystallinity was obtained at film thickness of 300nm with the sputtering gas of Ar+20% $O_2$and the bias voltage of 100V. The barrier layer of Pt(100nm)/Ti(50nm) was very effective in avoiding the formation of SiO$_2$layer at the interface between SrTiO$_3$film and Si substrate. The capacitor with Au/SrTiO$_3$/Pt/Ti/SiO$_2$/Si structure was prepared to measure the electric and the dielectric properties. The highest capacitance and the lowest leakage current density were obtained by annealing at $600^{\circ}C$ for 2hrs. The typical specific capacitance was 6.4fF/$\textrm{cm}^2$, the relative dielectric constant was 217, and the leakage current density was about 2.0$\times$10$^{-8}$ A/$\textrm{cm}^2$ at the SrTiO$_3$film with the thickness of 300nm.

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Analyze of I-V Characteristics and Amorphous Sturcture by XRD Patterns (XRD 패턴에 의한 비정질구조와 I-V 특성분석)

  • Oh, Teresa
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.20 no.7
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    • pp.16-19
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    • 2019
  • A thinner film has superior electrical properties and a better amorphous structure. Amorphous structures can be effective in improving conductivity through a depletion effect. Research is needed on the Schottky contact, where potential barriers are formed, as a way to identify these characteristics. $SiO_2/SnO_2$ thin films were prepared to examine the amorphous structure and Schottky contact, $SiO_2$ thin films were prepared using Ar = 20 sccm. $SnO_2$ thin films were deposited using mixed gas with a flow rate of argon and oxygen at 20 sccm, and $SnO_2$ thin films were added by magnetron sputtering and treated at $100^{\circ}C$ and $150^{\circ}C$. To identify the conditions under which the amorphous structure was constructed, the XRD patterns were investigated and C-V and I-V measurements were taken to make Al electrodes and perform electrical analysis. The depletion layer was formed by the recombination of electrons and holes through the heat treatment process. $SiO_2/SnO_2$ thin films confirmed that the pores were well formed when heat treated at $100^{\circ}C$ and an electric current was applied over the micro area. An amorphous $SiO_2/SnO_2$ thin film with heat treatment at $100^{\circ}C$ showed no reflection at $33^{\circ}\;2{\theta}$ in the XRD pattern, and a reflection at $44^{\circ}2\;{\theta}$. The macroscopic view (-30 V

Voltammetric Sensor Incorporated with Conductive Polymer, Tyrosinase, and Ionic Liquid Electrolyte for Bisphenol F (전도성고분자, 티로시나아제 효소 및 이온성 액체 전해질을 융합한 전압전류법 기반의 비스페놀F 검출 센서)

  • Sung Eun Ji;Sang Hyuk Lee;Hye Jin Lee
    • Applied Chemistry for Engineering
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    • v.34 no.3
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    • pp.258-263
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    • 2023
  • In this study, conductive polymers and the enzyme tyrosinase (Tyr) were deposited on the surface of a screen printed carbon electrode (SPCE), which can be fabricated as a disposable sensor chip, and applied to the detection of bisphenol F (BPF), an endocrine disruptor with proven links to male diseases and thyroid disorders, using electrochemical methods. On the surface of the SPCE working electrode, which was negatively charged by oxygen plasma treatment, a positively charged conductive polymer, poly(diallyldimethyl ammonium chloride) (PDDA), a negatively charged polymer compound, poly(sodium 4-styrenesulfonate) (PSS), and another layer of PDDA were layered by electrostatic attraction in the order of PDDA, PSS, and finally PDDA. Then, a layer of Tyr, which was negatively charged due to pH adjustment to 7.0, was added to create a PDDA-PSS-PDDA-Tyr sensor for BPF. When the electrode sensor is exposed to a BPF solution, which is the substrate and target analyte, 4,4'-methylenebis(cyclohexa-3,5-diene-1,2-dione) is generated by an oxidation reaction with the Tyr enzyme on the electrode surface. The reduction process of the product at 0.1 V (vs. Ag/AgCl) generating 4,4'-methylenebis(benzene-1,2-diol) was measured using cyclic and differential pulse voltammetries, resulting in a change in the peak current with respect to the concentration of BPF. In addition, we compared the detection performance of BPF using an ionic liquid electrolyte as an alternative to phosphate-buffered saline, which has been used in many previous sensing studies. Furthermore, the selectivity of bisphenol S, which acts as an interfering substance with a similar structure to BPF, was investigated. Finally, we demonstrated the practical applicability of the sensor by applying it to analyze the concentration of BPF in real samples prepared in the laboratory.

A Study on the Nonpoint Pollutant Loadings in Urban and Agricultural Areas (도시(都市)와 농촌(農村)에서의 비점원(非點源) 오염물(汚染物) 배출양상(排出樣相)에 관한 연구(硏究))

  • Lim, Bong Su;Lee, Byung Hyun;Choi, Eui So
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.4 no.2
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    • pp.45-53
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    • 1984
  • This study was conducted to investigate characteristics of nonpoint pollutant discharges and concentrations in runoff from the urban and agricultural areas in Korea. The analytical parameters used for this study were COD, BOD and SS. This study was conducted during the period from May to August 1981. Nonpoint pollutant mass loadings from the urban area were influenced by the rainfall intensity and the duration of rainfall, and etc. The concentrations of pollutants in the first flush was higher as the discharges increased. It was, however, found that the concentrations of pollutants in the heavy storm runoff were decreased due to the dilution effect. When other rainfall followed a peak rainfall, the concentrations of pollutants were lower than expected, because the first flush conveyed the most of pollutants deposited on the combined sewers. However the concentrations were increased in proportion to the increased flow when a rainfall of higher intensity than the first flush was continued. Yearly area yield rates in kg/ha were estimated to be 690.5(489.9~1,328) of COD, 319.7(226.8~614.8) of BOD, and 831.2(589.7~1,598) of SS. Pollutant sources in agricultural area were of the domestic waste water, manure composting stack, and agricultural solid wastes and etc. In the paddy field, yearly area yield rates in kg/ha were estimated to be 623.4(21.7~114) of COD, 18.65(9.53~34.5) of BOD, and 91.9(46.3~171.8) of SS. In the crop land, however, yearly rates in kg/ha were estimated to be 91.9(46.3~171.8) of COD, 23.09(11.7~42.5) of BOD, and 23.09(11.4~43.4) of SS. Pollutant sources in the feedlot area were originating from the feces of cattle, the cleaning water, the wastes spilled from manure composting stack during rain. Yearly area yield rate in kg/ha was estimated to be 3.804(2,489~6,658) of COD, 2.047(464~2,900) of BOD, and 1.149 (729~1,442) of SS. Pollutant discharges in the forest area were resulted from the organic layer like leaves and others deposited on the surface. Yearly area yield rate in kg/ha was estimated to be 9.86(5.45~18.56) of COD, 3.48(1.67~7.54) of BOD, and 4.64(9.74~10.35) of SS.

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Division of Soil Properties in Reclaimed Land of the Mangyeong and Dongjin River Basin and Their Agricultural Engineering Management (만경강과 동진강 유역 간척농경지 토양특성 구분과 농공학적 관리 대책)

  • Hwang, Seon-Woong;Kang, Jong-Gook;Lee, Kyung-Do;Lee, Kyung-Bo;Park, Ki-Hun;Chung, Doug-Young
    • Korean Journal of Soil Science and Fertilizer
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    • v.45 no.3
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    • pp.444-450
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    • 2012
  • The physical and chemical properties of soil in the Mangyeong and Dongjin river basin had been investigated in order to establish the most optimum soil improvement plan on the reclaimed land. The total soil area by reclamation in Saemangeum basin is 113,971 ha. The classification by the distribution of soil series and soil texture is as following. 13 soil series including Chonnam, Buyong and Chonbuk series are period-unknown areas. Regarding the soil texture, they are fine silty ~ clayey very fine. From 1920s to 1960s, Mangyeong, Gwanghwal and Chonbuk series had coarse silty textured soil. After the 1970s, Mangyeong, Gwanghwal, Munpo, Yeompo, Poseung, Gapo and Hasa series have more sandy soil ~ moderately coarse loamy textured soil. Regarding the chemical properties, the concentrations of EC, Exch. $K^+$, $Mg^{2+}$, $Na^+$ and pH are high regardless of the time of reclamation. On the other hand, organic matter (OM) of top soil were 3.3~16.1 g $kg^{-1}$. The organic matter contents were very low though the soil had been farmed for a long time. Furthermore, the deep soil had almost no organic matter with 5.6~1.1 g $kg^{-1}$. The reason is believed that there had not been any movement of OM and clay because pressure or induced pans had been formed by large agricultural machineries and poor vertical drain. Regarding the forming of illuvial horizon (B layer) which tells the development extent of soil, only in the Hwapo reclaimed area where rice had been cultivated for past 90 years, Fe and Mn from top soil are deposited at underground 20~30 cm with 7~8 cm thickness by the movement of clay. It is believed that it had been possible because the earthiness is silty clay loam soil with relatively high content of clay. The soils are soil with concern of damage from sea water, soil on flimsy ground and sandy soil. Therefore, soil improvement for stable crop production can be expected; if the water table would be lowered by subsurface drainage, the water permeability would be enhanced by gypsum and organic matter, and the sandy soil would be replaced by red soil with high content of clay.

Early Life History and Spawning Behavior of the Gobiid Fish, Luciogobius guttatus Gill (미끈망둑, Luciogobius guttatus Gill의 산란습성(産卵習性)및 초기생활사(初期生活史))

  • Kim, Yong-Uk;Han, Kyeong-Ho;Kang, Chung-Bae;Ryu, Jung-Wha
    • Korean Journal of Ichthyology
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    • v.4 no.1
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    • pp.1-13
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    • 1992
  • The gobiid fish, Luciogobius guttalus Gill has an anguilliform with some blackish and reddish brown color in life. It grows up to 90mm in total length. The specimens have been collected from several localities in the southern parts of Korea and Hokkaido, Japan. During the ebb tide, the fish was found in high level of intertidal zone exposed to the air among pebbles in the hollows and slopes of rocks. There are also some other small gobiid fishes comprising 3 species of relative gobies and 1 species of blennioid fish. A total of 5 egg masses were collected from the coast of Haeundae in April to May 1990. Each egg mass was deposited in one layer on the underside of a stone embedded in pebbles and guarded by the male parent. The eggs are club-shaped ranging from 2.71 to 2.80mm in long axis and from 0.65 to 0.74mm in short axis. The eggs were hatched in 98 hours after incubatied at the temperature varying from 19.5 to $25.5^{\circ}C$The newly hatched larvae were from 3.85 to 4.00mm in total length with 35~36 myomeres. In eleven days after hatching, total length reached 5.50mm. The part of the fin-fold of the future dorsal and anal fins became high. In sixteen days after hatching, the lavae averaged 6.20mm in total length and the caudal notochord flex at $45^{\circ}$. The larvae reached the juvenile stage in 48~50 days after hatching and attained 12.80~14.00mm in total length, and all fin-rays was formed. Ossification of the cranium took place at 5.50mm of mean total length in parasphenoid and basioccipital. Ossification of the visceral skeleton occurred in areas where active movements of bones are required, notalbly in the parts of feeding and respiration. Vertebrae began to develop from the anterior end to ossify posteriorly. Neural and haemal spines of vertebrae ossified always prior to the corresponding centra. When larvae reached to about 6.60mm in mean total length (17~18 days after hatching), jaw bones were more repidly ossified than vertebrae and cranium. Ossification of all bones nearly completed when the larvae reached to 13.40mm in mean total length (47~50 days after hatching).

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Low temperature plasma deposition of microcrystalline silicon thin films for active matrix displays: opportunities and challenges

  • Cabarrocas, Pere Roca I;Abramov, Alexey;Pham, Nans;Djeridane, Yassine;Moustapha, Oumkelthoum;Bonnassieux, Yvan;Girotra, Kunal;Chen, Hong;Park, Seung-Kyu;Park, Kyong-Tae;Huh, Jong-Moo;Choi, Joon-Hoo;Kim, Chi-Woo;Lee, Jin-Seok;Souk, Jun-H.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.107-108
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    • 2008
  • The spectacular development of AMLCDs, been made possible by a-Si:H technology, still faces two major drawbacks due to the intrinsic structure of a-Si:H, namely a low mobility and most important a shift of the transfer characteristics of the TFTs when submitted to bias stress. This has lead to strong research in the crystallization of a-Si:H films by laser and furnace annealing to produce polycrystalline silicon TFTs. While these devices show improved mobility and stability, they suffer from uniformity over large areas and increased cost. In the last decade we have focused on microcrystalline silicon (${\mu}c$-Si:H) for bottom gate TFTs, which can hopefully meet all the requirements for mass production of large area AMOLED displays [1,2]. In this presentation we will focus on the transfer of a deposition process based on the use of $SiF_4$-Ar-$H_2$ mixtures from a small area research laboratory reactor into an industrial gen 1 AKT reactor. We will first discuss on the optimization of the process conditions leading to fully crystallized films without any amorphous incubation layer, suitable for bottom gate TFTS, as well as on the use of plasma diagnostics to increase the deposition rate up to 0.5 nm/s [3]. The use of silicon nanocrystals appears as an elegant way to circumvent the opposite requirements of a high deposition rate and a fully crystallized interface [4]. The optimized process conditions are transferred to large area substrates in an industrial environment, on which some process adjustment was required to reproduce the material properties achieved in the laboratory scale reactor. For optimized process conditions, the homogeneity of the optical and electronic properties of the ${\mu}c$-Si:H films deposited on $300{\times}400\;mm$ substrates was checked by a set of complementary techniques. Spectroscopic ellipsometry, Raman spectroscopy, dark conductivity, time resolved microwave conductivity and hydrogen evolution measurements allowed demonstrating an excellent homogeneity in the structure and transport properties of the films. On the basis of these results, optimized process conditions were applied to TFTs, for which both bottom gate and top gate structures were studied aiming to achieve characteristics suitable for driving AMOLED displays. Results on the homogeneity of the TFT characteristics over the large area substrates and stability will be presented, as well as their application as a backplane for an AMOLED display.

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