• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.10 no.1
• /
• pp.111-116
• /
• 2006

In this paper, the image sensor using the a-Si:H TFT is proposed. The optimum amorphous silicon thin film is deposited using plasma enhanced chemical vapor deposition (PECVD). TFT and photodiode both with the thin film are fabricated and form image sensor. The photodiode shows that Idark is $10^{-12}A$, Iphoto is $10^{-9}A$ and Iphoto/Idark is $10^3$, respectively. In the case of a-Si:H TFT, it indicates that Ion/Ioff is $10^6$, the drain current is a few ${\mu}A$ and Vth is $2\~4$ volts. For the analysis on the fabricated image sensor, the reverse bias of -5 voltage in ITO of photodiode and $70{\mu}sec$ pulse in the gate of TFT are applied. The image sensor with good property was conformed through the measured photo/dark current.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.414.1-414.1
• /
• 2016

스크린 프린팅법을 이용한 태양전지의 전극은 주로 고가의 은을 사용하기에 태양전지의 저가화에 한계를 가지고 있다. 고효율 결정질 실리콘 태양전지의 원가절감의 문제 해결방안으로 박형 웨이퍼 연구개발이 많은 관심을 받고 있다. 본 연구에서는 은 전극을 대체 할 수 있는 니켈/구리 전극을 사용하였고, 박형 웨이퍼에서도 전극 공정이 가능한 도금법을 사용하여 전극을 형성 하였다. 니켈 전극형성은 광유도 도금법(Light-Induced Plating), 구리 전극형성은 광유도전해도금법(Light-Induced Electro Plating)을 이용하여 실험을 진행 하였다. 니켈 광유도 도금 공정시 공정시간 3 ~ 9분까지 가변하였다. 니켈실리사이드 형성 위해 열처리 공정을 $300{\sim}450^{\circ}C$까지 가변하였고 유지시간 30초 ~ 3분까지 가변하여 실험을 진행하였다. 니켈 도금 수용액의 pH 6 ~ 7.5까지 가변하여 실험하였다. 구리 광유도 전해도금 공정 전류밀도를 $1.6mA/cm^2{\sim}6.4mA/cm^2$까지 가변하여 실험을 진행 후, 전류밀도 $3.2mA/cm^2$로 시간 5 ~ 7분까지 가변하여 실험 하였다. 니켈 도금 공정 시간 5분, 니켈실리사이드 형성 열처리 온도 $350^{\circ}C$, 유지시간 1분에서 DIV(Dark I-V) 분석결과 가장 적은 누설전류를 확인하였다. 니켈 도금액 pH 6.5에서 니켈입자 및 구리입자의 균일성이 좋은 최적의 조건임을 확인하였다. 구리 도금 공정 전류밀도 $3.2mA/cm^2$, 시간 5분에서 TLM(Transmission Line Method) 측정결과 접촉 저항 $0.39{\Omega}$과 접촉 비저항 $12.3{\mu}{\Omega}{\cdot}cm^2$의 저항을 확인하였다. 도금법을 이용하여 전극을 형성함으로써 접촉저항 및 접촉 비저항이 낮고 전극 품질이 향상됨으로서 셀의 전류밀도 $42.49mA/cm^2$를 얻을 수 있었다.

• KIISE Transactions on Computing Practices
• /
• v.20 no.9
• /
• pp.507-512
• /
• 2014

Recently, Distributed computing processing begins using both CPU(Central processing unit) and GPU(Graphic processing unit) to improve the performance to overcome darksilicon problem which cannot use all of the transistors because of the electric power limitation. There is an integrated graphics processor that CPU and GPU share memory and Last level cache(LLC). But, There is no LLC access rules between CPU and GPU, so if GPU and CPU processes run together at the same time, performance of both processes gets worse because of the contention on the LLC. This Paper gives evidence to prove the need of the Cache Partitioning and is mentioned about the cache partitioning design using page coloring to allocate the L3 Cache space only for the GPU process to guarantee GPU process performance.

• Journal of the Speleological Society of Korea
• /
• v.59
• /
• pp.21-36
• /
• 1999

Most scholars calssify caves into natural resource, but caves possess values of natural and human resource, mix up the features of natural resources and human resources. Now, caves are distributed 260 in Korea. Seongryu Cave is showed in 1967 for the first time, till 1997 12 caves is opened to tourist. But since 1996 the 12 show caves of all is not launched the safety and environment-protection check-up adduced reason for IMF. Then caves must maintain environment of the normal temperature, humidity and dark. But the environment of caves are destroyed by tourism development. Thus to maintain environment of caves, it used to consider the counterplan as follows in restraint of the environmental change. Firstly, in case of development work to open caves, it must keep up with the prototype. Secondly, it must establish a freight depositary to prevent the influence of the caves's stain and damage due to tourist's objects. Thirdly, to maintain the normal temperature and humidity, it must install artificial poultice equipment of the inner parts of caves. Fourthly, in order to prevent the occurrence of $CO_2$, it must assessment of the optimum number of the greatest stayer. Fifthly, the control of closure for a given period of time is useful of the restoration to the cave's original state. Sixthly, by means of make narrow entrance, it should not influence the outer's air on the inner parts on caves. Seventhly, to keep the temperature of the inner part of caves, the lightening should be maintained moderately considering the convenience of a tour. Eightly, when water-proof cables for the lightening bulbs are connected each other, silicon tape is suitable and circuit breakers should be installed at the diverging points of the cables. Ninthly, the direction and angle of the lightening must be changed periodically to prevent green-pollution at the lightening spot. Lastly, when facilities and arrangements are equipped, corrosive materials should be excluded if circumstances allow.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.29 no.6
• /
• pp.383-388
• /
• 2019

High purity SiC fine powder with metal impurity contents of less than 1 ppm was synthesized by improved carbothermal reduction process, and the synthesized powder was used for SiC single crystal growth in RF heating PVT device at temperature above 2,100℃. In-situ x-ray image analyzer was used to observe the sublimation of the powder and single crystal growth behavior during the growth process. SiC powder was used as a source of single crystal growth, exhausted from the outside of the graphite crucible at the growth temperature and left graphite residues. During the growth, the flow of raw materials was concentrated in the middle and influenced the growth behavior of SiC single crystals. This is due to the difference in temperature distribution inside the crucible due to the fine powder. After the single crystal growth was completed, the single crystal ingot was cut into a 1 mm thick single crystal substrate and finely polished using a diamond abrasive slurry. A dark yellow 4H-SiC was observed overall of single crystal substrate, and the polycrystals generated in the outer part may be caused by the incorporation of impurities such as the bubble layer mixed in the process of attaching the seed crystal to the seed holder.

• Journal of Sensor Science and Technology
• /
• v.8 no.3
• /
• pp.239-246
• /
• 1999

A highly sensitive photovoltaic infrared photodiode was fabricated for detecting infrared light in $3{\sim}5\;{\mu}m$ wavelength range on InSb wafer with p-i-n structure grown by MOCVD. Silicon dioxide($SiO_2$) insulating films for the junction interface and surface of photodiode were prepared using RPCVD because InSb has low melting point and evaporation temperature. After formation of In ohmic contacts by thermal evaporation, the electrical properties of the photodiode were characterized in dark state at 77K. A product of zero-bias resistance and area($R_0A$) showed $1.56{\times}10^6\;{\Omega}{\cdot}cm^2$ that satisfied BLIP(background limited infrared photodetector) condition. When the photodiode was tested under infrared light, the normalized detectivity of about $10^{11}\;cm{\cdot}Hz^{1/2}{\cdot}W^{-1}$ was obtained. we successfully fabricated a unit cell with InSb IR array with good quantum efficiency and high detectivity.

• Journal of Korean Ophthalmic Optics Society
• /
• v.14 no.1
• /
• pp.57-62
• /
• 2009

Purpose: TiN films were deposited on sus304 by unbalanced magnetron sputtering system which was designed and developed as unbalancing the strength of the magnets in the magnetron electrode. The color and hardness of deposited TiN films was investigated. Methods: The cross sections of deposited films on silicon wafer were observed by SEM to measure the thickness of the films, the components of the surface of the films were identified by XPS, the components of the inner parts of the films were observed by XPS depth profiling. XPS high resolution scans and curve fittings of deposited films were performed for quantitative chemical analysis, Vickers micro hardness measurements of deposited films were performed with a nano indenter equipment. Results: The colors of deposited films gradually changed from light gold to dark gold, light violet, and indigo color with increasing of the thickness. It could be seen that the color change come from the composite change of three compound,$TiO_{x}N_{y}$, $TiO_2$, TiN. Especially, the composite change of$TiO_{x}N_{y}$ compound was thought to affect the color change with respect to thickness. Conclusions: Deposited films had lower than the value of general TiN film in Vickers hardness, which was caused by mixing three TiN, $TiO_2$,$TiO_{x}N_{y}$ compound in the deposited films. The increasing and decreasing of micro hardness with respect to thickness was thought to have something to do with the composite of TiN in the films.

• Korean Journal of Soil Science and Fertilizer
• /
• v.16 no.1
• /
• pp.20-27
• /
• 1983

A series of laboratory experiment was conducted to find out the chemical composition, characterization of humic substances by physical and chemical methods and reaction of Na-pyrophosphate, $Ca(OH)_2$ and rice straw with albumin on the degradation of soil organic matter in the volcanic ask soils of the Jeju Island. Results obtained were summarized as follows: 1. The contents of organic matter, available silicon, active iron and aluminum concentration in volcanic ash the soils were remarkably higher but available phosphorous was comparatively lower than the mineral soils. In volcanic ash soil, the contents of potassium, calcium and magnessium were higher in upland soil than that of forest soil. The ratios of active $Al^{{+}{+}{+}}/Fe^{{+}{+}}$, C/P and $K/Ca^+$ Mg were apparently high in volcanic ash soils while that of $SiO_2$/O.M. was high in mineral soil. 2. The carbon/nitrogen ratio in humin, humic acid content in organic matter, and carbon contents of humin in total carbon of soil organic matter were apparently higher in the volcanic ash soils than in the mineral soils, The total nitrogen and fractions of acid or alkali soluble nitrogen were remarkably high in volcanic ash soils while mineralizable nitrogen ($NH_4$-N and $NO_3$) contents were high in mineral soils. 3. The values of K600, RF and log K were also higher in volcanic ash soils than those in mineral soils, and the absorbance in the visible range were high and color was dark in the soil of which humification was progressed Extracted humic acid from volcanic ash soil was less reactive to the oxidizing chemical reagent and was persistance to the acid or alkali hydrolysises. 4. The major oxygen-containing functional groups in humic substances of volcanic ash soils were phenolic-OH alcoholic-OH and carboxyl groups while those in mineral soil were methoxyl and carbonyl groups. 5. Absorption spectra of alkaline solution of humic acid ranged from 200 nm to maxima 500 nm. Visible spectra peaks of from humic substances in the visible region were recognized at 350, 420, 450 and 480 nm. Only one single absorbance peak was observed in the visible region at 362 nm for Heugag series and two absorbance Peak were also at 360 nm and 390 nm for Yeungrag series. 6. Evolution of carbon as $Co_2$ was increased with addition of Na-pyrophosphate in Namweon and Heugag series, and "priming effects" took place on the soil organic matter decomposition by addition of rice straw with albumin in Ido series.