• Title/Summary/Keyword: coating defect

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Humidity Induced Defect Generation and Its Control during Organic Bottom Anti-reflective Coating in the Photo Lithography Process of Semiconductors

  • Mun, Seong-Yeol;Kang, Seong-Jun;Joung, Yang-Hee
    • Journal of information and communication convergence engineering
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    • v.10 no.3
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    • pp.295-299
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    • 2012
  • Defect generation during organic bottom anti-reflective coating (BARC) in the photo lithography process is closely related to humidity control in the BARC coating unit. Defects are related to the water component due to the humidity and act as a blocking material for the etching process, resulting in an extreme pattern bridging in the subsequent BARC etching process of the poly etch step. In this paper, the lower limit for the humidity that should be stringently controlled for to prevent defect generation during BARC coating is proposed. Various images of defects are inspected using various inspection tools utilizing optical and electron beams. The mechanism for defect generation only in the specific BARC coating step is analyzed and explained. The BARC defect-induced gate pattern bridging mechanism in the lithography process is also well explained in this paper.

Coating defect survey of underground buried pipelines (지하매설배관의 피복손상부 탐측에 관한 연구)

  • Ha, Tae-Hyun;Bae, Jeong-Hyo;Lee, Hyun-Goo;Kim, Dae-Kyeong;Ha, Yoon-Cheol;Park, Kyung-Wha
    • Proceedings of the KIEE Conference
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    • 2005.07e
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    • pp.61-63
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    • 2005
  • In present, most of underground metallic structures, especially gas pipeline, have adopted in order to protect against a corrosion. If a coating defect is be on the surface of gas pipeline, the pitting corrosion is occur normally. So, in the corrosion field, investigation of coating defect is very important activity. In this paper, DCVG(Direct Current Voltage Gradient) method which is can detect a coating defect of gas pipeline is introduced. And also, the assesment of coating defect position according to the position of temporary anode of ICCP(Impresed Current Cathodic Protection) system is presented.

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Investigation of shinning Spot Defect on Hot-Dip Galvanized Steel Sheets

  • Liu, Yonggang;Cui, Lei
    • Corrosion Science and Technology
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    • v.13 no.4
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    • pp.125-129
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    • 2014
  • Shinning spot defects on galvanized steel sheets were studied by optical microscope, scanning electron microscope(SEM), Energy Dispersive Spectrometer (EDS) and Laser-Induced Breakdown Spectroscopy Original Position Statistic Distribution Analysis (LIBSOPA) in this study. The research shows that the coating thickness of shinning spot defects which caused by the substrate defect is much lower than normal area, and when skin passed, the shinning spot defect area can not touch with skin pass roll which result in the surface of shinning spot is flat while normal area is rough. The different coating morphologies have different effects on the reflection of light, which cause the shinning spot defects more brighter than normal area.

Coating defect classification method for steel structures with vision-thermography imaging and zero-shot learning

  • Jun Lee;Kiyoung Kim;Hyeonjin Kim;Hoon Sohn
    • Smart Structures and Systems
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    • v.33 no.1
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    • pp.55-64
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    • 2024
  • This paper proposes a fusion imaging-based coating-defect classification method for steel structures that uses zero-shot learning. In the proposed method, a halogen lamp generates heat energy on the coating surface of a steel structure, and the resulting heat responses are measured by an infrared (IR) camera, while photos of the coating surface are captured by a charge-coupled device (CCD) camera. The measured heat responses and visual images are then analyzed using zero-shot learning to classify the coating defects, and the estimated coating defects are visualized throughout the inspection surface of the steel structure. In contrast to older approaches to coating-defect classification that relied on visual inspection and were limited to surface defects, and older artificial neural network (ANN)-based methods that required large amounts of data for training and validation, the proposed method accurately classifies both internal and external defects and can classify coating defects for unobserved classes that are not included in the training. Additionally, the proposed model easily learns about additional classifying conditions, making it simple to add classes for problems of interest and field application. Based on the results of validation via field testing, the defect-type classification performance is improved 22.7% of accuracy by fusing visual and thermal imaging compared to using only a visual dataset. Furthermore, the classification accuracy of the proposed method on a test dataset with only trained classes is validated to be 100%. With word-embedding vectors for the labels of untrained classes, the classification accuracy of the proposed method is 86.4%.

Investigation of Streaky Mark Defect on Hot Dip Galvannealed IF Steel

  • Xinyan, Jin;Li, Wang;Xin, Liu
    • Corrosion Science and Technology
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    • v.9 no.3
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    • pp.109-115
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    • 2010
  • Interstitial-free (IF) steels are widely used for car body material. However, a few types of streaky mark defect are commonly found on hot dip galvannealed (GA) IF steel sheets. In the present study, both the phase structure of a streaky mark defect and the microstructure of the substrate just below it were characterized by optical microscopy (OM) and scanning electron microscopy (SEM). It was found that the bright streaky mark area was composed of ${\delta}$ phase while the dark normal area was full of craters. More than half of the grains at the uppermost surface of the substrate just below the streaky mark defect are unrecrystallized grains which could result from lower finish rolling temperature during hot rolling and be kept stable during the annealing process, while almost all the grains in the normal area are equiaxed grains. In order to confirm the effect of the unrecrystallized grains on the coating morphology, hot dip galvannealing simulation experiments were carried out in IWATANI HDPS. It is proved that the unrecrystallized grains accelerate the Fe-Zn reaction rate during galvannealing and result in a flatter coating surface and an even coating thickness. Finally, a formation mechanism of the streaky mark defect on the hot dip galvannealed IF steel sheet was discussed.

The Weldability of Laminated Stator Core for Motor by Pulsed Nd:YAG Laser [II] - Investigation of Mechanism on Formation of Weld Defect - (펄스 Nd:YAG 레이저를 이용한 모터용 스테이터 적층코어의 용접특성 [II] - 용접결함의 형성 메커니즘 규명 -)

  • Kim Jong-Do;Kil Byung-Lea;Lee Chang-Je
    • Journal of Advanced Marine Engineering and Technology
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    • v.30 no.5
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    • pp.636-644
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    • 2006
  • Recently, there were some successful examples that the laser welding was introduced into production line. However, the spread of laser welding is not sufficient in many industries. There are several reasons why it is difficult to penetrate the laser welding into production lines. Because it is different from reflection, absorption and permeation of laser beam according to material and surface condition. Moreover, there are significant problems in processing such as absorption and scattering of beam by the induced plasma or plume. Therefore, understanding of mechanism on formation of weld defect in laser welding of the laminated core for motor is very important. In this paper, it was analyzed in terms of materials which was source of defect in laser welding and conventional arc welding. As a results of analysis, insulation coating film of the laminated core was judged to main factor of weld defect. it could be well aware as tracing carbon volume, and it was deduced that weld defect by insulation coating film was caused by difference of mechanism between the two heat sources.

ADAPTABLE ELLIPSE METHOD FOR BRIDGE COATING DEFECT RECOGNITION

  • Po-Han Chen;Ya-Ching Yang;Luh-Maan Chang
    • International conference on construction engineering and project management
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    • 2009.05a
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    • pp.449-456
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    • 2009
  • Image processing has been applied to steel bridge defect recognition since 1990s. Compare to human visual inspection, image processing provides a more objective and accurate way of assessment. Since shade and shadow may sometimes occur when taking bridge coating images, non-uniform illumination problems should be considered. By means of color image processing, this paper aims to mitigate the illumination effect for bridge coating assessment. Furthermore, the adaptable ellipse method (AEM) is proposed to recognize mild rust colors. Finally, AEM will be compared to the K-Means algorithm, a popular recognition method, to show its advantage.

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Effects of Thickness and Defects of DLC Coating Layer on Corrosion Resistance of Metallic Bipolar Plates of PEMFCs (PEMFC 금속분리판의 내식성에 미치는 DLC 코팅층의 두께 및 결함의 영향)

  • Dong-Ho Shin;Seong-Jong Kim
    • Corrosion Science and Technology
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    • v.23 no.3
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    • pp.235-245
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    • 2024
  • DLC coatings have been widely applied in industrial fields that require high corrosion resistance due to their excellent mechanical characteristics and chemical stability. In this research, effects of DLC coating thickness and defects on corrosion resistance were investigated for application of metallic bipolar plates in polymer membrane electrolyte fuel cells (PEMFCs). Results revealed that a DLC coating thickness of 0.7 ㎛ could lead to a defect size reduction of about 75.9% compared to that of 0.3 ㎛.As a result of potentiodynamic polarization experiments, the current density under a potential of 0.6 V was measured to be less than 1 ㎂/cm2,which was an excellent value. Inparticular, the delamination ratio and the decrease rate of maximum pitting depth were up to 84.8% and 63.3%, respectively, with an increase in the DLC coating thickness. These results demonstrate that DLC coating thickness and defects are factors that can affect corrosion resistance of DLC coating and its substrate.

Study on the FPCS for Photoresist Coating of Semiconductor Manufacturing Process (반도체 생산공정의 감광액 도포를 위한 FPCS에 관한 연구)

  • Park, Hyoung-Keun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.9
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    • pp.4467-4471
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    • 2013
  • In this research, developed full-scan photoresist coating system(FPCS) can improve the efficiency of the photoresist coating system essential for spinner equipment in nano semiconductor manufacturing process. The devices developed in this research, which can be swiftly replaced in case abnormal state element changes or wafer manufacturing defect occurs, are anticipated to improve module yield as well as real-time monitoring on the state element in order to prevent the complex process defect due to the photoresist miss coating.

Prediction of Defect Rate Caused by Meteorological Factors in Automotive Parts Painting (기상환경에 따른 자동차 부품 도장의 불량률 예측)

  • Pak, Sang-Hyon;Moon, Joon;Hwang, Jae-Jeong
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2021.10a
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    • pp.290-291
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    • 2021
  • Defects in the coating process of plastic automotive components are caused by various causes and phenomena. The correlation between defect occurrence rate and meteorological and environmental conditions such as temperature, humidity, and fine dust was analyzed. The defect rate data categorized by type and cause was collected for a year from a automotive parts coating company. This data and its correlation with environmental condition was acquired and experimented by machine learning techniques to predict the defect rate at a certain environmental condition. Correspondingly, the model predicted 98% from fine dust and 90% from curtaining (runs, sags) and hence proved its reliability.

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