• 제목/요약/키워드: cut-off probe

검색결과 19건 처리시간 0.028초

The improvement of cut-off probe for measuring plasma density at hard conditions

  • 김대웅;유신재;김정형;성대진;장홍영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.202-202
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    • 2011
  • Diagnostics of plasma density is a key factor for monitoring plasma processing. Various probes are invented to measure plasma density and cut-off probe is a one of the most promising diagnostics tool for measuring plasma density. However, at the low density or high pressure the cut-off probe cannot clearly resolve the cut-off peak. Several reasons make this problem: Cut-off likes peaks caused by cavity resonances and weaken transmission spectrum signal at high pressure. Recently, You et al., have researched mechanism of cut-off probe and we improve the cut-off reliability and sensitivity base on that research. Modified cut-off antenna is adapted and bias cut-off probe method is tried. These experiment results have good agreement with the previous study and show good measurement characteristics.

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Cut-off Probe Frequency Spectrum의 물리적 해석

  • 유신재;김대웅;김정형;성대진;신용현;나병근;장홍영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.200-200
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    • 2011
  • Although the cut-off probe, a precise measurement method for the electron density, is widely used in the industry, the physics on the wave spectrum of the cut-off is not understood yet, only cut-off point frequency containing the information of electron density has been analyzed well. This paper analyzes the microwave frequency spectrum of the cut-off probe to see the physics behind using both microwave field simulation (CST Microwave Studio) and simplified circuit simulation. The result shows that the circuit model well reproduces the cut-off wave spectrum especially in the low frequency regime where the wavelength of the driving frequency is larger than the characteristic length and reveals the physics of transmission characteristics with frequency as resonances between vacuum, plasma and sheath. Furthermore, by controlling the time domain in solver of the microwave simulator, the cut-off like transmission peaks above the cut-off frequency which has been believed as cavity effect is verified as chamber geometry effect. The result of this paper can be used as the basis for the improvement of cut-off probe.

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Effects of the Sheath on Determination of the Plasma Density of Microwave Probe

  • Kim, Dae-Woong;You, Shin-Jae;Na, Byung-Keun;You, Kwang-Ho;Kim, Jung-Hyung;Chang, Hong-Young
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.181-181
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    • 2012
  • The microwave probe for measuring plasma density is widely used for its advantages: First, it is not affected by the reactive gas. Second, it can measure local plasma parameters such as plasma density, plasma potential and plasma temperature. Third, it is simple and robust. A cut-off probe is the one of the most promising microwave probe. Recently, Kim et al. reveals the physics of the cut-off probe but the effect of the sheath on the determination of the plasma density is not explained. In this presentation, for taking account of sheath effects on determination of plasma density from the cut-off peak, a simplified circuit modeling and an E/M simulation are conducted. The results show that occupation ratio of sheath volume between two tips of the cut-off probe and subsequence pressure condition mainly change position of the cut-off peak with respect to plasma frequency. Magnitude of relative voltage taken on the impedance of sheath and the impedance of bulk plasma can explain this effect. Furthermore, effects of gap size, tip radius, and tip length ware revealed based on above analysis.

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Measurement of plasma potential by a biased cut off probe

  • 김대웅;김정형;성대진;유신재;장홍영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.465-465
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    • 2010
  • Cut off probe, the efficient method, can measure the plasma parameters like the plasma electron density and the electron temperature. Plasma potential is also one of the important parameters in plasma processing but cannot be measured by cut off probe yet. Thus we developed method to measure plasma potential by focusing on relation between bias on a tip and sheath around tip. The system consist of a ICP(Inductive Coupled Plasma) source, a Network analyzer and a bias tee that can be bridge apply DC voltage on the cut off probe tip. Plasma potential is identified by using this system. The results corresponded well with the measured results by single langmuir probe(SLP).

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Cutoff Probe Analysis and Improvement

  • 김대웅;유신재;유광호;박민;김정형;성대진;장홍영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.142-142
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    • 2011
  • Microwave diagnostics method for plasma science and engineering is vigorous research area for its good characteristics such as high sensitivity, reliability, and broad measurement spectrum from low density plasma to high density. We investigate mechanism of microwave probes (hairpin, impedance and absorbtionf probe) and apply it for interpretation of full transmitted spectrum of cutoff probe. Mechanism of the spectrum having same key roles of I-V curve of Langmuir probe is not exactly revealed yet in spite of its importance. This study elucidates physics behind it using a circuit model and E/M wave simulation. Circuit model reveals exact cut-off peak frequency taking account of a collision frequency and a plasma frequency and it enable precise diagnostics of plasma densty from low pressure to high pressre. Cut-off like peaks have been obstacle for choosing cut-off peak is analyzed by E/M simulation and one of cutoff like peaks made by probe holder used for acquire plasma density with cutoff peak applying the hairpin relation. Furthermore, phase difference method for plasma density is conducted. This method uses a single microwave frequency source and it is low-priced.

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다익 송풍기의 이산 주파수 소음 저감을 위한 실험적 연구 (An experimental study for reduction of B.P.F. noise level of multi-blade fan)

  • 김영찬;이상환
    • 설비공학논문집
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    • 제11권2호
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    • pp.167-175
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    • 1999
  • B.P.F.(Blade Passing Frequency) levels were measured with the cut-off clearance changes. The velocity inside the scroll, pressure fluctuation at cut-off region, and the scroll surface pressure distribution along the scroll from the cut-off to outlet were measured. With a certain cut-off clearance the improvement of efficiency and attenuation of B.P.F. noise level could be achieved. The measured results of pressure fluctuation and scroll surface pressure distribution showed that the secondary flow inside the scroll increased B.P.F. noise level at the cut-off region as the cut-off clearance got wide.

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Cutoff Probe를 이용한 자화유도결합 플라즈마의 특성 연구 (A Study on Magnetized Inductively Coupled Plasma Using Cutoff Probe)

  • 손의정;김동현;이호준
    • 전기학회논문지
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    • 제65권10호
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    • pp.1706-1711
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    • 2016
  • Electromagnetic wave simulation was performed to predict characteristics of manufactured cutoff probe at low temperature magnetized plasma medium. Microwave cutoff probe is designed for research the properties of magnetized inductively coupled plasma. It was shown that the cutoff probe method can safely be used for weakly magnetized high density plasma sources. Cutoff probe system with two port network analyzer has been prepared and applied to measure electron density distributions in large area, 13.56MHz driven weakly magnetized inductively coupled plasma source. The results shown that, the plasma frequency confirmed cut-off characteristics in low temperature plasma. Especially, cut-off characteristics was found at upper hybrid resonance frequency in the environment of the magnetic field. In case of a induced weak magnetic field in inductively coupled plasma, plasma density estimated from the cutoff frequency in the same way at unmagnetized plasma due to nearly same plasma frequency and upper hybrid resonance frequency. The plasma density is increased and uniformity is improved by applying a induced weak magnetic field in inductively coupled plasma.

기계학습을 이용한 단일 관련자극 P300기반 숨김정보검사 (One-probe P300 based concealed information test with machine learning)

  • 김혁;김현택
    • 인지과학
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    • 제35권1호
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    • pp.49-95
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    • 2024
  • 국내 형사소송절차에서 진술의 진위여부 확인을 위해 사용하는 도구는 폴리그래프검사, 진술타당도분석, P300 기반 숨김정보검사 등이 있고, 이 중에서 폴리그래프검사의 사용빈도가 다른 도구들에 비하여 높다. 하지만, 검사결과를 뒷받침해 줄 수 있는 근거의 부족으로 인하여 재판과정에서 증거채택 가능성이 낮다. 폴리그래프검사를 뒷받침해 줄 수 있는 방법으로, 사전연구가 풍부한 P300기반 숨김정보검사가 주목을 받아 왔지만, 기존의 검사기법은 두 가지 제한점이 있어 실제 사건에서의 활용도는 낮은 편이다. 첫째, 검사에 필요한 관련자극만 3개 또는 6개 등, 사전에 노출되지 않은 정보가 다수 필요하기 때문에 실제 사건에서 사용 가능성이 낮다. 둘째, 기존의 P300기반 숨김정보검사 프로토콜에서는 관련자극과 무관련자극에 대한 P300요소 전위값을 명확하게 구분하기 위하여 오드볼패러다임을 사용하기 때문에 무관련자극에 대한 P300요소 전위값이 과소 추정될 가능성이 있다. 본 연구에서는 검사의 사용 가능성을 높이기 위하여 사전에 노출되지 않은 정보가 단 하나만 있어도 검사가 가능한 단일 관련자극을 사용하는 수정된 P300기반 숨김정보검사 프로토콜을 탐색하였고, 오드볼패러다임 사용으로 인한 무관련자극에 대한 P300요소 전위값이 과소 추정되는 문제를 보완하기 위하여 다양한 기계학습의 분류 알고리즘을 비교하였다. 연구결과 단일 관련자극으로 여성과 남성의 얼굴자극을 사용할 경우, 자극은 400ms 지속시간으로 60회 제시하고, 절단값을 유죄집단은 90%로 무죄집단은 30%로 하여 정점-정점 방법으로 P300요소 전위값을 분석하는 것이 적합함을 확인하였다. 단어자극의 경우, 지속시간을 300ms로 60회 제시하고, P300요소 전위값 분석방법은 얼굴자극과 동일하게 시행하는 것이 적합하다는 것을 확인하였다. 또한 관련자극과 무관련자극에 대한 정점-정점 P300요소 전위값을 6가지 기계학습 분류 알고리즘을 사용하여 분석한 결과, 로지스틱 회귀(LR), 선형 판별 분석(LDA), K-최근접 이웃(KNN) 알고리즘이 관련자극과 무관련자극의 분류에 적합하다는 것을 확인하였다.

Residual magnetic field profiles and their current density profiles of coated conductors for fast and slow cut-off current operations

  • Sun, J.;Tallouli, M.;Shyshkin, O.;Hamabe, M.;Watanabe, H.;Chikumoto, N.;Yamaguchi, S.
    • 한국초전도ㆍ저온공학회논문지
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    • 제17권1호
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    • pp.17-20
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    • 2015
  • Coated conductor is an important candidate for power cable applications due to its high current density. Even for DC power cable transmission, we must study the transport properties of HTS tapes after slow and fast discharge. In order to evaluate relation of the magnetic field with applied current we developed a scanning magnetic field measurements system by employing a Hall probe. This work presents the measurements of the magnetic fields above a coated conductor by varying applied current pattern. In the work, a transport current of 100 A, less than the critical current, is applied to YBCO coated conductor. We measured the residual magnetic field distributions after cut off the transport current with slow and fast operations. The results show differences of the magnetic field profiles and the corresponding current profiles by an inverse solution from the magnetic field measurement between these two operations because of the hysteresis of coated conductor excited by the transport current.

자동차 에어컨용 전곡형 원심 송풍기의 공력성능 분석 (Experimental Study on the Performance of a Forward-Curved Centrifugal Fan for an Automotive Air-Conditioner)

  • 권의용;조남효
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2000년도 유체기계 연구개발 발표회 논문집
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    • pp.122-128
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    • 2000
  • Aerodynamic optimization of an automotive air-conditioning blower is a hard task because of the highly complex flow phenomena related to three-dimensional flow separations and the unsteady nature caused by the interaction between primary and secondary air flows throughout the fan. In this paper, an aerodynamic study on a forward-curved centrifugal fan has been carried out Firstly we obtained the fan performance curves versus flow rates showing its unstable nature in the surging operation range. Secondly aerodynamic characterizations were carried out by investigating the velocity and pressure fields in the casing flow passage using a 5-hole pilot probe, at different operating conditions. Surface flow pattern near the cut-off area exhibits similar flow behavior above the best efficiency operating point, although the pressure level increases substantially with the Increase of flow rate. Vorticity in the casing passage flow occurs in all (low rates, downstream from the r-Z plane $\theta$=120 deg., where the position of its core changes with the circumferential location. Although complex, the general flow behavior were common, giving insight in its main aerodynamic features.

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