• JOURNAL OF ELECTRICAL WORLD
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• no.6 s.102
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• pp.96-101
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• 1985

• Air Cleaning Technology
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• v.1 no.1 s.1
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• pp.1-46
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• 1988

• Journal of the Korea Safety Management & Science
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• v.9 no.1
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• pp.197-211
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• 2007

The power of semiconductor, Korea is continuously constructing semiconductor production line for keeping a front-runner status. however, studies and data about potential risks in semiconductor factory are still short. If fire does not initially suppressed, the fire causes a great damage. To decrease fire risk factors, in addition to fire fighting safety equipment, more important thing is how to design and construct fire protection system. The current fire protection codes about semiconductor factory come under functional law, and this law is short of consideration about particularity of factory. The existing prescriptive fire codes depending on experience compose without evident engineering verifications, thus equipments which is created by the current prescriptive fire code may bring about a variety of problems. For example, the design under the current regulation can not cope with the excessive investments, low efficiencies, and the diversifying construction designs and be applied to the quick changes of new technologies. Ergo, an optimal design for fire protection is to equip fire protection arrangements with condition and environment of production field. Manufacturing factory of semiconductors is a windowless airtight space. And for cleanliness, there exists strong flow of cooperation. Therefore, there is a need for fire safety design that meets the characteristic of a clean room. Accordingly, we are to derive smoke flow according to cooperation process within a clean room and construction plan of an optimal sensor system. In this study, in order to confirm the performance of proposed smoke-exhaust equipment and suggest efficient smoke exhaust device when there is a fire of 1MW of methane in the clean room of company H, we have implemented fire simulation using fluid dynamics computation.

• Analytical Science and Technology
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• v.13 no.4
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• pp.412-422
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• 2000

The polymeric FAB materials of air shower used in clean room of wafer industry have been outgassed with the dynamic headspace (ca.$100^{\circ}C$) for half an hour, and analyzed using GC-MS. The air in the clean room running air shower was sampled using sorbent tube method, and the organic compounds adsorbed in the sorbent tube were extracted using Soxhlet extraction method, and analyzed using GC-MS. The analytical results from FAB materials of air shower (electric over current relay, acryl plate. polycarbonate window, filter, fan housing, steel galvanized cold plate and canvas buffer) indicated that most of chemicals were originated from polymer fragments of FAB materials. Their analytical results have been compared with those from the air of clean room running air shower. These comparative results could lead to identify whether the sources of trace organic contaminants in clean room air are originated from the polymeric FAB material of air shower.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.24 no.4
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• pp.297-305
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• 2012

In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 $m^3/h$ that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditioning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.8
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• pp.2110-2121
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• 1993

A numerical investigation has been carried out for the flow characteristics after exchange of some filters from the original layer to the new low pressure loss layer with equal filtering efficiency. The solution domain includes upper plenum, filter layer, clean space, access panels, and lower plenum. The concept of the distributed pressure resistance was applied to describe the momentum loss in filter layer and access panels. The evolution of the flow field is simulated using the low Reynolds number k-.epsilon. over bar turbulent model and SIMPLE algorithm based on the finite volume method. As a result, after the exchange of filter layer the power requirement can be reduced by 8-9 percent. The results also demonstrate that the perpendicularity of the flow near access panels may become worse at new filter layer than origianl filter layer. But the situation can be recovered by adjusting the jopening ratio of access panels.

• Fire Science and Engineering
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• v.20 no.2 s.62
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• pp.8-13
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• 2006

Numerical simulations were carried out for a fire in a clean room to confirm needs of a smoke control system and a sprinkler system, and to investigate a possible smoke spread-out. For a 1 MW methanol fire in a space of $39m{\times}13m$ floor and 4 m high, smoke spread-out was scrutinized for failure of the sprinkler system and/or the smoke control system. It was shown that the smoke control system removes smoke safely without the sprinkler system and that the sprinkler system is required to suppress smoke generation and spread of the fire, and to remove the smoke quickly. It was also confirmed that highly reliable sprinkler heads and automatic fire detection system are required for the sprinkler and smoke control systems.

• Fire Science and Engineering
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• v.31 no.4
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• pp.26-34
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• 2017

The purpose of this study is to identify and improve the performance of the adjacent room ventilation system in living room ventilation facilities, and compare and analyze the smoke control regulations of the NFPA code and the national fire safety standard (NFSC). The analysis method was fire dynamics simulation (FDS) and was used to analyze the, variations of the air supply amount, width of the boundary, change in indoor combustion and wind velocity of the incoming air. It was found to be advantageous to secure the clean layer when the amount of air supplied is less than the amount of discharged air in the fire room. However, in the supply room, it is more effective to secure the clean layer when the amount of supplied air is larger than the amount of discharged air, as a longer boundary width gives rise to better performance. In addition, it is necessary to consider the amount of air supplied and discharged as a function of the kind of flammable material. Moreover, decreasing the air inlet wind speed and amount of incoming air is advantageous for securing the clean layer of the fire room.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.2 no.4
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• pp.303-315
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• 1990

Uniformity of velocity is quite important design points of a vertical laminar flow type clean room. In the present paper, flows in a room with a bottom pannel are numerically simulated by using a low-Reynolds number $k-{\epsilon}$ model, and a new flow model of the pannel are suggested. Resistance coefficient of the pannel and size of the exhaust channel show considerable effects on flow pattern and uniformity of flow on the bottom. Reflection coefficient also has important roles. A possibility to obtain the uniform and unidirectional flow is tested by adjusting the distribution of resistance coefficient of the pannel. Such a numerical simulation of the flow will be a good method to get optimun design parameters.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.5
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• pp.921-925
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• 2007

Gas removal characteristics of an air clean system, consisted of a filter and a nonthermal discharge plasma reactor with a magnetic field, have been investigated with emphasis on the enhancing gas removal efficiency of the applied magnetic field. It is found that the magnetic field influenced significantly to the corona discharge characteristics, decreasing the corona onset voltage and increasing the corona current. As a result, the proposed air clean system with the magnetic field showed the higher removal efficiency of the gas (e.g., trimethlyamine) than that of without the magnetic field. This would be because the magnetic field applied to the discharge plasma reactor of the air clean system can elevate the corona characteristics, and activate the generation of ozone, thus the removal efficiency of the gas was concurrently enhanced. This reveals that the proposed air clean system with the magnetic field could be used as an effective means of removal an indoor pollutant gas.