• Proceedings of the Materials Research Society of Korea Conference
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• 1998.08a
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• pp.78.1-78
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• 1998

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.5
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• pp.976-985
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• 2002

The purpose of this paper is that the roughness(Rrms = 31$\AA$, Rp-v = 270$\AA$) of ITO thin film deposited by sputtering method for OELD is improved to Rrms $\leq$ 10$\AA$, Rp-v $\leq$ 80$\AA$ by chemical mechanical polishing(CMP). First, ITO thin films are polished with a variety of consumables (Pads, Slurries) to choose proper some for the roughness improvement and the CMP mechanism of ITO thin films is demonstrated on the ground of the experiment results. Henceforth, the CMP characteristics (Removal rate, Non-uniformity) of chosen consumables are evaluated according to processing conditions (Polishing pressures, Table velocities) and suitable conditions for ITO film CMP are selected. Finally, the electrical and optical properties (Sheet resistance, Transmittance) of ITO thin films are investigated to verify whether or not ITO thin film are still suitable for OELD after polished.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05d
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• pp.109-112
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• 2003

Recently, CMP (Chemical mechanical polishing) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, COO (cost of ownership) and COC (cost of consumables) were relatively increased because of expensive slurry. In this paper, we have studied the possibility of recycle of reused silica slurry in order to reduce the costs of CMP slurry. Also, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• Proceedings of the KWS Conference
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• v.43
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• pp.141-143
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• 2004

The experimental simulation welds using 3kinds of 70ksi titania based flux-cored consumables were performed on 24 inches 24.6-thick API 5L Gr. B pipe with relatively high current, over 300A and four different Post Weld Heat Treaonent(PWHT) conditions at $625^{circ}C$ were applied to each consumable test coupon. It is well known that, in common welding processes such as Submerged Arc Welding(SAW) or Flux Cored A.c Welding(FCAW), the cooling rates in as-deposited weld bead are normally so ,apid that actual precipitation of microalloy carbonitrides, Nb(C,N) or V(C,N) is not likely to occur in the as-welded weld metal, however, during stress relief or PWHT the operation of precipitation can reduce the impact properties of the weld metal. As results of mechanical testing, it is concluded that PWHT at $625^{circ}C$ is detrimental to weld metal impact toughness of Ti-B type flux- cored (FC) welding consumables regardless of the amount of Nb and V, but two optima were exhibited, one at 800ppm Ti, 75ppm 5 and another 360ppm Ti, 54ppm 5.

• Journal of Welding and Joining
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• v.23 no.4
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• pp.27-33
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• 2005

Quantitative evaluation was performed on the microstructure of flux-cored arc(FCA) weld metal using a method blown as IIW scheme. It was mainly intended to figure out any practical difficulties in applying this method and also to provide the consumable makers with basic guide line in developing FCA welding consumables far better properties. Assessment of the experimental results showed IIW scheme was quite reliable in the low heat input range where the acicular ferrite was a major constituent. However, in the high heat input range, some scatter was noticed as the other phases like grain boundary ferrite and Widmansttaten ferrite become dominant. It implies that the accuracy of IIW scheme depends on the faction of microstructural constituents and it become worse as the fraction of latter two phases increases. This tendency was discussed in terms of the characteristics of those two phases. In addition, base line microstructure of rutile type FCA weld metal was addressed for developing new FCA welding consumables intended for higher heat input welding.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.9
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• pp.759-764
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• 2003

Recently, CMP (chemical mechanical polishing) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, COO (cost of ownership) and COC (cost of consumables) were relatively increased because of expensive slurry. In this paper, we have studied the possibility of recycle of roused silica slurry in order to reduce the costs of CMP slurry. The post-CMP thickness and within-wafer non-uniformity (WIWNU) wore measured as a function of different slurry composition. As an experimental result, the performance of reused slurry with annealed silica abrasive of 2 wt％ contents was showed high removal rate and low non-uniformity. Therefore, we propose two-step CMP process as follows , In tile first-step CMP, we can polish the thick and rough film surface using remaked slurry, and then, in the second-step CMP, we can polish the thin film and fine pattern using original slurry. In summary, we can expect the saying of high costs of slurry.

• Journal of Welding and Joining
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• v.31 no.6
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• pp.37-43
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• 2013

This study targets to make clear the connection between MS (Martensite start) point and welding shrinkage. We approved that a Martensite-transformed weldment may not yield state under low MS point, but also admitted the limitation of numerical calculation by inherent strain approach or thermal strain approach. Therefore, new thermal strain formulae during cooling stages were made. As a thermal strain is obtained by integrating thermal extension coefficient, a constant of integration should be decided. In our suggested formulae, the origin was based on totally remained austenite, and added strain from volume changes in Martensite transformation was based on totally transformed ferrite. Through the suggested methodology, It is verified that an MS point under a critical temperature can let weld shrinkage relax and the critical value can be obtained. For supporting this process, 15 weld-consumables were made, were tested by fillet type and were measured. As a result, a positive correlation between MS point and level of weld-distortion was obtained, but it was rather weak.

• Journal of Welding and Joining
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• v.16 no.1
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• pp.25-37
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• 1998

본 해설에서는 Inconel계와 Hastelloy계로 구분되는 9%Ni강용 피복아크용접봉을 중심으로 LNG저장탱크 용접시공시 발생 가능한 문제점들을 검토하고, Ni합금 피복봉의 심선과 피복제와 관련한 일반적인 제조특성을 살펴보았다. 또한 현재 국내 현장에서 용접시공에 사용되는 용접재료의 화학적, 기계적 특성과 함께 용접작업성을 평가한 결과 이들 피복아크용접봉들은 규격이 정한 요구조건들을 만족하면서 비교적 양호한 용접작업성을 확보하고 있는 것으롤 판단되었다. 이상의 검토결과는 향후 9%Ni강용 Ni합금 피복아크용접봉의 국산화 개발에 기초자료로 활용될 것으로 기대된다.

• Journal of Korean Elementary Science Education
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• v.23 no.4
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• pp.305-317
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• 2004

The learning materials in elementary school science textbooks should include all kinds of materials being used by both teachers and students in the science teaching. The major purpose of this research is to analysis textbooks and teacher's guidebooks prepared for the science teaching of 3-6 grade students. To clarify this research, we listed whole of the learning materials of science teaching for each grade and counted numbers being used for whole of the lessons of science. And according to the characteristics and the methods of its preparation of materials, the types of learning materials can be divided into 10 categories such as teaching equipments for science, test materials, consumables, audio-visual aids, teaching equipments in general, collecting' recycling materials, field studies' collected data, breeding' cultivation materials, manufacture materials, and etc. At the result of this research, the 7th national science curriculum needs total 844 items of learning materials for science education. They could be separated into ten types of categories such as 159 items of teaching equipments for science, 65 items of test materials, 116 items of consumables, 198 items of audio-visual aids, 64 items teaching equipments in general, 31 items of collecting' recycling materials, 38 items of field studies (collecting) materials, 17 items of breeding-cultivation materials, 58 items of manufacturing materials, 105 items of other materials. And we found out that there were 332 items of materials for the 3rd grade, 303 items for the 4th grade, 324 items for the 5th grade, and 254 items for the 6th grade. The result of this research could be useful for classroom activities for science teaching.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.145-148
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• 2003

Recently, the recycle of CMP (chemical mechanical polishing) slurries have been positively considered in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in CMP process. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are one of the most important components. Especially, the abrasive particles of slurry are needed in order to achieve a good removal rate. However, the cost of abrasives, is still very high. In this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slury, As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.