• Journal of the Semiconductor & Display Technology
• /
• v.22 no.1
• /
• pp.1-5
• /
• 2023

Most of the production process is performed in a cleanroom in the case of facilities that produce semiconductor chips or display panels. Therefore, environmental management of cleanrooms is very important for product yield and quality control. Among them, airborne particles are a representative management item enough to be the standard for the actual cleanroom rating, and it is a part of the Fab or Facility monitoring system, and the sequential particle monitoring system is mainly used. However, this method has a problem in that measurement efficiency decreases as the length of the sampling tube increases. In addition, a statistically significant test of deterioration in efficiency has rarely been performed. Therefore, in this study, the statistically significant test between the number of particles measured by InSitu and the number of particles measured for each sampling tube ends(Remote). Through this, the efficiency degradation problem of the sequential particle monitoring system was confirmed by a statistical method.

• Proceedings of the Korea Air Pollution Research Association Conference
• /
• 2007.10a
• /
• pp.343-344
• /
• 2007

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
• /
• v.24 no.1
• /
• pp.56-65
• /
• 1995

• Proceedings of the Korea Institute of Fire Science and Engineering Conference
• /
• 2000.11a
• /
• pp.131-135
• /
• 2000

• Bulletin of the Korean Chemical Society
• /
• v.20 no.2
• /
• pp.226-228
• /
• 1999

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
• /
• v.40 no.2
• /
• pp.55-60
• /
• 2011

• Korean Journal of Air-Conditioning and Refrigeration Engineering
• /
• v.13 no.10
• /
• pp.966-973
• /
• 2001

In this study, measurement and analysis of energy consumption of an office building with cleanroom and laboratory have been conducted. Data acquisition system for collecting energy consumption data of the whole building including air-conditioning equipments has been installed in a building located in Seoul. Data are collected for a period of one year in 2000 and analyzed for studying the energy consumption pattern. The percentage of electrical energy used for air-conditioning system is measured to be 46.1%. The collected data will serve as valuable information for diagnosing and improving the energy system of the building.

• Proceedings of the Safety Management and Science Conference
• /
• 2008.11a
• /
• pp.641-647
• /
• 2008

Since korea must get 5.2% reduction of green gas emission and insecurity of economic impact is on the increase due to unstable oil market, the demands of energy saving techniques are increasing. In this paper, we investigate necessity of development of enormous energy used cleanroom energy saving techniques furthermore we also investigate the adoption of dependability management system to develop the energy saving cleanroom development process.

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
• /
• v.24 no.1
• /
• pp.33-43
• /
• 1995

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
• /
• v.20 no.4
• /
• pp.298-308
• /
• 1991