• Title/Summary/Keyword: deposit stress

검색결과 90건 처리시간 0.02초

Crystallization and Characterization of GeSn Deposited on Si with Ge Buffer Layer by Low-temperature Sputter Epitaxy

  • Lee, Jeongmin;Cho, Il Hwan;Seo, Dongsun;Cho, Seongjae;Park, Byung-Gook
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제16권6호
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    • pp.854-859
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    • 2016
  • Recently, GeSn is drawing great deal of interests as one of the candidates for group-IV-driven optical interconnect for integration with the Si complementary metal-oxide-semiconductor (CMOS) owing to its pseudo-direct band structure and high electron and hole mobilities. However, the large lattice mismatch between GeSn and Si as well as the Sn segregation have been considered to be issues in preparing GeSn on Si. In this work, we deposit the GeSn films on Si by DC magnetron sputtering at a low temperature of $250^{\circ}C$ and characterize the thin films. To reduce the stresses by GeSn onto Si, Ge buffer deposited under different processing conditions were inserted between Si and GeSn. As the result, polycrystalline GeSn domains with Sn atomic fraction of 6.51% on Si were successfully obtained and it has been demonstrated that the Ge buffer layer deposited at a higher sputtering power can relax the stress induced by the large lattice mismatch between Si substrate and GeSn thin films.

나노 X-선 쉐도우 마스크를 이용한 고폭비의 나노 구조물 제작 (A Novel Fabrication Method of the High-Aspect-Ratio Nano Structure (HAR-Nano Structure) Using a Nano X-Ray Shadow Mask)

  • 김종현;이승섭;김용철
    • 대한기계학회논문집A
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    • 제30권10호
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    • pp.1314-1319
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    • 2006
  • This paper describes the novel fabrication method of the high-aspect-ratio nano structure which is impossible by conventional method using a shadow mask and a Deep X-ray Lithography (DXRL). The shadow mask with $1{\mu}m-sized$ apertures is fabricated on the silicon membrane using a conventional UV-lithography. The size of aperture is reduced to 200nm by accumulated low stress silicon nitride using a LPCVD (low pressure chemical vapor deposition) process. The X-ray mask is fabricated by depositing absorber layer (Au, $3{\mu}m$) on the back side of nano shadow mask. The thickness of an absorber layer must deposit dozens micrometers to obtain contrast more than 100 for a conventional DXRL process. The thickness of $3{\mu}m-absorber$ layer can get sufficient contrast using a central beam stop method, blocking high energy X-rays. The nano circle and nano line, 200nm in diameter in width, respectively, were demonstrated 700nm in height with a negative photoresist of SU-8.

Naphthalene Trisulfonic Acid가 니켈 전착층의 표면 특성에 미치는 영향 (Effects of Naphthalene Trisulfonic Acid on the Surface Properties of Electrodeposited Ni Layer)

  • 이주열;김만;권식철;김정환;김인곤
    • 한국표면공학회지
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    • 제39권1호
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    • pp.13-17
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    • 2006
  • The effects of an organic additive, naphthalene trisulfonic acid (NTSA), contained in the nickel sulfamate bath on the surface properties of the electrodeposited nickel layer were investigated through electrochemical technique, x-ray diffraction analysis, and microscopic observation. The addition of NTSA facilitated the oxidation process of electrodeposited nickel layer during anodic scan and also increased the hardness and internal stress of the nickel film as the applied current density became higher. It seems that NTSA modulated the deposit structure during electrodeposition and so induced higher distribution of (110) orientation with respect to (200). With the increase of the NTSA in the bath, nickel layer was formed in small grain size, which resulted in enhanced surface evenness and brightness.

Bacillus sp. PCE3 균주에 의한 질산이온 흡수 특성 (Characterization of Microbial Nitrate Uptake by Bacillus sp. PCE3)

  • 윤영배;박수진;한민우;김영기
    • Journal of Applied Biological Chemistry
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    • 제56권4호
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    • pp.241-244
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    • 2013
  • 질산이온은 식물체의 주된 영양분중의 하나이며, 다수확을 위하여 자주 과량이 시용되고 있다. 이것은 토양중 질산이온이 집적되어 염류장애의 주된 이유가 되며, 유리 및 비닐 온실의 토양에서 심각한 문제가 될 수 있다. 본 연구에서는 축산농가의 배수구 주위 젖은 토양으로 부터 6가지 미생물을 분리하였으며, 그들의 질산이온 흡수 활성을 측정하였다. 이 미생물들은 1,000-3,000 ppm (10-50 mM) 수준의 질산이온을 제거할 수 있었으며, 특히 PCE3 균주는 4,000 ppm으로 가장 높은 활성을 보였다. 이 균주들을 동정하기 위하여, 16S rRNA 유전자 서열을 결정하고 분석하였다. 이들 균주중 PCE3 균주는 Bacillus 속으로 확인되었다. 균주의 성장과 질산이온 흡수활성을 측정하였을 때, $37^{\circ}C$와 pH 7-9 범위에서 최대 값을 보였다. Bacillus sp. PCE3 균주는 배지의 질산이온 농도에 따라 40-60 mM (2,500-3,700 ppm)의 질산이온을 제거할 수 있었다. 그러므로, Bacillus sp. PCE3 균주는 질산이온이 집적한 시설원예 토양에서 질산이온 제거에 유용하게 이용될 수 있을 것이다.

갈륨이 첨가된 산화아연막의 코팅에 따른 미세팁 구조 탄소나노튜브의 전계방출 특성 및 장시간 안정성 (Field-emission Properties and Long-term Stability of Tip-type Carbon Nanotubes Coated with Gallium-incorporated Zinc Oxide Films)

  • 김종필;노영록;조경철;이상렬;박진석
    • 반도체디스플레이기술학회지
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    • 제8권4호
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    • pp.65-69
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    • 2009
  • Carbon nanotubes (CNTs) were coated with undoped zinc oxide (ZnO) or 5 wt% gallium-incorporated ZnO (GZO) using various deposition conditions. The CNTs were directly grown on conical-type tungsten substrates at $700^{\circ}C$ using inductively coupled plasma-chemical vapor deposition. The pulsed laser deposition technique was used to deposit the ZnO and GZO thin films with very low stress. Field-emission scanning electron microscopy and high-resolution transmission electron microscopy were used to monitor the variations in the morphology and microstructure of CNTs prior to and after ZnO or GZO coating. The formation of ZnO and GZO films on CNTs was confirmed using energy-dispersive x-ray spectroscopy. In comparison to the as-grown (uncoated) CNT emitter, the CNT emitter that was coated with a thin (10 nm) GZO film showed remarkably improved field emission characteristics, such as the emission current of $325\;{\mu}A$ at 1 kV and the threshold field of $1.96\;V/{\mu}m$ at $0.1\;{\mu}A$, and it also exhibited the highly stable operation of emission current up to 40 h.

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조직판막의 실패와 석회화에 관한 연구 (The relation of the bioprosthetic valve failure to its calcification)

  • 홍유선
    • Journal of Chest Surgery
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    • 제22권6호
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    • pp.1001-1012
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    • 1989
  • In 1968, Carpentier and his associates introduced glutaraldehyde as a compound for preparing cardiac tissue valve, and this technique has provided a considerably more suitable and durable tissue valve substitute. To increase further durability of valve tissue, Reis and his colleagues designed a flexible stent to reduce the stress on the heterogeneous tissue valve mounted. However with the advent of more innovative mechanical valve currently, many bioprosthetic valves are being substituted by mechanical valves at our department of cardiothoracic surgery because of bioprosthetic valve failure. Main cause of bioprosthetic valves failure were calcification or/and tear of tissue valves. The purpose of this retrospective study is to clarify the relationship between the patients clinical profile during implantation of tissue valves and pathologic features of the failed bioprosthetic valve. From March, 1982 through June, 1988, 53 bioprosthetic heart valves that had been ex-planted from 45 patients at the department of cardiac surgery of Yonsei University Hospital were subjected to this study. The patients were 10 to 65 year-old [mean age: 30.3 yr] with 17 males and 28 females. Re-replacements of prosthetic valves were carried out twenty nine in mitral position, eight in aortic position and eight in both aortic and mitral position simultaneously. The grading and location for calcification of valves were verified by radiograms. The calcification of the explanted valves leaflets was graded from 0 to 4 plus according to Cipriano and associates method. The types of tear and perforation of leaflet were classified into four types as Ishihara has adopted initially in 1981. In younger age group under thirty three years, explanted tissue valves were significantly more affected in terms of grades of severity of valve calcification as compared with older age group [p < 0.035]. Valve calcification appeared more severe in male as compared to female [p< 0.002]. Ionescu-Shiley bovine pericardial bioprosthetic valves showed more severe calcification than Hancock porcine tissue valves [p< 0.035]. Calcium deposit was found very prevalent at the area of commissural attachment [86 % of all]. Type I of valve rupture was shown to be related with simultaneous calcification. However, the relation of explanted valve position, duration of implanted prosthetic valve, atrial fibrillation and anticoagulant therapy to the severity of bioprosthetic valve calcification were not significantly clear statistically [p > 0.05].

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인천지역 준설토의 응력이력을 고려한 잔류 침하량 (Residual Settlement for Dredged Soil Deposit Considering Stress History in Incheon Area)

  • 천병식;이인훈;박덕흠;성화돈
    • 한국지반환경공학회 논문집
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    • 제9권2호
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    • pp.5-13
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    • 2008
  • 본 연구에서는 원지반 상부에 분포하는 준설토 매립층으로 인한 원지반의 압밀이력을 분석하기 위해 다양한 현장 원위치 시험과 실내시험을 수행하였으며, 특히 준설매립하중에 의한 원지반 압밀이 완료되지 않은 경우 추가 성토하중 재하시 합리적인 침하량 산정을 위해 CPTu 시험을 수행하였다. 원지반의 CPTu 시험결과 준설매립하중에 의한 원지반 연약점토층의 압밀도는 평균 80%의 정도를 보였다. 연구대상지역은 과거 준설매립하중에 대하여 원지반의 압밀이 완료되지 않은 상태이므로 추가 성토하중 재하시 잔류 압밀도(20%)만큼의 잔류침하를 고려하여 압밀침하량을 산정하였다. 추가 성토하중(${\Delta}P_s$) 재하시 압밀진행중인 원지반의 잔류 압밀도를 고려하지 않는 경우 잔류 압밀도(20%)만큼의 잔류침하에 의해 과다한 침하가 예상되며, PBD공법에 의한 연약지반 개량시 소요 압밀도 확보가 어려운 것으로 나타났다.

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동적 나노압침법을 이용한 Ni-P 도막의 특성 연구 (Characterization of Electro-deposited Ni-P Layer by Using Dynamic Nano-Indentation Method)

  • 정무영;백열;강보경;최용;권혁주
    • 한국표면공학회지
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    • 제51권4호
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    • pp.197-201
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    • 2018
  • Dynamic nano-indentation method was applied to characterize thin electroformed Ni-P layers. The Ni-P layers were produced in a sulphamic acid bath at $50^{\circ}C$ in $0.02A/cm^2$ for 10-60 minutes. The chemical analyses by XRD and EDX showed that the Ni-P layers were very fine grains with mainly $Ni_3P$ with Ni. The surface roughness determined by atomic force microscopy increased with thickness, which was relative to the surface morphology. The nano-hardness and the stiffness of the thin Ni-P layers with thickness of 1.9, 6.2 and $7.5{\mu}m$ were 5.52, 6.52 and 6.77 [GPa] and 56.7, 76.2 and 108.0 [${\mu}N/nm$], respectively. The elastic modulus of the Ni-P layer increased with thickness such as 37.29, 54.50 and 78.76 [GPa], respectively. The surface roughness of the electroplated Ni-P layers with diverse thickness was 8.66, 18.56 and 35.22 [nm], respectively. The enhanced nano-mechanical properties were related to mainly residual stress of the Ni-P layers.

유효콘계수를 이용한 포화점토의 비배수전단강도 평가 (Estimation of Undrained Shear Strength for Clays Using Effective Cone Factor)

  • 김창동;김수일;이준환
    • 한국지반공학회논문집
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    • 제24권11호
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    • pp.133-141
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    • 2008
  • 본 연구는 피에조콘관입시험(CPTu) 결과를 이용한 점토의 비배수전단강도 평가에 관한 것으로서, CPTu 시험결과로부터 발생할 수 있는 불확실성을 최소화하고 보다 경제적이며 효과적인 비 배수전단강도 평가법 개발을 목적으로 한다. 이를 위하여 국내 남해안 지역의 해성 점토지반을 대상으로 하여, 다양한 현장 및 실내시험을 수행하였다. 제안된 방법에서는 기존 방법에 포함되어 있는 상재압(${\sigma}_{v0}$)의 보정절차가 요구되지 않으며, CPTu 결과인 콘지지력($q_t$)과 초기간극수압($u_i$)의 측정만으로 비배수전단강도의 추정이 가능하도록 하여, 조사과정에서의 추가비용이나 시간소모를 최소화하도록 하였다. 제안된 방법의 적온성 평가를 위하여 국내의 다양한 토질특성을 나타내는 4개 지역에서 수행된 피에조콘관입시험 결과를 수집하였으며, 이를 토대로 제안된 방법에 의한 결과와 실측된 결과와의 비교분석을 실시하였다. 분석결과, 예측된 결과는 측정된 결과와 유사함을 확인할 수 있었다.

초연약 준설 매립지반의 비선형 유한변형 압밀해석기법 - Part II: 해석기법과 Craney Island 사례분석 (Analysis Method for Non-Linear Finite Strain Consolidation for Soft Dredged Soil Deposit - Part II: Analysis Method and Craney Island Case Study)

  • 최항석;곽태훈;이철호;이동섭;티모시 스탁
    • 한국지반공학회논문집
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    • 제27권11호
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    • pp.5-15
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    • 2011
  • 본 논문에서는 압축성이 매우 큰 준설 매립지반의 비선형 유한변형 압밀거동을 평가하기 위해 두 가지 압밀해석방법이 제시되었다. 이를 위해 동반논문에서 얻어진 초기간극비, 비선형의 간극비-유효응력 관계와 간극비-투수계수 관계를 비선형 압밀 물성치로 적용하였다. 단순화된 Morris의 간편 이론해(2002)와 대표적인 일차원 비선형 유한변형 압밀 프로그램인 PSDDF(Primary Consolidation, Secondary Compression, and Desiccation of Dredged Fill)의 해석결과를 일련의 실내실험을 통해 얻어진 인천 준설토와 카올리나이트의 자중압밀 침하거동과 비교하여, 실제 준설 매립지반의 장기간 비선형 유한변형 압밀거동을 모사하는데 두 방법의 적용이 타당함을 보였다. 또한, Craney Island 인공섬 사례분석을 통하여 적절한 비선형 유한변형 압밀 파라메터 선정의 중요성과 준설 매립지반의 압밀거동 평가시 PSDDF의 적용성을 제시하였다.