• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
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• v.14 no.3
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• pp.236-241
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• 1985

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.25 no.1
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• pp.7-13
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• 2013

Bio Clean Room(BCR) and pharmaceutical product manufacturing facilities require careful assessment of many factors, including HVAC, controls, room finishes, process equipment, room operations, and utilities. Flow of equipment, personnel, and product must also be considered along with system flexibility, redundancy, and maintenance shutdown strategies. It is important to involve designers, operators, commissioning staff, quality control, maintenance, constructors, validation personnel, and the production representative during the conceptual stage of design. Critical variables for room environment and types of controls vary greatly with the clean space's intended purpose. It is particularly important to determine critical parameters with quality assurance to set limits and safety factors for temperature, humidity, room pressure, and other control requirements. In this paper, oxygen cluster ion equipment was utilized in order to enhance the indoor air quality and to prevent the airborne infection of ward in hospital. Moreover, the performance test of the equipment was also performed in order to develop the optimal sterilization system of BCR using the equipment.

• Journal of the Korean Society of Safety
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• v.21 no.5 s.77
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• pp.46-52
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• 2006

The purpose of this paper is to investigate the removal efficiency of fine dusts as the configuration condition of machinery and equipments in Clean Room and to analyze the flowing behaviors of fine dusts as the layout of Clean Room. The layout of the Clean Room was classified into side layout type, 2 center line type and center concentration type layout, and the flow rates used in this research were 0.22m/s, 0.44m/s and 0.80m/s. Dust removal efficiency as layout change was decreased 37% for side layout type, 31% for 2 center line type and 20% for center concentration type layout at the flow rate of 0.22m/s, compared with the state without machinery and equipments in Clean Room. The efficiency was decreased 42% for side layout type, 22% for 2 center line type and 8% for center concentration type layout at the flow rate of 0.44m/s, and decreased 20% for side layout type, 18% for 2 center line type and 10% for center concentration type layout at the flow rate of 0.80m/s. According to the result of dust removal behavior, $0.3{\mu}m,\;1{\mu}m\;and\;3{\mu}m$ dust except for $5{\mu}m$ showed the higher change of the behavior in side layout type than in center concentration type layout due to the change of air flow. It was confirmed that removal behavior depends on the layout of machinery and equipments as the dust size decreases.

• Journal of the Korean Institute of Gas
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• v.25 no.6
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• pp.35-44
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• 2021

The PR (Photo Resist) process in the semiconductor process is a process that uses a mixture of flammable substances. Due to the process equipment is installed in a clean room and when flammable substances leak, there is a high risk of suffocation, fire, and explosion. It is necessary to analyze the impact of accidents that may occur during operation and to evaluate whether the safety of workers can be guaranteed. In this study, the value of radiant heat and temperature change at the monitor point set up virtual inside the clean room was confirmed through CFD simulation of 10 leak and fire scenarios using the FLACS CFD - Fire Module. A fire that occurs inside a clean room transfers high radiant heat to the inter-story structure, but its scope is quite limited, and it is unlikely that it will collapse in a single fire accident. There was no scenario in which two stairs leading to the exit were exposed to high radiant heat at the same time due to a fire accident, therefore workers were able to escape in case of a fire. In addition, it was confirmed that the level of radiant heat and temperature rise rapidly decreased as they moved downstairs. According to the API 520 standard, workers exposed to 6.31 kW/m² of radiant heat that workers can withstand for 30 seconds were confirmed that it was possible to sufficiently escape from the inside.

• KIEAE Journal
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• v.13 no.4
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• pp.63-68
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• 2013

On the electricity consumption in Korea, the lighting sector takes about 17% of annual total electricity consumptions. In the midst of higher interests on energy conservation measures, design and choice of energy-saving lighting fixtures have been more important. With growth of technology-intensive industries like advanced material, semiconductor, and biotechnology from the 1980s, needs for clean room and thus illumination at clean rooms have been increased. In this paper, development, specification, and features of a Teardrop LED(hereinafter TD LED) lighting fixture as replacement of Teardrop florescent lighting one that has been popularly installed at clean rooms were presented. Also we performed the economic analysis of return on investment(ROI) about energy savings by the installation of the TD LED lighting fixture at a new-built clean room. The economic analysis showed that the new-developed TD LED lighting fixture would be able to withdraw the initial installation cost within 4 years. Lastly, improvement directions and development plans of the next TD LED lighting fixture for wider applications at clean rooms were described.

• Journal of Energy Engineering
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• v.24 no.3
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• pp.122-127
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• 2015

We carried out three-dimensional flow analysis in a clean room. Flow field in a robot experiment system, induced from the moving robot, is numerically studied in this paper. The effects of moving robot in a clean room are investigated in order to find the section of dust accumulation. Contamination on the bottom produced from the moving robot is predicted from the analysis results from the flow fields. Results show that a large swirl flow is formed around the moving robot. Consequently, the optimal flow condition can be obtained by controlling the fluid velocity through the fixing of inlet or outlet position.

• Transactions of the Korean Society of Mechanical Engineers
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• v.10 no.6
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• pp.852-860
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• 1986

The effect of placing a worktable in a vertical laminar flow clean room is invesgiated by a numerical simulation. The model clean room is assumed to be a rectangular square of 2m*2m, in which a worktable of 0.8m long and 0.1m thick is located at 0.7m above the floor. Major parameters are the horizontal position of the table and the inlet flow velocity. The flow is assumed to be laminar throughout the clean room. Navier-Stokes equations with the pressure terms are directly solved by the SIMPLE algorithm. Boundary conditions at the two exits are given in terms of pressure conditions. The flow pattern, pressure loss due to viscous friction, the ratio of flow rates through each exit and pressure imbalance at the exits are calculated. All of the flow characteristics are seen to vary substantially with the location of the table, but are quite insensitive to the inlet flow velocity(Reynolds number). As an example, the flow rate through each exit can very by as much as 30% depending on the location of the table.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.21 no.5
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• pp.273-281
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• 2009

In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of $1,000\;m^3/h$ that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2540-2543
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• 2008

Liquid crystal displays (LCD's) are continuously coated with some chemicals in the clean room of a factory. Spreading of these chemicals is causing serious problems both in controlling clean room quality as well as to the workers inside the factory. It is required to alleviate or properly control the offensive odor which is mainly composed of propylene glycol mono ethyl acetate, novolak resin and photo active compound. The control strategy employed is to bleed the offensive odor gas out the clean room. A full scale 3D CFD model was created with anisotropic porous media, chemical species transport with no volumetric reaction, and thermal diffusion with propane gas (tracer gas) to simulate the odor spreading. A segregated implicit solver with standard k-$\varepsilon$ model is employed. The detailed CFD analysis made it possible to develop an effective method of ventilating the coater room and optimizing their capacities.

• Journal of the Korean Society of Hazard Mitigation
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• v.1 no.1 s.1
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• pp.157-163
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• 2001

The objective of the present study is to predict the characteristics of the fire and smoke propagations in a clean room. Numerical calculations have been performed by using the finite volume method to obtain temperature and velocity distributions in the clean room. In odor to account for the turbulent flow characteristics, the standard $k-{\varepsilon}$ model is used. From this study, it was found that the fire propagation could be fully developed only after 150 seconds when the ventilation system in the clean room was off. And the smoke mass fraction showed a similar distribution as the gas temperature. Since the simulated fire was proceeded up to $20{\sim}30%$ of the room within 60 seconds. it could be recommended that the occupants should be evacuated from the room within 30 seconds.