• Proceedings of the SAREK Conference
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• 2007.11a
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• pp.600-605
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• 2007

In this study, the risk rates of different contamination sources of the Foreign material in a minienvironment were analyzed through CFD simulation. From the results, the ambient contamination sources mainly affect wafers in the FOUP, whereas the internal contamination sources mainly affect wafers laid on the robot arm in the minienvironment. And the purging plenum system is very useful in protecting the wafers in the FOUP from Foreign materials transferred from the FFU. However, this system is unable to protect the wafers on the robot arm from internal Foreign materials and the wafers in the FOUP from sources of the interface between the FOUP and the minienvironment.

• Particle and aerosol research
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• v.14 no.4
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• pp.181-189
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• 2018

In this study, the risk rates of different contamination sources of the contaminant in a minienvironment were analyzed through Computational Fluid Dynamics (CFD) simulation. The airflow pattern characteristics can only predict the qualitative variation of contaminant concentration, but cannot evaluate the quantitative variations in the risk rate of sources. From the results, the ambient contamination sources mainly affect wafers in the Front Opening Unified Pod (FOUP), whereas the internal contamination sources mainly affect wafers laid on the robot arm in the minienvironment. And the purging plenum system is very useful in protecting the wafers in the FOUP from contaminants transferred from the Fan Filter Unit (FFU). However, this system is unable to protect the wafers on the robot arm from internal contaminants and the wafers in the FOUP from sources of the interface between the FOUP and the minienvironment.

• Fire Science and Engineering
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• v.28 no.3
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• pp.29-33
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• 2014

Cleanroom fires were simulated by using Fire Dynamics Simulator. A grid size of $0.5{\times}0.5{\times}0.2m^3$ was selected following review of grid sizes. Fires in three large cleanrooms were investigated to confirm safety by applying the requirements on temperature, visibility, and carbon monoxide concentration in performance based design. The worst situation without sprinkler system and air flow of 0.1 m/s downward in the cleamrooms was considered. It was confirmed that all the three cleanrooms were safe in case without sprinklers since the temperature was below the safety requirement. Decrease in visibility and carbon monoxide concentration due to the fires were negligible.

• Asian Journal of Atmospheric Environment
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• v.10 no.4
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• pp.226-231
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• 2016

In order to remove fog often causes various troubles in our daily lives, the novel defog blower equipped the roller brush made of recycled horse's mane hair was developed. This work presents the overview of new defog devices and the experimental data obtained at two different kinds of defogging experiments. In the model experiment carried out at the enclosed cleanroom ($W5.9m{\times}L5.1m{\times}H2.4m$) targeted a vinyl house, fog was dissipated in less than 30 seconds in case with wind entrainment and two minutes 45 seconds in case without wind entrainment after running of the newly designed defog blower. When the demisting blower was run in a duct, it has an excellent mist sweeping qualities as well as a great removal effect for the background particles (89.5% and 65.4% scavenging rates for fine and coarse particles, respectively). It can be therefore said that the mist eliminator presented in this paper is ideal for use in the sealing space like a vinyl house and the industrial sites where required to remove both harmful mist and particle.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.23 no.1
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• pp.69-77
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• 2009

Recently, As increasing cleanroom size, Stocker system is trending the large size and long distance for LCD material transfer system. In order to rise a rate of production, the manufacturer are on the decrease of total tact time with Stocker system. And the manufacturer are requested to high speed of next generation Stocker system. Therefore, this paper propose Contactless Power Supply(CPS) system about high speed of next generation Stocker system. This paper proposes CPS system is applied in the long distance and straight section with Stocker system. The test results of input/output characteristic and efficiency of CPS system on operating pattern of Stocker system were analyzed, and proved the applicability on commercial use.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.5
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• pp.457-466
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• 2007

A numerical and experimental study on the evaluation and the prediction of cleanliness level in the mini-environment system was carried out. Using the concept of local mean air-age (LMA) and effective flow rate, the new direct method for estimating the mini-environment was developed and compared with the previous performance index of airflow pattern characteristics. It was found out that the airflow pattern analysis is a restricted method to estimate the real performance of the mini-environment. The reason is that the airflow pattern cannot predict the effect of the increment of the ventilation rate on the cleanliness level in the mini-environment. While LMA is capable of showing the effects of the contaminant accumulation caused by turbulent intensity, eddy, and the increment of the effective flow rate. This result showed that LMA is more exact and effective performance index than the previous one like the airflow pattern characteristics.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.25 no.12
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• pp.1730-1738
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• 2001

This paper presents an overview of testing and analyzing field performance of a centrifugal chiller which has a rated capacity of 200 RT(703 kW). Field data of a chiller installed in the cleanroom research building of KIST has been collected far performance analysis. The operating data included start-up, shut-down, and quasi-static state where cooling capacity and compressor power consumption varied cyclically. It was found that the steady-state thermodynamic model could be applied to relate the cooling capacity and COP under quasi-static conditions. The results led to finding the required cooling load pattern and a possible energy saving method. This study provides a method of evaluating performance of a large capacity centrifugal chiller in which field test is necessary.

• Proceedings of the SAREK Conference
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• 2008.11a
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• pp.452-457
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• 2008

We performed a study on the contaminant transfer in a clean space for the location of product and fan filter unit using computational fluid dynamics analysis. To simplify the real product moving process, three different non-moving cases regrading the locations of product were selected: no product, at the lower side, and at the upper and lower sides. And to investigate the characteristics of the contaminant transfer, the arrangement of fan filter units was varied. Local mean air-age and contaminant distribution were used as evaluation indices. From the results, the contaminant transfer to the product was the most when the products were simultaneously located at the upper and lower sides. And the contaminant was easily exhausted regardless of the location of product when the fan filter units were properly arranged at the top side of the clean space.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.38-43
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• 2021

Permanent magnet linear synchronous motor (PMLSM) is suitable for use in cleanroom environments and have advantages such as high speed, high thrust, and high precision. If the stators are arranged in the entire moving path of the mover, there is a problem in that the installation cost increases. To solve this problem, discontinuous armature arrangement PMLSM has been proposed. In this case, the mover receives a greater detent force in the section where the stator is not arranged. When a large detent force occurs, it appears as a ripple component of the thrust during PMLSM operation. If the shape of the stator is changed to reduce the detent force, the characteristics of the back EMF are changed. Therefore, in this paper, the detent force and the harmonic components of back EMF were reduced through multi-purpose shape optimization. To this end, the FEA model was constructed and main effect analysis was performed on the major shape variables affecting each objective function. Then, the optimal shape that minimizes the objective function was derived through the response surface analysis method.

• Fire Science and Engineering
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• v.26 no.5
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• pp.67-72
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• 2012

Fire simulation was carried out for an enclosure with three doorways of $20{\times}10{\times}3m^3$ and a cleanroom of $44{\times}48{\times}10m^3$, to suggest appropriate grid size in fire simulations by using of FDS for large scale buildings. The variations of temperature and visibility with time were compared for the x and y direction grid sizes of 0.1~1.0 m (aspect ratios 0.5~5.0), fixing the z direction grid size 0.2 m. The results showed that the grid sizes 0.5 m (aspect ratio 2.5) or smaller are appropriate among the grid sizes tested, whereas 1.0 m is not acceptable. It was confirmed that estimate of the available safe egress time requires a great care due to fluctuations in temperature, visibility, etc., and further investigations on the grid size when selecting a large grid size inevitable, and on the aspect ratios for a larger grid are in need.