• 한국기계가공학회지
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• 제18권8호
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• pp.44-50
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• 2019

CMP is the most critical process in the manufacture of silicon wafers, and the use of retaining rings, which are consumable parts used in CMP equipment, is increasingly important. Since the retaining ring is made of plastic, it is not only weak in strength but also has the problem of taking a long time for the flattening operation of the ring itself performed before the CMP process, and of the imbalance of force due to bolt tightening causing uneven wear. In order to solve this problem, the retaining ring and the insert ring are integrally used, and the flatness of the retaining ring may be affected depending on the material of the insert ring. Also, the residual stress generated in the manufacturing process of the insert ring may cause distortion of the ring, which may adversely affect the precision polishing. In this study, when the insert ring is made of Zn or STS304, the thickness variation and the flatness of the retaining ring are compared and, finally, the material removal rate is analyzed by polishing the wafer by the oxide CMP process. Through these experiments, the effects of the insert ring material on the polishing accuracy of the wafers were investigated.

• 한국세라믹학회지
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• 제46권1호
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• pp.86-93
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• 2009

The crack formation and the resistance of ITO film on PET substrate with a thickness of 20 nm were investigated as a function of strain. The onset strain for the increase of resistance increased with increasing strain rate, suggesting the crack initiation is dependent on the strain rate. Electrical resistance increased at the strain of 1.6% at the strain rates below $10^{-4}/sec$ while it increased at ${\sim}2%$ at the strain rates above $10^{-3}/sec$. The critical strain at which the cracks were formed is close to the proportional limit. Upon loading, the initial cracks perpendicular to the tensile axis were observed and propagated the whole sample width with increasing strain. The spacing between horizontal cracks is thought to be determined by the fracture strength and the interfacial strength between ITO and PET. The crack density increased with increasing strain. However, the effect of the strain rate on the crack density was less pronounced in ITO/PET with 20 nm ITO thickness than ITO/PET with 125 nm ITO thickness, the strength of ITO film is thought to increase as the thickness on ITO film decreases. The absence of cracks on ITO film at a strain as close as 1.5% can be attributed to the compressive residual stress of ITO film which was developed during cooling after the coating process. The higher critical strain for the onset of the resistance increase and the crack initiation of ITO/PET with a thinner ITO film (20 nm) can be linked with the higher strength of the thinner ITO film.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2003년도 기술심포지움 논문집
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• pp.84-87
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• 2003

Since Pb-free solder alloys have been used extensively in microelectronic packaging industry, the interaction between UBM (Under Bump Metallurgy) and solder is a critical issue because IMC (Intermetallic Compound) at the interface is critical for the adhesion of mechanical and the electrical contact for flip chip bonding. IMC growth must be fast during the reflow process to form stable IMC. Too fast IMC growth, however, is undesirable because it causes the dewetting of UBM and the unstable mechanical stability of thick IMC. UP to now. Ni and Cu are the most popular UBMs because electroplating is lower cost process than thin film deposition in vacuum for Al/Ni(V)/Cu or phased Cr-Cu. The consumption rate and the growth rate of IMC on Ni are lower than those of Cu. In contrast, the wetting of solder bumps on Cu is better than Ni. In addition, the residual stress of Cu is lower than that of Ni. Therefore, the alloy of Cu and Ni could be used as optimum UBM with both advantages of Ni and Cu. In this paper, the interfacial reactions of Sn-3.5Ag-0.7Cu solder on Ni-xCu alloy UBMs were investigated. The UBMs of Ni-Cu alloy were made on Si wafer. Thin Cr film and Cu film were used as adhesion layer and electroplating seed layer, respectively. And then, the solderable layer, Ni-Cu alloy, was deposited on the seed layer by electroplating. The UBM consumption rate and intermetallic growth on Ni-Cu alloy were studied as a function of time and Cu contents. And the IMCs between solder and UBM were analyzed with SEM, EDS, and TEM.

• Tribology and Lubricants
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• 제13권2호
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• pp.96-104
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• 1997

This paper was focused on the wear characteristics of ion-nitrided metal and with ion-nitride processing, which is basically concerned with the effects of carbon content in workpiece and added carbon content gas atmosphere on the best wear performance. Increased carbon content in workpiece increases compound layer thickness, but decreases diffusion layer thickness. On the other hand, a small optimal amount of carbon content in gas atmosphere increase compound layer thickness as well as diffusion layer thickness and hardness. Wear tests show that the compound layer of ion-nitrided metal reduces wear rate when the applied wear load is small. However, as the load becomes large, the existence of compound layer tends to increase wear rate. Compressive residual stress at the compound layer is the largest at the compound layer, and decreases as the depth from the surface increases. It is found in the analysis that under small applied load, the critical depth where voids and cracks may be created and propagated is located at the compound layer, so that the adhesive wear is created and the existence of compound layer reduces the amount of wear. When the load becomes large, the critical depth is located below the compound layer and delamination, which may explained by surface deformation, crack nucleation and propagation, is created and the existence of compound layer increases wear rate. For the compound layer, at added carbon contents of 0 percent and 0.5 at. percent, the $\varepsilon$ monophase is predominant. But at 0.7 at. percent added carbon, the $\varepsilon$ monophase formation tends to be severely inhibited and r' and $Fe_3C$ polyphase formation becomes dominant. This increased hard $\varepsilon$ phase layer was observed to be more beneficial in reducing friction and wear.

• 한국해양공학회지
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• 제20권6호
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• pp.88-92
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• 2006

Large-scale model tests of welded topside joints were carried out to observe the fatigue behavior of API 2W Gr.50 steel produced by POSCO. The fatigue crack behaviors for various loading conditions were measured and investigated around the critical joint sections. The experimental results have been verified with numerical approaches and also compared with the AWS D1.1 and DnV RP-C203 design curves. The large-scale experiment models were fabricated, based on the actual operating east area fixed platform. The dimensions of the models were slightly modified to accommodate the test facilities and capacities. The fatigue test was carried out having ${\Delta}Q$ of T1=705.6kN, T2=749.7kN and T3=793.8kN. The three specimens were statically loaded 20 times, with various loadings of about 50kN intervalsbetween the maximum and minimum loads required in the fatigue tests. This loading removed the residual stress in the specimen before the fatigue tests. The topside joint crack was initiated from the brace heel, where the maximum tensile stress occurred. The API 2W Gr.50 steel satisfied the AWS D1.1 detail category C and DnV RP-C203 detail category F ${\Delta}S-N$ curve.

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2004년도 학술대회지
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• pp.337-341
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• 2004

Engineering ceramics have superior heat resistance, corrosion resistance, and wear resistance. Consequently, these art significant candidates for hot-section structural components of heat engine and the inner containment of nuclear fusion reactor. Besides, some of them have the ability to heal cracks and great benefit can be anticipated with great benefit the structural engineering field. Especially, law fracture toughness of ceramics supplement with self-healing ability. In the present study, we have been noticed some practically important points for the healing behavior of silicon nitride, alumina, mullite with SiC particle and whisker. The presence of silicon carbide (SiC) in ceramic compound is very important for crack-healing behavior. However, self-healing of SiC has not been investigated well in detail yet. In this study, commercial SiC was selected as sample, which can be anticipated in the excellent crack healing ability. The specimens were produced three-point bending specimen with a critical semi-circular crack of which size that is about $50-700{\mu}m$. Three-point bending test and static fatigue test were performed cracked and healed SiC specimens. A monotonic bending load was applied to cracked specimens by three-point loading at different temperature. The purpose of this paper is to report Strength Properties and Elastic Waves Characteristics of Silicon Carbide with Crack Healing Ability.

• 대한치과기공학회지
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• 제22권1호
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• pp.69-78
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• 2000

The microstructure and corrosion behavior of commercially dental casting gold alloys were investigated to clarify the effect of burn-out temperature and cooling rate. In the case of water quenching after casting, only the αphase, which is typical dendritic microstructure of golda alloy, was detected. However, the precipitates along the grain boundary were detected only at the slow cooling rate and they increased inversely proportional to the burn-out temperature. This might be due to the time difference which solute atom could diffuse. EPMA and SEM results also demonstrated that the precipitate should be lamellar structure consisted of Ag rich phase(${\alpha}_1$) and Cu rich phase (${\alpha}_2$). In terms of corrosion, the galvanic coupling was formed due to the difference of composition between precipitates and matrix at the slow cooling rate. In the case of water quenching, the critical current density($i_p$) which indicate the degree of corrosion was lowest at $650^{\circ}C$ and below the burnout temperature, $i_p$ increased with it because of the effect of grain boundary segregation. But above the temperature, $i_p$ increased with it. This may be due to the strain field effect by residual thermal stress.

• 대한간호학회지
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• 제29권6호
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• pp.1192-1207
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• 1999

The purpose of this study was to clarify the dynamic relationships among risk factors of arteriosclerosis and to develop and examine a model which could explain this relationship clearly. Data were collected from medical records of 400 male clients who visited a university hospital located in Inchon for physical examinations, from May 1996 to December 1996. Data were analyzed using the LISREL (Linear Structural Relationship) 8 program. To test the fitness of the hypothesized model, chi-square, RMSR (root mean square residual), GFI (goodness of fit index), CN (critical number) and Q-plot were used. Most of the fitness measurements, except the chi-square showed that the hypothesized model complimented the real data. According to the results, there were trends that obesity and hyperlipidemia were prevalent in heavier smokers, higher alcohol intakers, and groups who excercised less. Also, hypertension was more prevalent in older age, higher alcohol intaker, and higher serum lipid level groups. In contrast to the hypothesis, alcohol intake did not significantly affect serum lipid levels. This might be due to the serum lipid measurements (total cholesterol and trigryceride) used in this study to estimate hyperlipidemia. The direct effect of smoking on hypertension was not significant. However, the total effect of smoking on the hypertension was significant since indirect effects of smoking on hypertension, such as obesity and hyperlipidemia, were significant. The total effect of obesity on hypertension was significant since the indirect effect of obesity on hypertension via hyperlipidemia was significant, although the direct effect of smoking on hypertension was not significant. The degree of explaining hyperlipidemia with smoking, exercise, and obesity was high (60%), however, the degree of explaining obesity with age, smoking, alcohol intake, and exercise was very low (7%). On the basis of these results, high risk factors of arteriosclerosis such as hypertension, hyperlipidemia, or obesity are either directly or indirectly correlated each other. Therefore, it is difficult to predict outcomes for increasing or decreasing the risk factors by simply modulating a factor. Smoking, alcohol, and exercise both directly and indirectly affected major risk factors of arteriosclerosis. Therefore, correcting these variables is required to decrease risk factors. Finally, the relationship among other risk factors which have been known to be related with arteriosclerosis (diet, stress or hereditary) should be clarified in further studies.

• Steel and Composite Structures
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• 제30권5호
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• pp.483-492
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• 2019

In the current study, the influence of the initial lateral (sweep) shape and the cross-sectional twist imperfection on the lateral torsional buckling (LTB) response of doubly-symmetric steel I-beams was investigated. The material imperfection (residual stress) was not considered. For this objective, standard European IPN 300 beam with different unbraced span was numerically analyzed for three imperfection cases: (i) no sweep and no twist (perfect); (ii) three different shapes of global sweep (half-sine, full-sine and full-parabola between the end supports); and (iii) the combination of three different sweeps with initial sinusoidal twist along the beam. The first comparison was done between the results of numerical analyses (FEM) and both a theoretical solution and the code lateral torsional buckling formulations (EC3 and AISC-LRFD). These results with no imperfection effects were then separately compared with three different shapes of global sweep and the presence of initial twist in these sweep shapes. Besides, the effects of the shapes of initial global sweep and the inclusion of sinusoidal twist on the critical buckling load of the beams were investigated to unveil which parameter was considerably effective on LTB response. The most compatible outcomes for the perfect beams was obtained from the AISC-LRFD formulation; however, the EC-3 formulation estimated the $P_{cr}$ load conservatively. The high difference from the EC-3 formulation was predicted to directly originate from the initial imperfection reduction factor and high safety factor in its formulation. Due to no consideration of geometric imperfection in the AISC-LFRD code solution and the theoretical formulation, the need to develop a practical imperfection reduction factor for AISC-LRFD and theoretical formulation was underlined. Initial imperfections were obtained to be more influential on the buckling load, as the unbraced length of a beam approached to the elastic limit unbraced length ($L_r$). Mode-compatible initial imperfection shapes should be taken into account in the design and analysis stages of the I-beam to properly estimate the geometric imperfection influence on the $P_{cr}$ load. Sweep and sweep-twist imperfections led to 10% and 15% decrease in the $P_{cr}$ load, respectively, thus; well-estimated sweep and twist imperfections should considered in the LTB of doubly-symmetric steel I-beams.

• 한국지반공학회논문집
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• 제23권9호
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• pp.5-16
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• 2007

비배수 상태에서의 변수 $S_u,\;E_u$, n의 함수로 표현되는 단순한 선형 완전점탄성 모델은 굴착 중에 연성 토양에 시공되는 지중연속벽의 변위를 예측하는데 사용된다. 그러나 유한요소해석에서의 이러한 모델은 굴착이 잠시 중단되었거나 완료된 후 지중연속벽의 측방향 변위를 연속적으로 예측하는 데 한계가 있다. 굴착이 이루어지지 않는 동안의 지중연속벽 주변 토양의 변형 거동특성을 연구하기 위하여, 지중연속벽 주변 토양에 작용하는 응력상태를 가정한 '방콕 연약 점토'에 대한 일련의 삼축압축시험이 모사되었다. 본 연구에서는 세 가지 다른 조건에서의 삼축압축시험이 실시되었는바, 압밀 비배수 조건에서의 재하($CK_0UC$), 압밀 배수 및 비배수 조건에서의 재하 및 제하($CK_0DUC$와 $CK_0UUC$)의 조건에서 시험이 실시되었다. 시험으로부터 일련의 $CK_0DUC$ 시험에서 얻은 전단강도는 $CK_0UC$ 시험에서의 잔류강도와 같음을 알 수 있었다. $CK_0DUC$ 시험에서 시험편에 가해지는 수평압력을 점진적으로 감소시키면서 측정한 탄성계수는 편차응력의 증가와 더불어 감소함을 알 수 있었다. 또한 $CK_0UC$와 $CK_0DUC$시험에서 한계상태 관계의 기울기가 동일하게 나타났다. 더욱이, $CK_0DUC$시험에서 수평압력을 점진적으로 감소시킬 경우의, 축방향 및 반경방향 변형율 증가율을 시간, 한계상태 관계의 기울기, 편차응력과 평균 유호응력의 비의 함수로 표현할 수 있었다. 이 연구는 삼축압축시험의 제하 과정에서 얻은 시험 결과가 굴착 중 지중연속벽의 변형을 예측하는데 사용될 수 있음을 보였다.AFM)과 Scanning Electron Microscopy(SEM)을 통해 관찰한 GST 다층박막시료의 고온 열처리 전후 표면미시거칠기 변화도 PRAM 기록기를 사용할 때에는 in-situ 타원계를 사용할 때보다 1/10 정도의 크기를 보여주어 PRAM 기록기와 분광타원계를 사용하여 결정한 GST의 고온광학물성의 신뢰성을 확인하여 주었다.>, 여자 $179.1{\pm}37.2%$이었다. 평균필요량에 비해 가장 낮은 양을 섭취한 영양소는 엽산으로서 남자 $60.1{\pm}10.8%$, 여자 $54.6{\pm}9.9%$로 조사되었다. 칼슘의 섭취량은 평균필요량에 비해 전체 $74.9{\pm}31.9%$로 나타났다. 에너지 섭취량에 있어서 남자 노인들은 모두가 필요추정량의 75% 미만을 섭취하고 있었고 여자 노인의 경우에도 97%가 필요추정량의 75% 미만을 섭취하여 에너지 섭취량이 매우 낮았다 반면에 단백질 섭취량에 있어서는 남자 노인의 경우 100%가 평균필요량의 125%를 초과하였고, 여자 노인의 경우에는 91%가 평균필요량의 125%를 초과하여 대조적이었다. 비타민 A와 E는 각각 평균필요량과 충분섭취량의 125%를 초과하는 비율이 높게 나타난 반면에 비타민 $B_2$는 특히 남자 노인에서 평균필요량의 75%미만을 섭취한 비율이 높게 나타났다. 엽산 섭취량에 있어서는 평균필요량의 75% 미만을 섭취한 비율이 전체 96%로 나타나 심각한 부족상태로 조사되었다 반면에 철의 섭취량은 남녀 모두 100%가 평균필요량의 125%를 초과하여 섭취한 것으로 나타났다. 아연의 섭취량은 남자 17%,여자 15%가 평균필요량의 75% 미만을 섭취한 것으로 조사되었다. 에너지와 엽산은 모든 노인들에서 평균필요량에 미달되게 섭취한