• Korean Journal of Materials Research
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• v.3 no.4
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• pp.327-335
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• 1993

Using a RF cylindrical magnetron operated with two electromagnets having a Helmholz configuration, RF magnetron plasma properties and characteristics of reactive ion ething of Si were investigated as a function of applied magnetic field strengths using 3mTorr $CF_4/H_2$ and $CHF_3$. Also, I-V characteristics of Schottky diodes, which were made of silicons etched under different applied magnetic field strengths and gas environments, were measured to investigate the degree of radiation damage during the reactive ion etching. As the magnetic field strent;th increased, ion densities and radical densities of the plasmas were increased linearly, however, the dc self-bias voltages induced on the powered electrode, where the specimen are located, were decreased exponentially. Maximum etch rates, which were 5 times faster than that etched without applied magnetic filed, were obtained using near lOOGauss, and, under these conditions, little or no radiation damages on the etched silicons were found.

• JSTS:Journal of Semiconductor Technology and Science
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• v.7 no.3
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• pp.161-165
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• 2007

In this paper, mesoporous Pt on micro pillars Pt electrode is newly designed, fabricated, and characterized on silicon substrate for non-enzymatic electrochemical sensor micro-chip integrated with CMOS readout circuitry. The fabricated micro/nano Pt electrode has cylindrical hexangular arrayed nano Pt pores with a diameter of 3.2 nm which is formed on top of the micro pillars Pt electrode with approximately $6{\mu}m$ in diameter, $6{\mu}m$ in space, and $50{\mu}m$ in height. The measured current responses of the fabricated plane Pt, mesoporous Pt, and mesoporous Pt on the micro pillar Pt electrodes are approximately $9.9nA/mm^2,\;6.72{\mu}A/mm^2,\;and\;7.67{\mu}A/mm^2$ in 10mM glucose solution with 0.1M phosphate buffered saline (PBS) solution, respectively. In addition, the measured current responses of the fabricated plane Pt, mesoporous Pt, and mesoporous Pt on the micro pillar Pt electrodes are approximately $0.15{\mu}A/mm^2,\;0.56{\mu}A/mm^2,\;and\;0.74{\mu}A/mm^2$ in 0.1mM ascorbic acid (AA) solution with 0.1M phosphate buffered saline (PBS) solution, respectively. This experimental results show that the proposed micro/nano Pt electrode is highly sensitive and promising for CMOS integrated non-enzymatic electrochemical sensor applications. Since the micro-pillar Pt electrode can also be utilized with a micro-fluidic mixer in the sensor chip, the sensor chip can be much smaller, cheaper, and easier to be fabricated.

• Journal of Sensor Science and Technology
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• v.31 no.1
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• pp.45-50
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• 2022

Multi-rod type Ag-AgCl electrodes have been developed for use in underwater electric field sensors. The developed cylindrical electrode had a diameter of 50 mm and a height of 130 mm. The electrode had five Ag-AgCl rods with a diameter of 2 mm and a height of 80 mm to enlarge the reaction surface area. Each Ag-AgCl rod was fabricated under the same conditions as the usual anodizing method in an electrolyte. The two developed electrodes were placed in the center of a 500-mm long, 400-mm wide, and 300-mm high acrylic tank filled with artificial seawater, at an interval of 100 mm, to evaluate their characteristics as uniaxial underwater electric field sensors. The underwater external electric field was generated using titanium plate electrodes installed at both ends of the tank. The noise level at 1 Hz of the developed electrode was approximately 3.7 nV/√Hz. The reception of the underwater electric field signal using the developed electrode was linear, within an error of approximately 0.6 %, in the range of 1-10000 ㎶/m at 1 Hz. In addition, its frequency response was flat within an error of 1.1 % in the range of 1-1000 Hz at 10000 ㎶/m.

• Bulletin of the Korean Chemical Society
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• v.33 no.3
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• pp.901-905
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• 2012

In this study, we investigated the pure geometrical effect of porous materials in gas adsorption using the grand canonical Monte Carlo simulations of primitive gas-pore models with various pore geometries such as planar, cylindrical, and random pore geometries. Although the model does not possess atomistic level details of porous materials, our simulation results provided many insightful information in the effect of pore geometry on the adsorption behavior of gas molecules. First, the surface curvature of porous materials plays a significant role in the amount of adsorbed gas molecules: the concave surface such as in cylindrical pores induces more attraction between gas molecules and pore, which results in the enhanced gas adsorption. On the contrary, the convex surface of random pores gives the opposite effect. Second, this geometrical effect shows a nonmonotonic dependence on the gas-pore interaction strength and length. Third, as the external gas pressure is increased, the change in the gas adsorption due to pore geometry is reduced. Finally, the pore geometry also affects the collision dynamics of gas molecules. Since our model is based on primitive description of fluid molecules, our conclusion can be applied to any fluidic systems including reactant-electrode systems.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.10
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• pp.1011-1017
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• 2012

We report the development of an optical micro-nanolithography method by using a roll-type mask. It includes phase-shift lithography and photolithography for realizing various target dimensions. For sub-wavelength resolution, a structure is achieved using the near-field exposure of a photoresist through a cylindrical phase-mask, allowing high-throughput continuous patterning. By using a film-type metal mask, continuous photolithography was achieved, and this method could be used to control the period of resultant patterns in real time by changing the rotating speed of the cylinder mask. As an application, we present the fabrication of a transparent electrode in the form of a metallic mesh by using the developed roll-type photolithography process. As a result, a transparent conductor with good properties was achieved by using a recently built cylindrical phase-shift lithography prototype, which was designed for patterning on 100-mm2 substrates.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1100-1103
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• 2003

One of the good ways to raise the rate of the electrochemical reaction is to broaden the effective surface area of the electrode by developing cylindrical nano-pores on the surfaces. The numerous pores of several nanometer in diameter can be used to enhance a specific faradaic reaction so that the nano-porous structure attract keen attention in terms of implication of new bio/chemical sensors, in which no chemical modification is involved. Amperometric glucose sensor is a representative example that needs the selective enhancement of glucose oxidation over the current due to physiological interferents such as ascorbic acid. The present paper reports how the ascorbic acid and glucose diffuse around the nano-porous surface by simulation study, for which 2D-FDM (Finite Difference Method) was adopted. The results of the simulation not only consist with those from electrochemical experiments but also reveal valuable potential for more advanced application of the nano-porous electrode.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.11 no.4
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• pp.13-21
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• 2001

Electrorheological(ER) fluid is a kind of smart material with variable shear stress and dynamic viscosity under various electric field intensity. Electric field can control the damping characteristics of ER damper. The objective of this study is the analysis of the performance of ER damper and its application to shock absorber. Idealized nonlinear Bingham plastic shear flow model is used to predict the velocity profile between electrodes. Cylindrical dashpot ER damper with moving electrode is constructed and tested under various electric fields. The analytic and experimental results for damping force are compared and discussed. Drop test system using ER damper is prepared to identify transient vibration characteristics. The rebound is eased as the applied electric field increases. When semi-active control algorithm is applied, rebound phenomenon disappears and vibration energy level decays faster than the case of zero electric field.

• Journal of the Korean Society of Safety
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• v.11 no.3
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• pp.81-88
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• 1996

In order to investigate the electrical properties of transformer oils for large power, the characteristics of AC and Impulse breakdown in gap length of 1.0~2.5mm and that of volume resistivity were researched in temperature range of 20~$100^{\circ}C$. An geometrical capacitance of electrode with coaxial cylindrical shape for measuring the volume resistivity was 16pF, and highmegohm meter with model no. VMG-1000 was used, and also the applied voltage were DC 100, 250 and 500V. In the dependance of breakdown characteristics due to electrode gap length, it was confirmed that breakdown voltage was nearly uniform by volume effect according to the increase of gap. In the characteristics for AC breakdown, the dielectric strength was increased to $90^{\circ}C$ but decreased over $90^{\circ}C$, and also in case of impulse breakdown, it was increased to 7$0^{\circ}C$ and at dated $70^{\circ}C$ over in temperature range. The calculated mobility of oils in the characteristics for impulse breakdown were about $10^{-5}$~$10^{-4}cm^2/V{\cdot}S$, and the value of volume resistivity was almost invariable in low temperature range, regardless of voltage by the stable thermal properties, and it indicated a peak at $50^{\circ}C$ and had a sudden change to decrease over that temperature, and also the value of volume resistivity in 250V/mm at $80^{\circ}C$ is suitable for the International electrical standards, it was confirmed.

• Progress in Medical Physics
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• v.22 no.3
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• pp.148-154
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• 2011

The quality factors ($k_{Q,Q_0}$) were evaluated by appling the results recently studied for the effect of central electrode in TRS-398 protocol. The PTW-31010 and IBA-CC13 chambers were used in this study. The quality factors were calculated as a function of beam quality for high energy electron and photon beams and compared with data currently used in TRS-398 protocol. In the PTW-31010 chamber using aluminium electrode, appling the new central electrode collections, the quality factors were 0.4% and 0.9% higher than current TRS-398 data for high energy photon and electron beams respectively. In the IBA-CC13 chamber using C-552 electrode, there are no variations in quality factors compared to TRS-398 data currently used.

• Radiation Oncology Journal
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• v.9 no.2
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• pp.171-176
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• 1991

To evaluate the temperature distribution according to the size of the electorde and the thickness of the phantom using 8MHz radiofrequency capacitive heating device, various sized electrodes and phantoms were used in combination. The radii of the electrodes are 10, 15, 20, 25, and 30 cm and the thickness of cylindrical phantoms with diameter 30 cm were 10, 15, 20, 25, 30, and 35 cm. When the thickness of the phantom was 25 cm or 30 cm, homogenous heating was achieved by using the electrode which diameter was equal to or greater than the thickness of the phantom. When the thickness of the phantom was 20 cm or less. homogenous heating was not achieved by using the electrode which diameter was equal to the thickness of the phantom, but achieved by the larger diameter of the electorode. When the sizes of paired electrodes were not equal, the smaller electrode side was preferentially heated.