• 전기저널
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• 6호통권102호
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• pp.96-101
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• 1985

• 공기청정기술
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• 제1권1호통권1호
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• pp.1-46
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• 1988

• 대한안전경영과학회지
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• 제9권1호
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• pp.197-211
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• 2007

The power of semiconductor, Korea is continuously constructing semiconductor production line for keeping a front-runner status. however, studies and data about potential risks in semiconductor factory are still short. If fire does not initially suppressed, the fire causes a great damage. To decrease fire risk factors, in addition to fire fighting safety equipment, more important thing is how to design and construct fire protection system. The current fire protection codes about semiconductor factory come under functional law, and this law is short of consideration about particularity of factory. The existing prescriptive fire codes depending on experience compose without evident engineering verifications, thus equipments which is created by the current prescriptive fire code may bring about a variety of problems. For example, the design under the current regulation can not cope with the excessive investments, low efficiencies, and the diversifying construction designs and be applied to the quick changes of new technologies. Ergo, an optimal design for fire protection is to equip fire protection arrangements with condition and environment of production field. Manufacturing factory of semiconductors is a windowless airtight space. And for cleanliness, there exists strong flow of cooperation. Therefore, there is a need for fire safety design that meets the characteristic of a clean room. Accordingly, we are to derive smoke flow according to cooperation process within a clean room and construction plan of an optimal sensor system. In this study, in order to confirm the performance of proposed smoke-exhaust equipment and suggest efficient smoke exhaust device when there is a fire of 1MW of methane in the clean room of company H, we have implemented fire simulation using fluid dynamics computation.

• 분석과학
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• 제13권4호
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• pp.412-422
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• 2000

실리콘 웨퍼 산업계의 청정실에서 사용되는 에어샤워기중 고분자로 제작된 부품들을 $100^{\circ}C$에서 30분간 다이나믹 해드 스페이스에서 가스로 용출한 후 GC-MS로 분석 하였다. 에어샤워기가 가동중인 청정실의 대기를 흡착관 튜브방식으로 채취하였고, 이러한 흡착관 튜브에 흡착된 유기화합물은 쏙시렛 용출법을 이용하여 용출한 후 GC-MS로 분석하였다. 에어샤워기의 제조 부품(electric over current relay, acryl plate. polycarbonate window, filter, fan housing, steel galvanized cold plate and canvas buffer)들로 부터의 분석결과 대부분의 성분들은 제조부품의 고분자 성분들에서 유래되었음을 확인 할 수 있었으며, 에어샤워기가 가동중인 청정실의 대기분석 결과와 비교 분석되었다. 이러한 분석결과의 비교 연구는 청정실내에서의 유기오염물질이 에어샤워기의 고분자 제조부품으로부터 유래 되었는지를 확인하게 해준다.

• 설비공학논문집
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• 제24권4호
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• pp.297-305
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• 2012

In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 $m^3/h$ that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditioning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation.

• 대한기계학회논문집
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• 제17권8호
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• pp.2110-2121
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• 1993

A numerical investigation has been carried out for the flow characteristics after exchange of some filters from the original layer to the new low pressure loss layer with equal filtering efficiency. The solution domain includes upper plenum, filter layer, clean space, access panels, and lower plenum. The concept of the distributed pressure resistance was applied to describe the momentum loss in filter layer and access panels. The evolution of the flow field is simulated using the low Reynolds number k-.epsilon. over bar turbulent model and SIMPLE algorithm based on the finite volume method. As a result, after the exchange of filter layer the power requirement can be reduced by 8-9 percent. The results also demonstrate that the perpendicularity of the flow near access panels may become worse at new filter layer than origianl filter layer. But the situation can be recovered by adjusting the jopening ratio of access panels.

• 한국화재소방학회논문지
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• 제20권2호
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• pp.8-13
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• 2006

제연설비와 스프링클러설비의 필요성을 확인하고 연기확산 가능성을 조사하기 위해 청정실 화재의 시뮬레이션을 수행하였다. 바닥면적 $39m{\times}13m$, 높이 4 m의 작업구역에 1MW의 메탄올 화재가 발생했을때, 제연설비와 스프링클러설비의 정상작동과 작동실패에 따른 연기누출 여부를 조사하였다. 제연설비가 정상적으로 작동하는 경우에는 스프링클러설비에 관계없이 연기가 안전하게 배출됨을 알 수 있었다. 화재확산과 연기발생을 억제하고 발생한 연기를 신속히 배출하기 위해 스프링클러설비가 필요하며, 스프링클러설비와 제연설비가 신속하게 작동할 수 있도록 신뢰도가 높은 스프링클러설비 헤드와 자동화재탐지설비가 필요함을 확인하였다.

• 한국화재소방학회논문지
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• 제31권4호
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• pp.26-34
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• 2017

본 논문은 거실제연설비의 인접구역 상호제연방식의 성능 확인 및 향상을 위한 논문으로써 국가화재안전기준(NFSC)과 NFPA 연기제어에 관한 규정을 비교 분석하였다. 분석방법은 화재 시뮬레이션(FDS)을 통해 모델링을 실시하여, 급기량 변화, 제연경계의 폭, 화재실내 가연물 변화, 유입공기의 풍속차이를 통해 이루어졌다. 그 결과 청결층 확보를 위해 급기량을 배출량 이하로 하였을때 화재실에서의 청결층 확보에 유리한 것으로 나타났으나 급기실에서는 급기량을 배출량 이상으로 하였을때 청결층 확보에 유리한 것으로 나타났으며, 제연경계의 폭이 길어질수록 성능 확보에 유리한 것으로 나타났다. 또한 가연물의 종류에 따라 급기량과 배출량을 고려해야 하며, 공기유입구 풍속은 급기량을 감소시킴과 동시에 공기유입구 풍속을 낮게 하므로써 화재실의 청결층 확보에 유리한 것으로 나타났다.

• 설비공학논문집
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• 제2권4호
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• pp.303-315
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• 1990

Uniformity of velocity is quite important design points of a vertical laminar flow type clean room. In the present paper, flows in a room with a bottom pannel are numerically simulated by using a low-Reynolds number $k-{\epsilon}$ model, and a new flow model of the pannel are suggested. Resistance coefficient of the pannel and size of the exhaust channel show considerable effects on flow pattern and uniformity of flow on the bottom. Reflection coefficient also has important roles. A possibility to obtain the uniform and unidirectional flow is tested by adjusting the distribution of resistance coefficient of the pannel. Such a numerical simulation of the flow will be a good method to get optimun design parameters.

• 전기학회논문지
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• 제56권5호
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• pp.921-925
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• 2007

Gas removal characteristics of an air clean system, consisted of a filter and a nonthermal discharge plasma reactor with a magnetic field, have been investigated with emphasis on the enhancing gas removal efficiency of the applied magnetic field. It is found that the magnetic field influenced significantly to the corona discharge characteristics, decreasing the corona onset voltage and increasing the corona current. As a result, the proposed air clean system with the magnetic field showed the higher removal efficiency of the gas (e.g., trimethlyamine) than that of without the magnetic field. This would be because the magnetic field applied to the discharge plasma reactor of the air clean system can elevate the corona characteristics, and activate the generation of ozone, thus the removal efficiency of the gas was concurrently enhanced. This reveals that the proposed air clean system with the magnetic field could be used as an effective means of removal an indoor pollutant gas.