• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.364-365
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• 2006

Transverse some wave was generated by T type waveguide for single wafer cleaning application T type megasonic waveguide was analyzed by acoustic pressure measurements and particle removal efficiency. Compared to conventional longitudinal waves, not like longitudinal waves, transverse waves showed changes of direction and phase which increased the cleaning efficiency.

• 한국레이저가공학회지
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• 제5권2호
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• pp.9-15
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• 2002

Basic principles and unique characteristics of laser-induced shock cleaning have been described compared to a conventional laser cleaning method and the removal of small tungsten particles from silicon wafer surfaces was attempted using both methods. It was found that the conventional laser cleaning was not feasible to remove the tungsten particles whereas a successful removal of the particles was carried out by the laser-induced shock waves. From the quantitative analysis using a surface scanner, the average removal efficiency of the particles was more than 98% where smaller particles were slightly more difficult to remove probably due to the increased adhesion force with a decrease of the particle size. It was also seen that the gap distance between the laser focus and the wafer surface is an important processing parameter since the removal efficiency is strongly dependent on the gap distance.

• 복식
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• 제54권1호
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• pp.1-10
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• 2004

The purpose of this study was to compare the efficiency of four different cleaning method of silk and to fabrics, which were excavated from the sixteenth century tombs. The four cleaning methods were hand washing in water and hand washing in solvent, washing in ultrasonic cleaner, and using of ultrasonic gun after washing in ultrasonic cleaner. The following is the result of the experiment: ㆍBoth silk and jute fabrics shrank the most after hand-wash in water. This cleaning method decreased their thickness the most but changed their strength the least. However, the color of the fabric changed the most after had-wash in water. This washing method might discolor the dyed fabric, so one must check the condition of the fabric thoroughly before washing it. ㆍThe weight and the thickness of the fabric changed little after ultrasonic cleaning. This cleaning method, therefore. is less efficient than hand-water-wash. The use of ultrasonic gun after ultrasonic wash for partial cleansing enhanced the efficiency a little. Nevertheless, this method left stain around the area where the gun was used, and the injected water could damage the fabric. ㆍThe excavated fabric became softer in the cleaning process as the dirt was washed away. In both cases of silk and jute fabrics cleaning, solvent made the fabric softer than water. Washed in solvent, the fabric did not swell. But water penetrated to the fiber during the cleaning process and made the fabric swell. When the water evaporates, the swollen fiber structure collapses and the fabric become stiff. Ultrasonic wash did not cause much change in the flexibility of the fabric, for this method does not remove the dirt as effectively as the other method.

• 한국응용과학기술학회지
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• 제32권3호
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• pp.372-376
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• 2015

The experiment was performed using the cleaning precipitator To investigate the absorption efficiency of the $SO_X/NO_X$ of the aqueous ammonia solution. Concentration of the cleaning liquid is 0.1, 0.5, and 1.0% with increasing absorption efficiency has improved. However, the reaction shown only a difference in time. Absorption efficiency has improved in accordance with the gas residence time. When the direction of the same gas and the cleaning liquid is determined that there is the effect of increasing the residence time. The relative impact of $SO_X$ and $NO_X$ is this likely to react slower than $SO_X/NO_X$. The yield is determined to require adjustment of the cleaning dust collector according to the concentration of the next gas.

• Korean Chemical Engineering Research
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• 제45권2호
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• pp.203-207
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• 2007

불산과 오존 세정 시 실리콘 웨이퍼 표면의 미세입자를 효과적으로 제거할 수 있는 세정 방법에 대하여 연구하였다. 불산의 농도가 0.3 vol% 이상이 되어야 미세입자가 제거 되었으며, 초음파가 인가된 오존수를 사용 시 제거 효율은 증가되었다. 오존과 불산 세정 단계 이후에 추가로 극미량의(0.01 vol%) 희석 암모니아수 세정을 하면 미세입자가 99%이상 제거됨을 확인하였다. 이는 암모니아수에 의한 웨이퍼 표면의 미세 에칭 효과와 알칼리 영역에서의 재흡착 방지 효과가 동시에 작용함에 기인된다고 보인다. 한편, 불산-오존-희석 암모니아수 세정은 통상의 SC-1 세정과 비교할 때 표면 미세 거칠기가 개선되는 경향을 보였다. 불산-오존-희석 암모니아수 세정은 상온에서도 미세입자를 효과적으로 제거할 수 있는 세정 방법으로, 고온 공정 및 과다한 화학액을 사용하는 기존 습식세정의 대안으로서 기대된다.

• 한국철도학회논문집
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• 제18권6호
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• pp.552-557
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• 2015

철도부지의 도상자갈은 윤활유, 중금속 등으로 오염된 경우가 많다. 이에 본 연구에서는 오염된 자갈표면의 오염물질을 물리적으로 제거하는 오염도상자갈의 건식 정화 기술 성능을 알아보고자 하였다. 오염도상자갈 표면에 경도가 높은 금강사 연마재를 압축공기를 이용하여 분사할 수 있는 오염자갈 정화 장치를 제작하고, 여기에 오염자갈을 투입하여, 처리 시간을 1~10분까지 다양하게 변화시키면서 도상자갈의 석유계총탄화수소와 중금속 등의 정화 효율을 알아보았다. 석유계총탄화수소 제거 효율은 기관차 정차장에서 포집한 차량 윤활유 오염자갈은 70-80%로 다소 높은 반면에, 분기기에서 포집한 분기기 윤활유 오염자갈은 40-60%로 비교적 낮았다. 중금속 제거 효율은 구리와 납이 90% 이상으로 높은 반면에 니켈과 아연은 65-80%로 비교적 낮았다. 실험 결과 건식 자갈 정화 기술은 오염자갈의 처리에 효율적임을 확인할 수 있었다.

• 한국정밀공학회지
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• 제24권11호
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• pp.66-75
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• 2007

To prevent an insulator failure, an automatic cleaning and inspection robot was developed for suspension insulator strings. The robot autonomously moves along the insulator string using the clamps installed on its two moving frames. Especially, unlike the existing cleaning robots using jets of water, the robot system adopts a dry cleaning method using rotating brushes and a circular motion guide. In addition, a mechanized brush bristles and a voltage-balancing contactor are devised to increase cleaning efficiency and to prevent arc generation under live-line conditions, respectively. We confirmed its effectiveness through experiments.

• 한국레이저가공학회지
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• 제12권4호
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• pp.17-25
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• 2009

The surface cleaning method based on the laser-induced breakdown (LIB) of gas and subsequent plasma and shock wave generation can remove small particles from solid surfaces. In the laser shock cleaning (LSC) process, a high-power laser pulse induces optical breakdown of the ambient gas above the solid surface covered with contaminant particles. The subsequently created shock wave followed by a high-speed flow stream detaches the particles. In this work, a novel surface cleaning process using laser-induced breakdown of liquid is introduced and demonstrated. LIB of a micro liquid jet increases the shock wave intensity and thus removes smaller particle than the conventional LSC method. Experiments demonstrate that the cleaning force and cleaning efficiency are also increased significantly by this method.

• 한국해양환경ㆍ에너지학회지
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• 제5권2호
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• pp.41-49
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• 2002

본 논문은 해양 폐기물 수거선박과 선단구성의 초기개념개발에 대하여 논한다. 운용요구조건을 도출하기 위해 해역의 운용환경, 유사선, 관련법규 및 규정을 조사하고 임무분석을 통해 선박과 선단의 사양요구조건(TLR)을 작성하였다. 국내연안의 침적 폐기물 추정량을 토대로 수거에 필요한 선박규모의 여러 대안을 도출하고 경제성, 효율성을 검토하였으며 국내연안에 적합한 수거선박과 선단을 구성하였다.

• Korean Chemical Engineering Research
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• 제60권3호
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• pp.452-458
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• 2022

3가지 종류의 기-액 하이브리드 수평형, 수직형 그리고 needle-to-cylinder형 플라즈마 반응기가 제작되었다. 이들 반응기를 통하여 대기압 플라즈마 방전에서 발생하는 반응 활성종 생성과 전극 내의 전위차를 통한 세정성분의 기-액 활성화 반응을 일으키는 고효율 친환경 기반의 세정 개념을 제시하였다. 세정성능에 대한 효율성을 비교한 결과, needle-to-cylinder형 반응기가 가장 우수한 특성을 가졌다. 본 연구를 통해 기-액 하이브리드 대기압 플라즈마 반응기가 반도체 공정 등 초정밀 세정공정에 응용 가능성이 있음을 확인하였다.