• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.181-184
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• 2001

Chemical Mechanical Polishing(CMP) of Shallow Trench Isolation(STD structure in 0.18 m semiconductor device fabrication is studied. CMP process is applied for the STI structure with and without reverse moat pattern and End Point Detection (EPD) method is tested. To optimize the transistor properties related metal 1 parameters. we studied the correlation between CMP thickness of STI using high selectivity slurry. DOE of gate etch recipe, and 1st metal DC values. Remaining thickness of STI CMP is proportional to the thickness of gate-etch process and this can affect to gate profile. As CMP thickness increased. the N-poly foot is deteriorated. and the P-Poly Noth is getting better. If CD (Critical Dimension) value is fixed at some point,, all IDSN/P values are in inverse proportional to CMP thickness by reason of so called Profile Effect. Weve found out this phenomenon in all around DOE conditions of Gate etch process and we also could understand that it would not have any correlation effects between VT and CMP thickness in the range of POE 120 sec conditions. As CMP thickness increased by $100\AA$. 3.2 $u\AA$ of IDSN is getting better in base 1 condition. In POE 50% condition. 1.7 $u\AA$ is improved. and 0.7 $u\AA$ is improved in step 2 condition. Wed like to set the control target of CD (critical dimension) in gate etch process which can affect Idsat, VT property versus STI topology decided by CMP thickness. We also would like to decide optimized thickness target of STI CMP throughout property comparison between conventional STI CMP with reverse moat process and newly introduced STI CMP using high selectivity slurry. And we studied the process conditions to reduce Gate Profile Skew of which source known as STI topology by evaluation of gate etch recipe versus STI CMP thickness.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.181-184
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• 2001

Chemical Mechanical Polishing(CMP) of Shallow Trench Isolation(STI) structure in 0.18 m semiconductor device fabrication is studied. CMP process is applied for the STI structure with and without reverse moat pattern and End Point Detection (EPD) method is tested. To optimize the transistor properties related metal 1 parameters, we studied the correlation between CMP thickness of STI using high selectivity slurry, DOE of gate etch recipe, and 1st metal DC values. Remaining thickness of STI CMP is proportional to the thickness of gate-etch process and this can affect to gate profile. As CMP thickness increased, the N-poly foot is deteriorated, and the P-Poly Noth is getting better. If CD (Critical Dimension) value is fixed at some point, all IDSN/P values are in inverse proportional to CMP thickness by reason of so called Profile Effect. Weve found out this phenomenon in all around DOE conditions of Gate etch process and we also could understand that it would not have any correlation effects between VT and CMP thickness in the range of POE 120 sec conditions. As CMP thickness increased by 100 ${\AA}$, 3.2 u${\AA}$ of IDSN is getting better in base 1 condition. In POE 50% condition, 1.7 u${\AA}$ is improved, and 0.7 u${\AA}$ is improved in step 2 condition. Wed like to set the control target of CD (critical dimension) in gate etch process which can affect Idsat, VT property versus STI topology decided by CMP thickness. We also would like to decide optimized thickness target of STI CMP throughout property comparison between conventional STI CMP with reverse moat process and newly introduced STI CMP using high selectivity slurry. And we studied the process conditions to reduce Gate Profile Skew of which source known as STI topology by evaluation of gate etch recipe versus STI CMP thickness.

• Progress in Superconductivity and Cryogenics
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• v.22 no.2
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• pp.38-43
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• 2020

This paper presents comparative research on characteristics of air-cored and iron-cored high-temperature superconductor (HTS) field winding synchronous motors. The 100 kW air-cored model is designed analytically by Spatial Harmonic Method, and based on this model, the iron-cored model having the same output power is designed for comparison. Due to the substantial difference of permeability property between air and iron-core, there is a difference of magnetic field magnitude and angle with respect to the HTS tape c-axis, resulting in a different critical current of the field winding considering the anisotropic property of HTS tape. For a detailed comparison between two models, the following key motor characteristics are calculated through the Finite Element Method (FEM) simulation: 1) critical current; 2) HTS wire length; and 3) torque characteristics. From the simulation results, it can be confirmed that the critical current value of the iron-cored model increases by 33 %. Also, in the case of the superconducting wire consumption, those of the iron-cored and air-cored models are 95.3 m and 815.6 m, respectively. So the wire usage can be reduced to about 88 % by using iron core. However, in terms of torque characteristics, the torque ripple of the iron-cored model is about twice as large as that of the air-cored model, which may be a disadvantage on vibration and acoustic noise.

• Earthquakes and Structures
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• v.9 no.6
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• pp.1133-1152
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• 2015

A frequency-domain method is developed for evaluating the earthquake input energy to two building structures connected by viscous dampers. It is shown that the earthquake input energies to respective building structures and viscous connecting dampers can be defined as works done by the boundary forces between the subsystems on their corresponding displacements. It is demonstrated that the proposed energy transfer function is very useful for clear understanding of dependence of energy consumption ratios in respective buildings and connecting viscous dampers on their properties. It can be shown that the area of the energy transfer function for the total system is constant regardless of natural period and damping ratio because the constant Fourier amplitude of the input acceleration, relating directly the area of the energy transfer function to the input energy, indicates the Dirac delta function and only an initial velocity (kinetic energy) is given in this case. Owing to the constant area property of the energy transfer functions, the total input energy to the overall system including both buildings and connecting viscous dampers is approximately constant regardless of the quantity of connecting viscous dampers. This property leads to an advantageous feature that, if the energy consumption in the connecting viscous dampers increases, the input energies to the buildings can be reduced drastically. For the worst case analysis, critical excitation problems with respect to the impulse interval for double impulse (simplification of pulse-type impulsive ground motion) and multiple impulses (simplification of long-duration ground motion) are considered and their solutions are provided.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.251.2-251.2
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• 2010

Plant biomass has been proposed to be an alternative source for petroleum-based chemical compounds. Especially, phenolic chemical compounds can be obtained from lignin by chemical depolymerization processes because lignin consists of complex aromatic polymer such as trans-p-coumaryl, coniferyl and sinapyl alcohols, etc. Phenolic chemical compounds from lignin were usually produced in super critical water. However, we applied Near-critical water (NCW) system because NCW is known as a good solvent for lignin depolymerization. Organic matter like lignin can be solved in NCW system and the system has a unique acid-base property without conventional non-eco-friendly chemicals such as sulfuric acid and sodium hydroxide. In this work, we tried to optimize the NCW depolymerization system by adjusting the processing variables such as reaction time, temperature and pressure. Moreover, the amount of additional phenol was optimized by changing the molar ratio between water and phenol. Phenol was used as capping agent to prevent re-polymerization of active fragment such as formaldehyde. Alkali-lignin was used as a starting material and characterized by a Solid State 13C-NMR, FT-IR and EA (Elemental Analysis). GC-MS analysis confirmed that o-cresol, p-cresol, anisole and 4-hydroxyphathalic acid were the main product and they were quantitatively analyzed by HPLC.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1448-1453
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• 2004

The major parameters governing the fluid dynamical and thermo-dynamical behavior in the large pipeline network system are friction loss and the pipeline length. But in local pipeline networks and relatively short distance pipeline system, secondary loss and the considerations of the moving states of the fluid machine are also important. One of the major element in local pressure control system is pressure regulator. It causes the variations of the physical properties in that pipeline system. Especially, as there is not enough information to obtain reliable physical property values such as density, temperature etc. at the downstream of the pressure regulator, It is hard to calculate accurate solution in the pipeline network analysis. In this study, some numerical approaches to investigate the critical-flow-characteristics of the pressure regulator have been done and the detail examinations and considerations of the pressure regulator as a pipeline network elements according to the variations of the inlet-outlet pressure ratio have been carried. Finally the flow-flied distributions, relations and critical-flow-characteristics have been studied. in detail and the 1D analytic method to analyze critical pipe flow have been investigated

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.9
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• pp.2792-2799
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• 1996

It was shown in the previous study that the numerically derived elastic work factor for CLS specimen was independent of fiber direction for a unidirectional case. Also, it was proposed the elastic work factor could be used to determine energy release rate from a single test record. In the present study, elastic work factor was derived from a simple beam theory to investigate its dependence on material property and geometric condition. Also, the elastic work factor of CLS specimen was applied experimentally to determine critical energy release rate in order to prove its validity determining critical energy release rate from a single specimen. For this purpose, critical energy release rate determined using the elastic work factor was compared with that determined by the compliance method. The results showed that while elastic work factor is affected by $t_2/t_1$ and $L_2/L_1$ it is independent of fiber angle for a unidirectional case. It was also found that critical energy release rates determined by both methods are comparable each other, thus elastic work factor approach can be used to determine energy release rate from a single test specimen.

• Journal of the Korean Solar Energy Society
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• v.36 no.3
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• pp.63-74
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• 2016

The nanofluids are the fluids with excellent thermal property, it is expected as a working fluid of the next generation. The nanofluids are well known that if it is used in the boiling heat transfer system, the critical heat flux is enhanced up to 200%, and the thermal conductivity is increased up to from 10 to 160%. However, the fouling phenomenon can be occurred that nanoparticles of nanofluids are deposited on the heat transfer surface. Therefore, to investigate relation between nanofluid and fouling, this study is carried out using oxidized graphene nanofluid. Also it compared and analyzed the critical heat flux and the boiling heat transfer coefficient. As the result, in case of oxidized graphene deposition for fouling, the critical heat flux is increased up to 20% more than oxdized graphene nanofluid. However, the boiling heat transfer coefficient is decreased down to about $6kW/m^2K$ at $1,000kW/m^2$ more than pure water.

• Progress in Superconductivity and Cryogenics
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• v.16 no.1
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• pp.19-22
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• 2014

The effects of Mg content on the pore formation, density and critical properties were investigated in in-situ reacted $MgB_2$ superconductors. The $Mg_{1+x}B_2$, (x=-0.2, 0.0, 0.05, 0.3, 1.0) bulk samples with different Mg contents were heat-treated at $900^{\circ}C$ for 1 h in an Ar atmosphere. The dimensional changes of a pellet's mass and volume after heat-treatment were measured. After heat-treatment process, the sample mass was decreased by Mg evaporation, but the sample volume was expanded by pore formation at the Mg site; therefore, the apparent density was decreased. Spherical pores the same as Mg particles were developed after heat-treatment in all samples, and the pore density was increased with increasing Mg content. As the x of Mg content was increased to 1.0, the apparent density of $Mg_{1+x}B_2$ samples was decreased due to a relatively larger reduction in a mass change. The critical current density of Mg excessive sample of x=0.05 showed the highest values over the applied magnetic fields because the excessive Mg may compensate Mg loss and enhance grain connectivity.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.3
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• pp.241-246
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• 2000

We fabricated Bi-2223 multi-filaments superconductor tape and evaluated the effect of twisting on the microstructural evolution and critical current. Twist pitches of the tapes are in the range of 70- 8mm and uniformly deformed. It was observed that grain size and the degree of texture decreased as decreasing pitch probably due to the formation of the irregular interface between Ag and filaments. In addition critical current of the tapes decreased to 6.5 A with decreasing pitch to 8mm, showing 48% of degradation compared to the untwisted tapes decreased to 6.5 A with decreasing pitch to 8mm, showing 48% of degradation compared to the untwisted tape(12.5 A). These reduction of critical current may be related to the interface irregularity smaller grain size worse texture and the presence of cracks due to the induced strain during twisting processing.