• Radiation Oncology Journal
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• v.37 no.4
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• pp.232-248
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• 2019

Proton beams have been used for cancer treatment for more than 28 years, and several technological advancements have been made to achieve improved clinical outcomes by delivering more accurate and conformal doses to the target cancer cells while minimizing the dose to normal tissues. The state-of-the-art intensity modulated proton therapy is now prevailing as a major treatment technique in proton facilities worldwide, but still faces many challenges in being applied to the lung. Thus, in this article, the current status of proton therapy technique is reviewed and issues regarding the relevant uncertainty in proton therapy in the lung are summarized.

• Proceedings of the KIEE Conference
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• 1991.07a
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• pp.166-170
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• 1991

An advanced on-resistance model of VDMOS devices in the low voltage regime is proposed and verified by 2-D device simulations. The model considers the lateral gaussian doping profiles in the channel region and exact current spreading angles in the epitaxial layer for both linear and cellular geometries by employing the conformal mapping. It is found out that the on-resistance of low voltage VDMOS may be overestimated considerably if it is analyzed by the conventional method. The 2-D device simulation results show that the proposed model is valid for all ranges of cell spacings and breakdown voltages.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.86-86
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• 2003

Copper has attracted much attention in the deep submicron ULSI metallization process as a replacement for aluminum due to its lower resistivity and higher electromigration resistance. Electroless copper deposition method is appealing because it yields conformal, high quality copper at relatively low cost and a low processing temperature. In this work, it was investigated that effect of the microstructure of the substrate on the electroless deposition. The mechanism of the nucleation and growth of the palladium nuclei during palladium activation was proposed. Electroless copper deposition on TiN barriers using glyoxylic acid as a reducing agent was also investigated to replace toxic formaldehyde. Furthermore, electroless copper deposition on TaN$\sub$x/ barriers was examined at various nitrogen flow rate during TaN$\sub$x/ deposition. Finally, it was investigated that the effect of plasma treatment of as-deposited TaN$\sub$x/ harriers on the electroless copper deposition.

• 한국전산유체공학회:학술대회논문집
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• 2000.05a
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• pp.99-106
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• 2000

A method of two and three dimensional orthogonal grid generation with control of spacing by using the covariant Laplace equation is Presented. An important feature of the methodology is its ability to control effectively the grid spacing especially near the boundaries still maintaining good orthogonality in whole field. The method is based on the concept of decomposition of the global transformation into consecutive transformation of an approximate conformal mapping and au auxiliary orthogonal mapping to have linear and uncoupled equations. Control of cell spacing is based on the concept of reference arc length, and orthogonal correction is performed in the auxiliary domain. It is concluded that the methodology can successfully generate well controlled orthogonal grids around bodies of 2 and 3 dimensional configurations.

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.42-44
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• 2003

The paper presents the method and apparatus for conformal photoresist spray coating on the 3D structured substrate. The system consists of a high-temperature-rotational chuck, ultrasonic spray nozzle module, angle control module and nozzle moving module. The coating uniformity is acquired by controlling the moving speed of the ultrasonic spray nozzle across the substrate which is rotated constantly. To coat the photoresist conformally the spray angle of the nozzle and the temperature of the substrate are controlled during spray coating. The rotational chuck can be heated up by hot air or $N_2$. The photoresist (AZ1512) has been coated on the 3D structured wafer by spray coating system and the characteristics have been evaluated.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.6
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• pp.1216-1220
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• 1992

In case that a general cusp-crack shaped inclusion expressed in a polynominal form of conformal mapping function exists in a two dimensional elastic body under uniform heat flow, the complex potential and thermal stress intensity factors are derived. Two thermal boundary conditions are considered, one an insulated rigid inclusion and the other a rigid inclusion with fixed boundary temperature. The previous solutions of the thermal stress intensity factors for symmetrical airfoil and lip type rigid inclusions are obtained from the general solution of the thermal stress intensity factors.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.19 no.10
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• pp.987-995
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• 2009

As an experimental technique to analyze the far-field characteristics of underwater cylindrical array sensors, cylindrical acoustic holography is studied. Inside an laboratory water tank, far-field directivity patterns as well as near-field source images are reconstructed from the measured hologram by hydrophone array. Approximate equation for far-field directivity estimation is derived based on stationary phase method. The simulation and experiment show well usefulness of the proposed method in application of underwater array sensors.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.282-282
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• 2013

The antimony sulfide ($Sb_2S_3$) thin films were deposited using the gas phase method which known as atomic layer deposition (ALD) on mesoporous micro-films. Tris (dimethylamido) antimony (III[$(Me_2N)_3Sb$] and hydrogensulfide ($H_2S$) were used as precursors to deposit $Sb_2S_3$. Self-terminating nature of $(Me_2N)_3Sb$ and $H_2S$ reaction were demonstrated by growth rate saturation versus precursors dosing time. Absorption spectra and extinction coefficient were investigated by UV-VIS spectroscopy. Scanning electron microscopic analysis and X-ray photoelectron spectroscopy (XPS) depth profile were employed to determine the conformal deposition.

• Geomechanics and Engineering
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• v.3 no.1
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• pp.17-28
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• 2011

This paper presents an analytical solution for steady state flow into a close-ended cylindrical permeameter. The soil medium is considered to be uniform, isotropic, and of infinite thickness. Laplace equation is solved by considering rotational symmetry and by using curvilinear coordinates obtained from conformal mapping. The deduced shape factors, which are compared to approximate relationships obtained from both numerical and physical modelling, and idealizations involving ellipsoidal cavities, are proposed for use in field measurements. It is shown that some of the shape factors obtained are significantly different from published values and show a much higher dependence of the rate of flow on the aspect ratio, than deduced from approximate solutions.

• Bulletin of the Korean Mathematical Society
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• v.29 no.1
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• pp.73-80
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• 1992

We discuss transverse harmonic fields on compact foliated Riemannian manifolds, and give a necessary and sufficient condition for a transverse field to be a transverse harmonic one and the non-existence of transverse harmonic fields. 1. On a foliated Riemannian manifold, geometric transverse fields, that is, transverse Killing, affine, projective, conformal fields were discussed by Kamber and Tondeur([3]), Molino ([5], [6]), Pak and Yorozu ([7]) and others. If the foliation is one by points, then transverse fields are usual fields on Riemannian manifolds. Thus it is natural to extend well known results concerning those fields on Riemannian manifolds to foliated cases. On the other hand, the following theorem is well known ([1], [10]): If the Ricci operator in a compact Riemannian manifold M is non-negative everywhere, then a harmonic vector field in M has a vanishing covariant derivative. If the Ricci operator in M is positive-definite, then a harmonic vector field other than zero does not exist in M.