• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.21-27
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• 2023

In this article, a plate-type megasonic cleaning system with cooling pins is proposed for the sliced ingot, which is a raw material of silicon (Si) wafers. The megasonic system is operated with a lead zirconate titanate (PZT) actuator, which has high electric resistance, thus when it is being operated, it dissipates much heat. So this article proposes a megasonic system with cooling pins. In the design process, finite element analysis was performed and the results were used for the design of the waveguide. The frequency with the maximum impedance value was 998 kHz, which agreed well with the measured value of 997 kHz with 0.1 % error. Based on the results, the 1 MHz waveguide was fabricated. Acoustic pressures were measured, and analyzed. Finally, cleaning tests were performed, and 90 % particle removal efficiency (PRE) was achieved over 10 W power. These results imply that the developed 1 MHz megasonic will effectively clean sliced ingot wafer surfaces.

• Journal of the Korean Vacuum Society
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• v.9 no.2
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• pp.102-109
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• 2000

It is difficult to meet the cleanliness requirement of $10^{10}/\textrm{cm}^2$ for the giga level device fabrication with mechanical cleaning techniques like scrubbing which is widely used to remove the particles generated during Chemical Mechanical Polishing (CMP) processes. Therefore, the second cleaning process is needed to remove metallic contaminants which were not completely removed during the mechanical cleaning process. In this paper the experimental results for the removal of the metallic contaminants existing on the wafer surface using remote plasma $H_2$ cleaning and UV/$O_3$ cleaning techniques are reported. In the remote plasma $H_2$ cleaning the efficiency of contaminants removal increases with decreasing the plasma exposure time and increasing the rf-power. Also the optimum process conditions for the removal of K, Fe and Cu impurities which are easily found on the wafer surface after CMP processes are the plasma exposure time of 1min and the rf-power of 100 W. The surface roughness decreased by 30-50 % after remote plasma $H_2$ cleaning. On the other hand, the highest efficiency of K, Fe and Cu impurities removal was achieved for the UV exposure time of 30 sec. The removal mechanism of the metallic contaminants like K, Fe and Cu in the remote plasma $H_2$ and the UV/$O_3$ cleaning processes is as follows: the metal atoms are lifted off by $SiO^*$ when the $SiO^*$is evaporated after the chemical $SiO_2$ formed under the metal atoms reacts with $H^+ \; and\; e^-$ to form $SiO^*$.

• Applied Chemistry for Engineering
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• v.18 no.2
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• pp.188-193
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• 2007

Semi-solvent type cleaning agents were prepared by mixing naphthenes, natural terpene oil, surfactant and water, and measured their physical properties. And also, cleaning efficiency for flux and grease was measured by gravimetric method. By measuring the physical properties, pH for cleaning agents were 6.0~6.7, surface tension, 27.4~28.4 dyne/cm, and wetting index, 8.65~12.46 (with water), 11.99~17.43 (without water). The cleaning agent composed of naphthene, 30 wt%, natural terpene oil, 45 wt%, surfactant, 13 wt%, co-surfactant, 12 wt%, and water, 0 wt% had the largest wetting index, and shown the most effective cleaning properties for flux (98.66%) and grease (93.44%). The conductivity with $0.5{\sim}0.9{\mu}s/cm$ to the cleaning agent containing small amount of water was found to form W/O type microemulsion.

• Journal of Korean Society of Water Science and Technology
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• v.26 no.6
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• pp.99-107
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• 2018

This research has developed a high temperature steam cleaning technology using a ceramic membrane with durability against temperature and pressure conditions. In steam cleaning, steam of $120^{\circ}C$ is injected into the ceramic membrane to induce pyrolysis by the endothermic reaction to remove fouling from the membrane. The water quality of raw water was adjusted to turbidity 10, 25 NTU and DOC 2.5 mg/L, and the membrane was uniformly fouled by constant pressure operation at 100, 200, and 300 kPa. Physical backwashing was performed with water and air at a pressure of 500 kPa and steam at $120^{\circ}C$ was injected for 0 to 5 minutes. As the turbidity concentration and the operating pressure increased, the flux decreased by 0.7 to 14.4%. It is confirmed that 10.7 to 53.8% recovery is possible than physical cleaning at the injection of steam for 3 minutes, so it is considered that the steam cleaning of the ceramic membrane is effective. Compared with CEB after NaOCl (300 mg/L) filtration at 25 NTU and 300 kPa of turbidity, the steam cleaning result for 3 minutes was similar to 46.7% of CEB for 3 hours. It has been confirmed that steam cleaning is suitable for a ceramic membrane having excellent heat resistance against high temperature. It was considered to have better cleaning efficiency as compared with general physical backwashing.

• Clean Technology
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• v.17 no.2
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• pp.117-123
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• 2011

In this study, evaluation tests for cleaning performance of various cleaning agents and selection of optimal ultrasonic cleaning parameters were executed to develop an efficient cleaning process in remanufacturing of laser copy machine. Cleaning performance tests were executed with 8 cleaning agents (A~H) to remove the contaminants of oil-ink, toner particles, and shoe polish. Physical properties and foamability tests were also applied. For 3 types of contaminants, cleaning agent G showed superior cleaning performance compared to agent A which has being used at a remanufacturing of laser copy machine in Korea. With cleaning agents selected in pre-tests, ultrasonic cleaning tests were executed to remove real contaminants on the parts of used digital laser copy machine parts. Cleaning agent G at 28 kHz ultrasonic frequency showed faster cleaning performance compared to agent A and other frequencies. The productivity and economic efficiency in remanufacturing of laser copy machine are expected to increase by adapting agent G and 28 kHz frequency at ultrasonic cleaning process.

• Journal of Korean Society of Water and Wastewater
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• v.29 no.2
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• pp.233-241
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• 2015

Polytetrafluoroethylene (PTFE) membrane has high resistance to chlorine, which is a great advantages in chemical cleaning to recover water flux during membrane processes in drinking water systems. A humic kaolin water with approximately 4 mg/L of DOC and 10 NTU of turbidity was prepared as a feed water. Coagulation pretreatment with or without settling was applied. The coagulation with settling showed the greatest water production. The reduced flux was effectively recovered by NaOCl cleaning, i.e., 21% recovery by 50 mg/L of NaOCl cleaning and 49% recovery by 500 mg/L NaOCl cleaning. The images of SEM and AFM analyses were corresponded to the water flux variation. However, when the floc was accumulated on the membrane surfaces, the efficiency of NaOCl cleaning was substantially limited. In addition, dynamic contact angle became greater after cleaning, which indicates changes in characteristics of fouling layer such as surface hydrophobicity. Proper cleaning technologies during enhanced backwash using NaOCl would expand application of PTFE membranes in drinking water systems.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.3
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• pp.163-170
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• 2016

Regulations for the exhaust gas of diesel vehicles are being strengthened every year. Recently, diesel emission regulations for HC, CO, NOx, and particulate matter (PM) have been subject to very strict standards. In the future, the regulation of PM is expected to become stricter. Accordingly, diesel particulate filters (DPFs) have been applied to most diesel vehicles for PM reduction. With increasing engine mileage, ash and soot from the engine exhaust gas accumulate inside the DPF. This accumulation can damage the DPF or degrade engine performance. Therefore, efficient cleaning of the DPF is critical for the maintenance of the engine. If the DPF is well managed through regular cleaning, it can improve the power and fuel economy of the engine and reduce maintenance costs. Therefore, this study was performed to develop a high-efficiency cleaning method for DPFs and an apparatus that can more effectively clean out the accumulated ash and soot.

• Membrane and Water Treatment
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• v.11 no.2
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• pp.97-109
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• 2020

Membrane fouling is the main drawback of membrane technology. Frequent membrane cleaning and membrane replacement are, therefore, required to reduce membrane fouling that causes permeate flux reduction, lower rejection, or higher operating pressure. Studies have proved that the alteration of membrane properties is the key controlling factor in lessening membrane fouling. Among stimuli-responsive membranes, thermo-responsive membrane is the most popular, with a drastic phase transition and swelling-shrinking behavior caused by the temperature change. In this study, the thermo-responsive ability of two commercial membranes, PolyCera® Titan membrane and PolyCera® Hydro membrane, at different temperatures was studied on the antifouling function of the membrane in palm oil mill effluent (POME) treatment. The evaluation of the membrane's thermo-responsive ability was done through three cycles of adsorption (fouling) and desorption (defouling) processes in a membrane filtration process. The experimental result depicted that PolyCera® Hydro membrane had a higher membrane permeability of 67.869 L/㎡.h.bar than PolyCera® Titan membrane at 46.011 L/㎡.h.bar. However, the high membrane permeability of PolyCera® Hydro membrane was compensated with low removal efficiency. PolyCera® Titan membrane with a smaller mean pore size had better rejection performance than PolyCera® Hydro membrane for all tested parameters. On the other hand, PolyCera® Titan membrane had a better hydrodynamic cleaning efficiency than PolyCera® Hydro membrane regardless of the hydrodynamic cleaning temperature. The best hydrodynamic cleaning performed by PolyCera® Titan membrane was at 35℃ with the flux recovery ratio (FRR) of 99.17 ± 1.43%. The excellent thermo-responsive properties of the PolyCera® Titan membrane could eventually reduce the frequency of membrane replacement and lessen the use of chemicals for membrane cleaning. This outstanding exploration helps to provide a solution to the chemical industry and membrane technology bottleneck, which is the membrane fouling, thus reducing the operating cost incurred by the membrane fouling.

• Journal of Korean Society on Water Environment
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• v.33 no.2
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• pp.123-129
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• 2017

The purpose of this study is to identify potential methodologies to reasonably estimate the effectiveness of road vacuum cleaning in terms of pollution loads reduction. In this context, this study proposes two empirical equations to estimate the amount of diffuse pollution loads removed by road vacuum cleaning. The proposed equations estimate the removed amount of pollution loads respectively taking into consideration of: a) the distance of road vacuum cleaning; and b) the amount of road-deposited sediment(RDS). All of the parameters in these equations were evaluated based on results of field monitoring and laboratory analyses, except for the RDS generation rate. The results of this study suggest that pollutant removal efficiency is 46.3% for $BOD_5$ and 56.4% for TP; discharge ratios for particulate and dissolved $BOD_5$ are 35.0% and 21.2%, respectively; discharge ratios for particulate and dissolved TP are 35.0% and 19.4%, respectively. Average concentrations of pollutants in RDS are $BOD_5$ 977.3 mg/kg and TP 317.6 mg/kg. Some results of a case study imply that both equations can be potentially useful if the adopted parameters are reasonably evaluated. In particular, the RDS generation rate should be evaluated based on monitoring data collected from various road conditions.

• 한국태양에너지학회:학술대회논문집
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• 2009.11a
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• pp.279-284
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• 2009

Traditionally, so-called "industrial waste gases", such ad exhaust from boilers at industrial installations and a large quantity of soot discharged from power station, before their release into the atmosphere, have been on occasion subjected to an air cleaning process to remove fine particles that may pollute the atmosphere (such as mist and dust containing various powdery or oily substances and moisture from industrial waste gases). The release of industrial waste gases containing these particles directly into the atmosphere poses a serious threat to the earth environment; and recovery of these noxious substances is required by law in some countries and local governments. in urban areas, air pollution from automobile exhaust and others creates a serious condition. Some homes are equipped with and use indoor air purifiers. In many of the kitchens of restaurants, smoke generated during cooking and otherwise contaminated air are cleansed by air purifiers before being released outside or recycled inside. For the dust collecting devices to recover the fine particles contained in contaminated air, the cause for air pollution and how to purify air, many types based on various principles are known. Specifically, classified based on theories of particle collection, filtration, gravity, inertia, centrifugation, electricity, and cleaning types are cited as available processes. Among them, an appropriate type is selected according to the size or type of fine particles to be collected and conditions for installation. For the efficiency of dust collection, a filtration system (by using bag filters and others) and electric system are particularly outstanding and are therefore used widely in various areas of industry. In this research, rotary type high performance oil mist and smoke collecting system with self auto cleaning device equipped with the cleaning fluid spraying section is investigated.