• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2004년도 ICCAS
• /
• pp.1264-1268
• /
• 2004

This paper presents a wafer motion modeling of the transfer unit and the control unit in the clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean airs. The motion in the transfer unit is modeled as a mass-spring-damper system where the recovering force by air jets issued from the perforated plate is modeled as a linear spring. The motion in the control unit is also modeled as another mass-spring-damper system, but in two dimensional systems. Experiments with a clean tube system built for 12-inch wafers show the validity of the presented force and motion models.

• 한국정밀공학회지
• /
• 제21권3호
• /
• pp.66-73
• /
• 2004

This paper presents wafer motion modeling of transfer unit in clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean airs. When the wafer is transferred in x direction with an initial velocity the motion along x direction can be modeled as a simple decaying motion due to viscous friction of the fluid. But, the motion in y direction is modeled as a mass-spring-damper system where the recovering force by air jets issued from the perforated is modeled as a linear spring. Experiments with a clean tube system built fur 12 wafer show the validity of the presented force and motion models.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
• /
• pp.249-249
• /
• 2000

This paper introduces a clean mobile robot fur 4th generation LCD cassette, which is guided by optical sensor and position compensation using vision module. The mobile robot for LCD cassette transfer might be controlled by AGV controller which has powerful algorithms. It offers optimum routes to the destination of clean mobile robot by using dynamic dispatch algorithm and MAP data. This clean mobile robot is equipped with 4 axes fork type manipulator providing repeatability accuracy of $\pm$ 0.05mm.

• Journal of Advanced Marine Engineering and Technology
• /
• 제19권4호
• /
• pp.27-33
• /
• 1995

The turbulent flow and heat transfer in the tunnel laminar flow type clean room is investigated by a numerical simulation. The model clean room is assumed to be a rectngular $5m\times3m$, in which a worktable of 0.75m hight, and 1.5m or 3m long at the floor. Major parameters are the inlet flow velocity, inlet hole size and worktable surface distance. The mean Nusselt number is increased by increasing Reynolds number and can be expressed by the correlation equation.

• 대한설비공학회:학술대회논문집
• /
• 대한설비공학회 2008년도 동계학술발표대회 논문집
• /
• pp.452-457
• /
• 2008

We performed a study on the contaminant transfer in a clean space for the location of product and fan filter unit using computational fluid dynamics analysis. To simplify the real product moving process, three different non-moving cases regrading the locations of product were selected: no product, at the lower side, and at the upper and lower sides. And to investigate the characteristics of the contaminant transfer, the arrangement of fan filter units was varied. Local mean air-age and contaminant distribution were used as evaluation indices. From the results, the contaminant transfer to the product was the most when the products were simultaneously located at the upper and lower sides. And the contaminant was easily exhausted regardless of the location of product when the fan filter units were properly arranged at the top side of the clean space.

• 한국산학기술학회논문지
• /
• 제11권10호
• /
• pp.3633-3640
• /
• 2010

헬리컬형으로 자화된 영구자석을 이용한 비접촉 마그넷 기어를 개발하기 위하여 3차원 FEM 해석 기법을 활용하였고 마그넷 기어의 자기적 특성 해석 및 설계 요소기술을 확보하였다. 마그넷 기어를 이용한 클린 반송 컨베이어 및 회전장치의 성능평가를 위하여 class 10의 클린부스 환경에서 시험운전을 거쳐, 이송 속도, 최대 허용 토크, 클린도, 최대 이송 중량, 헌팅 유무, 소음도 등을 측정한 결과 클린도 class 10의 공정까지도 대응이 가능한 것으로 확인되었다.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
• /
• pp.161-161
• /
• 2000

The clean mobile robot for wafer transfer is AGV that carry each wafer to each equipment. It has wafer handling technology, wafer ID recognition technology, position calibration technology using vision system, and anti-vibration technology. Wafer loading/unloading working accuracy is within ${\pm}$1mm, ${\pm}$3$^{\circ}$. By application of this AGV, we can reduce the manufacturing tack time and bring cost down of equipment.

• 반도체디스플레이기술학회지
• /
• 제8권4호
• /
• pp.71-76
• /
• 2009

The clean non-contact type conveyor system for vertical transfer of large size FPD(Flat Panel Display) glasses has been installed at FPD production line just since a few years ago. The most important part of the conveyor is the 3 axis permanent magnet rollers faced orthogonally in pairs. However, the systematic design method about it has not been proposed yet. In this paper, we studied a design analysis for determining geometrical parameters of the magnetic roller by using a commercial FEM tool of the 3D Maxwell. Through a series of simulation, we obtained the relationship of several geometrical parameters affecting the torque of the conveyor.

• 청정기술
• /
• 제22권1호
• /
• pp.45-52
• /
• 2016

This study reports on the modeling and simulation of heat transfer in packaging boxes used for vaccine shipping. Both water and n-tetradecane are used as primary insulation materials inside a multi-slab system. The one-dimensional model, which is a spherical model using a radius equivalent to the rectangular geometry of container, is applied in this study. N-tetradecane with low thermal diffusivity and proper phase transition temperature exhibits higher heat transfer resistance during both heating and cooling processes compared to water. Thus, n-tetradecane is a better candidate as an insulating material for packaging containers for vaccine shipping. Furthermore, the developed method can also become a rapid and economic tool for screening appropriate phase change materials used as insulation materials with suitable properties in logistics applications.

• Journal of Magnetics
• /
• 제18권2호
• /
• pp.105-110
• /
• 2013

The design model and key parameters of the material design for the control of induced magnetic flux at the near-field and efficient power transfer in a modified wireless power transfer (WPT) system with a large air gap of wireless electric vehicles were investigated through analytical simulations for magnetic vector and time-domain transient analysis. Higher saturation magnetic core with low core loss induced a stronger vertical magnetic field by the W-type primary coil in the WPT system with a gap of 20 cm at 20 kHz, which is shown from the vector potentials of the magnetic induction. The transient analysis shows that the higher magnetic fluxes through the pick-up cores lead to a linear increment of the alternating voltage with a sinusoidal waveform in the non-contact energy transfer system.