• 한국정밀공학회지
• /
• 제22권8호
• /
• pp.27-33
• /
• 2005

Polishing pads play an important role in chemical mechanical polishing(CMP) which has recently been recognized at the most effective method to achieve global planarization. In this paper, we have investigated CMP characteristics as a change of groove density of polishing pads. The parameter $(K_n)$ is proposed to estimate groove density of pad. The $K_n$ is defined as groove area divided by pitch area. As the groove density value increased, removal rate increased to some point and then gradually saturated in case of increasing the groove density excessively. In addition Within wafer non-uniformity(WIWNU) worse as groove density increased excessively, although WIWNU improved as groove density increased. Also the uniformity of temperature of pad surface decreased as the groove density increased. It was because that the cooling effect increased as groove density increased. In other words, increasing the groove density which means the apparent contact area of pad has influence on amount of discharge of slurry during polishing process.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2008년도 제39회 하계학술대회
• /
• pp.1352-1353
• /
• 2008

In this study, aluminium - doped zinc oxide (ZnO:Al) transparent conducting film was deposited on PET(polyethylen terephthalate) substrate by r.f. magnetron sputtering method. PET substrate was surface-treated in an atmospheric pressure DBD(dielectric barrier discharge) plasma to increase deposition rate and to improve electrical propesties. Morphological changes by DBD plasma were obsered using contact angle measurement. The contact angle of water on PET was reduced from 62$^{\circ}$ to 42$^{\circ}$ by DBD plasma surface treatment. The plasma treatment also increased deposition rate and electrical propesties. The electrical resistivity as low as $4.97{\times}10^{-3}[{\Omega}-cm]$ and the deposition rate of 234[${\AA}$-m/min] were obtained in ZnO:Al film with surface treatment time of 5min, and 20min., respectively.

• 한국초전도ㆍ저온공학회논문지
• /
• 제14권3호
• /
• pp.33-37
• /
• 2012

An HTS racetrack-type coil without turn-to-turn insulation was characterized by critical current, sudden discharge, and over-current tests with respect to external pressures applied to the straight sections of the coil. The thermal stability of the non-insulated HTS racetrack-type coil was remarkably enhanced with increasing external pressure applied to the straight sections of racetrack-type coil. Furthermore, over-current test results confirmed that the non-insulated HTS racetrack-type coil with increased turn-to-turn thermal contact has the potential to be manufactured into field coils of HTS wind turbine generators with highly enhanced thermal and electrical stabilities.

• 조명전기설비학회논문지
• /
• 제23권6호
• /
• pp.72-77
• /
• 2009

2006년 우리나라에서 발생된 전기화재 중 63.2[%]는 전기배선에서 단락에 의해 발생되었다. 따라서 전기배선에 의한 화재가능성에 대한 연구가 필요하다. 이에 본 연구에서는 통전중인 도선이 주변 조영재와 접촉할 가능성 및 접촉에 의한 화재가능성에 대하여 연구하였다. 그 결과 도선에 흐르는 전류가 클수록 주변의 조영재와 접촉할 가능성이 높고 특히, 도선의 온도가 도선피복의 발화점을 넘는 경우 도선과 주변 조영재 간에 불꽃을 동반하는 방전이 발생됨으로써, 전기화재 가능성이 더욱 커지는 것을 실험적으로 알 수 있었다.

• 설비공학논문집
• /
• 제13권2호
• /
• pp.134-143
• /
• 2001

This paper presents the characteristics of flank and tip seal leakage in a scroll compressor for air-conditioners with R-22 under actual operating conditions. It is well known that the leakage has significant effect on the performance of the scroll compressor. Experiments were performed by using indirect method for measuring mass flow rate passing through flank and tip seal under actual operating conditions, In addition, an analytical model for tip seal leakage was developed to investigate tangential and radial leakage observed at grooves and contact points of tip seals. For low oil concentration, theoretical results were compared with experimental data to verify the analytical model. As a result, leakages through flank and tip seal parts were evaluated as afunction of pressure ratio, orbiting angle, discharge pressure, tip clearance, and leakage point. It was also found that the tip seal leakage was considerable even though the tip seal provided adequate sealing effect.

• KEPCO Journal on Electric Power and Energy
• /
• 제7권2호
• /
• pp.317-321
• /
• 2021

As the large-scale renewable energy power plant increases, the high-capacity and compact Energy Storage System (ESS) is required. However, this trend could reduce the insulation reliability of ESS. In this study, the surface flashover characteristics for four types of solid insulators are investigated in the uniform electric field with AC and Lightning Impulse (LI) voltage waveforms under various contamination levels. In addtion, insulator surfaces are compared based on the contact angle before and after surface flashover. The experimental results show that AC flashover voltage is dependent on the materials and the contamination level, but LI flashover voltage is only associated with the contamination level. Especially, AC flashover voltage of PC (PolyCarbonate) is higher than that of other insulators, which is associated with the unique and sequential creepage discharge propagation pattern of PC. The localized discharges on the surface of PC form corresponding tracking points. Then, the interconnected trackings result in the complete flashover. This flashover patterns degrade the surface of PC much more than that of epoxy and Bulk Molding Compoud (BMC). Thus, the contact angle of PC is significantly reduced compared to that of other insulators. The increased hydrophilicity in the surface of PC enhances the insulator surface conductivity.

• Korean Chemical Engineering Research
• /
• 제51권2호
• /
• pp.214-220
• /
• 2013

본 연구에서는 실리케이트계 황색 형광체($Sr_2SiO_4:Eu^{2+}$)의 신뢰성 향상을 위하여 대기압 유전체장벽방전 플라즈마를 이용하여 hexamethyldisiloxane (HMDSO, $C_6H_{18}OSi_2$)을 형광체 분말에 코팅하였다. 플라즈마 코팅 후의 형광체 분말특성은 주사전자현미경(scanning electron microscope), 투과전자현미경(transmission electron microscope), 형광분광광도계(fluorescence spectrophotometer) 및 접촉각측정기(contact angle analyzer)를 이용하여 조사되었다. 형광체 분말의 플라즈마 코팅 후 접촉각이 $133.0^{\circ}$(물)와 $140.5^{\circ}$(글리세롤)로 증가하여 표면이 소수성으로 변화되었음을 확인하였으며, 광발광(photoluminescence)은 최대 7.8%의 향상을 나타냄을 알 수 있었다. 플라즈마 코팅 후 형광체 표면의 주사전자현미경 및 투과전자현미경 사진을 통해 낟알형상의 표면조직이 박막 코팅 층으로 덮여 있고, 코팅 층은 31~46 nm 가량의 두께로 형성되어 있음을 확인하였다. 발광다이오드(3528 1 칩 LED)에 형광체를 실장한 후 $85^{\circ}C$와 85% 상대습도에서 1,000시간 동안 신뢰성 테스트(85-85 Test)를 수행한 결과 코팅이 되지 않은 경우와 비교하여 코팅후의 형광체가 광도 저하율에서도 개선 효과를 보이는 것으로 나타났다. 본 연구의 유전체장벽방전 플라즈마 코팅 방법은 불규칙한 입자 형태의 형광체 분말 표면을 입체적으로 코팅하여 제품의 신뢰성을 향상시킬 수 있는 방법으로 판단된다.

• 멤브레인
• /
• 제26권1호
• /
• pp.70-75
• /
• 2016

본 연구에서는 하수처리수를 원수로 사용하여 직접 접촉식 막증발법을 적용하여 원수 온도와 원수 유량 변화에 따른 하수처리수의 COD, TN, TP, TOC의 제거율 변화와 여과플럭스의 변화를 측정하였다. 또한 하수처리수에 의한 분리막의 오염 가역성을 평가하기 위해 1차 증류수만을 사용하여 물리세정을 수행한 후 플럭스의 회복률을 측정하였다. 실험결과 원수의 온도 및 유량에 관계없이 원수가 3배 농축될 때까지 여과를 진행하였음에도 불구하고 하수처리수의 주요 오염물질인 COD, TN, TP, TOC에 대한 제거율이 92% 이상으로 높게 나타났다. 또한 비교적 낮은 온도인 $50^{\circ}C$와 $60^{\circ}C$에서 원수의 유량에 따라 최소 13.8 LMH에서 20.3 LMH로 높은 여과플럭스를 나타냈다. 그리고 높은 농축계수까지 여과 실험을 진행했음에도 불구하고 낮은 여과플럭스의 감소를 나타냈으며 1차 증류수를 이용한 짧은 시간 동안의 물리세정만으로 최소 90% 이상의 높은 여과 플럭스 회복율을 나타냈다. 따라서 하수처리수 재이용을 위한 공정으로 막증발법의 적용이 충분히 가능할 것으로 판단된다.

• 대한간호학회지
• /
• 제46권4호
• /
• pp.610-617
• /
• 2016

Purpose: Smoking cessation is strongly recommended for every smoker after ischemic stroke, but many patients fail to quit smoking. An improved smoking cessation rate has been reported with intensive behavioral therapy during hospitalization and supportive contact after discharge. The aim of this study was to demonstrate the usefulness of the timely interventions for smoking cessation in men with acute ischemic stroke. Methods: Patients who participated in the timely interventions strategy (TI group) were compared with those who received conventional counseling (CC group). In the TI group, a certified nurse provided comprehensive education during admission and additional counseling after discharge. Outcome was measured by point smoking success rate and sustained smoking cessation rate for 12 months. Results: Participants, 157 men (86 of the TI group and 71 of the CC group), were enrolled. Mean age was $58.25{\pm}11.23$ years and mean initial National Institutes of Health Stroke Scale score was $4.68{\pm}5.46$. The TI group showed a higher point smoking success rate compared with the CC group (p=.003). Multiple logistic regression analysis showed that the TI group was 2.96-fold (95% CI, 1.43~6.13) more likely to sustain smoking cessation for 12 months than the CC group. Conclusion: Findings indicate that multiple interventions initiated during hospital stay and regular follow-up after discharge are more effective than conventional smoking cessation counseling in men with acute ischemic stroke.

• 상하수도학회지
• /
• 제30권2호
• /
• pp.167-177
• /
• 2016

This work investigated the decomposition of aqueous anatoxin-a originated from cyanobacteria using an underwater dielectric barrier discharge plasma system based on a porous ceramic tube and an alternating current (AC) high voltage. Plasmatic gas generated inside the porous ceramic tube was uniformly dispersed in the form of numerous bubbles into the aqueous solution through the micro-pores of the ceramic tube, which allowed an effective contact between the plasmatic gas and the aqueous anatoxin-a solution. Effect of applied voltage, treatment time and the coexistence of nutrients such as $NO_3{^-}$, $H_2PO_4{^-}$ and glucose on the decomposition of anatoxin-a was examined. Chemical analyses of the plasma-treated anatoxin-a solution using liquid chromatography-mass spectrometry (LC-MS) and ion chromatography (IC) were performed to elucidate the mineralization mechanisms. Increasing the voltage improved the anatoxin-a decomposition efficiency due to the increased discharge power, but the energy required to remove a given amount of anatoxin-a was similar, regardless of the voltage. At an applied voltage of 17.2 kV (oxygen flow rate: $1.0L\;min^{-1}$), anatoxin-a at an initial concentration of $1mg\;L^{-1}$ (volume: 0.5 L) was successfully treated within 3 min. The chemical analyses using LC-MS and IC suggested that the intermediates with molecular weights of 123~161 produced by the attack of plasma-induced reactive species on anatoxin-a molecule were further oxidized to stable compounds such as acetic acid, formic acid and oxalic acid.