• Title/Summary/Keyword: cut-off probe

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The improvement of cut-off probe for measuring plasma density at hard conditions

  • Kim, Dae-Ung;Yu, Sin-Jae;Kim, Jeong-Hyeong;Seong, Dae-Jin;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.202-202
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    • 2011
  • Diagnostics of plasma density is a key factor for monitoring plasma processing. Various probes are invented to measure plasma density and cut-off probe is a one of the most promising diagnostics tool for measuring plasma density. However, at the low density or high pressure the cut-off probe cannot clearly resolve the cut-off peak. Several reasons make this problem: Cut-off likes peaks caused by cavity resonances and weaken transmission spectrum signal at high pressure. Recently, You et al., have researched mechanism of cut-off probe and we improve the cut-off reliability and sensitivity base on that research. Modified cut-off antenna is adapted and bias cut-off probe method is tried. These experiment results have good agreement with the previous study and show good measurement characteristics.

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Cut-off Probe Frequency Spectrum의 물리적 해석

  • Yu, Sin-Jae;Kim, Dae-Ung;Kim, Jeong-Hyeong;Seong, Dae-Jin;Sin, Yong-Hyeon;Na, Byeong-Geun;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.200-200
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    • 2011
  • Although the cut-off probe, a precise measurement method for the electron density, is widely used in the industry, the physics on the wave spectrum of the cut-off is not understood yet, only cut-off point frequency containing the information of electron density has been analyzed well. This paper analyzes the microwave frequency spectrum of the cut-off probe to see the physics behind using both microwave field simulation (CST Microwave Studio) and simplified circuit simulation. The result shows that the circuit model well reproduces the cut-off wave spectrum especially in the low frequency regime where the wavelength of the driving frequency is larger than the characteristic length and reveals the physics of transmission characteristics with frequency as resonances between vacuum, plasma and sheath. Furthermore, by controlling the time domain in solver of the microwave simulator, the cut-off like transmission peaks above the cut-off frequency which has been believed as cavity effect is verified as chamber geometry effect. The result of this paper can be used as the basis for the improvement of cut-off probe.

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Effects of the Sheath on Determination of the Plasma Density of Microwave Probe

  • Kim, Dae-Woong;You, Shin-Jae;Na, Byung-Keun;You, Kwang-Ho;Kim, Jung-Hyung;Chang, Hong-Young
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.181-181
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    • 2012
  • The microwave probe for measuring plasma density is widely used for its advantages: First, it is not affected by the reactive gas. Second, it can measure local plasma parameters such as plasma density, plasma potential and plasma temperature. Third, it is simple and robust. A cut-off probe is the one of the most promising microwave probe. Recently, Kim et al. reveals the physics of the cut-off probe but the effect of the sheath on the determination of the plasma density is not explained. In this presentation, for taking account of sheath effects on determination of plasma density from the cut-off peak, a simplified circuit modeling and an E/M simulation are conducted. The results show that occupation ratio of sheath volume between two tips of the cut-off probe and subsequence pressure condition mainly change position of the cut-off peak with respect to plasma frequency. Magnitude of relative voltage taken on the impedance of sheath and the impedance of bulk plasma can explain this effect. Furthermore, effects of gap size, tip radius, and tip length ware revealed based on above analysis.

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Measurement of plasma potential by a biased cut off probe

  • Kim, Dae-Ung;Kim, Jeong-Hyeong;Seong, Dae-Jin;Yu, Sin-Jae;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.465-465
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    • 2010
  • Cut off probe, the efficient method, can measure the plasma parameters like the plasma electron density and the electron temperature. Plasma potential is also one of the important parameters in plasma processing but cannot be measured by cut off probe yet. Thus we developed method to measure plasma potential by focusing on relation between bias on a tip and sheath around tip. The system consist of a ICP(Inductive Coupled Plasma) source, a Network analyzer and a bias tee that can be bridge apply DC voltage on the cut off probe tip. Plasma potential is identified by using this system. The results corresponded well with the measured results by single langmuir probe(SLP).

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Cutoff Probe Analysis and Improvement

  • Kim, Dae-Ung;Yu, Sin-Jae;Yu, Gwang-Ho;Park, Min;Kim, Jeong-Hyeong;Seong, Dae-Jin;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.142-142
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    • 2011
  • Microwave diagnostics method for plasma science and engineering is vigorous research area for its good characteristics such as high sensitivity, reliability, and broad measurement spectrum from low density plasma to high density. We investigate mechanism of microwave probes (hairpin, impedance and absorbtionf probe) and apply it for interpretation of full transmitted spectrum of cutoff probe. Mechanism of the spectrum having same key roles of I-V curve of Langmuir probe is not exactly revealed yet in spite of its importance. This study elucidates physics behind it using a circuit model and E/M wave simulation. Circuit model reveals exact cut-off peak frequency taking account of a collision frequency and a plasma frequency and it enable precise diagnostics of plasma densty from low pressure to high pressre. Cut-off like peaks have been obstacle for choosing cut-off peak is analyzed by E/M simulation and one of cutoff like peaks made by probe holder used for acquire plasma density with cutoff peak applying the hairpin relation. Furthermore, phase difference method for plasma density is conducted. This method uses a single microwave frequency source and it is low-priced.

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An experimental study for reduction of B.P.F. noise level of multi-blade fan (다익 송풍기의 이산 주파수 소음 저감을 위한 실험적 연구)

  • 김영찬;이상환
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.11 no.2
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    • pp.167-175
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    • 1999
  • B.P.F.(Blade Passing Frequency) levels were measured with the cut-off clearance changes. The velocity inside the scroll, pressure fluctuation at cut-off region, and the scroll surface pressure distribution along the scroll from the cut-off to outlet were measured. With a certain cut-off clearance the improvement of efficiency and attenuation of B.P.F. noise level could be achieved. The measured results of pressure fluctuation and scroll surface pressure distribution showed that the secondary flow inside the scroll increased B.P.F. noise level at the cut-off region as the cut-off clearance got wide.

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A Study on Magnetized Inductively Coupled Plasma Using Cutoff Probe (Cutoff Probe를 이용한 자화유도결합 플라즈마의 특성 연구)

  • Son, Eui-Jeong;Kim, Dong-Hyun;Lee, Ho-Jun
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.65 no.10
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    • pp.1706-1711
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    • 2016
  • Electromagnetic wave simulation was performed to predict characteristics of manufactured cutoff probe at low temperature magnetized plasma medium. Microwave cutoff probe is designed for research the properties of magnetized inductively coupled plasma. It was shown that the cutoff probe method can safely be used for weakly magnetized high density plasma sources. Cutoff probe system with two port network analyzer has been prepared and applied to measure electron density distributions in large area, 13.56MHz driven weakly magnetized inductively coupled plasma source. The results shown that, the plasma frequency confirmed cut-off characteristics in low temperature plasma. Especially, cut-off characteristics was found at upper hybrid resonance frequency in the environment of the magnetic field. In case of a induced weak magnetic field in inductively coupled plasma, plasma density estimated from the cutoff frequency in the same way at unmagnetized plasma due to nearly same plasma frequency and upper hybrid resonance frequency. The plasma density is increased and uniformity is improved by applying a induced weak magnetic field in inductively coupled plasma.

One-probe P300 based concealed information test with machine learning (기계학습을 이용한 단일 관련자극 P300기반 숨김정보검사)

  • Hyuk Kim;Hyun-Taek Kim
    • Korean Journal of Cognitive Science
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    • v.35 no.1
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    • pp.49-95
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    • 2024
  • Polygraph examination, statement validity analysis and P300-based concealed information test are major three examination tools, which are use to determine a person's truthfulness and credibility in criminal procedure. Although polygraph examination is most common in criminal procedure, but it has little admissibility of evidence due to the weakness of scientific basis. In 1990s to support the weakness of scientific basis about polygraph, Farwell and Donchin proposed the P300-based concealed information test technique. The P300-based concealed information test has two strong points. First, the P300-based concealed information test is easy to conduct with polygraph. Second, the P300-based concealed information test has plentiful scientific basis. Nevertheless, the utilization of P300-based concealed information test is infrequent, because of the quantity of probe stimulus. The probe stimulus contains closed information that is relevant to the crime or other investigated situation. In tradition P300-based concealed information test protocol, three or more probe stimuli are necessarily needed. But it is hard to acquire three or more probe stimuli, because most of the crime relevant information is opened in investigative situation. In addition, P300-based concealed information test uses oddball paradigm, and oddball paradigm makes imbalance between the number of probe and irrelevant stimulus. Thus, there is a possibility that the unbalanced number of probe and irrelevant stimulus caused systematic underestimation of P300 amplitude of irrelevant stimuli. To overcome the these two limitation of P300-based concealed information test, one-probe P300-based concealed information test protocol is explored with various machine learning algorithms. According to this study, parameters of the modified one-probe protocol are as follows. In the condition of female and male face stimuli, the duration of stimuli are encouraged 400ms, the repetition of stimuli are encouraged 60 times, the analysis method of P300 amplitude is encouraged peak to peak method, the cut-off of guilty condition is encouraged 90% and the cut-off of innocent condition is encouraged 30%. In the condition of two-syllable word stimulus, the duration of stimulus is encouraged 300ms, the repetition of stimulus is encouraged 60 times, the analysis method of P300 amplitude is encouraged peak to peak method, the cut-off of guilty condition is encouraged 90% and the cut-off of innocent condition is encouraged 30%. It was also conformed that the logistic regression (LR), linear discriminant analysis (LDA), K Neighbors (KNN) algorithms were probable methods for analysis of P300 amplitude. The one-probe P300-based concealed information test with machine learning protocol is helpful to increase utilization of P300-based concealed information test, and supports to determine a person's truthfulness and credibility with the polygraph examination in criminal procedure.

Residual magnetic field profiles and their current density profiles of coated conductors for fast and slow cut-off current operations

  • Sun, J.;Tallouli, M.;Shyshkin, O.;Hamabe, M.;Watanabe, H.;Chikumoto, N.;Yamaguchi, S.
    • Progress in Superconductivity and Cryogenics
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    • v.17 no.1
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    • pp.17-20
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    • 2015
  • Coated conductor is an important candidate for power cable applications due to its high current density. Even for DC power cable transmission, we must study the transport properties of HTS tapes after slow and fast discharge. In order to evaluate relation of the magnetic field with applied current we developed a scanning magnetic field measurements system by employing a Hall probe. This work presents the measurements of the magnetic fields above a coated conductor by varying applied current pattern. In the work, a transport current of 100 A, less than the critical current, is applied to YBCO coated conductor. We measured the residual magnetic field distributions after cut off the transport current with slow and fast operations. The results show differences of the magnetic field profiles and the corresponding current profiles by an inverse solution from the magnetic field measurement between these two operations because of the hysteresis of coated conductor excited by the transport current.

Experimental Study on the Performance of a Forward-Curved Centrifugal Fan for an Automotive Air-Conditioner (자동차 에어컨용 전곡형 원심 송풍기의 공력성능 분석)

  • Kwon, Eui-Yong;Cho, Nam-Hyo
    • 유체기계공업학회:학술대회논문집
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    • 2000.12a
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    • pp.122-128
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    • 2000
  • Aerodynamic optimization of an automotive air-conditioning blower is a hard task because of the highly complex flow phenomena related to three-dimensional flow separations and the unsteady nature caused by the interaction between primary and secondary air flows throughout the fan. In this paper, an aerodynamic study on a forward-curved centrifugal fan has been carried out Firstly we obtained the fan performance curves versus flow rates showing its unstable nature in the surging operation range. Secondly aerodynamic characterizations were carried out by investigating the velocity and pressure fields in the casing flow passage using a 5-hole pilot probe, at different operating conditions. Surface flow pattern near the cut-off area exhibits similar flow behavior above the best efficiency operating point, although the pressure level increases substantially with the Increase of flow rate. Vorticity in the casing passage flow occurs in all (low rates, downstream from the r-Z plane $\theta$=120 deg., where the position of its core changes with the circumferential location. Although complex, the general flow behavior were common, giving insight in its main aerodynamic features.

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